JP2015153970A5 - - Google Patents

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Publication number
JP2015153970A5
JP2015153970A5 JP2014028151A JP2014028151A JP2015153970A5 JP 2015153970 A5 JP2015153970 A5 JP 2015153970A5 JP 2014028151 A JP2014028151 A JP 2014028151A JP 2014028151 A JP2014028151 A JP 2014028151A JP 2015153970 A5 JP2015153970 A5 JP 2015153970A5
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JP
Japan
Prior art keywords
substrate
holding mechanism
mounting
transported
substrate holding
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Pending
Application number
JP2014028151A
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English (en)
Japanese (ja)
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JP2015153970A (ja
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Priority to JP2014028151A priority Critical patent/JP2015153970A/ja
Priority claimed from JP2014028151A external-priority patent/JP2015153970A/ja
Publication of JP2015153970A publication Critical patent/JP2015153970A/ja
Publication of JP2015153970A5 publication Critical patent/JP2015153970A5/ja
Pending legal-status Critical Current

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JP2014028151A 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法 Pending JP2015153970A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014028151A JP2015153970A (ja) 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014028151A JP2015153970A (ja) 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法

Publications (2)

Publication Number Publication Date
JP2015153970A JP2015153970A (ja) 2015-08-24
JP2015153970A5 true JP2015153970A5 (enExample) 2017-03-09

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ID=53895908

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JP2014028151A Pending JP2015153970A (ja) 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法

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JP (1) JP2015153970A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115285681A (zh) * 2022-07-27 2022-11-04 上海见远自动化科技有限公司 一种上片机晶圆自动上料装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2673239B2 (ja) * 1988-11-07 1997-11-05 東京エレクトロン株式会社 処理装置
JPH11195690A (ja) * 1997-12-26 1999-07-21 Kashiwara Machine Mfg Co Ltd ウエーハ移載装置
KR19990086237A (ko) * 1998-05-26 1999-12-15 윤종용 반도체 웨이퍼 이송장치의 이송아암 및 이를 구비하는 이송장치
JP4553841B2 (ja) * 2003-05-06 2010-09-29 オリンパス株式会社 基板吸着装置
JP4282018B2 (ja) * 2004-09-30 2009-06-17 東京エレクトロン株式会社 基板搬送装置
JP4519743B2 (ja) * 2005-09-20 2010-08-04 株式会社安川電機 基板吸着装置、基板支持体、基板搬送装置、およびガラス基板搬送用ロボット。
JP2013198960A (ja) * 2012-03-26 2013-10-03 Disco Corp ロボットハンド

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