JP2015038188A5 - - Google Patents
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- Publication number
- JP2015038188A5 JP2015038188A5 JP2014118092A JP2014118092A JP2015038188A5 JP 2015038188 A5 JP2015038188 A5 JP 2015038188A5 JP 2014118092 A JP2014118092 A JP 2014118092A JP 2014118092 A JP2014118092 A JP 2014118092A JP 2015038188 A5 JP2015038188 A5 JP 2015038188A5
- Authority
- JP
- Japan
- Prior art keywords
- composition
- manufacturing
- compound
- silicon
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000004519 manufacturing process Methods 0.000 claims 18
- 150000001875 compounds Chemical class 0.000 claims 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 6
- 125000004430 oxygen atom Chemical group O* 0.000 claims 5
- 239000000758 substrate Substances 0.000 claims 5
- 239000002346 layers by function Substances 0.000 claims 4
- 229910052710 silicon Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 230000002378 acidificating effect Effects 0.000 claims 2
- 229920000642 polymer Polymers 0.000 claims 2
- 239000006087 Silane Coupling Agent Substances 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052799 carbon Inorganic materials 0.000 claims 1
- 125000004432 carbon atom Chemical group C* 0.000 claims 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000010703 silicon Substances 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361832086P | 2013-06-06 | 2013-06-06 | |
| US61/832,086 | 2013-06-06 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015038188A JP2015038188A (ja) | 2015-02-26 |
| JP2015038188A5 true JP2015038188A5 (enExample) | 2017-07-06 |
| JP6443850B2 JP6443850B2 (ja) | 2018-12-26 |
Family
ID=52004713
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014118092A Active JP6443850B2 (ja) | 2013-06-06 | 2014-06-06 | ナノインプリント用組成物、部材の製造方法及びデバイスの製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US9240565B2 (enExample) |
| JP (1) | JP6443850B2 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016529330A (ja) | 2013-06-27 | 2016-09-23 | 東洋合成工業株式会社 | 化学種の発生を向上させるための試剤 |
| US10031416B2 (en) | 2013-08-07 | 2018-07-24 | Toyo Gosei Co., Ltd. | Reagent for enhancing generation of chemical species |
| JP2015098471A (ja) | 2013-11-18 | 2015-05-28 | 東洋合成工業株式会社 | 化学種発生向上試剤 |
| JP6504653B2 (ja) | 2014-03-31 | 2019-04-24 | 東洋合成工業株式会社 | 組成物及び部品の製造方法 |
| JP6797529B2 (ja) | 2015-01-21 | 2020-12-09 | 東洋合成工業株式会社 | 光学部材の製造方法及びそれに用いられる組成物 |
| US10213943B2 (en) | 2015-09-11 | 2019-02-26 | Toyo Gosei Co., Ltd. | Composition |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2601254B2 (ja) * | 1995-03-23 | 1997-04-16 | 株式会社クラレ | 歯科用接着性組成物 |
| JP3941262B2 (ja) * | 1998-10-06 | 2007-07-04 | 株式会社日立製作所 | 熱硬化性樹脂材料およびその製造方法 |
| JP2002012796A (ja) * | 2000-06-27 | 2002-01-15 | Toagosei Co Ltd | 被覆用樹脂組成物及びこれを被覆して成るフォトマスク |
| JP4217886B2 (ja) * | 2003-06-25 | 2009-02-04 | Ｊｓｒ株式会社 | 感放射線性屈折率変化性組成物、パターン形成法および光学材料 |
| JP5607287B2 (ja) * | 2007-05-16 | 2014-10-15 | アッディソン クレアル ワベ， エルエルシー | 情報層の光複製用感光性樹脂 |
| WO2011087008A1 (ja) * | 2010-01-14 | 2011-07-21 | 三菱レイヨン株式会社 | 硬化性樹脂組成物、その硬化物からなる光学部材 |
| JP5546893B2 (ja) * | 2010-02-16 | 2014-07-09 | 東京エレクトロン株式会社 | インプリント方法 |
| US20110245371A1 (en) * | 2010-03-31 | 2011-10-06 | Claude Schweitzer | Pneumatic tire with rubber component containing alkylalkoxysilane and silicone resin |
| JP2014074158A (ja) * | 2012-09-11 | 2014-04-24 | Nippon Synthetic Chem Ind Co Ltd:The | 活性エネルギー線硬化性樹脂組成物およびこれを用いてなるコーティング剤組成物 |
-
2014
- 2014-06-05 US US14/297,488 patent/US9240565B2/en active Active
- 2014-06-06 JP JP2014118092A patent/JP6443850B2/ja active Active
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