JP2015153970A - 基板保持機構、基板搬送装置および基板搬送方法 - Google Patents

基板保持機構、基板搬送装置および基板搬送方法 Download PDF

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JP2015153970A
JP2015153970A JP2014028151A JP2014028151A JP2015153970A JP 2015153970 A JP2015153970 A JP 2015153970A JP 2014028151 A JP2014028151 A JP 2014028151A JP 2014028151 A JP2014028151 A JP 2014028151A JP 2015153970 A JP2015153970 A JP 2015153970A
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substrate
wafer
holding mechanism
suction
cassette
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JP2015153970A5 (enExample
Inventor
啓治 枝松
Keiji Edamatsu
啓治 枝松
充 千田
Mitsuru Senda
充 千田
松本　圭司
Keiji Matsumoto
圭司 松本
坂井　稔康
Toshiyasu Sakai
稔康 坂井
純 山室
Jun Yamamuro
純 山室
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Canon Inc
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Canon Inc
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Priority to JP2014028151A priority Critical patent/JP2015153970A/ja
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Publication of JP2015153970A5 publication Critical patent/JP2015153970A5/ja
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JP2014028151A 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法 Pending JP2015153970A (ja)

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JP2014028151A JP2015153970A (ja) 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法

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JP2014028151A JP2015153970A (ja) 2014-02-18 2014-02-18 基板保持機構、基板搬送装置および基板搬送方法

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JP2015153970A true JP2015153970A (ja) 2015-08-24
JP2015153970A5 JP2015153970A5 (enExample) 2017-03-09

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115285681A (zh) * 2022-07-27 2022-11-04 上海见远自动化科技有限公司 一种上片机晶圆自动上料装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126648A (ja) * 1988-11-07 1990-05-15 Tokyo Electron Ltd 処理装置
JPH11195690A (ja) * 1997-12-26 1999-07-21 Kashiwara Machine Mfg Co Ltd ウエーハ移載装置
JPH11345855A (ja) * 1998-05-26 1999-12-14 Samsung Electronics Co Ltd 半導体ウェ―ハ移送装置の移送ア―ム及びこれを備える移送装置
WO2004100254A1 (ja) * 2003-05-06 2004-11-18 Olympus Corporation 基板吸着装置
JP2006108133A (ja) * 2004-09-30 2006-04-20 Tokyo Electron Ltd 基板搬送装置
JP2007083322A (ja) * 2005-09-20 2007-04-05 Yaskawa Electric Corp 基板吸着装置、基板支持体、基板搬送装置、およびガラス基板搬送用ロボット。
JP2013198960A (ja) * 2012-03-26 2013-10-03 Disco Corp ロボットハンド

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02126648A (ja) * 1988-11-07 1990-05-15 Tokyo Electron Ltd 処理装置
JPH11195690A (ja) * 1997-12-26 1999-07-21 Kashiwara Machine Mfg Co Ltd ウエーハ移載装置
JPH11345855A (ja) * 1998-05-26 1999-12-14 Samsung Electronics Co Ltd 半導体ウェ―ハ移送装置の移送ア―ム及びこれを備える移送装置
WO2004100254A1 (ja) * 2003-05-06 2004-11-18 Olympus Corporation 基板吸着装置
JP2006108133A (ja) * 2004-09-30 2006-04-20 Tokyo Electron Ltd 基板搬送装置
JP2007083322A (ja) * 2005-09-20 2007-04-05 Yaskawa Electric Corp 基板吸着装置、基板支持体、基板搬送装置、およびガラス基板搬送用ロボット。
JP2013198960A (ja) * 2012-03-26 2013-10-03 Disco Corp ロボットハンド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115285681A (zh) * 2022-07-27 2022-11-04 上海见远自动化科技有限公司 一种上片机晶圆自动上料装置

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