JP2014524147A5 - - Google Patents

Download PDF

Info

Publication number
JP2014524147A5
JP2014524147A5 JP2014519618A JP2014519618A JP2014524147A5 JP 2014524147 A5 JP2014524147 A5 JP 2014524147A5 JP 2014519618 A JP2014519618 A JP 2014519618A JP 2014519618 A JP2014519618 A JP 2014519618A JP 2014524147 A5 JP2014524147 A5 JP 2014524147A5
Authority
JP
Japan
Prior art keywords
layer
cutting portion
processing head
laser beam
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014519618A
Other languages
English (en)
Japanese (ja)
Other versions
JP2014524147A (ja
JP6106168B2 (ja
Filing date
Publication date
Priority claimed from GB1112286.8A external-priority patent/GB2492972B/en
Application filed filed Critical
Publication of JP2014524147A publication Critical patent/JP2014524147A/ja
Publication of JP2014524147A5 publication Critical patent/JP2014524147A5/ja
Application granted granted Critical
Publication of JP6106168B2 publication Critical patent/JP6106168B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014519618A 2011-07-15 2012-07-13 薄膜デバイスを個別のセルに分割する方法及び装置 Expired - Fee Related JP6106168B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1112286.8 2011-07-15
GB1112286.8A GB2492972B (en) 2011-07-15 2011-07-15 Method and apparatus for dividing a thin film device into separate cells
PCT/GB2012/000590 WO2013011254A1 (en) 2011-07-15 2012-07-13 Method and apparatus for dividing a thin film device into separate cells

Publications (3)

Publication Number Publication Date
JP2014524147A JP2014524147A (ja) 2014-09-18
JP2014524147A5 true JP2014524147A5 (enExample) 2015-09-10
JP6106168B2 JP6106168B2 (ja) 2017-03-29

Family

ID=44586748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014519618A Expired - Fee Related JP6106168B2 (ja) 2011-07-15 2012-07-13 薄膜デバイスを個別のセルに分割する方法及び装置

Country Status (8)

Country Link
US (1) US9054177B2 (enExample)
EP (1) EP2732468B1 (enExample)
JP (1) JP6106168B2 (enExample)
KR (1) KR101880699B1 (enExample)
CN (1) CN103688358B (enExample)
GB (1) GB2492972B (enExample)
TW (1) TWI617385B (enExample)
WO (1) WO2013011254A1 (enExample)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2492971B (en) * 2011-07-15 2013-09-18 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
JP2015096823A (ja) 2013-11-15 2015-05-21 浜松ホトニクス株式会社 放射線検出器、及び放射線検出器の製造方法
EP2974822B1 (en) * 2014-07-14 2017-08-16 ASM Technology Singapore Pte Ltd. Method of dicing thin semiconductor substrates
KR101677152B1 (ko) * 2015-03-27 2016-11-17 (주)엔에스 단차 가공용 레이저 절단 장치
KR101677154B1 (ko) * 2015-04-22 2016-11-17 (주)엔에스 단차 가공용 레이저 절단 장치
KR101689860B1 (ko) * 2015-05-26 2016-12-26 (주)엔에스 단차 가공용 레이저 절단 장치
KR101702568B1 (ko) * 2015-07-28 2017-02-06 (주)엔에스 단차 가공용 레이저 절단 장치
KR102567316B1 (ko) * 2015-11-04 2023-08-16 엘지디스플레이 주식회사 디스플레이 제조장치
CN105562939A (zh) * 2016-03-03 2016-05-11 苏州大学 一种印刷电路板的多波长飞秒激光扫描刻蚀加工方法
CN108604618B (zh) * 2016-12-27 2022-12-06 中国建材国际工程集团有限公司 用于监视在太阳能模块中形成隔离槽的激光划片过程的方法和系统
GB2572608A (en) * 2018-04-03 2019-10-09 Ilika Tech Ltd Laser processing method for thin film structures
KR102319690B1 (ko) * 2020-05-12 2021-11-02 주식회사 이오테크닉스 홀 형성 장치 및 홀 형성 방법
KR102737376B1 (ko) * 2022-12-23 2024-12-03 주식회사 메카로에너지 패턴형 투광 태양전지 모듈 및 그 제조 방법
KR102756303B1 (ko) * 2023-11-30 2025-01-21 주식회사 바인딩 투과형 cigs 모듈을 제작하기 위한 방법 및 이에 따라 제작된 투과형 cigs 모듈

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3604917A1 (de) * 1986-02-17 1987-08-27 Messerschmitt Boelkow Blohm Verfahren zur herstellung eines integrierten verbandes in reihe geschalteter duennschicht-solarzellen
JPS63192561A (ja) * 1987-02-04 1988-08-09 Nkk Corp マルチ切断装置
JP3248336B2 (ja) * 1994-03-23 2002-01-21 富士電機株式会社 薄膜太陽電池の製造方法
KR100207135B1 (ko) * 1994-10-18 1999-07-15 니시무로 타이죠 반사형 액정표시소자 및 그 제조방법
JPH08267265A (ja) * 1995-03-30 1996-10-15 Fuji Electric Corp Res & Dev Ltd 薄膜加工装置
DE19840936B4 (de) * 1998-09-08 2005-03-10 Hell Gravure Systems Gmbh Anordnung zum mehrkanaligen Schneiden und Ritzen von Materialien mittels Laserstrahlen
JP4233741B2 (ja) * 2000-09-27 2009-03-04 三菱重工業株式会社 太陽電池モジュール及びその製造方法
TW548689B (en) * 2001-01-25 2003-08-21 Fujitsu Display Tech Reflection type liquid crystal display device and manufacturing method thereof
JP2004330271A (ja) * 2003-05-09 2004-11-25 Kanegafuchi Chem Ind Co Ltd 透光性薄膜太陽電池の作製方法
JP4340246B2 (ja) * 2005-03-07 2009-10-07 シャープ株式会社 薄膜太陽電池およびその製造方法
JP2007310334A (ja) * 2006-05-19 2007-11-29 Mikuni Denshi Kk ハーフトーン露光法を用いた液晶表示装置の製造法
JP5088661B2 (ja) * 2006-12-05 2012-12-05 セイコーエプソン株式会社 半導体装置および電気光学装置
WO2009027476A2 (en) * 2007-08-30 2009-03-05 Oc Oerlikon Balzers Ag A thin-film solar cell system and method and apparatus for manufacturing a thin-film solar cell
JP4785827B2 (ja) * 2007-12-27 2011-10-05 三洋電機株式会社 太陽電池モジュール及びその製造方法
GB2458986B (en) * 2008-04-08 2012-05-30 M Solv Ltd Apparatus for patterning thin films on continuous flexible substrates
GB2474665B (en) 2009-10-22 2011-10-12 M Solv Ltd Method and apparatus for dividing thin film device into separate cells
GB2492971B (en) 2011-07-15 2013-09-18 M Solv Ltd Method and apparatus for dividing thin film device into separate cells

Similar Documents

Publication Publication Date Title
JP2014524147A5 (enExample)
JP5608754B2 (ja) 薄膜デバイスを個別のセルに分割するための方法および装置
JP6106168B2 (ja) 薄膜デバイスを個別のセルに分割する方法及び装置
JP2013508963A5 (enExample)
JP6041875B2 (ja) 薄膜デバイスを個別のセルに分割するための方法および装置
WO2015031435A3 (en) Method of separating a glass sheet from a carrier
US20110312158A1 (en) Method and apparatus for dividing thin film device into separate cells
JP2013546160A5 (enExample)
JP2013546160A (ja) 薄膜デバイスを分離したセルに分割するための方法及び装置
JP2008268880A5 (enExample)
CN102203943A (zh) 通过多激光束照射将在基板上形成的半导体膜划分成多个区域的方法
JP2013533627A5 (enExample)
JP2015533264A5 (enExample)
WO2012093793A3 (en) Method and apparatus for driving cell array driven by electric field
DK200800036A (da) Skæreindretning til skæring af kontinuert fremfört baneformet materiale