JP2015193175A5 - - Google Patents
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- Publication number
- JP2015193175A5 JP2015193175A5 JP2014072910A JP2014072910A JP2015193175A5 JP 2015193175 A5 JP2015193175 A5 JP 2015193175A5 JP 2014072910 A JP2014072910 A JP 2014072910A JP 2014072910 A JP2014072910 A JP 2014072910A JP 2015193175 A5 JP2015193175 A5 JP 2015193175A5
- Authority
- JP
- Japan
- Prior art keywords
- fluoride
- manufactured
- nitride film
- solvent
- formula
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 10
- 238000001994 activation Methods 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 7
- 239000002904 solvent Substances 0.000 description 6
- 230000004913 activation Effects 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- -1 fluorocarbon compound Chemical class 0.000 description 4
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 3
- 239000013500 performance material Substances 0.000 description 3
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 239000010702 perfluoropolyether Chemical group 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 1
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 239000005456 alcohol based solvent Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000003759 ester based solvent Substances 0.000 description 1
- 239000004210 ether based solvent Substances 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical group 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000005453 ketone based solvent Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000012046 mixed solvent Substances 0.000 description 1
- 229920001709 polysilazane Polymers 0.000 description 1
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical class [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014072910A JP6096147B2 (ja) | 2014-03-31 | 2014-03-31 | 圧縮成形金型の製造方法、及び圧縮成形体の製造方法 |
| PCT/JP2015/058182 WO2015151825A1 (ja) | 2014-03-31 | 2015-03-19 | 圧縮成形金型、圧縮成形金型の製造方法、及び圧縮成形体の製造方法 |
| KR1020167001174A KR20160137938A (ko) | 2014-03-31 | 2015-03-19 | 압축 성형 금형, 압축 성형 금형의 제조 방법, 및 압축 성형체의 제조 방법 |
| CN201580001414.9A CN105408081B (zh) | 2014-03-31 | 2015-03-19 | 压缩成形模具、压缩成形模具的制造方法、及压缩成形体的制造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014072910A JP6096147B2 (ja) | 2014-03-31 | 2014-03-31 | 圧縮成形金型の製造方法、及び圧縮成形体の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015193175A JP2015193175A (ja) | 2015-11-05 |
| JP2015193175A5 true JP2015193175A5 (https=) | 2016-03-03 |
| JP6096147B2 JP6096147B2 (ja) | 2017-03-15 |
Family
ID=54240156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014072910A Expired - Fee Related JP6096147B2 (ja) | 2014-03-31 | 2014-03-31 | 圧縮成形金型の製造方法、及び圧縮成形体の製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6096147B2 (https=) |
| KR (1) | KR20160137938A (https=) |
| CN (1) | CN105408081B (https=) |
| WO (1) | WO2015151825A1 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102016125406A1 (de) | 2016-12-22 | 2018-06-28 | Gkn Sinter Metals Engineering Gmbh | Matrize für eine Presse |
| KR102940152B1 (ko) * | 2023-07-06 | 2026-03-17 | 한국원자력연구원 | 양방향 압축 금형 장치 |
| CN120228231B (zh) * | 2025-04-11 | 2025-11-25 | 河南浙锻机床有限公司 | 自动化压力机及在金属配件加工中的应用 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0649295B2 (ja) | 1989-02-01 | 1994-06-29 | チッソ株式会社 | 粉体成形用離型剤及びそれを用いた成形品の製造方法 |
| JPH03254910A (ja) * | 1989-07-11 | 1991-11-13 | Hitachi Tool Eng Ltd | プラスチック成形用金型 |
| JPH03216298A (ja) * | 1990-01-19 | 1991-09-24 | Idemitsu Kosan Co Ltd | 圧縮成形方法 |
| JP2849162B2 (ja) * | 1990-02-27 | 1999-01-20 | 日本タングステン株式会社 | 樹脂材成形用モールド |
| JP3837928B2 (ja) * | 1998-08-21 | 2006-10-25 | 住友電気工業株式会社 | 樹脂成形装置用部材及びその製造方法 |
| JP2002001733A (ja) * | 2000-06-26 | 2002-01-08 | Fuji Dies Kk | 半導体封止用樹脂のタブレット成形用金型 |
| US7153592B2 (en) * | 2000-08-31 | 2006-12-26 | Fujitsu Limited | Organic EL element and method of manufacturing the same, organic EL display device using the element, organic EL material, and surface emission device and liquid crystal display device using the material |
| JP3292199B2 (ja) * | 2001-03-22 | 2002-06-17 | 住友電気工業株式会社 | ゴム用金型、ゴム用金型の製造方法およびゴムの成形方法 |
| US7238383B2 (en) * | 2003-03-07 | 2007-07-03 | Eastman Kodak Company | Making and using compacted pellets for OLED displays |
| JP4582497B2 (ja) * | 2004-02-27 | 2010-11-17 | 株式会社ダイヤメット | 粉末成形体の成形方法 |
| JP5516653B2 (ja) * | 2006-10-06 | 2014-06-11 | 日立化成株式会社 | タブレット成形金型、ならびにタブレット、光半導体素子搭載用基板の製造方法および光半導体装置。 |
| JP2008112977A (ja) * | 2006-10-06 | 2008-05-15 | Hitachi Chem Co Ltd | タブレット成形金型、ならびにタブレット、光半導体素子搭載用基板の製造方法および光半導体装置。 |
| KR100949819B1 (ko) | 2008-03-11 | 2010-03-30 | 박진연 | 타블릿 성형 다이 어셈블리 |
| JP3163163U (ja) | 2010-07-21 | 2010-09-30 | 株式会社ジェピア | 金型 |
| JP2012056246A (ja) * | 2010-09-10 | 2012-03-22 | Fujifilm Corp | 微細な凹凸パターンを表面に有するＮｉ原盤、およびそれを用いたＮｉ複盤の製造方法 |
| JP5725339B2 (ja) * | 2011-03-25 | 2015-05-27 | 株式会社小糸製作所 | 熱板溶着用治具およびその製造方法、金属部材 |
-
2014
- 2014-03-31 JP JP2014072910A patent/JP6096147B2/ja not_active Expired - Fee Related
-
2015
- 2015-03-19 KR KR1020167001174A patent/KR20160137938A/ko not_active Ceased
- 2015-03-19 WO PCT/JP2015/058182 patent/WO2015151825A1/ja not_active Ceased
- 2015-03-19 CN CN201580001414.9A patent/CN105408081B/zh not_active Expired - Fee Related
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