JP2015507376A - 集積回路構成部品、スイッチ、およびメモリ・セル - Google Patents
集積回路構成部品、スイッチ、およびメモリ・セル Download PDFInfo
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Abstract
Description
いくつかの実施形態では、スイッチが、1対の電極間で縦方向に延び、その1対の電極の両方に導電可能に接続したグラフェン構造を備える。第1および第2の導電性構造は、グラフェン構造の横方向に外側に位置しており、互いから見てグラフェン構造の反対側になっている。グラフェン構造と、第1および第2の導電性構造のうちの少なくとも1つとに横方向に挟まれた位置に、強誘電材料が存在する。第1および第2の導電性構造は、グラフェン構造‐強誘電材料間への電界の印加により、スイッチを「オン」状態および「オフ」状態にするように構成される。
Claims (35)
- 1対の電極間で縦方向に延び、前記1対の電極の両方に導電可能に接続したグラフェン構造と、
前記グラフェン構造の横方向に外側にあり、互いから見て前記グラフェン構造の相対する側にある第1および第2の導電性構造と、
前記グラフェン構造と、前記第1および第2の導電性構造のうちの少なくとも1つとに横方向に挟まれた強誘電材料と、
を備えるスイッチであって、
前記第1および第2の導電性構造が、前記グラフェン構造‐前記強誘電材料間への電界の印加により、前記スイッチを「オン」状態および「オフ」状態にするように構成される、
スイッチ。 - 前記第1の導電性構造が、前記複数の電極のうちの一方の電極に導電可能に結合し、
前記第2の導電性構造が、前記複数の電極のうちの他方の電極に導電可能に結合する、
請求項1に記載のスイッチ。 - 前記グラフェン構造の1つの側にある前記強誘電材料の最小の横方向の厚みが、前記グラフェン構造のグラフェンの厚みよりも小さい、
請求項1に記載のスイッチ。 - 前記グラフェン構造の1つの側にある前記強誘電材料の最大の横方向の厚みが、前記グラフェン構造のグラフェンの厚みよりも小さい、
請求項1に記載のスイッチ。 - 前記グラフェン構造の1つの側にある前記強誘電材料の最小の横方向の厚みが、約1ナノメートルから約10ナノメートルである、
請求項1に記載のスイッチ。 - 前記グラフェン構造の1つの側にある前記強誘電材料の最小の横方向の厚みが、約3ナノメートルから約5ナノメートルである、
請求項5に記載のスイッチ。 - 前記グラフェン構造が、2つのグラフェンの層を含む、
請求項1に記載のスイッチ。 - 前記1対の電極の両方に導電可能に接続した前記グラフェン構造のうちの少なくとも2つを備える、
請求項1に記載のスイッチ。 - 前記強誘電材料が、前記グラフェン構造のグラフェンに直接触れる、
請求項1に記載のスイッチ。 - 前記強誘電材料が、前記グラフェン構造のグラフェンから離隔した任意の位置にある、
請求項1に記載のスイッチ。 - 前記グラフェンから前記強誘電材料までの最小横方向間隔が、約1ナノメートル以下である、
請求項10に記載の方法。 - 前記グラフェン構造と、前記グラフェン構造の相対する側のうちの1つの側にある、前記第1および第2の導電性構造のうちの1つのみとにより、強誘電材料が横方向に挟まれる、
請求項1に記載のスイッチ。 - 前記グラフェン構造と、前記グラフェン構造の相対する側にある前記第1および第2の導電性構造の両方とにより、強誘電材料が横方向に挟まれる、
請求項1に記載のスイッチ。 - 前記相対する側にある前記強誘電材料が、同一の組成である、
請求項13に記載のスイッチ。 - 前記相対する側のうちの1つの側にある前記強誘電材料の組成が、前記相対する側のうちの他方の側にある前記強誘電材料の組成と異なる、
請求項13に記載のスイッチ。 - 前記相対する側のうちの1つの側にある前記強誘電材料が、前記グラフェン構造のグラフェンに直接触れ、
前記相対する側のうちの他方の側にある前記強誘電材料が、前記グラフェン構造のグラフェンから離隔した任意の位置にある、
請求項13に記載のスイッチ。 - 前記相対する側のうちの両方の側の前記強誘電材料が、前記グラフェン構造のグラフェンに直接触れる、
請求項13に記載のスイッチ。 - 前記相対する側のうちの両方の側の前記強誘電材料が、前記グラフェン構造のグラフェンから離隔した任意の位置にある、
請求項13に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極間で縦方向に途切れなく延びる、
請求項1に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極間の距離の少なくとも約50%の範囲に広がる、
請求項19に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極のうちの少なくとも1つの電極に直接触れる、
請求項19に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極の両方の電極に直接触れる、
請求項19に記載のスイッチ。 - 前記強誘電材料が、前記グラフェン構造のグラフェンと同一の広さを占める、
請求項19に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極間で縦方向に途切れを有する、
請求項1に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極間の距離の少なくとも約50%の範囲に広がる、
請求項24に記載のスイッチ。 - 前記強誘電材料が、3つ以上の縦方向に離隔したセグメントを含む、
請求項24に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極のうちの少なくとも1つの電極に直接触れる、
請求項24に記載のスイッチ。 - 前記強誘電材料が、前記1対の電極の両方の電極に直接触れる、
請求項24に記載のスイッチ。 - スペースにより互いから分離した第1の電極および第2の電極と、
前記第1および第2の電極の両方に導電可能に接続し、前記スペースの端から端まで延びたグラフェン構造と、
前記第1の電極から前記スペース内に延び、前記スペースの一部分のみに渡り延びた第1の導電性突出部と、
前記第2の電極から前記スペース内に延び、前記スペースの一部分のみに渡り延びた第2の導電性突出部と、
前記第2の突出部の領域に重なる前記第1の突出部の領域であって、前記グラフェン構造が、前記第1および第2の突出部の前記重なる複数の領域間にある、前記第1の突出部の領域と、
前記重なる複数の領域内で、前記グラフェン構造と、前記第1および第2の突出部のうちの少なくとも1つとに横方向に挟まれた強誘電材料と、
を備える集積回路の構成部品。 - 前記構成部品が、スイッチを備え、
前記第1および第2の導電性突出部が、前記グラフェン構造‐前記強誘電材料間への電界の印加により、前記スイッチを「オン」状態および「オフ」状態にするように構成される、
請求項29に記載の構成部品。 - 前記構成部品が、メモリ・セルを備え、
前記第1および第2の導電性突出部が、前記グラフェン構造‐前記強誘電材料間への電界の印加により、前記メモリ・セルを、少なくとも2つのメモリ状態のうちの1つのメモリ状態にするように構成される、
請求項29に記載の構成部品。 - 1対の電極間で縦方向に延び、前記1対の電極の両方に導電可能に接続したグラフェン構造と、
前記グラフェン構造の横方向に外側にあり、互いから見て前記グラフェン構造の相対する側にある第1および第2の導電性構造と、
前記グラフェン構造の横方向に外側にあり、前記グラフェン構造と、前記第1および第2の導電性構造のうちの少なくとも1つとに横方向に挟まれた強誘電材料と、
を備えるメモリ・セルであって、
前記第1および第2の導電性構造が、前記グラフェン構造‐前記強誘電材料間への電界の印加により、前記メモリ・セルを、少なくとも2つのメモリ状態のうちの1つのメモリ状態にするように構成される、
メモリ・セル。 - 前記第1の導電性構造が、前記複数の電極のうちの一方の電極に導電可能に結合し、
前記第2の導電性構造が、前記複数の電極のうちの他方の電極に導電可能に結合する、
請求項32に記載のメモリ・セル。 - 前記第1の導電性構造および前記第2の導電性構造が、それぞれ前記一方の電極および前記他方の電極から直交方向に延びる、
請求項33に記載のメモリ・セル。 - スペースにより互いから分離した第1の電極および第2の電極と、
前記第1および第2の電極の両方に導電可能に接続し、前記スペースの端から端まで延び、ギャップを挟んで互いから離隔した第1および第2のグラフェン構造と、
前記第1の電極から前記スペース内に延び、前記スペースの一部分のみに渡り延び、前記第1のグラフェン構造の一方の側にある第1の導電性突出部と、
前記第2の電極から前記スペース内に延び、前記スペースの一部分のみに渡り延びた第2の導電性突出部であって、前記第2の電極が、前記第1のグラフェン構造と前記第2のグラフェン構造との間にあり、前記第1の導電性突出部から見て前記第1のグラフェン構造の反対側にある、第2の導電性突出部と、
前記第1の電極から前記スペース内に延び、前記スペースの一部分のみに渡り延び、前記第2の導電性突出部から見て前記第2のグラフェン構造の反対側にある第3の導電性突出部と、
前記第2の突出部の領域に重なる前記第1の突出部の領域であって、前記第1のグラフェン構造が、前記第1および第2の突出部の前記重なる複数の領域間にある、前記第1の突出部の領域と、
前記第3の突出部の領域に重なる前記第2の突出部の領域であって、前記第2のグラフェン構造が、前記第2および第3の突出部の前記重なる複数の領域間にある、前記第2の突出部の領域と、
a)前記第1の突出部および前記第2の突出部の前記重なる複数の領域間、b)前記第2の突出部および前記第3の突出部の前記重なる複数の領域間のうちの少なくとも一方で横方向に挟まれた強誘電材料と、
を備える集積回路の構成部品。
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