SG11201405610PA - Trace gas concentration in art ms traps - Google Patents

Trace gas concentration in art ms traps

Info

Publication number
SG11201405610PA
SG11201405610PA SG11201405610PA SG11201405610PA SG11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA SG 11201405610P A SG11201405610P A SG 11201405610PA
Authority
SG
Singapore
Prior art keywords
traps
art
gas concentration
trace gas
trace
Prior art date
Application number
SG11201405610PA
Inventor
Gerardo A Brucker
Timothy C Swinney
G Jeffery Rathbone
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of SG11201405610PA publication Critical patent/SG11201405610PA/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/4245—Electrostatic ion traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
SG11201405610PA 2012-03-13 2013-03-13 Trace gas concentration in art ms traps SG11201405610PA (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201261610092P 2012-03-13 2012-03-13
PCT/US2013/030801 WO2013138446A1 (en) 2012-03-13 2013-03-13 Trace gas concentration in art ms traps

Publications (1)

Publication Number Publication Date
SG11201405610PA true SG11201405610PA (en) 2014-11-27

Family

ID=49161755

Family Applications (1)

Application Number Title Priority Date Filing Date
SG11201405610PA SG11201405610PA (en) 2012-03-13 2013-03-13 Trace gas concentration in art ms traps

Country Status (7)

Country Link
US (1) US9714919B2 (en)
EP (1) EP2825875B1 (en)
JP (2) JP6570998B2 (en)
KR (2) KR20180081633A (en)
CN (1) CN104380099B (en)
SG (1) SG11201405610PA (en)
WO (1) WO2013138446A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013201499A1 (en) * 2013-01-30 2014-07-31 Carl Zeiss Microscopy Gmbh Method for the mass spectrometric analysis of gas mixtures and mass spectrometers
GB2527867B (en) * 2014-12-01 2016-06-29 Ion Science Ltd Detection of organics in water
JP6750628B2 (en) * 2015-09-18 2020-09-02 パナソニック株式会社 Chemical substance concentrator and chemical substance detection device
WO2019147748A2 (en) * 2018-01-24 2019-08-01 Rapiscan Systems, Inc. Surface layer disruption and ionization utilizing an extreme ultraviolet radiation source
GB201802917D0 (en) 2018-02-22 2018-04-11 Micromass Ltd Charge detection mass spectrometry
CN108479394B (en) * 2018-03-14 2021-01-08 中国科学院近代物理研究所 Trace gas isotopic enrichment system and method
JP2020088300A (en) 2018-11-30 2020-06-04 株式会社リコー Coating liquid for forming oxide, manufacturing method of oxide film, and manufacturing method of field effect transistor
GB2592653B (en) * 2020-03-05 2022-12-28 Edwards Vacuum Llc Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump
US11842891B2 (en) 2020-04-09 2023-12-12 Waters Technologies Corporation Ion detector

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1183682B (en) * 1985-05-24 1987-10-22 Getters Spa CHEMICAL COMPRESSOR AND PURIFIER FOR HYDROGEN ISOTOPES
US4785666A (en) 1986-12-19 1988-11-22 Martin Marietta Corporation Method of increasing the sensitivity of a leak detector in the probe mode
US5142143A (en) 1990-10-31 1992-08-25 Extrel Corporation Method and apparatus for preconcentration for analysis purposes of trace constitutes in gases
US5426300A (en) * 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US6211516B1 (en) 1999-02-09 2001-04-03 Syagen Technology Photoionization mass spectrometer
US6326615B1 (en) * 1999-08-30 2001-12-04 Syagen Technology Rapid response mass spectrometer system
US6545268B1 (en) 2000-04-10 2003-04-08 Perseptive Biosystems Preparation of ion pulse for time-of-flight and for tandem time-of-flight mass analysis
EP1291651A4 (en) 2000-06-14 2009-03-25 Mitsubishi Heavy Ind Ltd Device for detecting chemical substance and method for measuring concentration of chemical substance
US6781119B2 (en) * 2000-12-14 2004-08-24 Mks Instruments, Inc. Ion storage system
JP3572256B2 (en) * 2000-12-19 2004-09-29 三菱重工業株式会社 Chemical substance detection device
US7034292B1 (en) * 2002-05-31 2006-04-25 Analytica Of Branford, Inc. Mass spectrometry with segmented RF multiple ion guides in various pressure regions
GB0404285D0 (en) 2004-02-26 2004-03-31 Shimadzu Res Lab Europe Ltd A tandem ion-trap time-of flight mass spectrometer
CN1811408B (en) 2005-01-28 2010-04-28 方向 Internal photo ionization ion trap quality analyzer and method thereof
US7476852B2 (en) 2005-05-17 2009-01-13 Honeywell International Inc. Ionization-based detection
GB0526245D0 (en) * 2005-12-22 2006-02-01 Shimadzu Res Lab Europe Ltd A mass spectrometer using a dynamic pressure ion source
GB0607542D0 (en) * 2006-04-13 2006-05-24 Thermo Finnigan Llc Mass spectrometer
TWI484529B (en) 2006-11-13 2015-05-11 Mks Instr Inc Ion trap mass spectrometer, method of obtaining mass spectrum using the same, ion trap, method of and apparatus for trapping ions in ion trap
CN101320016A (en) * 2008-01-29 2008-12-10 复旦大学 Method for cascade mass spectrometry by using multiple ion traps
JP5449701B2 (en) * 2008-05-28 2014-03-19 株式会社日立ハイテクノロジーズ Mass spectrometer
US20100163724A1 (en) * 2008-12-30 2010-07-01 University Of North Texas Applications of hydrogen gas getters in mass spectrometry
ITMI20090402A1 (en) * 2009-03-17 2010-09-18 Getters Spa COMBINED PUMPING SYSTEM INCLUDING A GETTER PUMP AND A ION PUMP
JP5688494B2 (en) * 2009-05-06 2015-03-25 エム ケー エス インストルメンツインコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ Electrostatic ion trap
JP5735511B2 (en) 2009-09-04 2015-06-17 ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド Method, system and apparatus for filtering ions in a mass spectrometer

Also Published As

Publication number Publication date
JP2018136335A (en) 2018-08-30
EP2825875B1 (en) 2019-05-08
CN104380099B (en) 2017-08-25
WO2013138446A1 (en) 2013-09-19
JP6667571B2 (en) 2020-03-18
JP6570998B2 (en) 2019-09-04
KR20180081633A (en) 2018-07-16
KR20140143403A (en) 2014-12-16
US20150028882A1 (en) 2015-01-29
US9714919B2 (en) 2017-07-25
CN104380099A (en) 2015-02-25
JP2015511708A (en) 2015-04-20
EP2825875A4 (en) 2016-05-04
EP2825875A1 (en) 2015-01-21

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