JP2015029088A5 - - Google Patents

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Publication number
JP2015029088A5
JP2015029088A5 JP2014132168A JP2014132168A JP2015029088A5 JP 2015029088 A5 JP2015029088 A5 JP 2015029088A5 JP 2014132168 A JP2014132168 A JP 2014132168A JP 2014132168 A JP2014132168 A JP 2014132168A JP 2015029088 A5 JP2015029088 A5 JP 2015029088A5
Authority
JP
Japan
Prior art keywords
ring
application example
base ring
clamp
elastomer band
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014132168A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015029088A (ja
Filing date
Publication date
Priority claimed from US13/930,659 external-priority patent/US9502279B2/en
Application filed filed Critical
Publication of JP2015029088A publication Critical patent/JP2015029088A/ja
Publication of JP2015029088A5 publication Critical patent/JP2015029088A5/ja
Pending legal-status Critical Current

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JP2014132168A 2013-06-28 2014-06-27 微細溝付き非付着面を有する装着装置 Pending JP2015029088A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US13/930,659 2013-06-28
US13/930,659 US9502279B2 (en) 2013-06-28 2013-06-28 Installation fixture having a micro-grooved non-stick surface

Publications (2)

Publication Number Publication Date
JP2015029088A JP2015029088A (ja) 2015-02-12
JP2015029088A5 true JP2015029088A5 (https=) 2017-09-21

Family

ID=52115739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014132168A Pending JP2015029088A (ja) 2013-06-28 2014-06-27 微細溝付き非付着面を有する装着装置

Country Status (5)

Country Link
US (1) US9502279B2 (https=)
JP (1) JP2015029088A (https=)
KR (1) KR20150044371A (https=)
CN (1) CN104253078A (https=)
TW (1) TWI622123B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105405797B (zh) * 2015-12-30 2018-01-12 天津金海通自动化设备制造有限公司 一种给气浮动机构
JP6572788B2 (ja) * 2016-01-29 2019-09-11 住友大阪セメント株式会社 静電チャック装置
JP7340938B2 (ja) * 2019-02-25 2023-09-08 東京エレクトロン株式会社 載置台及び基板処理装置
CN116845004A (zh) * 2020-05-27 2023-10-03 北京北方华创微电子装备有限公司 半导体工艺设备

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US6771482B2 (en) 2001-07-30 2004-08-03 Unaxis Usa Inc. Perimeter seal for backside cooling of substrates
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JP2007207728A (ja) * 2006-02-06 2007-08-16 Aisin Seiki Co Ltd 固体高分子型燃料電池用セパレータ及びその製造方法、並びに固体高分子型燃料電池
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