JP6277606B2 - 振動素子、振動子、発振器、電子機器および移動体 - Google Patents

振動素子、振動子、発振器、電子機器および移動体 Download PDF

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Publication number
JP6277606B2
JP6277606B2 JP2013128014A JP2013128014A JP6277606B2 JP 6277606 B2 JP6277606 B2 JP 6277606B2 JP 2013128014 A JP2013128014 A JP 2013128014A JP 2013128014 A JP2013128014 A JP 2013128014A JP 6277606 B2 JP6277606 B2 JP 6277606B2
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Japan
Prior art keywords
vibration element
vibration
base
vibrating
holding arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2013128014A
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English (en)
Japanese (ja)
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JP2015005788A (ja
JP2015005788A5 (enExample
Inventor
明法 山田
明法 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2013128014A priority Critical patent/JP6277606B2/ja
Priority to CN201410273074.2A priority patent/CN104242866B/zh
Priority to US14/308,161 priority patent/US20140368288A1/en
Publication of JP2015005788A publication Critical patent/JP2015005788A/ja
Publication of JP2015005788A5 publication Critical patent/JP2015005788A5/ja
Application granted granted Critical
Publication of JP6277606B2 publication Critical patent/JP6277606B2/ja
Expired - Fee Related legal-status Critical Current
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/0538—Constructional combinations of supports or holders with electromechanical or other electronic elements
    • H03H9/0547—Constructional combinations of supports or holders with electromechanical or other electronic elements consisting of a vertical arrangement
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Oscillators With Electromechanical Resonators (AREA)
JP2013128014A 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体 Expired - Fee Related JP6277606B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2013128014A JP6277606B2 (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体
CN201410273074.2A CN104242866B (zh) 2013-06-18 2014-06-18 振动元件、振子、振荡器、电子设备以及移动体
US14/308,161 US20140368288A1 (en) 2013-06-18 2014-06-18 Resonator element, resonator, oscillator, electronic device, and moving object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013128014A JP6277606B2 (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体

Publications (3)

Publication Number Publication Date
JP2015005788A JP2015005788A (ja) 2015-01-08
JP2015005788A5 JP2015005788A5 (enExample) 2016-07-28
JP6277606B2 true JP6277606B2 (ja) 2018-02-14

Family

ID=52018732

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013128014A Expired - Fee Related JP6277606B2 (ja) 2013-06-18 2013-06-18 振動素子、振動子、発振器、電子機器および移動体

Country Status (3)

Country Link
US (1) US20140368288A1 (enExample)
JP (1) JP6277606B2 (enExample)
CN (1) CN104242866B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI634742B (zh) * 2013-11-16 2018-09-01 精工愛普生股份有限公司 振動片、振動子、振盪器、電子機器及移動體
US10864552B2 (en) * 2015-12-28 2020-12-15 Nippon Telegraph And Telephone Corporation Pseudo force sense generation apparatus
JP6942983B2 (ja) * 2017-03-17 2021-09-29 セイコーエプソン株式会社 発振器、電子機器および移動体
JP2021013132A (ja) 2019-07-09 2021-02-04 セイコーエプソン株式会社 振動素子、振動子、電子機器、及び移動体
JP7370190B2 (ja) * 2019-08-14 2023-10-27 太陽誘電株式会社 パネル及び電子機器

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3493292A (en) * 1966-07-22 1970-02-03 Bulova Watch Co Inc Tuning fork structures
JPS4998219A (enExample) * 1973-01-22 1974-09-17
TW567664B (en) * 2001-10-09 2003-12-21 Ebauchesfabrik Eta Ag Piezoelectric resonator and assembly comprising the same enclosed in a case
JP4415389B2 (ja) * 2005-04-27 2010-02-17 セイコーエプソン株式会社 圧電デバイス
US20060279176A1 (en) * 2005-06-09 2006-12-14 Eta Manufacture Horlogere Suisse Small-sized piezoelectric resonator
US7084556B1 (en) * 2005-06-09 2006-08-01 Eta Sa Manufacture Horlogere Suisse Small-sized piezoelectric resonator
US8234774B2 (en) * 2007-12-21 2012-08-07 Sitime Corporation Method for fabricating a microelectromechanical system (MEMS) resonator
WO2009116523A1 (ja) * 2008-03-18 2009-09-24 シチズンホールディングス株式会社 圧電デバイス
JP2010141387A (ja) * 2008-12-09 2010-06-24 Epson Toyocom Corp 圧電振動子、圧電デバイス
US8067880B2 (en) * 2008-12-27 2011-11-29 Seiko Epson Corporation Flexural vibration element and electronic component
JP5399767B2 (ja) * 2009-04-28 2014-01-29 京セラクリスタルデバイス株式会社 水晶振動素子
JP5565154B2 (ja) * 2009-09-11 2014-08-06 セイコーエプソン株式会社 振動片、振動子、発振器、および電子機器
JP2014135654A (ja) * 2013-01-10 2014-07-24 Sii Crystal Technology Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP6013228B2 (ja) * 2013-02-25 2016-10-25 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動子、発振器、電子機器及び電波時計
JP6145288B2 (ja) * 2013-03-15 2017-06-07 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器、及び電波時計

Also Published As

Publication number Publication date
CN104242866B (zh) 2018-08-07
US20140368288A1 (en) 2014-12-18
CN104242866A (zh) 2014-12-24
JP2015005788A (ja) 2015-01-08

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