JP2014517547A - 集積回路構造、集積回路、および堅牢なtsv構造を形成する方法 - Google Patents
集積回路構造、集積回路、および堅牢なtsv構造を形成する方法 Download PDFInfo
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76841—Barrier, adhesion or liner layers
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
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- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/782—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, each consisting of a single circuit element
- H01L21/786—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, each consisting of a single circuit element the substrate being other than a semiconductor body, e.g. insulating body
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Abstract
【解決手段】TSVは半導体基板を貫通して延在する環状トレンチを構成する。基板はトレンチの内側側壁および外側側壁を画定し、側壁は5ミクロン〜10ミクロンの範囲内の距離だけ分離される。銅又は銅合金を含む導電性経路が、前記第1の誘電体層の上面から前記基板を貫通して前記トレンチ内に延在する。基板厚は60ミクロン以下とすることができる。導電性経路に導通可能に接続されるインターコネクト・メタライゼーションを有する誘電体層が前記環状トレンチの上方に直接形成される。
【選択図】図3
Description
Claims (10)
- 上面に形成される少なくとも1つの半導体デバイス、および前記上面にわたって堆積される第1の誘電体層を有する基板と、
前記第1の誘電体層を貫通し、前記基板を貫通して延在する環状トレンチであって、前記基板は前記トレンチの内側側壁および外側側壁を構成し、前記内側側壁および前記外側側壁は5ミクロン〜10ミクロンの範囲内の距離だけ分離される、環状トレンチと、
前記トレンチ内にあり、前記第1の誘電体層の上側面から前記基板を貫通して延在する導電性経路であって、銅または銅合金を含む導電性経路と、
インターコネクト・メタライゼーションを含む第2の誘電体層であって、前記インターコネクト・メタライゼーションは前記導電性経路に導通可能に接続され、前記第2の誘電体層は前記第1の誘電体層上に直接形成され前記環状トレンチを覆う、第2の誘電体層と
を備える、集積回路構造。 - 前記内側側壁および前記外側側壁は5.5ミクロン〜9ミクロンの範囲内の距離だけ分離され、前記直径は5ミクロン〜8ミクロンの範囲内にある、請求項1に記載の集積回路構造。
- 前記内側側壁および前記外側側壁は前記上面に対して85度〜90度内の角度で傾斜する、請求項1に記載の集積回路構造。
- 前記導電性経路は2ミクロンより大きな平均粒径を有する、請求項1に記載の集積回路構造。
- 上面に形成された少なくとも1つの半導体デバイスを有する半導体基板と、
前記半導体基板の前記上面から底面まで延在する環状トレンチであって、前記環状トレンチは、前記半導体基板からなるコアを画定する内側側壁を有し、前記コアは前記上面において5ミクロン〜8ミクロンの直径を有し、前記内側側壁は前記上面に対して87度〜90度に傾けられる、環状トレンチと、
前記環状トレンチ内の導電性経路であって、前記半導体基板から誘電体ライナによって分離される導電性経路と、
前記少なくとも1つの半導体デバイスに導通可能に接続されるインターコネクト・メタライゼーションを含む誘電体層であって、前記環状トレンチを覆う誘電体層と
を備える、集積回路。 - 前記導電性経路は銅または銅合金を含み、
前記半導体基板は単結晶シリコンを含み、
前記誘電体ライナは前記内側側壁上に厚みを有し、前記底面付近の前記厚みは前記上面における前記厚みの少なくとも50%である、請求項5に記載の集積回路。 - 前記環状トレンチの外径は、前記上面において19ミクロン〜23ミクロンである、請求項5に記載の集積回路。
- 基板内に環状トレンチを形成するステップであって、前記基板はその上面に形成された少なくとも1つの半導体デバイスを有し、前記トレンチは、10ミクロン未満だけ分離され90ミクロン以下の深さまで延在する内側側壁および外側側壁を有する、形成するステップと、
前記内側側壁および前記外側側壁を共形誘電体ライナで裏打ちするステップと、
前記トレンチを銅または銅合金を含む導電性材料で充填するステップと、
前記充填されたトレンチを、少なくとも20分間、350℃よりも高い温度でアニールするステップと
を含む、堅牢なTSV構造を形成する方法。 - 前記基板の背面を薄厚化して、前記充填されたトレンチの前記導電性材料を露出させるステップを更に含む、請求項8に記載の方法。
- 前記側壁は10パーセント未満の粗さを有する波形の輪郭を有する、請求項8に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/167,107 US8487425B2 (en) | 2011-06-23 | 2011-06-23 | Optimized annular copper TSV |
US13/167,107 | 2011-06-23 | ||
PCT/US2012/043052 WO2012177585A2 (en) | 2011-06-23 | 2012-06-19 | Optimized annular copper tsv |
Publications (1)
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JP2014517547A true JP2014517547A (ja) | 2014-07-17 |
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JP2014517076A Pending JP2014517547A (ja) | 2011-06-23 | 2012-06-19 | 集積回路構造、集積回路、および堅牢なtsv構造を形成する方法 |
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Country | Link |
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US (2) | US8487425B2 (ja) |
JP (1) | JP2014517547A (ja) |
KR (1) | KR20140014251A (ja) |
CN (1) | CN103548120B (ja) |
CA (1) | CA2828498A1 (ja) |
DE (1) | DE112012001870B4 (ja) |
GB (1) | GB2505576B (ja) |
TW (1) | TWI525776B (ja) |
WO (1) | WO2012177585A2 (ja) |
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CN103548120B (zh) | 2016-12-07 |
CN103548120A (zh) | 2014-01-29 |
US8487425B2 (en) | 2013-07-16 |
US20130244420A1 (en) | 2013-09-19 |
GB2505576B (en) | 2016-03-23 |
CA2828498A1 (en) | 2012-12-27 |
WO2012177585A3 (en) | 2013-04-25 |
GB2505576A (en) | 2014-03-05 |
US8658535B2 (en) | 2014-02-25 |
KR20140014251A (ko) | 2014-02-05 |
US20120326309A1 (en) | 2012-12-27 |
TW201306218A (zh) | 2013-02-01 |
DE112012001870T5 (de) | 2014-03-27 |
GB201318982D0 (en) | 2013-12-11 |
DE112012001870B4 (de) | 2018-09-13 |
WO2012177585A2 (en) | 2012-12-27 |
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