JP2014534464A5 - - Google Patents
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- Publication number
- JP2014534464A5 JP2014534464A5 JP2014534799A JP2014534799A JP2014534464A5 JP 2014534464 A5 JP2014534464 A5 JP 2014534464A5 JP 2014534799 A JP2014534799 A JP 2014534799A JP 2014534799 A JP2014534799 A JP 2014534799A JP 2014534464 A5 JP2014534464 A5 JP 2014534464A5
- Authority
- JP
- Japan
- Prior art keywords
- inert gas
- deuterium
- hydrogen
- nlo crystal
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000013078 crystal Substances 0.000 claims 32
- 239000011261 inert gas Substances 0.000 claims 27
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 claims 22
- 229910052805 deuterium Inorganic materials 0.000 claims 22
- 229910052739 hydrogen Inorganic materials 0.000 claims 20
- 239000001257 hydrogen Substances 0.000 claims 20
- 239000000203 mixture Substances 0.000 claims 18
- 238000000034 method Methods 0.000 claims 17
- 239000007789 gas Substances 0.000 claims 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 10
- 150000002431 hydrogen Chemical class 0.000 claims 10
- 238000010521 absorption reaction Methods 0.000 claims 6
- XBJJRSFLZVLCSE-UHFFFAOYSA-N barium(2+);diborate Chemical compound [Ba+2].[Ba+2].[Ba+2].[O-]B([O-])[O-].[O-]B([O-])[O-] XBJJRSFLZVLCSE-UHFFFAOYSA-N 0.000 claims 4
- 230000009849 deactivation Effects 0.000 claims 4
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 claims 4
- VCZFPTGOQQOZGI-UHFFFAOYSA-N lithium bis(oxoboranyloxy)borinate Chemical compound [Li+].[O-]B(OB=O)OB=O VCZFPTGOQQOZGI-UHFFFAOYSA-N 0.000 claims 4
- 230000003287 optical effect Effects 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 3
- 230000007547 defect Effects 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 230000000415 inactivating effect Effects 0.000 claims 3
- 238000002329 infrared spectrum Methods 0.000 claims 3
- 239000001301 oxygen Substances 0.000 claims 3
- 229910052760 oxygen Inorganic materials 0.000 claims 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- NNAZVIPNYDXXPF-UHFFFAOYSA-N [Li+].[Cs+].OB([O-])[O-] Chemical compound [Li+].[Cs+].OB([O-])[O-] NNAZVIPNYDXXPF-UHFFFAOYSA-N 0.000 claims 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims 2
- JDLDTRXYGQMDRV-UHFFFAOYSA-N tricesium;borate Chemical compound [Cs+].[Cs+].[Cs+].[O-]B([O-])[O-] JDLDTRXYGQMDRV-UHFFFAOYSA-N 0.000 claims 2
- 238000002211 ultraviolet spectrum Methods 0.000 claims 2
- 238000001429 visible spectrum Methods 0.000 claims 2
- 230000004913 activation Effects 0.000 claims 1
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- 238000000137 annealing Methods 0.000 claims 1
- 230000002779 inactivation Effects 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201161544425P | 2011-10-07 | 2011-10-07 | |
| US61/544,425 | 2011-10-07 | ||
| US13/488,635 | 2012-06-05 | ||
| US13/488,635 US9250178B2 (en) | 2011-10-07 | 2012-06-05 | Passivation of nonlinear optical crystals |
| PCT/US2012/059072 WO2013052878A1 (en) | 2011-10-07 | 2012-10-05 | Hydrogen passivation of nonlinear optical crystals |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015206996A Division JP6062521B2 (ja) | 2011-10-07 | 2015-10-21 | 光学的検査システムの製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014534464A JP2014534464A (ja) | 2014-12-18 |
| JP2014534464A5 true JP2014534464A5 (cg-RX-API-DMAC7.html) | 2015-12-10 |
| JP6000362B2 JP6000362B2 (ja) | 2016-09-28 |
Family
ID=48041880
Family Applications (7)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014534799A Active JP6000362B2 (ja) | 2011-10-07 | 2012-10-05 | 非線形光学結晶の水素不活性化 |
| JP2015206996A Active JP6062521B2 (ja) | 2011-10-07 | 2015-10-21 | 光学的検査システムの製造方法 |
| JP2016241892A Active JP6415523B2 (ja) | 2011-10-07 | 2016-12-14 | 光学的検査システム |
| JP2018074155A Pending JP2018132773A (ja) | 2011-10-07 | 2018-04-06 | レーザシステム、非線形光学結晶およびその不活性化方法 |
| JP2020080419A Active JP7170686B2 (ja) | 2011-10-07 | 2020-04-30 | レーザシステムおよび非線形光学結晶の製造方法 |
| JP2022175763A Pending JP2023002813A (ja) | 2011-10-07 | 2022-11-01 | 非線形光学結晶の不活性化方法 |
| JP2024122326A Active JP7788504B2 (ja) | 2011-10-07 | 2024-07-29 | 非線形光学結晶の不活性化方法 |
Family Applications After (6)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015206996A Active JP6062521B2 (ja) | 2011-10-07 | 2015-10-21 | 光学的検査システムの製造方法 |
| JP2016241892A Active JP6415523B2 (ja) | 2011-10-07 | 2016-12-14 | 光学的検査システム |
| JP2018074155A Pending JP2018132773A (ja) | 2011-10-07 | 2018-04-06 | レーザシステム、非線形光学結晶およびその不活性化方法 |
| JP2020080419A Active JP7170686B2 (ja) | 2011-10-07 | 2020-04-30 | レーザシステムおよび非線形光学結晶の製造方法 |
| JP2022175763A Pending JP2023002813A (ja) | 2011-10-07 | 2022-11-01 | 非線形光学結晶の不活性化方法 |
| JP2024122326A Active JP7788504B2 (ja) | 2011-10-07 | 2024-07-29 | 非線形光学結晶の不活性化方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (4) | US9250178B2 (cg-RX-API-DMAC7.html) |
| EP (2) | EP3957778A1 (cg-RX-API-DMAC7.html) |
| JP (7) | JP6000362B2 (cg-RX-API-DMAC7.html) |
| KR (3) | KR101961901B1 (cg-RX-API-DMAC7.html) |
| CN (3) | CN107255898A (cg-RX-API-DMAC7.html) |
| IL (3) | IL231971A (cg-RX-API-DMAC7.html) |
| TW (4) | TWI735852B (cg-RX-API-DMAC7.html) |
| WO (1) | WO2013052878A1 (cg-RX-API-DMAC7.html) |
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| US20190056637A1 (en) * | 2017-08-21 | 2019-02-21 | Kla-Tencor Corporation | In-Situ Passivation for Nonlinear Optical Crystals |
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