JP2014527721A5 - - Google Patents

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Publication number
JP2014527721A5
JP2014527721A5 JP2014526117A JP2014526117A JP2014527721A5 JP 2014527721 A5 JP2014527721 A5 JP 2014527721A5 JP 2014526117 A JP2014526117 A JP 2014526117A JP 2014526117 A JP2014526117 A JP 2014526117A JP 2014527721 A5 JP2014527721 A5 JP 2014527721A5
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JP
Japan
Prior art keywords
wafer
door
cantilever
tip
finger
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2014526117A
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English (en)
Japanese (ja)
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JP2014527721A (ja
JP6096776B2 (ja
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Application filed filed Critical
Priority claimed from PCT/US2012/050624 external-priority patent/WO2013025629A2/en
Publication of JP2014527721A publication Critical patent/JP2014527721A/ja
Publication of JP2014527721A5 publication Critical patent/JP2014527721A5/ja
Application granted granted Critical
Publication of JP6096776B2 publication Critical patent/JP6096776B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014526117A 2011-08-12 2012-08-13 ウェハー搬送器 Active JP6096776B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161523254P 2011-08-12 2011-08-12
US61/523,254 2011-08-12
PCT/US2012/050624 WO2013025629A2 (en) 2011-08-12 2012-08-13 Wafer carrier

Publications (3)

Publication Number Publication Date
JP2014527721A JP2014527721A (ja) 2014-10-16
JP2014527721A5 true JP2014527721A5 (enExample) 2015-09-24
JP6096776B2 JP6096776B2 (ja) 2017-03-15

Family

ID=47715660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014526117A Active JP6096776B2 (ja) 2011-08-12 2012-08-13 ウェハー搬送器

Country Status (7)

Country Link
US (2) US9312157B2 (enExample)
EP (1) EP2742526A4 (enExample)
JP (1) JP6096776B2 (enExample)
KR (1) KR102011159B1 (enExample)
CN (2) CN103828033B (enExample)
TW (1) TWI587444B (enExample)
WO (1) WO2013025629A2 (enExample)

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US11104496B2 (en) * 2019-08-16 2021-08-31 Gudeng Precision Industrial Co., Ltd. Non-sealed reticle storage device
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US12486120B2 (en) 2020-03-23 2025-12-02 Applied Materials, Inc. Substrate processing system carrier
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TWI782689B (zh) * 2021-09-02 2022-11-01 家登精密工業股份有限公司 快拆式氣閥、具有快拆式氣閥的基板容器及快拆式氣閥的安裝和拆卸方法
JP2024533650A (ja) * 2021-09-22 2024-09-12 インテグリス・インコーポレーテッド プロセスキャリア
CN113562309B (zh) * 2021-09-27 2021-12-14 徐州和润电子材料有限公司 一种通讯电子产品制造用硅晶片无损存储装置
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TWI848670B (zh) * 2022-06-30 2024-07-11 家登精密工業股份有限公司 保護包裝組件
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