JP2015099580A - 位置センサの製法およびそれによって得られた位置センサ - Google Patents

位置センサの製法およびそれによって得られた位置センサ Download PDF

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Publication number
JP2015099580A
JP2015099580A JP2014101372A JP2014101372A JP2015099580A JP 2015099580 A JP2015099580 A JP 2015099580A JP 2014101372 A JP2014101372 A JP 2014101372A JP 2014101372 A JP2014101372 A JP 2014101372A JP 2015099580 A JP2015099580 A JP 2015099580A
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JP
Japan
Prior art keywords
core
layer
forming
photosensitive resin
position sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014101372A
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English (en)
Japanese (ja)
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JP2015099580A5 (cg-RX-API-DMAC7.html
Inventor
裕介 清水
Yusuke Shimizu
裕介 清水
良真 吉岡
Yoshimasa Yoshioka
良真 吉岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2014101372A priority Critical patent/JP2015099580A/ja
Priority to KR1020167005193A priority patent/KR20160074453A/ko
Priority to CN201480051515.2A priority patent/CN105556441A/zh
Priority to PCT/JP2014/069291 priority patent/WO2015056474A1/ja
Priority to US15/024,562 priority patent/US20160238416A1/en
Priority to TW103125709A priority patent/TW201516810A/zh
Publication of JP2015099580A publication Critical patent/JP2015099580A/ja
Publication of JP2015099580A5 publication Critical patent/JP2015099580A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/3537—Optical fibre sensor using a particular arrangement of the optical fibre itself
    • G01D5/3538—Optical fibre sensor using a particular arrangement of the optical fibre itself using a particular type of fiber, e.g. fibre with several cores, PANDA fiber, fiber with an elliptic core or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/042—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means
    • G06F3/0421—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by opto-electronic means by interrupting or reflecting a light beam, e.g. optical touch-screen
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04109—FTIR in optical digitiser, i.e. touch detection by frustrating the total internal reflection within an optical waveguide due to changes of optical properties or deformation at the touch location

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
JP2014101372A 2013-10-17 2014-05-15 位置センサの製法およびそれによって得られた位置センサ Pending JP2015099580A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2014101372A JP2015099580A (ja) 2013-10-17 2014-05-15 位置センサの製法およびそれによって得られた位置センサ
KR1020167005193A KR20160074453A (ko) 2013-10-17 2014-07-22 위치 센서의 제법 및 그에 의해 얻어진 위치 센서
CN201480051515.2A CN105556441A (zh) 2013-10-17 2014-07-22 位置传感器的制造方法及由此得到的位置传感器
PCT/JP2014/069291 WO2015056474A1 (ja) 2013-10-17 2014-07-22 位置センサの製法およびそれによって得られた位置センサ
US15/024,562 US20160238416A1 (en) 2013-10-17 2014-07-22 Position sensor production method, and position sensor produced by the method
TW103125709A TW201516810A (zh) 2013-10-17 2014-07-28 位置感測器之製法及藉由該製法所得之位置感測器

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013216587 2013-10-17
JP2013216587 2013-10-17
JP2014101372A JP2015099580A (ja) 2013-10-17 2014-05-15 位置センサの製法およびそれによって得られた位置センサ

Publications (2)

Publication Number Publication Date
JP2015099580A true JP2015099580A (ja) 2015-05-28
JP2015099580A5 JP2015099580A5 (cg-RX-API-DMAC7.html) 2016-03-24

Family

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JP2014101372A Pending JP2015099580A (ja) 2013-10-17 2014-05-15 位置センサの製法およびそれによって得られた位置センサ

Country Status (6)

Country Link
US (1) US20160238416A1 (cg-RX-API-DMAC7.html)
JP (1) JP2015099580A (cg-RX-API-DMAC7.html)
KR (1) KR20160074453A (cg-RX-API-DMAC7.html)
CN (1) CN105556441A (cg-RX-API-DMAC7.html)
TW (1) TW201516810A (cg-RX-API-DMAC7.html)
WO (1) WO2015056474A1 (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6959731B2 (ja) * 2016-11-30 2021-11-05 日東電工株式会社 光電気混載基板
JP7570006B2 (ja) * 2017-11-09 2024-10-21 パナソニックＩｐマネジメント株式会社 光導波路及びその製造方法
CN111076751B (zh) * 2019-12-30 2025-01-28 苏州德睿电力科技有限公司 一种基于ald镀膜的高灵敏度光波导传感器及其制备方法

Family Cites Families (21)

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JPH08234895A (ja) 1995-02-27 1996-09-13 Canon Inc 座標入力方法及びその装置
JP2001255425A (ja) * 2000-03-13 2001-09-21 Oki Electric Ind Co Ltd 光導波路
JP4014519B2 (ja) * 2002-07-17 2007-11-28 日東電工株式会社 ポリマー光導波路の製造方法
JP4667904B2 (ja) 2005-02-22 2011-04-13 株式会社 日立ディスプレイズ 表示装置
US20080106527A1 (en) * 2006-11-06 2008-05-08 Rpo Pty Limited Waveguide Configurations for Minimising Substrate Area
JP2008170524A (ja) * 2007-01-09 2008-07-24 Nitto Denko Corp タッチパネル用光導波路
JP4962266B2 (ja) * 2007-10-23 2012-06-27 富士ゼロックス株式会社 光導波路の製造方法
US7885211B2 (en) * 2007-10-26 2011-02-08 Texas Instruments Incorporated Selective rank CQI and PMI feedback in wireless networks
JP5101325B2 (ja) * 2008-02-07 2012-12-19 日東電工株式会社 タッチパネル用光導波路の製造方法
JP5231151B2 (ja) 2008-10-01 2013-07-10 ルネサスエレクトロニクス株式会社 デジタルアンプシステム
JP2010128089A (ja) * 2008-11-26 2010-06-10 Nitto Denko Corp 光導波路および光学式タッチパネル
JP5239835B2 (ja) * 2008-12-24 2013-07-17 富士ゼロックス株式会社 光導波路及び光導波路型タッチパネル
US8384682B2 (en) * 2009-01-08 2013-02-26 Industrial Technology Research Institute Optical interactive panel and display system with optical interactive panel
JP2010211382A (ja) * 2009-03-09 2010-09-24 Nitto Denko Corp 光導波路および光学式タッチパネル
JP5820233B2 (ja) * 2011-01-07 2015-11-24 日東電工株式会社 光導波路の製法
JP5031922B1 (ja) * 2011-03-14 2012-09-26 日東電工株式会社 入力デバイス
KR20120139264A (ko) * 2011-06-17 2012-12-27 한국전자통신연구원 광도파로를 이용하여 압력을 감지하기 위한 장치 및 그 방법
CN103858182B (zh) * 2012-03-23 2015-06-03 积水纳米涂层科技有限公司 透光性导电性膜、其制造方法及其用途
JP5513654B1 (ja) * 2013-03-08 2014-06-04 日東電工株式会社 無線送信機能付き電子下敷き
JP5513655B1 (ja) * 2013-03-08 2014-06-04 日東電工株式会社 情報管理システム
JP6146738B2 (ja) * 2013-04-27 2017-06-14 株式会社オプトロジック 撮像レンズ

Also Published As

Publication number Publication date
US20160238416A1 (en) 2016-08-18
WO2015056474A1 (ja) 2015-04-23
KR20160074453A (ko) 2016-06-28
CN105556441A (zh) 2016-05-04
TW201516810A (zh) 2015-05-01

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