JP2015023104A5 - - Google Patents

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Publication number
JP2015023104A5
JP2015023104A5 JP2013149020A JP2013149020A JP2015023104A5 JP 2015023104 A5 JP2015023104 A5 JP 2015023104A5 JP 2013149020 A JP2013149020 A JP 2013149020A JP 2013149020 A JP2013149020 A JP 2013149020A JP 2015023104 A5 JP2015023104 A5 JP 2015023104A5
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JP
Japan
Prior art keywords
processing apparatus
plasma processing
filter
plasma
component
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JP2013149020A
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English (en)
Japanese (ja)
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JP6239294B2 (ja
JP2015023104A (ja
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Priority claimed from JP2013149020A external-priority patent/JP6239294B2/ja
Priority to JP2013149020A priority Critical patent/JP6239294B2/ja
Priority to TW103120834A priority patent/TWI564956B/zh
Priority to US14/333,502 priority patent/US9767997B2/en
Priority to CN201410341799.0A priority patent/CN104299880B/zh
Priority to KR1020140090166A priority patent/KR101656745B1/ko
Publication of JP2015023104A publication Critical patent/JP2015023104A/ja
Publication of JP2015023104A5 publication Critical patent/JP2015023104A5/ja
Priority to US15/677,260 priority patent/US11424110B2/en
Publication of JP6239294B2 publication Critical patent/JP6239294B2/ja
Application granted granted Critical
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JP2013149020A 2013-07-18 2013-07-18 プラズマ処理装置及びプラズマ処理装置の運転方法 Active JP6239294B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2013149020A JP6239294B2 (ja) 2013-07-18 2013-07-18 プラズマ処理装置及びプラズマ処理装置の運転方法
TW103120834A TWI564956B (zh) 2013-07-18 2014-06-17 And a method of operating the plasma processing apparatus and the plasma processing apparatus
US14/333,502 US9767997B2 (en) 2013-07-18 2014-07-16 Plasma processing apparatus and operational method thereof
KR1020140090166A KR101656745B1 (ko) 2013-07-18 2014-07-17 플라즈마 처리 장치 및 플라즈마 처리 장치의 운전 방법
CN201410341799.0A CN104299880B (zh) 2013-07-18 2014-07-17 等离子体处理装置及等离子体处理装置的运行方法
US15/677,260 US11424110B2 (en) 2013-07-18 2017-08-15 Plasma processing apparatus and operational method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013149020A JP6239294B2 (ja) 2013-07-18 2013-07-18 プラズマ処理装置及びプラズマ処理装置の運転方法

Publications (3)

Publication Number Publication Date
JP2015023104A JP2015023104A (ja) 2015-02-02
JP2015023104A5 true JP2015023104A5 (enExample) 2016-09-29
JP6239294B2 JP6239294B2 (ja) 2017-11-29

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JP2013149020A Active JP6239294B2 (ja) 2013-07-18 2013-07-18 プラズマ処理装置及びプラズマ処理装置の運転方法

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US (2) US9767997B2 (enExample)
JP (1) JP6239294B2 (enExample)
KR (1) KR101656745B1 (enExample)
CN (1) CN104299880B (enExample)
TW (1) TWI564956B (enExample)

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