JP2015074228A - 減衰ポケットを有する多層電鋳ノズルプレート - Google Patents
減衰ポケットを有する多層電鋳ノズルプレート Download PDFInfo
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- 239000002184 metal Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 25
- 238000005323 electroforming Methods 0.000 claims description 21
- 229920002120 photoresistant polymer Polymers 0.000 claims description 14
- 239000000853 adhesive Substances 0.000 claims description 12
- 230000001070 adhesive effect Effects 0.000 claims description 12
- 229920001169 thermoplastic Polymers 0.000 claims description 5
- 239000004416 thermosoftening plastic Substances 0.000 claims description 5
- 239000010410 layer Substances 0.000 description 53
- 239000000976 ink Substances 0.000 description 50
- 229920000642 polymer Polymers 0.000 description 19
- 238000007639 printing Methods 0.000 description 12
- 238000000206 photolithography Methods 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000010926 purge Methods 0.000 description 8
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- 239000007787 solid Substances 0.000 description 5
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- 238000005516 engineering process Methods 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229910000990 Ni alloy Inorganic materials 0.000 description 3
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- 150000002739 metals Chemical class 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
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- 229920005989 resin Polymers 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
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- B41J2/01—Ink jet
- B41J2/015—Ink jet characterised by the jet generation process
- B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
- B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
- B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
- B41J2/04521—Control methods or devices therefor, e.g. driver circuits, control circuits reducing number of signal lines needed
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- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
【解決手段】インクジェット印刷ヘッド10は、ノズル16、ノズルプレート18における凹部30、及び、凹部を被覆して印刷ヘッドの使用中に空気又は他の気体によって満たされることができる密封されたポケット38を形成する適合層36を含むノズルプレートを含む。ノズルからのインク44の吐出中における圧電素子28の作動中に、密封されたポケットは、圧電素子によって発生された音響エネルギを減衰させ、それにより、音響エネルギによる隣接するノズルへのクロストークを低減する。
【選択図】図2
Description
Claims (10)
- 内部にインクチャンバを備える印刷ヘッド・マニホールドと、
外側表面、
外側表面の反対側の内側表面、及び、
内側表面内の凹部を備え、凹部が外側表面と内側表面との間の高さにおける中間面を備える
ノズルプレートと、
凹部を被覆してノズルプレート内に密封されたポケットを形成する、ノズルプレートの内側表面に取り付けられた適合層と
を備えるインクジェット印刷ヘッド。 - さらに、密封されたポケット内に気体を、インクチャンバ内にインクを備える、
請求項1に記載のインクジェット印刷ヘッド。 - インクチャンバ内のインクが、適合層によって密封されたポケット内の気体から分離される、
請求項2に記載のインクジェット印刷ヘッド。 - 適合層が、印刷ヘッド・マニホールドにノズルプレートを物理的に取り付ける接着剤である、
請求項1に記載のインクジェット印刷ヘッド。 - さらに、密封されたポケット内に気体を、インクチャンバ内にインクを備える、
請求項4に記載のインクジェット印刷ヘッド。 - 外側表面と、外側表面の反対側の内側表面とを備えるノズルプレートを形成することと、
内側表面内に外側表面と内側表面との間の高さにおいて中間面を備える凹部を形成することと、
凹部を被覆してノズルプレート内に密封されたポケットを形成する、ノズルプレートの内側表面に適合層を取り付けることと
を備える、インクジェット印刷ヘッドを形成する方法。 - さらに、
フォトリソグラフィプロセスを使用してマンドレル上に第1のパターニングされたフォトレジスト層を形成することであって、第1のパターニングされたフォトレジスト層がマンドレルの第1の部分を被覆し且つマンドレルの第2の部分を露出させることと、
マンドレル上に第1のパターニングされた電鋳金属層を電鋳することであって、第1のパターニングされたフォトレジスト層が第1の電鋳金属層内に複数のノズルを画定し、第1の電鋳金属層が外側表面を備えることと、
フォトリソグラフィプロセスを使用してマンドレル上に及び第1のパターニングされた電鋳金属層上に第2のパターニングされたフォトレジスト層を形成することであって、第2のパターニングされたフォトレジスト層が第1のパターニングされた電鋳金属層の第1の部分を被覆し且つ第1のパターニングされた電鋳金属層の第2の部分を露出させることと、
第1のパターニングされた電鋳金属層上に第2のパターニングされた電鋳金属層を電鋳することであって、第2のパターニングされたフォトレジスト層が凹部を画定し、第2のパターニングされた電鋳金属層が内側表面を備えることと
を備える、
請求項6に記載の方法。 - 適合層が熱可塑性接着剤であり、本方法が、さらに、接着剤としての適合層を使用して印刷ヘッド・マニホールドにノズルプレートを取り付けることを備える、
請求項6に記載の方法。 - マニホールドがインク流路を備え、本方法が、さらに、インクによってインク流路を満たすことを備え、熱可塑性接着剤が、密封されたポケット内の気体からインク流路内のインクを分離する、
請求項8に記載の方法。 - さらに、
印刷ヘッド・マニホールドにダイアフラムを取り付けることと、
ダイアフラムに圧電素子を取り付けることと、
ノズルからインクを吐出するように圧電素子を作動させることとを備え、熱可塑性接着剤がノズルからのインクの吐出中に音響エネルギを減衰させるように構成されている、
請求項9に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/048,196 US9168747B2 (en) | 2013-10-08 | 2013-10-08 | Multi-layer electroformed nozzle plate with attenuation pockets |
US14/048,196 | 2013-10-08 |
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Publication Number | Publication Date |
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JP2015074228A true JP2015074228A (ja) | 2015-04-20 |
JP6483384B2 JP6483384B2 (ja) | 2019-03-13 |
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Application Number | Title | Priority Date | Filing Date |
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JP2014192418A Active JP6483384B2 (ja) | 2013-10-08 | 2014-09-22 | 減衰ポケットを有する多層電鋳ノズルプレート |
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US (1) | US9168747B2 (ja) |
JP (1) | JP6483384B2 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2020523221A (ja) * | 2017-06-09 | 2020-08-06 | フジフィルム ディマティックス, インコーポレイテッド | クロストークを減少させた流体吐出装置 |
JP2020179618A (ja) * | 2019-04-26 | 2020-11-05 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
JP2021154748A (ja) * | 2015-04-24 | 2021-10-07 | フジフィルム ディマティックス, インコーポレイテッド | 低減されたクロストークを有する流体吐出デバイス |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10569544B2 (en) | 2016-07-12 | 2020-02-25 | Hewlett-Packard Development Company, L.P. | Multi-layered nozzle fluid ejection device |
WO2018176102A1 (en) * | 2017-03-31 | 2018-10-04 | Vaxxas Pty Limited | Device and method for coating surfaces |
JP7071159B2 (ja) * | 2018-02-28 | 2022-05-18 | キヤノン株式会社 | 液体吐出ヘッド用基板 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07329297A (ja) * | 1994-06-03 | 1995-12-19 | Seiko Epson Corp | 積層型インクジェット記録ヘッド |
JPH07329304A (ja) * | 1994-04-11 | 1995-12-19 | Fujitsu Ltd | インクジェット記録装置、その記録ヘッド用ノズル板およびそのノズル板の製造方法 |
JPH08238769A (ja) * | 1995-01-13 | 1996-09-17 | Tektronix Inc | インク・ジェット・プリント・ヘッド |
JPH08238768A (ja) * | 1995-01-11 | 1996-09-17 | Tektronix Inc | ドット・サイズが変調されたインク・ジェット・プリント方法及び装置 |
JPH09239978A (ja) * | 1996-03-07 | 1997-09-16 | Ricoh Co Ltd | インクジェットヘッド |
JP2009234096A (ja) * | 2008-03-27 | 2009-10-15 | Brother Ind Ltd | 液滴吐出ヘッド及びインクジェットヘッド |
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US20100045740A1 (en) | 2008-08-19 | 2010-02-25 | Xerox Corporation | Fluid dispensing subassembly with compliant aperture plate |
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JP2021154748A (ja) * | 2015-04-24 | 2021-10-07 | フジフィルム ディマティックス, インコーポレイテッド | 低減されたクロストークを有する流体吐出デバイス |
US11498330B2 (en) | 2015-04-24 | 2022-11-15 | Fujifilm Dimatix, Inc. | Fluid ejection devices with reduced crosstalk |
US11865837B2 (en) | 2015-04-24 | 2024-01-09 | Fujifilm Dimatix, Inc. | Fluid ejection devices with reduced crosstalk |
JP2020523221A (ja) * | 2017-06-09 | 2020-08-06 | フジフィルム ディマティックス, インコーポレイテッド | クロストークを減少させた流体吐出装置 |
JP2020179618A (ja) * | 2019-04-26 | 2020-11-05 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
JP7331441B2 (ja) | 2019-04-26 | 2023-08-23 | セイコーエプソン株式会社 | 液体噴射ヘッドおよび液体噴射装置 |
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US9168747B2 (en) | 2015-10-27 |
US20150097897A1 (en) | 2015-04-09 |
JP6483384B2 (ja) | 2019-03-13 |
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