JP2014527721A5 - - Google Patents

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Publication number
JP2014527721A5
JP2014527721A5 JP2014526117A JP2014526117A JP2014527721A5 JP 2014527721 A5 JP2014527721 A5 JP 2014527721A5 JP 2014526117 A JP2014526117 A JP 2014526117A JP 2014526117 A JP2014526117 A JP 2014526117A JP 2014527721 A5 JP2014527721 A5 JP 2014527721A5
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JP
Japan
Prior art keywords
wafer
door
cantilever
tip
finger
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014526117A
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English (en)
Japanese (ja)
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JP6096776B2 (ja
JP2014527721A (ja
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Priority claimed from PCT/US2012/050624 external-priority patent/WO2013025629A2/en
Publication of JP2014527721A publication Critical patent/JP2014527721A/ja
Publication of JP2014527721A5 publication Critical patent/JP2014527721A5/ja
Application granted granted Critical
Publication of JP6096776B2 publication Critical patent/JP6096776B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014526117A 2011-08-12 2012-08-13 ウェハー搬送器 Active JP6096776B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201161523254P 2011-08-12 2011-08-12
US61/523,254 2011-08-12
PCT/US2012/050624 WO2013025629A2 (en) 2011-08-12 2012-08-13 Wafer carrier

Publications (3)

Publication Number Publication Date
JP2014527721A JP2014527721A (ja) 2014-10-16
JP2014527721A5 true JP2014527721A5 (enExample) 2015-09-24
JP6096776B2 JP6096776B2 (ja) 2017-03-15

Family

ID=47715660

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014526117A Active JP6096776B2 (ja) 2011-08-12 2012-08-13 ウェハー搬送器

Country Status (7)

Country Link
US (2) US9312157B2 (enExample)
EP (1) EP2742526A4 (enExample)
JP (1) JP6096776B2 (enExample)
KR (1) KR102011159B1 (enExample)
CN (2) CN106941087B (enExample)
TW (1) TWI587444B (enExample)
WO (1) WO2013025629A2 (enExample)

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US10978326B2 (en) * 2018-10-29 2021-04-13 Taiwan Semiconductor Manufacturing Co, , Ltd. Semiconductor wafer storage device
NL2022185B1 (nl) * 2018-12-12 2020-07-02 Suss Microtec Lithography Gmbh Substratkassette
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US10964584B2 (en) 2019-05-20 2021-03-30 Applied Materials, Inc. Process kit ring adaptor
US11104496B2 (en) * 2019-08-16 2021-08-31 Gudeng Precision Industrial Co., Ltd. Non-sealed reticle storage device
US12486120B2 (en) 2020-03-23 2025-12-02 Applied Materials, Inc. Substrate processing system carrier
US12027397B2 (en) 2020-03-23 2024-07-02 Applied Materials, Inc Enclosure system shelf including alignment features
USD980176S1 (en) * 2020-06-02 2023-03-07 Applied Materials, Inc. Substrate processing system carrier
USD954769S1 (en) * 2020-06-02 2022-06-14 Applied Materials, Inc. Enclosure system shelf
TWI746014B (zh) * 2020-06-16 2021-11-11 大立鈺科技有限公司 晶圓存取總成及其晶圓存取裝置與晶圓載具
TWI746045B (zh) * 2020-07-07 2021-11-11 家登精密工業股份有限公司 基板載具鎖扣結構
WO2022192335A1 (en) * 2021-03-10 2022-09-15 Entegris, Inc. Semiconductor substrate carrying container with front and rear openings
TWI782689B (zh) * 2021-09-02 2022-11-01 家登精密工業股份有限公司 快拆式氣閥、具有快拆式氣閥的基板容器及快拆式氣閥的安裝和拆卸方法
KR20240068690A (ko) * 2021-09-22 2024-05-17 엔테그리스, 아이엔씨. 프로세스 캐리어
CN113562309B (zh) * 2021-09-27 2021-12-14 徐州和润电子材料有限公司 一种通讯电子产品制造用硅晶片无损存储装置
KR102733145B1 (ko) 2022-04-05 2024-11-25 주식회사 삼에스코리아 웨이퍼 수납용기 및 그에 사용되는 캡 조립체
TWI848670B (zh) * 2022-06-30 2024-07-11 家登精密工業股份有限公司 保護包裝組件
TWD232262S (zh) * 2023-01-18 2024-07-11 日商信越聚合物股份有限公司 (日本) 儲存及運送晶圓之容器
US20250029857A1 (en) * 2023-07-21 2025-01-23 Entegris, Inc. Module retainer
CN116805608A (zh) * 2023-08-29 2023-09-26 芯岛新材料(浙江)有限公司 一种晶圆盒
WO2025074498A1 (ja) * 2023-10-03 2025-04-10 ミライアル株式会社 基板収納容器
WO2025163816A1 (ja) * 2024-01-31 2025-08-07 ミライアル株式会社 基板収納容器

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KR101554375B1 (ko) * 2008-04-25 2015-09-18 신에츠 폴리머 가부시키가이샤 리테이너, 및 리테이너를 구비한 기판 수납 용기
TWI343353B (en) * 2008-11-04 2011-06-11 Gudeng Prec Industral Co Ltd A wafer container having the snap-fitting constraint module
KR101165613B1 (ko) 2009-05-13 2012-07-16 미라이얼 가부시키가이샤 반도체 웨이퍼 수납용기
JP2011060994A (ja) 2009-09-10 2011-03-24 Shin Etsu Polymer Co Ltd 基板収納容器及び基板の取り扱い方法

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