JP2015021973A - 光電子ユニット測定用高周波プローブカード - Google Patents

光電子ユニット測定用高周波プローブカード Download PDF

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Publication number
JP2015021973A
JP2015021973A JP2014148870A JP2014148870A JP2015021973A JP 2015021973 A JP2015021973 A JP 2015021973A JP 2014148870 A JP2014148870 A JP 2014148870A JP 2014148870 A JP2014148870 A JP 2014148870A JP 2015021973 A JP2015021973 A JP 2015021973A
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JP
Japan
Prior art keywords
perforation
frequency probe
probe
impedance matching
probe card
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2014148870A
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English (en)
Japanese (ja)
Inventor
嘉泰 張
Chia-Tai Chang
嘉泰 張
惠彬 楊
Hui-Pin Yang
惠彬 楊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MJC Probe Inc
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MJC Probe Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MJC Probe Inc filed Critical MJC Probe Inc
Publication of JP2015021973A publication Critical patent/JP2015021973A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06772—High frequency probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07342—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being at an angle other than perpendicular to test object, e.g. probe card

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP2014148870A 2013-07-23 2014-07-22 光電子ユニット測定用高周波プローブカード Pending JP2015021973A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
TW102126339 2013-07-23
TW102126339A TW201504631A (zh) 2013-07-23 2013-07-23 光電元件檢測用之高頻探針卡

Publications (1)

Publication Number Publication Date
JP2015021973A true JP2015021973A (ja) 2015-02-02

Family

ID=52388375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014148870A Pending JP2015021973A (ja) 2013-07-23 2014-07-22 光電子ユニット測定用高周波プローブカード

Country Status (4)

Country Link
US (1) US9535093B2 (enExample)
JP (1) JP2015021973A (enExample)
CN (1) CN104345186B (enExample)
TW (1) TW201504631A (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI564568B (zh) * 2015-03-26 2017-01-01 Use a coaxial pin with a cantilever probe card
TWI541512B (zh) * 2015-05-29 2016-07-11 Use a probe card with a coaxial pin
TWI606241B (zh) * 2015-09-16 2017-11-21 Mpi Corp Probe card with bypass line
US10663486B2 (en) * 2017-02-06 2020-05-26 International Business Machines Corporation Portable electrical noise probe structure
CN108872651B (zh) * 2017-05-08 2021-05-07 旺矽科技股份有限公司 探针卡
TWI661206B (zh) * 2018-01-19 2019-06-01 新加坡商美亞國際電子有限公司 測試用電路板
CN110716122B (zh) * 2018-07-13 2021-09-28 中华精测科技股份有限公司 高频探针卡装置及其信号传输模块
WO2020111076A1 (ja) * 2018-11-27 2020-06-04 日本発條株式会社 プローブユニット
TW202035995A (zh) * 2019-03-18 2020-10-01 旺矽科技股份有限公司 探針裝置
TWI679424B (zh) * 2019-03-29 2019-12-11 矽品精密工業股份有限公司 檢測裝置及其製法
US11346860B2 (en) * 2019-08-15 2022-05-31 Mpi Corporation Probe head for high frequency signal test and medium or low frequency signal test at the same time
CN112611916B (zh) * 2019-10-04 2024-09-03 旺矽科技股份有限公司 用于电路板阻抗测试的可调式探针装置
CN112710878B (zh) * 2019-10-24 2024-02-27 台湾中华精测科技股份有限公司 可拆式高频测试装置及其垂直式探针头
CN114354990B (zh) * 2020-10-14 2024-04-09 旺矽科技股份有限公司 整合不同电性测试的探针卡
US12158482B2 (en) * 2020-12-22 2024-12-03 Mediatek Inc. Probe card assembly
CN113848351B (zh) * 2021-08-16 2023-07-25 昆山德普福电子科技有限公司 高频探测组件

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650991A (ja) * 1992-07-31 1994-02-25 Toho Denshi Kk プローブ装置
JPH08271547A (ja) * 1995-03-31 1996-10-18 Nec Corp プローブ装置
JP2000292441A (ja) * 1999-04-07 2000-10-20 Micronics Japan Co Ltd プローブカード
JP2008170441A (ja) * 2007-01-08 2008-07-24 Mjc Probe Inc 高周波プローブ及びプローブカード
US20080191726A1 (en) * 2007-02-13 2008-08-14 Mjc Probe Incorporation Cantilever-type probe card for high frequency application
JPWO2008059767A1 (ja) * 2006-11-15 2010-03-04 日本電子材料株式会社 光デバイス用検査装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3205373B2 (ja) * 1992-03-12 2001-09-04 株式会社日立製作所 液晶表示装置
US7254889B1 (en) * 2000-09-08 2007-08-14 Gabe Cherian Interconnection devices
TW459405B (en) * 2000-10-17 2001-10-11 Advanced Epitaxy Technology In Manufacturing method of III-nitride device
TWI321820B (en) * 2006-08-25 2010-03-11 Star Techn Inc Integrated circuits probing apparatus having a temperature-adjusting mechanism
CN101788573A (zh) * 2009-01-23 2010-07-28 京元电子股份有限公司 探针卡
KR101332225B1 (ko) * 2009-07-30 2013-11-25 메키트 에퀴지션 코포레이션 시스템-인 패키지들
US20110261344A1 (en) * 2009-12-31 2011-10-27 Mapper Lithography Ip B.V. Exposure method
US8884640B2 (en) * 2011-04-28 2014-11-11 Mpi Corporation Integrated high-speed probe system
CN103543304B (zh) * 2012-07-13 2016-05-18 旺矽科技股份有限公司 高频探针卡

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650991A (ja) * 1992-07-31 1994-02-25 Toho Denshi Kk プローブ装置
JPH08271547A (ja) * 1995-03-31 1996-10-18 Nec Corp プローブ装置
JP2000292441A (ja) * 1999-04-07 2000-10-20 Micronics Japan Co Ltd プローブカード
JPWO2008059767A1 (ja) * 2006-11-15 2010-03-04 日本電子材料株式会社 光デバイス用検査装置
JP2008170441A (ja) * 2007-01-08 2008-07-24 Mjc Probe Inc 高周波プローブ及びプローブカード
US20080191726A1 (en) * 2007-02-13 2008-08-14 Mjc Probe Incorporation Cantilever-type probe card for high frequency application

Also Published As

Publication number Publication date
US20150028911A1 (en) 2015-01-29
CN104345186B (zh) 2017-07-14
TWI460432B (enExample) 2014-11-11
US9535093B2 (en) 2017-01-03
TW201504631A (zh) 2015-02-01
CN104345186A (zh) 2015-02-11

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