JP2015069975A - 被加工物の加工方法 - Google Patents
被加工物の加工方法 Download PDFInfo
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- JP2015069975A JP2015069975A JP2013199914A JP2013199914A JP2015069975A JP 2015069975 A JP2015069975 A JP 2015069975A JP 2013199914 A JP2013199914 A JP 2013199914A JP 2013199914 A JP2013199914 A JP 2013199914A JP 2015069975 A JP2015069975 A JP 2015069975A
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- 238000003672 processing method Methods 0.000 title abstract description 15
- 230000001678 irradiating effect Effects 0.000 claims abstract description 14
- 238000010521 absorption reaction Methods 0.000 claims description 23
- 230000015572 biosynthetic process Effects 0.000 abstract description 4
- 235000012431 wafers Nutrition 0.000 description 19
- 238000000034 method Methods 0.000 description 10
- 230000001681 protective effect Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000002835 absorbance Methods 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
- B23K2103/56—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26 semiconducting
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- High Energy & Nuclear Physics (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electromagnetism (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Laser Beam Processing (AREA)
- Dicing (AREA)
Abstract
【解決手段】被加工物(11)に対して透過性を有する波長のレーザービーム(L1)を照射して被加工物の内部に改質層(25)を形成する改質層形成ステップと、改質層形成ステップを実施した後、被加工物の吸収端の近傍で吸収側の波長のレーザービーム(25)を改質層に沿って照射して改質層を起点に被加工物を分割する分割ステップと、を備える構成とした。
【選択図】図3
Description
11a 表面
11b 裏面
11c 外周
13 デバイス領域
15 外周余剰領域
17 分割予定ライン(ストリート)
19 デバイス
21 保護テープ
21a 表面
21b 裏面
23 フレーム
25 改質層
27 クラック
2 レーザー加工装置
4 保持テーブル
4a 保持面
6 クランプ
8 第1のレーザー加工ヘッド
10 第2のレーザー加工ヘッド
L1,L2 レーザービーム
Claims (1)
- 被加工物に対して透過性を有する波長のレーザービームを照射して被加工物の内部に改質層を形成する改質層形成ステップと、
該改質層形成ステップを実施した後、被加工物の吸収端の近傍で吸収側の波長のレーザービームを該改質層に沿って照射して該改質層を起点に被加工物を分割する分割ステップと、を備えたことを特徴とする被加工物の加工方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013199914A JP2015069975A (ja) | 2013-09-26 | 2013-09-26 | 被加工物の加工方法 |
DE201410218759 DE102014218759A1 (de) | 2013-09-26 | 2014-09-18 | Bearbeitungsverfahren für ein Werkstück |
FR1459022A FR3010925B1 (fr) | 2013-09-26 | 2014-09-24 | Procede de traitement d'une piece |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013199914A JP2015069975A (ja) | 2013-09-26 | 2013-09-26 | 被加工物の加工方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2015069975A true JP2015069975A (ja) | 2015-04-13 |
Family
ID=52623827
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013199914A Pending JP2015069975A (ja) | 2013-09-26 | 2013-09-26 | 被加工物の加工方法 |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2015069975A (ja) |
DE (1) | DE102014218759A1 (ja) |
FR (1) | FR3010925B1 (ja) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106312337A (zh) * | 2016-09-19 | 2017-01-11 | 武汉帝尔激光科技股份有限公司 | 一种晶硅太阳能电池片激光切半机 |
JP2017022246A (ja) * | 2015-07-09 | 2017-01-26 | 株式会社ディスコ | ウェーハの加工方法 |
JP2018206943A (ja) * | 2017-06-05 | 2018-12-27 | 株式会社ディスコ | チップの製造方法 |
JP2018206945A (ja) * | 2017-06-05 | 2018-12-27 | 株式会社ディスコ | チップの製造方法 |
JP2018206941A (ja) * | 2017-06-05 | 2018-12-27 | 株式会社ディスコ | チップの製造方法 |
JP2019040914A (ja) * | 2017-08-22 | 2019-03-14 | 株式会社ディスコ | チップの製造方法 |
JP2019040915A (ja) * | 2017-08-22 | 2019-03-14 | 株式会社ディスコ | チップの製造方法 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102018003675A1 (de) * | 2018-05-04 | 2019-11-07 | Siltectra Gmbh | Verfahren zum Abtrennen von Festkörperschichten von Kompositstrukturen aus SiC und einer metallischen Beschichtung oder elektrischen Bauteilen |
JP7370881B2 (ja) * | 2020-01-24 | 2023-10-30 | 株式会社ディスコ | ウエーハ加工方法、及びウエーハ加工装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006012902A (ja) * | 2004-06-22 | 2006-01-12 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2011183434A (ja) * | 2010-03-09 | 2011-09-22 | Mitsuboshi Diamond Industrial Co Ltd | レーザ加工方法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003088975A (ja) * | 2001-09-12 | 2003-03-25 | Hamamatsu Photonics Kk | レーザ加工方法 |
JP2005142303A (ja) * | 2003-11-05 | 2005-06-02 | Disco Abrasive Syst Ltd | シリコンウエーハの分割方法および分割装置 |
JP2006229021A (ja) | 2005-02-18 | 2006-08-31 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2011156582A (ja) * | 2010-02-03 | 2011-08-18 | Disco Abrasive Syst Ltd | Co2レーザによる分割方法 |
JP2011165766A (ja) * | 2010-02-05 | 2011-08-25 | Disco Abrasive Syst Ltd | 光デバイスウエーハの加工方法 |
US10239160B2 (en) * | 2011-09-21 | 2019-03-26 | Coherent, Inc. | Systems and processes that singulate materials |
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2013
- 2013-09-26 JP JP2013199914A patent/JP2015069975A/ja active Pending
-
2014
- 2014-09-18 DE DE201410218759 patent/DE102014218759A1/de active Pending
- 2014-09-24 FR FR1459022A patent/FR3010925B1/fr active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006012902A (ja) * | 2004-06-22 | 2006-01-12 | Disco Abrasive Syst Ltd | ウエーハの加工方法 |
JP2011183434A (ja) * | 2010-03-09 | 2011-09-22 | Mitsuboshi Diamond Industrial Co Ltd | レーザ加工方法 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2017022246A (ja) * | 2015-07-09 | 2017-01-26 | 株式会社ディスコ | ウェーハの加工方法 |
CN106312337A (zh) * | 2016-09-19 | 2017-01-11 | 武汉帝尔激光科技股份有限公司 | 一种晶硅太阳能电池片激光切半机 |
JP2018206943A (ja) * | 2017-06-05 | 2018-12-27 | 株式会社ディスコ | チップの製造方法 |
JP2018206945A (ja) * | 2017-06-05 | 2018-12-27 | 株式会社ディスコ | チップの製造方法 |
JP2018206941A (ja) * | 2017-06-05 | 2018-12-27 | 株式会社ディスコ | チップの製造方法 |
JP2019040914A (ja) * | 2017-08-22 | 2019-03-14 | 株式会社ディスコ | チップの製造方法 |
JP2019040915A (ja) * | 2017-08-22 | 2019-03-14 | 株式会社ディスコ | チップの製造方法 |
JP7031968B2 (ja) | 2017-08-22 | 2022-03-08 | 株式会社ディスコ | チップの製造方法 |
JP7031967B2 (ja) | 2017-08-22 | 2022-03-08 | 株式会社ディスコ | チップの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
FR3010925A1 (fr) | 2015-03-27 |
DE102014218759A1 (de) | 2015-03-26 |
FR3010925B1 (fr) | 2018-09-07 |
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