JP2015032827A - 基板処理装置及び基板処理方法 - Google Patents
基板処理装置及び基板処理方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 323
- 238000003672 processing method Methods 0.000 title claims abstract description 11
- 238000000034 method Methods 0.000 claims abstract description 140
- 230000008569 process Effects 0.000 claims abstract description 135
- 238000004140 cleaning Methods 0.000 claims abstract description 118
- 239000012530 fluid Substances 0.000 claims description 112
- 229910000679 solder Inorganic materials 0.000 claims description 26
- 230000032258 transport Effects 0.000 claims description 18
- 230000001174 ascending effect Effects 0.000 claims description 13
- 238000005406 washing Methods 0.000 claims description 5
- 238000001035 drying Methods 0.000 claims description 3
- 238000004904 shortening Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 description 13
- 238000003860 storage Methods 0.000 description 11
- 239000012535 impurity Substances 0.000 description 6
- 230000004907 flux Effects 0.000 description 5
- 230000001105 regulatory effect Effects 0.000 description 5
- 238000007789 sealing Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
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Abstract
【解決手段】本発明の一実施形態による基板処理装置は、基板を収納するキャリヤーを備えるロードポートと、前記基板にリフロ工程を遂行する処理空間を有する1つ又は複数個の工程チャンバーを含む基板処理モジュールと、前記基板を洗浄する洗浄工程を遂行する洗浄ユニットと、前記ロードポートと前記基板処理モジュールとの間に位置する基板搬送モジュールと、を含み、前記基板搬送モジュールは、前記基板を前記ロードポート、前記基板処理モジュール、前記洗浄ユニットの間に搬送する搬送ロボットを有する。
【選択図】図1
Description
前記リフロ段階は、前記基板が前記第1工程チャンバーから前記第5工程チャンバーまで順に移動されながら、進行され、前記第1工程チャンバーから前記第4工程チャンバーまでは前記基板と前記ソルダバンプが加熱され、前記第5工程チャンバーでは前記基板と前記ソルダバンプが加熱されるか、或いは冷却され得る。
100 ロードポート、
110 キャリヤー、
200 基板搬送モジュール、
210 搬送ロボット、
300 基板処理モジュール、
301 リフロ処理ユニット、
310 工程チャンバー、
311 上部ハウジング、
312 下部ハウジング、
320 支持部材、
323 ヒーター、
330 排気部材、
340 工程流体供給部材(ガス供給部材)、
370 昇下降部材、
381 回転板、
382 駆動器、
384 基板ホール、
390 支持プレート、
400 洗浄ユニット、
410 洗浄チャンバー、
430 基板支持部材(支持部材)、
431 真空チャック、
433 駆動部、
450 第1流体供給部材(流体供給部材)、
456 圧力調節部、
470 第2流体供給部材(流体供給部材)。
Claims (25)
- 基板を収納するキャリヤーを備えるロードポートと、
前記基板にリフロ工程を遂行する処理空間を有する1つ又は複数個の工程チャンバーを含む基板処理モジュールと、
前記基板を洗浄する洗浄工程を遂行する洗浄ユニットと、
前記ロードポートと前記基板処理モジュールとの間に位置する基板搬送モジュールと、を含み、
前記基板搬送モジュールは、前記基板を前記ロードポート、前記基板処理モジュール、前記洗浄ユニットの間に搬送する搬送ロボットを有する基板処理装置。 - 前記洗浄ユニットは、
前記洗浄工程が遂行される空間を提供する洗浄チャンバーと、
前記洗浄チャンバーの内部に位置し、前記基板を支持する基板支持部材と、
前記基板へ洗浄流体を噴射する流体供給部材と、を含む請求項1に記載の基板処理装置。 - 前記基板支持部材は、前記基板を真空吸着するように真空圧を提供する真空チャックを含む請求項2に記載の基板処理装置。
- 前記洗浄ユニットは、前記真空チャックを回転させる駆動部をさらに含む請求項3に記載の基板処理装置。
- 前記流体供給部材は、
前記基板を洗浄する第1流体を前記基板に供給する第1流体供給部材と、
前記基板を乾燥する第2流体を前記基板に供給する第2流体供給部材と、を含む請求項2〜4のいずれか1つに記載の基板処理装置。 - 前記流体供給部材は、
前記第1流体と前記第2流体とが前記基板に供給されるときの圧力を調節する圧力調節部をさらに含む請求項5に記載の基板処理装置。 - 前記洗浄ユニットが複数個提供される請求項1〜6のいずれか1つに記載の基板処理装置。
- 前記洗浄ユニットは、前記基板処理モジュールに設けられ、
前記洗浄ユニットの一側面が前記基板搬送モジュールと接触する請求項1〜7のいずれか1つに記載の基板処理装置。 - 前記ロードポート、前記基板搬送モジュール、前記基板処理モジュールは、第1方向に沿って順に配列され、
前記複数個の前記洗浄ユニットは、前記第1方向と垂直になる第2方向に互に離隔して配置される請求項7または請求項8に記載の基板処理装置。 - 前記工程チャンバーは、
下部ハウジングと、
前記下部ハウジングと対向するように位置する上部ハウジングと、を含み、
前記基板処理モジュールは、
前記基板が固定される基板ホールが1つ又は複数個提供され、前記上部ハウジングと前記下部ハウジングとの間に位置する回転板と、
前記回転板を回転させる駆動器と、
前記下部ハウジングを昇下降させることによって、前記工程チャンバーを開閉する昇下降部材と、をさらに含む請求項1〜9のいずれか1つに記載の基板処理装置。 - 前記基板ホールは、互に一定な間隔を有し、環形のリング形状に配置され、
前記回転板は、前記基板ホールの中心を基準に回転する請求項10に記載の基板処理装置。 - 前記複数個の前記工程チャンバーは、上部から見る時、前記複数個の前記基板ホールと重なる位置に提供される請求項11に記載の基板処理装置。
- 前記基板処理モジュールは、
前記処理空間に工程流体を提供する工程流体供給部材と、
前記処理空間を排気する排気部材と、
前記処理空間に位置し、前記基板を支持する支持部材と、
前記支持部材を加熱するヒーターと、をさらに含む請求項10〜12のいずれか1つに記載の基板処理装置。 - 前記基板ホールは、第1乃至第6基板ホールを含み、
前記工程チャンバーは、第1乃至第5工程チャンバーを含み、
前記基板処理モジュールは、第1乃至第5基板ホールが各々第1乃至第5工程チャンバーと対応する位置に提供され、前記回転板が回転して前記第6基板ホールが前記第1工程チャンバーと対応する位置に移動されれば、前記第2乃至第5基板ホールが各々前記第2乃至第5工程チャンバーと対応する位置に移動されるように提供される請求項12または請求項13に記載の基板処理装置。 - 基板を収納するキャリヤーを備えるロードポートと、
前記基板にリフロ工程を遂行する1つ又は複数個のリフロ処理ユニットを含む基板処理モジュールと、
前記基板を洗浄する洗浄工程を遂行する洗浄ユニットと、
前記ロードポートと前記基板処理モジュールとの間に位置する基板搬送モジュールと、を含み、
前記基板搬送モジュールは、前記基板を前記ロードポート、前記基板処理モジュール、前記洗浄ユニットとの間に搬送する搬送ロボットを有する基板処理装置。 - 前記洗浄ユニットは、
前記洗浄工程が遂行される空間を提供する洗浄チャンバーと、
前記洗浄チャンバーの内部に位置するとともに前記基板を支持し、前記基板を真空吸着するように真空圧を提供する真空チャックを含む支持部材と、
前記真空チャックを回転させる駆動部と、
前記基板に洗浄流体を噴射する流体供給部材と、を含む請求項15に記載の基板処理装置。 - 前記流体供給部材は、
前記基板を洗浄する第1流体を前記基板に供給する第1流体供給部材と、
前記基板を乾燥する第2流体を前記基板に供給する第2流体供給部材と、をさらに含む請求項16に記載の基板処理装置。 - 前記洗浄ユニットが複数個提供され、
前記ロードポート、前記基板搬送モジュール、前記基板処理モジュールは、第1方向に沿って順に配列され、
前記複数個の前記洗浄ユニットは、前記基板処理モジュールに設けられ、当該洗浄ユニットの一側面が前記基板搬送モジュールと接触し、さらに、前記複数個の前記洗浄ユニットは、前記第1方向と垂直になる第2方向に互に離隔して配置される請求項15〜17のいずれか1つに記載の基板処理装置。 - 前記リフロ処理ユニットは、
内部に処理空間を有する工程チャンバーと、
前記処理空間に位置する支持部材と、
前記工程チャンバー上面と連結され、前記処理空間を排気する排気部材と、
前記処理空間に工程ガスを提供するガス供給部材と、を含み、
前記工程チャンバーは、
下部ハウジングと、
前記下部ハウジングと対向するように位置する上部ハウジングと、を含み、
前記基板処理モジュールは、
前記基板が固定されるホールが1つ又は複数個提供され、前記上部ハウジングと前記下部ハウジングとの間に位置する回転板と、
前記回転板を回転させる駆動器と、
前記下部ハウジングを昇下降させることによって、前記工程チャンバーを開閉する昇下降部材と、をさらに含む請求項15〜18のいずれか1つに記載の基板処理装置。 - 前記ホールは、互に一定な間隔を有し、環形のリング形状に配置され、
前記回転板は、前記ホールの中心を基準に回転する請求項19に記載の基板処理装置。 - 前記複数個の前記工程チャンバーは、上部から見る時、前記複数個の前記ホールと重なる位置に提供される請求項20に記載の基板処理装置。
- 請求項1に記載された基板処理装置を利用して前記基板にリフロ処理をする方法において、
ソルダバンプが付着した前記基板が前記ロードポートから前記基板搬送モジュールにローディングされるローディング段階と、
前記基板と前記ソルダバンプとが前記洗浄ユニットで洗浄される洗浄段階と、
前記基板が前記基板処理モジュールでリフロ処理されるリフロ段階と、
前記基板が前記ロードポートに搬送されるアンローディング段階と、を含む基板処理方法。 - 前記洗浄段階は、
前記基板と前記ソルダバンプとが前記リフロ段階の前に洗浄される1次洗浄段階と、
前記基板と前記ソルダバンプとが前記リフロ段階の後に洗浄される2次洗浄段階と、を含む請求項22に記載の基板処理方法。 - 前記洗浄段階は、
前記基板を洗浄する第1流体が前記基板に供給される第1洗浄段階と、
前記基板を乾燥する第2流体が前記基板に供給される第2洗浄段階と、を含む請求項22に記載の基板処理方法。 - 前記工程チャンバーは、第1乃至第5工程チャンバーを含み、
前記リフロ段階は、前記基板が前記第1工程チャンバーから前記第5工程チャンバーまで順に移動されながら、進行され、
前記第1工程チャンバーから前記第4工程チャンバーまでは前記基板と前記ソルダバンプが加熱され、
前記第5工程チャンバーでは前記基板と前記ソルダバンプが加熱されるか、或いは冷却される請求項22〜24のいずれか1つに記載の基板処理方法。
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JP2016122227A (ja) * | 2014-12-24 | 2016-07-07 | 株式会社東芝 | メモリシステムおよび情報処理システム |
KR101792771B1 (ko) * | 2016-06-16 | 2017-11-20 | (주)브이앤아이솔루션 | 기판처리장치 |
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KR102099105B1 (ko) * | 2018-07-18 | 2020-05-15 | 세메스 주식회사 | 기판 처리 방법 및 기판 처리 장치 |
KR102081706B1 (ko) * | 2018-07-18 | 2020-02-27 | 세메스 주식회사 | 기판 처리 방법 및 기판 처리 장치 |
KR20210058962A (ko) * | 2018-09-28 | 2021-05-24 | 보스턴 프로세스 테크놀로지스, 아이엔씨. | 다중 모듈 칩 제조 장치 |
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