JP2015015311A - キャビティ付き基板の製造方法 - Google Patents
キャビティ付き基板の製造方法 Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4697—Manufacturing multilayer circuits having cavities, e.g. for mounting components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/10—Details of components or other objects attached to or integrated in a printed circuit board
- H05K2201/10007—Types of components
- H05K2201/10204—Dummy component, dummy PCB or template, e.g. for monitoring, controlling of processes, comparing, scanning
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0044—Mechanical working of the substrate, e.g. drilling or punching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/007—Manufacture or processing of a substrate for a printed circuit board supported by a temporary or sacrificial carrier
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0094—Filling or covering plated through-holes or blind plated vias, e.g. for masking or for mechanical reinforcement
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/04—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed mechanically, e.g. by punching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/40—Forming printed elements for providing electric connections to or between printed circuits
- H05K3/42—Plated through-holes or plated via connections
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/44—Manufacturing insulated metal core circuits or other insulated electrically conductive core circuits
- H05K3/445—Manufacturing insulated metal core circuits or other insulated electrically conductive core circuits having insulated holes or insulated via connections through the metal core
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4602—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated
- H05K3/4608—Manufacturing multilayer circuits characterized by a special circuit board as base or central core whereon additional circuit layers are built or additional circuit boards are laminated comprising an electrically conductive base or core
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
Abstract
【解決手段】ベース層11に貫通孔11aを形成するステップと、貫通孔11a内に金属製のダミー部品13を挿入するステップと、貫通孔11aとダミー部品13との間の環状隙間を埋める合成樹脂製の絶縁部14を形成するステップと、ダミー部品13の下面を覆う合成樹脂製の下側絶縁層15及び19を絶縁部14と連続するようにベース層11の下面に形成するステップと、ダミー部品13の上面を覆う合成樹脂製の上側絶縁層16及び20を絶縁部14と連続するようにベース層11の上面に形成するステップと、上側絶縁層16及び20にダミー部品13の上面を露出させるための露出孔27をルーター加工によって形成するステップと、露出孔27を通じて露出したダミー部品13をエッチング加工によって除去してキャビティ28を形成するステップを備える。
【選択図】図8
Description
以下、図1〜図8を引用して、金属製のベース層11を含むキャビティ付き基板(図8を参照)の製造方法について説明する。
以下、先に述べた第1の製造方法の変形例について説明する。
以下、図16〜図22を引用して、合成樹脂製のベース層31を含むキャビティ付き基板(図22を参照)の製造方法について説明する。
以下、先に述べた第2の製造方法の変形例について説明する。
Claims (5)
- 電子部品装着用のキャビティを有するキャビティ付き基板の製造方法であって、
ベース層に貫通孔を形成するステップと、
前記貫通孔内に前記電子部品に対応した金属製のダミー部品を挿入するステップと、
前記貫通孔の内側壁と前記ダミー部品の外側壁との間の環状隙間を埋める合成樹脂製の絶縁部を形成するステップと、
前記ダミー部品の下面を覆う合成樹脂製の下側絶縁層を前記絶縁部と連続するように前記ベース層の下面に形成するステップと、
前記ダミー部品の上面を覆う合成樹脂製の上側絶縁層を前記絶縁部と連続するように前記ベース層の上面に形成するステップと、
前記上側絶縁層又は前記下側絶縁層に前記ダミー部品の上面又は下面を露出させるための露出孔を機械的な切削加工によって形成するステップと、
前記露出孔を通じて露出したダミー部品を化学的な蝕刻加工によって除去して前記キャビティを形成するステップとを備える、
ことを特徴とするキャビティ付き基板の製造方法。 - 前記ベース層は金属製である、
ことを特徴とする請求項1に記載のキャビティ付き基板の製造方法。 - 前記ベース層は合成樹脂製である、
ことを特徴とする請求項1に記載のキャビティ付き基板の製造方法。 - 前記ダミー部品の横断面形は、前記電子部品の横断面形よりも僅かに大きい、
ことを特徴とする請求項1〜3の何れか1項に記載のキャビティ付き基板の製造方法。 - 前記上側絶縁層と前記上側配線層の少なくとも一方の内部に配線を形成するステップをさらに備える、
ことを特徴とする請求項1〜4の何れか1項に記載のキャビティ付き基板の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013140101A JP5554868B1 (ja) | 2013-07-03 | 2013-07-03 | キャビティ付き基板の製造方法 |
KR1020140066875A KR101555474B1 (ko) | 2013-07-03 | 2014-06-02 | 캐비티 부착 기판의 제조 방법 |
TW103121099A TWI552654B (zh) | 2013-07-03 | 2014-06-18 | A method for manufacturing a cavity substrate |
US14/316,382 US9301407B2 (en) | 2013-07-03 | 2014-06-26 | Method of manufacturing substrate having cavity |
CN201410315807.4A CN104284522B (zh) | 2013-07-03 | 2014-07-03 | 具空腔的基板的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013140101A JP5554868B1 (ja) | 2013-07-03 | 2013-07-03 | キャビティ付き基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP5554868B1 JP5554868B1 (ja) | 2014-07-23 |
JP2015015311A true JP2015015311A (ja) | 2015-01-22 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013140101A Expired - Fee Related JP5554868B1 (ja) | 2013-07-03 | 2013-07-03 | キャビティ付き基板の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US9301407B2 (ja) |
JP (1) | JP5554868B1 (ja) |
KR (1) | KR101555474B1 (ja) |
CN (1) | CN104284522B (ja) |
TW (1) | TWI552654B (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016192475A (ja) * | 2015-03-31 | 2016-11-10 | 太陽誘電株式会社 | 部品内蔵基板および半導体モジュール |
JP2020068079A (ja) * | 2018-10-23 | 2020-04-30 | 株式会社Gceインスティチュート | 発電機能付発光装置、照明装置、及び表示装置 |
JP2022092596A (ja) * | 2020-12-10 | 2022-06-22 | 珠海越亜半導体股▲分▼有限公司 | 立体パッケージを実現する基板製造方法 |
JP2022145598A (ja) * | 2021-03-19 | 2022-10-04 | ナントン アクセス セミコンダクター シーオー.,エルティーディー | 埋め込みパッケージ構造及びその製造方法 |
WO2024057474A1 (ja) * | 2022-09-15 | 2024-03-21 | 株式会社Fuji | 樹脂積層体形成装置、回路基板、および回路基板形成方法 |
Families Citing this family (9)
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WO2016056068A1 (ja) * | 2014-10-07 | 2016-04-14 | 株式会社メイコー | 部品内蔵基板の製造方法及びこの製造方法を用いて製造した部品内蔵基板 |
JP6544981B2 (ja) * | 2015-04-20 | 2019-07-17 | ローム株式会社 | プリント配線基板 |
JP6401119B2 (ja) | 2015-07-21 | 2018-10-03 | 太陽誘電株式会社 | モジュール基板 |
KR20170037331A (ko) | 2015-09-25 | 2017-04-04 | 삼성전기주식회사 | 인쇄회로기판 및 그 제조방법 |
TWI610604B (zh) * | 2016-08-17 | 2018-01-01 | 健鼎科技股份有限公司 | 電路板鑽孔保護結構及具有此鑽孔保護結構之印刷電路板製造方法 |
TWI704658B (zh) * | 2019-06-04 | 2020-09-11 | 恆勁科技股份有限公司 | 封裝基板 |
US10804205B1 (en) | 2019-08-22 | 2020-10-13 | Bridge Semiconductor Corp. | Interconnect substrate with stiffener and warp balancer and semiconductor assembly using the same |
CN114071856A (zh) * | 2020-07-31 | 2022-02-18 | 庆鼎精密电子(淮安)有限公司 | 三维电路板及其制备方法 |
CN113451292A (zh) * | 2021-08-09 | 2021-09-28 | 华天科技(西安)有限公司 | 一种高集成2.5d封装结构及其制造方法 |
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KR100266637B1 (ko) | 1997-11-15 | 2000-09-15 | 김영환 | 적층형볼그리드어레이반도체패키지및그의제조방법 |
TWI294262B (en) | 2002-06-28 | 2008-03-01 | Matsushita Electric Ind Co Ltd | A light reception/emission device built-in module with optical and electrical wiring combined therein and method of making the same |
JP4117390B2 (ja) * | 2003-05-07 | 2008-07-16 | 株式会社トッパンNecサーキットソリューションズ | キャビティ付き多層プリント配線板の製造方法 |
KR100688769B1 (ko) * | 2004-12-30 | 2007-03-02 | 삼성전기주식회사 | 도금에 의한 칩 내장형 인쇄회로기판 및 그 제조 방법 |
KR100783462B1 (ko) | 2006-06-07 | 2007-12-07 | 삼성전기주식회사 | 전자 소자 내장형 인쇄회로기판 및 그 제조방법 |
JPWO2008020478A1 (ja) * | 2006-08-16 | 2010-01-07 | 富士通株式会社 | 機構部品内蔵基板及びその製造方法 |
KR20090130727A (ko) * | 2008-06-16 | 2009-12-24 | 삼성전기주식회사 | 전자부품 내장형 인쇄회로기판 및 그 제조방법 |
DE112009003811B4 (de) * | 2008-12-25 | 2017-04-06 | Mitsubishi Electric Corporation | Verfahren zum Herstellen einer Leiterplatine |
US8471156B2 (en) * | 2009-08-28 | 2013-06-25 | Advanced Semiconductor Engineering, Inc. | Method for forming a via in a substrate and substrate with a via |
CN102065637B (zh) * | 2009-11-12 | 2013-07-10 | 平面磁性有限公司 | 具磁性元件的封装结构及其方法 |
JP5001395B2 (ja) * | 2010-03-31 | 2012-08-15 | イビデン株式会社 | 配線板及び配線板の製造方法 |
JP5528261B2 (ja) * | 2010-08-24 | 2014-06-25 | 欣興電子股▲ふん▼有限公司 | プリント配線板およびその製造方法 |
-
2013
- 2013-07-03 JP JP2013140101A patent/JP5554868B1/ja not_active Expired - Fee Related
-
2014
- 2014-06-02 KR KR1020140066875A patent/KR101555474B1/ko active IP Right Grant
- 2014-06-18 TW TW103121099A patent/TWI552654B/zh not_active IP Right Cessation
- 2014-06-26 US US14/316,382 patent/US9301407B2/en not_active Expired - Fee Related
- 2014-07-03 CN CN201410315807.4A patent/CN104284522B/zh not_active Expired - Fee Related
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016192475A (ja) * | 2015-03-31 | 2016-11-10 | 太陽誘電株式会社 | 部品内蔵基板および半導体モジュール |
JP2020068079A (ja) * | 2018-10-23 | 2020-04-30 | 株式会社Gceインスティチュート | 発電機能付発光装置、照明装置、及び表示装置 |
JP7224015B2 (ja) | 2018-10-23 | 2023-02-17 | 株式会社Gceインスティチュート | 発電機能付発光装置、照明装置、及び表示装置 |
JP2022092596A (ja) * | 2020-12-10 | 2022-06-22 | 珠海越亜半導体股▲分▼有限公司 | 立体パッケージを実現する基板製造方法 |
JP7320045B2 (ja) | 2020-12-10 | 2023-08-02 | 珠海越亜半導体股▲分▼有限公司 | 立体パッケージを実現する基板製造方法 |
JP2022145598A (ja) * | 2021-03-19 | 2022-10-04 | ナントン アクセス セミコンダクター シーオー.,エルティーディー | 埋め込みパッケージ構造及びその製造方法 |
JP7405888B2 (ja) | 2021-03-19 | 2023-12-26 | ナントン アクセス セミコンダクター シーオー.,エルティーディー | 埋め込みパッケージ構造及びその製造方法 |
WO2024057474A1 (ja) * | 2022-09-15 | 2024-03-21 | 株式会社Fuji | 樹脂積層体形成装置、回路基板、および回路基板形成方法 |
Also Published As
Publication number | Publication date |
---|---|
CN104284522A (zh) | 2015-01-14 |
KR20150004734A (ko) | 2015-01-13 |
US9301407B2 (en) | 2016-03-29 |
TWI552654B (zh) | 2016-10-01 |
TW201509251A (zh) | 2015-03-01 |
KR101555474B1 (ko) | 2015-09-24 |
CN104284522B (zh) | 2017-09-19 |
US20150010694A1 (en) | 2015-01-08 |
JP5554868B1 (ja) | 2014-07-23 |
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