JP2015211524A - 半導体モジュール - Google Patents
半導体モジュール Download PDFInfo
- Publication number
- JP2015211524A JP2015211524A JP2014091148A JP2014091148A JP2015211524A JP 2015211524 A JP2015211524 A JP 2015211524A JP 2014091148 A JP2014091148 A JP 2014091148A JP 2014091148 A JP2014091148 A JP 2014091148A JP 2015211524 A JP2015211524 A JP 2015211524A
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- Prior art keywords
- phase
- wiring layer
- terminal
- bus bar
- electrode
- Prior art date
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Abstract
【解決手段】上アームおよび下アームを3相備えた3相交流の三相インバータ回路を構成する半導体モジュール6において、多層配線バスバー13を備える。多層配線バスバー13には、出力配線層が3相それぞれの上アームと下アームの中間電位点と接続されるU相配線層とV相配線層およびW相配線層が備えられている。絶縁層を介してU相〜W相配線層を対向配置して積層し、U相〜W相配線層それぞれと負荷との電気的接続を行うためのU端子13cとV端子13dとW端子13eとにそれぞれ接続する。そして、このような構造において、U相〜W相配線層の積層数を偶数とする。
【選択図】図4
Description
サージ電圧ΔVsurは、近年進められている大電流・高速スイッチング化により増加傾向にある。サージ保護については素子耐圧を高く取れば実現可能であるが、トレードオフの関係にあるオン抵抗が増加してしまい、定常損失の増加を招く。また、スイッチング損失Eswの低減や装置の小型化のニーズがあり、そのニーズに応えるには、dI/dtの向上や高周波化が必要となる。したがって、サージ電圧ΔVsurを増加させることなく、dI/dtの向上を図るためには、短絡ループ内における低インダクタンス化が必要である。
本発明の第1実施形態について説明する。本実施形態では、本発明の一実施形態にかかる半導体モジュールの適用例として、例えば三相交流モータなどの駆動を行う三相インバータ回路が備えられた半導体モジュールを例に挙げて説明する。
本発明は上記した実施形態に限定されるものではなく、特許請求の範囲に記載した範囲内において適宜変更が可能である。
3 負荷(三相交流モータ)
6 半導体モジュール
10 半導体チップ
13 多層配線バスバー
13a、13b 正極、負極端子
13c〜13e U〜W端子
14 制御端子
18 樹脂モールド部
51〜56 アーム
131、132 正極、負極配線層
133〜135 U相〜W相配線層
Claims (10)
- 表面および裏面を有し、半導体スイッチング素子(51a〜56a)が形成された半導体チップ(10)を有する上アーム(51、53、55)および下アーム(52、54、56)と、
前記上アームおよび前記下アームそれぞれの前記半導体チップの表面側および裏面側それぞれに配置された放熱板(11、12)と、
前記上アームの半導体チップにおける正極側に接続される正極配線層(131)と、前記正極配線層と外部電源(2)の正極側との電気的接続を行うための正極端子(13a)と、絶縁層(130)を介して前記正極配線層に対して対向配置されると共に前記下アームの半導体チップにおける負極側に接続される負極配線層(132)と、前記負極配線層との電気的接続を行うための負極端子(13b)とを有する主回路を構成する主回路側バスバー(13)と、
前記上アームの半導体チップにおける負極側に接続されると共に前記下アームの半導体チップにおける正極側に接続されることで、前記上アームと前記下アームの中間電位点に接続される出力配線層(133〜135)と、前記出力配線層と負荷(3)との電気的接続を行うための出力端子(13c〜13e)とを有する出力端子側バスバー(13)と、
前記半導体スイッチング素子の信号線となる制御端子(14)と、
前記放熱板の一面と前記主回路側バスバーのうち前記正極端子および前記負極端子側の端部と前記出力端子側バスバーのうち前記出力端子側の端部と前記制御端子の端部を露出させつつ、前記上アームおよび前記下アームを覆う樹脂モールド部(18)と、を有し、
前記上アームおよび前記下アームが3相備えられていると共に、前記出力配線層が3相それぞれの前記上アームと前記下アームの中間電位点と接続されるU相配線層(133)とV相配線層(134)およびW相配線層(135)とを有していると共に、該U相〜W相配線層が絶縁層(130)を介して対向配置されて積層されることで構成され、
前記出力端子が前記U相〜W相配線層それぞれと前記負荷との電気的接続を行うためのU端子(13c)とV端子(13d)とW端子(13e)とを有した構成とされ、
前記U相〜W相配線層の積層数が偶数とされていることを特徴とする半導体モジュール。 - 前記出力端子側バスバーと前記主回路側バスバーとが一体化された多層配線バスバーであることを特徴とする請求項1に記載の半導体モジュール。
- 前記正極配線層と前記負極配線層の積層数が前記U相〜W相配線層の積層数と同数とされていることを特徴とする請求項2に記載の半導体モジュール。
- 前記U相〜W相配線層の積層数が4層であり、前記配線層の1つが2層に分割されていることを特徴とする請求項2または3に記載の半導体モジュール。
- 2層に分割された前記配線層の間に他の配線層が配置されていることを特徴とする請求項4に記載の半導体モジュール。
- 前記主回路側バスバーのうち前記正極端子および前記負極端子側の端部と、前記出力端子側バスバーのうち前記出力端子側の端部とが、前記樹脂モールド部を挟んだ反対側から露出させられていることを特徴とする請求項2ないし5のいずれか1つに記載の半導体モジュール。
- 前記樹脂モールド部は、四角形板状で構成されており、前記主回路側バスバーのうち前記正極端子および前記負極端子側の端部と、前記出力端子側バスバーのうち前記出力端子側の端部とが前記樹脂モールド部のうち相対する2辺から露出させられていると共に、前記上アームにおける前記制御端子の端部と、前記下アームにおける前記制御端子の端部とが前記樹脂モールド部のうち前記2辺とは異なる相対する2辺から露出させられていることを特徴とする請求項6に記載の半導体モジュール。
- 前記U相〜W相配線層は、厚みよりも幅の方が寸法が大きくされていることを特徴とする請求項2ないし7のいずれか1つに記載の半導体モジュール。
- 前記上アームの半導体チップと前記下アームの半導体チップは、表面と裏面が同じ方向を向けられて配置され、該前記上アームの半導体チップと前記下アームの半導体チップの間を通過するように前記多層配線バスバーが配置されていることを特徴とする請求項2ないし8のいずれか1つに記載の半導体モジュール。
- 前記多層配線バスバーは、前記正極端子および前記負極端子側の端部から前記出力端子側に伸びる板状棒状部材によって構成されており、該多層配線バスバーの長手方向に対して交差する方向となる幅方向において、
前記多層配線バスバーの一面側には、前記上アームの半導体チップの表面側に配置される表面電極と電気的に接続されると共に前記出力配線層に繋がる第1出力電極(136a〜136c)と、前記下アームの半導体チップの表面側に配置される表面電極と電気的に接続されると共に前記負極配線層に繋がる負極電極(139a〜139c)が形成されており、
前記多層配線バスバーの前記一面と反対側の他面側には、前記上アームの半導体チップの裏面側に配置される裏面電極と電気的に接続されると共に前記正極配線層に繋がる正極電極(137a〜137c)と、前記下アームの半導体チップの裏面側に配置される裏面電極と電気的に接続されると共に前記出力配線層に繋がる第2出力電極(138a〜138c)が形成されており、
前記板状棒状部材とされた前記多層配線バスバーを幅方向に切断した断面において、前記第1出力電極と前記第2出力電極とが一方の対角に配置されていると共に前記多層配線バスバー内において電気的に接続されており、前記正極電極と前記負極電極とがもう一方の対角に配置されていることを特徴とする請求項9に記載の半導体モジュール。
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US15/129,860 US9905541B2 (en) | 2014-04-25 | 2015-03-26 | Semiconductor module with bus bar including stacked wiring layers |
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US10770439B2 (en) | 2017-02-13 | 2020-09-08 | Shindengen Electric Manufacturing Co., Ltd. | Electronic module |
US10950522B2 (en) | 2017-02-13 | 2021-03-16 | Shindengen Electric Manufacturing Co., Ltd. | Electronic device |
JP2021534710A (ja) * | 2018-08-09 | 2021-12-09 | エスエムエイ ソーラー テクノロジー アクティエンゲゼルシャフトSMA Solar Technology AG | 中間回路装置及びインバータ |
JP7101867B2 (ja) | 2018-08-09 | 2022-07-15 | エスエムエイ ソーラー テクノロジー アクティエンゲゼルシャフト | 中間回路装置及びインバータ |
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CN106256082B (zh) | 2018-10-23 |
JP6269296B2 (ja) | 2018-01-31 |
US20170148770A1 (en) | 2017-05-25 |
CN106256082A (zh) | 2016-12-21 |
DE112015002001B4 (de) | 2024-02-01 |
DE112015002001T5 (de) | 2017-01-26 |
WO2015162856A1 (ja) | 2015-10-29 |
US9905541B2 (en) | 2018-02-27 |
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