JP2015140454A - Cu核ボール、はんだペーストおよびはんだ継手 - Google Patents
Cu核ボール、はんだペーストおよびはんだ継手 Download PDFInfo
- Publication number
- JP2015140454A JP2015140454A JP2014013528A JP2014013528A JP2015140454A JP 2015140454 A JP2015140454 A JP 2015140454A JP 2014013528 A JP2014013528 A JP 2014013528A JP 2014013528 A JP2014013528 A JP 2014013528A JP 2015140454 A JP2015140454 A JP 2015140454A
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- JP
- Japan
- Prior art keywords
- ball
- solder
- plating film
- less
- core
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910000679 solder Inorganic materials 0.000 title claims abstract description 142
- 238000007747 plating Methods 0.000 claims abstract description 161
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 29
- 239000000956 alloy Substances 0.000 claims abstract description 29
- 230000003746 surface roughness Effects 0.000 claims abstract description 21
- 229910052770 Uranium Inorganic materials 0.000 claims description 13
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000000034 method Methods 0.000 abstract description 44
- 239000012535 impurity Substances 0.000 abstract description 22
- 239000010949 copper Substances 0.000 description 243
- 239000000243 solution Substances 0.000 description 49
- 239000000463 material Substances 0.000 description 26
- 230000002285 radioactive effect Effects 0.000 description 19
- 238000010438 heat treatment Methods 0.000 description 16
- 229910052745 lead Inorganic materials 0.000 description 16
- 239000000203 mixture Substances 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 15
- 238000000576 coating method Methods 0.000 description 15
- 229910052776 Thorium Inorganic materials 0.000 description 14
- 238000005259 measurement Methods 0.000 description 14
- 229910052797 bismuth Inorganic materials 0.000 description 12
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 10
- 239000003463 adsorbent Substances 0.000 description 10
- 239000008188 pellet Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 229910017944 Ag—Cu Inorganic materials 0.000 description 8
- 238000000921 elemental analysis Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 229910052709 silver Inorganic materials 0.000 description 8
- 150000001875 compounds Chemical class 0.000 description 7
- 239000013078 crystal Substances 0.000 description 7
- 239000002994 raw material Substances 0.000 description 7
- 150000003839 salts Chemical class 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052718 tin Inorganic materials 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 238000011156 evaluation Methods 0.000 description 5
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- -1 mercaptan compound Chemical class 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229940098779 methanesulfonic acid Drugs 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 238000007670 refining Methods 0.000 description 5
- KJCVRFUGPWSIIH-UHFFFAOYSA-N 1-naphthol Chemical compound C1=CC=C2C(O)=CC=CC2=C1 KJCVRFUGPWSIIH-UHFFFAOYSA-N 0.000 description 4
- 229910020220 Pb—Sn Inorganic materials 0.000 description 4
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical class [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 4
- 230000005260 alpha ray Effects 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 4
- 239000008139 complexing agent Substances 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 239000002244 precipitate Substances 0.000 description 4
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 4
- 238000003756 stirring Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052787 antimony Inorganic materials 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- JALQQBGHJJURDQ-UHFFFAOYSA-L bis(methylsulfonyloxy)tin Chemical compound [Sn+2].CS([O-])(=O)=O.CS([O-])(=O)=O JALQQBGHJJURDQ-UHFFFAOYSA-L 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 238000009713 electroplating Methods 0.000 description 3
- 238000009499 grossing Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 150000003460 sulfonic acids Chemical class 0.000 description 3
- 229910001432 tin ion Inorganic materials 0.000 description 3
- YYYOQURZQWIILK-UHFFFAOYSA-N 2-[(2-aminophenyl)disulfanyl]aniline Chemical compound NC1=CC=CC=C1SSC1=CC=CC=C1N YYYOQURZQWIILK-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- JJLJMEJHUUYSSY-UHFFFAOYSA-L Copper hydroxide Chemical compound [OH-].[OH-].[Cu+2] JJLJMEJHUUYSSY-UHFFFAOYSA-L 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- PWKSKIMOESPYIA-BYPYZUCNSA-N L-N-acetyl-Cysteine Chemical compound CC(=O)N[C@@H](CS)C(O)=O PWKSKIMOESPYIA-BYPYZUCNSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 229960004308 acetylcysteine Drugs 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 229910001431 copper ion Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 239000003673 groundwater Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 238000009616 inductively coupled plasma Methods 0.000 description 2
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 150000002736 metal compounds Chemical class 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052699 polonium Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 229910001923 silver oxide Inorganic materials 0.000 description 2
- SQGYOTSLMSWVJD-UHFFFAOYSA-N silver(1+) nitrate Chemical compound [Ag+].[O-]N(=O)=O SQGYOTSLMSWVJD-UHFFFAOYSA-N 0.000 description 2
- 239000004094 surface-active agent Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- YXTDAZMTQFUZHK-ZVGUSBNCSA-L (2r,3r)-2,3-dihydroxybutanedioate;tin(2+) Chemical compound [Sn+2].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O YXTDAZMTQFUZHK-ZVGUSBNCSA-L 0.000 description 1
- MNDGPLSORKUYSJ-UHFFFAOYSA-J 1,6,8,13-tetraoxa-7-stannaspiro[6.6]tridecane-2,5,9,12-tetrone Chemical compound O1C(=O)CCC(=O)O[Sn]21OC(=O)CCC(=O)O2 MNDGPLSORKUYSJ-UHFFFAOYSA-J 0.000 description 1
- DIZBQMTZXOUFTD-UHFFFAOYSA-N 2-(furan-2-yl)-3h-benzimidazole-5-carboxylic acid Chemical compound N1C2=CC(C(=O)O)=CC=C2N=C1C1=CC=CO1 DIZBQMTZXOUFTD-UHFFFAOYSA-N 0.000 description 1
- GEZAUFNYMZVOFV-UHFFFAOYSA-J 2-[(2-oxo-1,3,2$l^{5},4$l^{2}-dioxaphosphastannetan-2-yl)oxy]-1,3,2$l^{5},4$l^{2}-dioxaphosphastannetane 2-oxide Chemical compound [Sn+2].[Sn+2].[O-]P([O-])(=O)OP([O-])([O-])=O GEZAUFNYMZVOFV-UHFFFAOYSA-J 0.000 description 1
- JKFYKCYQEWQPTM-UHFFFAOYSA-N 2-azaniumyl-2-(4-fluorophenyl)acetate Chemical compound OC(=O)C(N)C1=CC=C(F)C=C1 JKFYKCYQEWQPTM-UHFFFAOYSA-N 0.000 description 1
- CQMNNMLVXSWLCH-UHFFFAOYSA-B 2-hydroxypropane-1,2,3-tricarboxylate;tin(4+) Chemical compound [Sn+4].[Sn+4].[Sn+4].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O.[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O CQMNNMLVXSWLCH-UHFFFAOYSA-B 0.000 description 1
- SKEZDZQGPKHHSH-UHFFFAOYSA-J 2-hydroxypropanoate;tin(4+) Chemical compound [Sn+4].CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O.CC(O)C([O-])=O SKEZDZQGPKHHSH-UHFFFAOYSA-J 0.000 description 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 description 1
- OCUCCJIRFHNWBP-IYEMJOQQSA-L Copper gluconate Chemical compound [Cu+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O OCUCCJIRFHNWBP-IYEMJOQQSA-L 0.000 description 1
- 229910021607 Silver chloride Inorganic materials 0.000 description 1
- 229910021612 Silver iodide Inorganic materials 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 229910020836 Sn-Ag Inorganic materials 0.000 description 1
- 229910020888 Sn-Cu Inorganic materials 0.000 description 1
- 229910020988 Sn—Ag Inorganic materials 0.000 description 1
- 229910019204 Sn—Cu Inorganic materials 0.000 description 1
- 229910018956 Sn—In Inorganic materials 0.000 description 1
- RZESOXIJGKVAAX-UHFFFAOYSA-L [Ag++].[O-]C(=O)CCC([O-])=O Chemical compound [Ag++].[O-]C(=O)CCC([O-])=O RZESOXIJGKVAAX-UHFFFAOYSA-L 0.000 description 1
- RAOSIAYCXKBGFE-UHFFFAOYSA-K [Cu+3].[O-]P([O-])([O-])=O Chemical compound [Cu+3].[O-]P([O-])([O-])=O RAOSIAYCXKBGFE-UHFFFAOYSA-K 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000005262 alpha decay Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005255 beta decay Effects 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- ODWXUNBKCRECNW-UHFFFAOYSA-M bromocopper(1+) Chemical compound Br[Cu+] ODWXUNBKCRECNW-UHFFFAOYSA-M 0.000 description 1
- MGIWDIMSTXWOCO-UHFFFAOYSA-N butanedioic acid;copper Chemical compound [Cu].OC(=O)CCC(O)=O MGIWDIMSTXWOCO-UHFFFAOYSA-N 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229940108925 copper gluconate Drugs 0.000 description 1
- HQUYBLKIOPTDRU-UHFFFAOYSA-N copper oxocopper dinitrate Chemical compound [N+](=O)([O-])[O-].[Cu+2].[Cu]=O.[N+](=O)([O-])[O-] HQUYBLKIOPTDRU-UHFFFAOYSA-N 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 1
- RSJOBNMOMQFPKQ-UHFFFAOYSA-L copper;2,3-dihydroxybutanedioate Chemical compound [Cu+2].[O-]C(=O)C(O)C(O)C([O-])=O RSJOBNMOMQFPKQ-UHFFFAOYSA-L 0.000 description 1
- DYROSKSLMAPFBZ-UHFFFAOYSA-L copper;2-hydroxypropanoate Chemical compound [Cu+2].CC(O)C([O-])=O.CC(O)C([O-])=O DYROSKSLMAPFBZ-UHFFFAOYSA-L 0.000 description 1
- HFDWIMBEIXDNQS-UHFFFAOYSA-L copper;diformate Chemical compound [Cu+2].[O-]C=O.[O-]C=O HFDWIMBEIXDNQS-UHFFFAOYSA-L 0.000 description 1
- GBRBMTNGQBKBQE-UHFFFAOYSA-L copper;diiodide Chemical compound I[Cu]I GBRBMTNGQBKBQE-UHFFFAOYSA-L 0.000 description 1
- ZQLBQWDYEGOYSW-UHFFFAOYSA-L copper;disulfamate Chemical compound [Cu+2].NS([O-])(=O)=O.NS([O-])(=O)=O ZQLBQWDYEGOYSW-UHFFFAOYSA-L 0.000 description 1
- ZHOLKSYCHRKNCU-UHFFFAOYSA-H copper;silicon(4+);hexafluoride Chemical compound [F-].[F-].[F-].[F-].[F-].[F-].[Si+4].[Cu+2] ZHOLKSYCHRKNCU-UHFFFAOYSA-H 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- FWBOFUGDKHMVPI-UHFFFAOYSA-K dicopper;2-oxidopropane-1,2,3-tricarboxylate Chemical compound [Cu+2].[Cu+2].[O-]C(=O)CC([O-])(C([O-])=O)CC([O-])=O FWBOFUGDKHMVPI-UHFFFAOYSA-K 0.000 description 1
- PEVJCYPAFCUXEZ-UHFFFAOYSA-J dicopper;phosphonato phosphate Chemical compound [Cu+2].[Cu+2].[O-]P([O-])(=O)OP([O-])([O-])=O PEVJCYPAFCUXEZ-UHFFFAOYSA-J 0.000 description 1
- ZUVOYUDQAUHLLG-OLXYHTOASA-L disilver;(2r,3r)-2,3-dihydroxybutanedioate Chemical compound [Ag+].[Ag+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O ZUVOYUDQAUHLLG-OLXYHTOASA-L 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005868 electrolysis reaction Methods 0.000 description 1
- 239000003792 electrolyte Substances 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 238000004993 emission spectroscopy Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- CCIVGXIOQKPBKL-UHFFFAOYSA-M ethanesulfonate Chemical compound CCS([O-])(=O)=O CCIVGXIOQKPBKL-UHFFFAOYSA-M 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 238000004949 mass spectrometry Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000010413 mother solution Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000005554 pickling Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 229910052704 radon Inorganic materials 0.000 description 1
- SYUHGPGVQRZVTB-UHFFFAOYSA-N radon atom Chemical compound [Rn] SYUHGPGVQRZVTB-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 150000003378 silver Chemical class 0.000 description 1
- CQLFBEKRDQMJLZ-UHFFFAOYSA-M silver acetate Chemical compound [Ag+].CC([O-])=O CQLFBEKRDQMJLZ-UHFFFAOYSA-M 0.000 description 1
- 229940071536 silver acetate Drugs 0.000 description 1
- ADZWSOLPGZMUMY-UHFFFAOYSA-M silver bromide Chemical compound [Ag]Br ADZWSOLPGZMUMY-UHFFFAOYSA-M 0.000 description 1
- 229940071575 silver citrate Drugs 0.000 description 1
- 229940045105 silver iodide Drugs 0.000 description 1
- HKZLPVFGJNLROG-UHFFFAOYSA-M silver monochloride Chemical compound [Cl-].[Ag+] HKZLPVFGJNLROG-UHFFFAOYSA-M 0.000 description 1
- 229910001961 silver nitrate Inorganic materials 0.000 description 1
- FJOLTQXXWSRAIX-UHFFFAOYSA-K silver phosphate Chemical compound [Ag+].[Ag+].[Ag+].[O-]P([O-])([O-])=O FJOLTQXXWSRAIX-UHFFFAOYSA-K 0.000 description 1
- 229910000161 silver phosphate Inorganic materials 0.000 description 1
- 229940019931 silver phosphate Drugs 0.000 description 1
- 229910000367 silver sulfate Inorganic materials 0.000 description 1
- YPNVIBVEFVRZPJ-UHFFFAOYSA-L silver sulfate Chemical compound [Ag+].[Ag+].[O-]S([O-])(=O)=O YPNVIBVEFVRZPJ-UHFFFAOYSA-L 0.000 description 1
- NEMJXQHXQWLYDM-JJKGCWMISA-M silver;(2r,3s,4r,5r)-2,3,4,5,6-pentahydroxyhexanoate Chemical compound [Ag+].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O NEMJXQHXQWLYDM-JJKGCWMISA-M 0.000 description 1
- LMEWRZSPCQHBOB-UHFFFAOYSA-M silver;2-hydroxypropanoate Chemical compound [Ag+].CC(O)C([O-])=O LMEWRZSPCQHBOB-UHFFFAOYSA-M 0.000 description 1
- FTNNQMMAOFBTNJ-UHFFFAOYSA-M silver;formate Chemical compound [Ag+].[O-]C=O FTNNQMMAOFBTNJ-UHFFFAOYSA-M 0.000 description 1
- TZMGLOFLKLBEFW-UHFFFAOYSA-M silver;sulfamate Chemical compound [Ag+].NS([O-])(=O)=O TZMGLOFLKLBEFW-UHFFFAOYSA-M 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004611 spectroscopical analysis Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- VPKAOUKDMHJLAY-UHFFFAOYSA-J tetrasilver;phosphonato phosphate Chemical compound [Ag+].[Ag+].[Ag+].[Ag+].[O-]P([O-])(=O)OP([O-])([O-])=O VPKAOUKDMHJLAY-UHFFFAOYSA-J 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- YZJQPSAZKVXWEZ-UHFFFAOYSA-J tin(4+) tetraformate Chemical compound [Sn+4].[O-]C=O.[O-]C=O.[O-]C=O.[O-]C=O YZJQPSAZKVXWEZ-UHFFFAOYSA-J 0.000 description 1
- FAKFSJNVVCGEEI-UHFFFAOYSA-J tin(4+);disulfate Chemical compound [Sn+4].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O FAKFSJNVVCGEEI-UHFFFAOYSA-J 0.000 description 1
- QUBMWJKTLKIJNN-UHFFFAOYSA-B tin(4+);tetraphosphate Chemical compound [Sn+4].[Sn+4].[Sn+4].[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O.[O-]P([O-])([O-])=O QUBMWJKTLKIJNN-UHFFFAOYSA-B 0.000 description 1
- AECLSPNOPRYXFI-UHFFFAOYSA-J tin(4+);tetrasulfamate Chemical compound [Sn+4].NS([O-])(=O)=O.NS([O-])(=O)=O.NS([O-])(=O)=O.NS([O-])(=O)=O AECLSPNOPRYXFI-UHFFFAOYSA-J 0.000 description 1
- HPGGPRDJHPYFRM-UHFFFAOYSA-J tin(iv) chloride Chemical compound Cl[Sn](Cl)(Cl)Cl HPGGPRDJHPYFRM-UHFFFAOYSA-J 0.000 description 1
- QPBYLOWPSRZOFX-UHFFFAOYSA-J tin(iv) iodide Chemical compound I[Sn](I)(I)I QPBYLOWPSRZOFX-UHFFFAOYSA-J 0.000 description 1
- YJGJRYWNNHUESM-UHFFFAOYSA-J triacetyloxystannyl acetate Chemical compound [Sn+4].CC([O-])=O.CC([O-])=O.CC([O-])=O.CC([O-])=O YJGJRYWNNHUESM-UHFFFAOYSA-J 0.000 description 1
- YQMWDQQWGKVOSQ-UHFFFAOYSA-N trinitrooxystannyl nitrate Chemical compound [Sn+4].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O YQMWDQQWGKVOSQ-UHFFFAOYSA-N 0.000 description 1
- PQGFRBOHUKOXQZ-FSCNPAMSSA-J tris[[(2R,3S,4R,5R)-2,3,4,5,6-pentahydroxyhexanoyl]oxy]stannyl (2R,3S,4R,5R)-2,3,4,5,6-pentahydroxyhexanoate Chemical compound [Sn+4].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O PQGFRBOHUKOXQZ-FSCNPAMSSA-J 0.000 description 1
- QUTYHQJYVDNJJA-UHFFFAOYSA-K trisilver;2-hydroxypropane-1,2,3-tricarboxylate Chemical compound [Ag+].[Ag+].[Ag+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O QUTYHQJYVDNJJA-UHFFFAOYSA-K 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/02—Fillers; Particles; Fibers; Reinforcement materials
- H05K2201/0203—Fillers and particles
- H05K2201/0206—Materials
- H05K2201/0218—Composite particles, i.e. first metal coated with second metal
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- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10613—Details of electrical connections of non-printed components, e.g. special leads
- H05K2201/10621—Components characterised by their electrical contacts
- H05K2201/10734—Ball grid array [BGA]; Bump grid array
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
Abstract
【解決手段】コアとなるCuボールの純度は99.9〜99.995%で、このCuボールに含まれる不純物のうち、Pb及び/又はBiの含有量の合計量が1ppm以上で、真球度が0.95以上のCuボールであり、Cuボールに被覆されるはんだめっき被膜は、Snはんだめっき被膜亦はSnを主成分とする鉛フリーはんだ合金からなるはんだめっき被膜であり、Uが5ppb以下で、Thが5ppb以下の含有量であり、Cuボールとはんだめっき被膜の総合のα線量が0.0200cph/cm2以下であると共に、上記Cu核ボールの表面粗さは0.3μm以下である。
【選択図】なし
Description
近年では放射性元素の含有量を低減した低α線のはんだ材料の開発が行われている。関連文献として例えば特許文献2が挙げられる。
同文献には、CuボールにSnめっきを行うことや、Cuボールおよび電解液が流動した状態で電解めっきを行うことについては一切開示されていない。
また、他の実施例では、Cuボールは、純度が99.9%〜99.995%で、真球度が0.95以上のコアボールが使用される。
Cuボールは、はんだバンプに用いられる際、はんだ付けの温度で溶融しないため、はんだ継手の高さのばらつきを抑えられることから、Cuボールは真球度が高く、直径のバラツキが少ない方が好ましい。
Cuボールは純度が99.9%以上99.995%以下であることが好ましい。不純物を適宜含ませることによって、Cuボールの真球度が高まり、十分な量の結晶核を溶融Cu中に確保することができる。
この際、不純物元素が多いと、この不純物元素が結晶核となって結晶粒の成長が抑制される。球形の溶融Cuは、成長が抑制された微細結晶粒によって真球度が高いCuボールとなる。
Cuボールから放射されるα線量は、0.0200cph/cm2以下が好ましい。この数値は、電子部品の高密度実装においてソフトエラーが問題にならない程度の数値である。
Cuボールに含まれる不純物元素のうち、特にPbおよびまたはBiの含有量は、合計で1ppm以上であるのが好ましい。
Cuボールの真球度が0.95未満であると、Cuボールが不定形状になるため、バンプ形成時に高さが不均一なバンプが形成され、接合不良が発生する可能性が高まる。さらにCuボールへのはんだめっきが不均一になり、Cu核ボールを電極に搭載してリフローを行う際、Cu核ボールが位置ずれを起こしてしまい、セルフアライメント性も悪化することになるからである。したがって真球度は、0.95以上、好ましくは0.990程度がよい。
本発明を構成するCuボールの直径は1〜1000μmであることが好ましい。この範囲にあると、球状のCuボールを安定して製造でき、また、端子間が狭ピッチである場合の接続短絡を抑制することができるからである。
本発明のCu核ボールは、Cuボールの表面にはんだめっき被膜を所定の厚みとなるように被覆して構成される。
はんだめっき被膜の組成は、Snか、Snを主成分とする鉛フリーはんだ合金の合金組成である。合金組成としては落下衝撃特性の観点から、好ましくはSn−3Ag−0.5Cu合金がよい。
UおよびThは放射性元素であり、ソフトエラーを抑制するにはこれらの含有量を抑える必要がある。UおよびThの含有量は、はんだめっき被膜のα線量を0.0200cph/cm2以下とするため、各々5ppb以下にする必要がある。また、現在または将来の高密度実装でのソフトエラーを抑制する観点から、UおよびThの含有量は各々2ppb以下が好ましい。今回使用した測定方法(ICP−MS)による場合には、UおよびThの含有量として示した数値2ppbは測定限界値である。
本発明に係るCu核ボールの表面から放射されるα線量は、0.0200cph/cm2以下である。この数値は、電子部品の高密度実装においてソフトエラーが問題にならない程度のα線量である。
続いて、上述したCu核ボールの製造例を以下に説明する。
(3a)Cuボールについて
(i)材料となるCu材はセラミックのような耐熱性の板(以下、「耐熱板」という。)に置かれ、耐熱板とともに炉中で加熱される。耐熱板には底部が半球状となった多数の円形の溝が設けられている。
上述のようにして作製されたCuボールをめっき液中に浸漬し、めっき液を流動させてめっき被膜を形成する。はんだめっき被膜を形成する方法としては、公知のバレルめっき等の電解めっき法、めっき槽に接続されたポンプがめっき槽中にめっき液に高速乱流を発生させ、めっき液の乱流によりCuボールにめっき被膜を形成する方法、めっき槽に振動板を設けて所定の周波数で振動させることによりめっき液を高速乱流攪拌し、めっき液の乱流によりCuボールにめっき被膜を形成する方法等がある。
(3b-i)Sn−Ag−Cu含有めっき液は、水を主体とする媒体に、スルホン酸類及び金属成分としてSn、Ag及びCuを必須成分として含有している。
めっき槽の容量はCuボールおよびめっき液の総投入量に応じて決定することができる。
式(1)中、wは電解析出量(g)、Iは電流(A)、tは通電時間(秒)、Mは析出する元素の原子量(Snの場合、118.71)、Zは原子価(Snの場合は2価)、Fはファラディ定数(96500クーロン)であり、電気量Q(A・秒)は(I×t)で表される。
雰囲気中で所定時間乾燥することで、本発明に係るCu核ボールが得られる。このはんだめっき被膜処理は、Cuを核としたカラム、ピラーやペレットの形態に応用することもできる。
(4a)Cuボール
真球度が高いCuボールの作製条件を調査した。純度が99.9%のCuペレット、純度が99.995%以下のCuワイヤ、および純度が99.995%を超えるCu板を準備した。各々をるつぼの中に投入した後、るつぼの温度を1200℃に昇温し、45分間加熱処理を行い、るつぼ底部に設けたオリフィスから溶融Cuを滴下し、生成した液滴を冷却してCuボールを造粒した。これにより平均粒径が250μmのCuボールを作製した。作製したCuボールの元素分析結果および真球度を表1に示す。以下に、真球度の測定方法を詳述する。
真球度はCNC画像測定システムで測定した。
装置は、ミツトヨ社製のウルトラクイックビジョン、ULTRA QV350−PROである。真球度とは、500個の各Cuボールの直径を、そのCuボールの長径で割った際に算出される算術平均値であり、値が上限である1.00に近いほど真球に近いことを表す。
α線量の測定にはガスフロー比例計数器のα線測定装置を用いた。測定サンプルは300mm×300mmの平面浅底容器にCuボールを容器の底が見えなくなるまで敷き詰めたものである。この測定サンプルをα線測定装置内に入れ、PR−10ガスフローにて24時間放置した後、α線量を測定した。
元素分析は、UおよびThについては誘導結合プラズマ質量分析(ICP−MS分析)、その他の元素については誘導結合プラズマ発光分光分析(ICP−AES分析)により行った。
試料1のCu核ボールの作製例を以下に示す。
純度99.9%のCuペレットで製造したCuボールについて、以下の条件でSnはんだめっき被膜を形成してCu核ボールを作製した。
撹拌容器にめっき液調整に必要な水の1/3に、54重量%のメタンスルホン酸水溶液の全容を入れ敷水とした。次に、錯化剤であるメルカプタン化合物の一例であるアセチルシステインを入れ溶解確認後、他の錯化剤である芳香族アミノ化合物の一例である2,2’−ジチオジアニリンを入れた。薄水色のゲル状の液体になったら速やかにメタンスルホン酸第一錫を入れた。
試料2のCu核ボールの作製例を以下に示す。
純度99.9%のCuペレットで製造したCuボールについて、膜厚が50μmのSn−Ag−Cuはんだめっき被膜を形成してCu核ボールを作製した。
はんだめっき液は、(Sn−Ag−Cu)めっき液である。
純度99.9%のCuペレットで製造したCuボールについて、溶着法を用いて以下の条件でSnはんだ被膜を形成してCu核ボールを作製した。
表面粗さ用の試料としては、試料1や2で示したCu核ボールを使用できるはもちろんであるが、今回は新たに表面粗さ用の試料を作製した。
(試料1)で用いられたと同様なCuボール(Cn材を使用、直径200μmで、純度は99.9%以上99.995%以下)を用いる。このCuボールに対して下地用のめっき処理を行う。この例では、2μmのNiめっき処理を行った。
このような条件でCu核ボールの算術平均粗さRaとして、任意の10個所の表面粗さを測定し、それらの算術平均を真の算術平均粗さとして使用した。同時に、超音波の照射時間(処理時間)を換えて測定した結果を(表3)として示す。
Claims (7)
- コアとなるCuボールと、該Cuボールの表面を被覆するはんだめっき被膜と備えるCu核ボールであって、
該Cuボールは純度が99.9%以上99.995%以下で、Uが5ppb以下で、Thが5ppb以下の含有量となされ、PbおよびまたはBiの含有量の合計量が1ppm以上となされた、真球度が0.95以上、α線量が0.0200cph/cm2以下のCuボールであり、
前記はんだめっき被膜は、Snはんだめっき被膜またはSnを主成分とする鉛フリーはんだ合金からなるはんだめっき被膜であり、
上記Cu核ボールの算術平均表面粗さは0.3μm以下となされた
ことを特徴とするCu核ボール。 - コアとなるCuボールと、該Cuボールの表面を被覆するはんだめっき被膜と備えるCu核ボールであって、
該Cuボールは純度が99.9%以上99.995%以下で、真球度が0.95以上であり、
前記はんだめっき被膜は、Snはんだめっき被膜またはSnを主成分とする鉛フリーはんだ合金からなるはんだめっき被膜であり、Uが5ppb以下で、Thが5ppb以下の含有量となされ、
Cu核ボールのα線量が0.0200cph/cm2以下であり、
上記Cu核ボールの算術平均表面粗さは0.3μm以下となされた
ことを特徴とするCu核ボール。 - 上記表面粗さは、0.22μm以下である
ことを特徴とする請求項1または2のいずれか1項に記載のCu核ボール。 - 前記Cuボールは、前記はんだめっき被膜で被覆される前に予めNiおよびCoから選択される1元素以上からなるめっき層で被覆されている
ことを特徴とする請求項1〜3のいずれか1項に記載のCu核ボール。 - α線量が0.0200cph/cm2以下である
ことを特徴とする請求項1〜4のいずれか1項に記載のCu核ボール。 - 請求項1〜5のいずれか1項に記載のCu核ボールを用いた
ことを特徴とするはんだペースト。 - 請求項1〜6のいずれか1項に記載のCu核ボールを使用して形成された
ことを特徴とするはんだ継手。
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WO2011114824A1 (ja) * | 2010-03-16 | 2011-09-22 | Jx日鉱日石金属株式会社 | α線量が少ない錫又は錫合金及びその製造方法 |
JP5633776B2 (ja) * | 2010-03-30 | 2014-12-03 | 日立金属株式会社 | 電子部品用複合ボールの製造方法 |
CN102376586B (zh) * | 2010-08-18 | 2016-03-30 | 日立金属株式会社 | 电子器件用复合球的制造方法 |
JP5260620B2 (ja) * | 2010-12-07 | 2013-08-14 | 株式会社神戸製鋼所 | Pcb端子及びその製造方法 |
EP2684970A4 (en) * | 2011-03-07 | 2015-03-04 | Jx Nippon Mining & Metals Corp | COPPER OR COPPER ALLOY HAVING REDUCED RAY EMISSION AND CONNECTING WIRE OBTAINED FROM COPPER OR COPPER ALLOY AS RAW MATERIAL |
US9668358B2 (en) | 2012-12-06 | 2017-05-30 | Senju Metal Industry Co., Ltd. | Cu ball |
EP3012047B1 (en) | 2013-06-19 | 2018-11-21 | Senju Metal Industry Co., Ltd. | Cu-cored solder ball |
US20150122661A1 (en) * | 2013-11-05 | 2015-05-07 | Rohm And Haas Electronic Materials Llc | Plating bath and method |
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2014
- 2014-01-28 JP JP2014013528A patent/JP5590259B1/ja active Active
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2015
- 2015-01-23 EP EP15152403.0A patent/EP2918706B1/en active Active
- 2015-01-26 TW TW104102488A patent/TWI524957B/zh active
- 2015-01-27 KR KR1020150012612A patent/KR20150089957A/ko not_active Application Discontinuation
- 2015-01-27 US US14/606,948 patent/US20150209912A1/en not_active Abandoned
- 2015-01-28 CN CN201610835984.4A patent/CN107097014B/zh active Active
- 2015-01-28 CN CN201510044092.8A patent/CN104801879A/zh active Pending
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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KR20180014217A (ko) * | 2015-06-29 | 2018-02-07 | 센주긴조쿠고교 가부시키가이샤 | 땜납 재료, 땜납 이음 및 땜납 재료의 검사 방법 |
KR101867796B1 (ko) | 2015-06-29 | 2018-06-15 | 센주긴조쿠고교 가부시키가이샤 | 땜납 재료, 땜납 이음 및 땜납 재료의 검사 방법 |
US10888959B2 (en) | 2018-06-12 | 2021-01-12 | Senju Metal Industry Co., Ltd. | Cu core ball, solder joint, solder paste and formed solder |
Also Published As
Publication number | Publication date |
---|---|
CN107097014B (zh) | 2019-07-16 |
US20150209912A1 (en) | 2015-07-30 |
US20170233884A1 (en) | 2017-08-17 |
JP5590259B1 (ja) | 2014-09-17 |
CN107097014A (zh) | 2017-08-29 |
CN104801879A (zh) | 2015-07-29 |
TW201540395A (zh) | 2015-11-01 |
KR20150089957A (ko) | 2015-08-05 |
US10370771B2 (en) | 2019-08-06 |
EP2918706B1 (en) | 2016-11-30 |
EP2918706A1 (en) | 2015-09-16 |
TWI524957B (zh) | 2016-03-11 |
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