JP2015005788A5 - - Google Patents

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Publication number
JP2015005788A5
JP2015005788A5 JP2013128014A JP2013128014A JP2015005788A5 JP 2015005788 A5 JP2015005788 A5 JP 2015005788A5 JP 2013128014 A JP2013128014 A JP 2013128014A JP 2013128014 A JP2013128014 A JP 2013128014A JP 2015005788 A5 JP2015005788 A5 JP 2015005788A5
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JP
Japan
Prior art keywords
base
plan
vibration
view
vibrating element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2013128014A
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English (en)
Japanese (ja)
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JP6277606B2 (ja
JP2015005788A (ja
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Publication date
Application filed filed Critical
Priority to JP2013128014A priority Critical patent/JP6277606B2/ja
Priority claimed from JP2013128014A external-priority patent/JP6277606B2/ja
Priority to US14/308,161 priority patent/US20140368288A1/en
Priority to CN201410273074.2A priority patent/CN104242866B/zh
Publication of JP2015005788A publication Critical patent/JP2015005788A/ja
Publication of JP2015005788A5 publication Critical patent/JP2015005788A5/ja
Application granted granted Critical
Publication of JP6277606B2 publication Critical patent/JP6277606B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2013128014A 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体 Expired - Fee Related JP6277606B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013128014A JP6277606B2 (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体
US14/308,161 US20140368288A1 (en) 2013-06-18 2014-06-18 Resonator element, resonator, oscillator, electronic device, and moving object
CN201410273074.2A CN104242866B (zh) 2013-06-18 2014-06-18 振动元件、振子、振荡器、电子设备以及移动体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013128014A JP6277606B2 (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2015005788A JP2015005788A (ja) 2015-01-08
JP2015005788A5 true JP2015005788A5 (enExample) 2016-07-28
JP6277606B2 JP6277606B2 (ja) 2018-02-14

Family

ID=52018732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013128014A Expired - Fee Related JP6277606B2 (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体

Country Status (3)

Country Link
US (1) US20140368288A1 (enExample)
JP (1) JP6277606B2 (enExample)
CN (1) CN104242866B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
CN108431732B (zh) * 2015-12-28 2021-03-26 日本电信电话株式会社 模拟力觉发生装置
JP6942983B2 (ja) * 2017-03-17 2021-09-29 セイコーエプソン株式会社 発振器、電子機器および移動体
JP2021013132A (ja) 2019-07-09 2021-02-04 セイコーエプソン株式会社 振動素子、振動子、電子機器、及び移動体
JP7370190B2 (ja) * 2019-08-14 2023-10-27 太陽誘電株式会社 パネル及び電子機器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493292A (en) * 1966-07-22 1970-02-03 Bulova Watch Co Inc Tuning fork structures
JPS4998219A (enExample) * 1973-01-22 1974-09-17
TW567664B (en) * 2001-10-09 2003-12-21 Ebauchesfabrik Eta Ag Piezoelectric resonator and assembly comprising the same enclosed in a case
JP4415389B2 (ja) * 2005-04-27 2010-02-17 セイコーエプソン株式会社 圧電デバイス
US20060279176A1 (en) * 2005-06-09 2006-12-14 Eta Manufacture Horlogere Suisse Small-sized piezoelectric resonator
US7084556B1 (en) * 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
US8234774B2 (en) * 2007-12-21 2012-08-07 Sitime Corporation Method for fabricating a microelectromechanical system (MEMS) resonator
US8558435B2 (en) * 2008-03-18 2013-10-15 Citizen Holdings Co., Ltd. Package structure of a piezoelectric device mounting and supporting a piezoelectric vibration element
JP2010141387A (ja) * 2008-12-09 2010-06-24 Epson Toyocom Corp 圧電振動子、圧電デバイス
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP5399767B2 (ja) * 2009-04-28 2014-01-29 京セラクリスタルデバイス株式会社 水晶振動素子
JP5565154B2 (ja) * 2009-09-11 2014-08-06 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP2014135654A (ja) * 2013-01-10 2014-07-24 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6013228B2 (ja) * 2013-02-25 2016-10-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器及び電波時計
JP6145288B2 (ja) * 2013-03-15 2017-06-07 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計

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