JP2015211180A - カーボンナノチューブシート及び電子機器とカーボンナノチューブシートの製造方法及び電子機器の製造方法 - Google Patents
カーボンナノチューブシート及び電子機器とカーボンナノチューブシートの製造方法及び電子機器の製造方法 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 263
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 256
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 256
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 23
- 238000000034 method Methods 0.000 title description 16
- 238000010438 heat treatment Methods 0.000 claims description 33
- 239000000758 substrate Substances 0.000 claims description 30
- 229920005989 resin Polymers 0.000 claims description 26
- 239000011347 resin Substances 0.000 claims description 26
- 238000003825 pressing Methods 0.000 claims description 18
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 10
- 238000005452 bending Methods 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 229920005992 thermoplastic resin Polymers 0.000 abstract description 8
- 230000017525 heat dissipation Effects 0.000 abstract description 6
- 239000004065 semiconductor Substances 0.000 description 34
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 14
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- 230000003197 catalytic effect Effects 0.000 description 9
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 239000007789 gas Substances 0.000 description 6
- 230000004048 modification Effects 0.000 description 5
- 238000012986 modification Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000010419 fine particle Substances 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
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- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
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Abstract
【解決手段】一端側に第1くびれ部Aを備えた複数のカーボンナノチューブ20aと、複数のカーボンナノチューブ20aの間に充填された熱可塑性の樹脂部30とを含み、カーボンナノチューブ20aは、熱可塑性の樹脂部30の一方の表面側で第1くびれ部Aから横方向に折れ曲がっている。第1カーボンナノチューブ部21の長さは20μm程度であり、その全体が発熱体40に接触する。
【選択図】図8
Description
図2〜図5は第1実施形態のカーボンナノチューブシートの製造方法を示す図、図6は第1実施形態のカーボンナノチューブシートを示す図である。
前述した第1実施形態では、カーボンナノチューブ集合体20に樹脂部30を充填してシート状に一体化している。
Claims (11)
- 一端側に第1くびれ部を備えた複数のカーボンナノチューブと、
前記複数のカーボンナノチューブの間に充填された樹脂部と
を有することを特徴とするカーボンナノチューブシート。 - 前記カーボンナノチューブは、前記樹脂部の一方の表面側で前記第1くびれ部から横方向に折れ曲がっていることを特徴とする請求項1に記載のカーボンナノチューブシート。
- 前記カーボンナノチューブは他端側に第2くびれ部を備えていることを特徴とする請求項1に記載のカーボンナノチューブシート。
- 前記カーボンナノチューブは、
前記樹脂部の一方の表面側で前記第1くびれ部から横方向に折れ曲がっており、かつ、前記樹脂部の他方の表面側で前記第2くびれ部から横方向に折れ曲がっていることを特徴とする請求項3に記載のカーボンナノチューブシート。 - 前記カーボンナノチューブはアルミナ膜で被覆されていることを特徴とする請求項1乃至4のいずれか一項に記載のカーボンナノチューブシート。
- 一端側に第1くびれ部を備えた複数のカーボンナノチューブと、前記複数のカーボンナノチューブの間に充填された樹脂部とを有し、前記カーボンナノチューブは、前記樹脂部の一方の表面側で前記第1くびれ部から横方向に折れ曲がっているカーボンナノチューブシートと、
前記カーボンナノチューブシートの一方の面に配置され、前記複数のカーボンナノチューブの一端側の前記第1くびれ部から折れた部分と接触する発熱体と、
前記カーボンナノチューブシートの他方の面に配置され、前記カーボンナノチューブの他端側に接触する放熱部材と
を有することを特徴とする電子機器。 - 前記カーボンナノチューブは前記他端側に第2くびれ部を有し、
前記カーボンナノチューブは、前記樹脂部の他方の表面側で前記第2くびれ部から横方向に折れ曲がっており、
前記放熱部材は、前記カーボンナノチューブシートの他端側の前記第2くびれ部から折れた部分と接触していることを特徴とする請求項6に記載の電子機器。 - 基板の上に、少なくとも一端側にくびれ部を備えた複数のカーボンナノチューブを形成する工程と、
前記カーボンナノチューブの間に樹脂部を充填する工程と、
前記基板を除去する工程と
を有することを特徴とするカーボンナノチューブシートの製造方法。 - 基板の上に、少なくとも一端側にくびれ部を備えた複数のカーボンナノチューブを成長する工程と、
前記カーボンナノチューブをアルミナ膜で被覆する工程と、
前記基板を除去する工程と
を有することを特徴とするカーボンナノチューブシートの製造方法。 - 基板の上に、少なくとも一端側にくびれ部を備えた複数のカーボンナノチューブを形成する工程と、
前記複数のカーボンナノチューブの間に樹脂部を充填する工程と、
前記基板を除去する工程と
により、カーボンナノチューブシートを得る工程と、
発熱体の上に前記カーボンナノチューブシートを配置する工程と、
前記カーボンナノチューブシートの上に放熱部材を配置し、前記放熱部材を下側に押圧して、前記複数のカーボンナノチューブを前記くびれ部から横方向に折り曲げる工程と
を有することを特徴とする電子機器の製造方法。 - 基板の上に、少なくとも一端側にくびれ部を備えた複数のカーボンナノチューブを形成する工程と、
前記複数のカーボンナノチューブをアルミナ膜で被覆する工程と、
前記基板を除去工程と
により、カーボンナノチューブシートを得る工程と、
発熱体の上に前記カーボンナノチューブシートを配置する工程と、
前記カーボンナノチューブシートの上に部材を配置し、前記部材を下側に押圧して、前記複数のカーボンナノチューブを前記第1くびれ部から折り曲げる工程と
を有することを特徴とする電子機器の製造方法。
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JP2014093341A JP6223903B2 (ja) | 2014-04-30 | 2014-04-30 | カーボンナノチューブシート及び電子機器とカーボンナノチューブシートの製造方法及び電子機器の製造方法 |
US14/689,484 US9644128B2 (en) | 2014-04-30 | 2015-04-17 | Carbon nanotube sheet, electronic device, method of manufacturing carbon nanotube sheet, and method of manufacturing electronic device |
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JP2019046844A (ja) * | 2017-08-30 | 2019-03-22 | トヨタ自動車株式会社 | 放熱シート |
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