JP2014505349A - 半円形状のアンテナを備える基板処理装置 - Google Patents
半円形状のアンテナを備える基板処理装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 134
- 238000000034 method Methods 0.000 claims abstract description 42
- 230000005684 electric field Effects 0.000 claims abstract description 22
- 239000007789 gas Substances 0.000 claims description 103
- 239000012495 reaction gas Substances 0.000 claims description 78
- 238000009792 diffusion process Methods 0.000 claims description 33
- 230000007423 decrease Effects 0.000 claims description 7
- 238000007599 discharging Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 152
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 149
- 229910052710 silicon Inorganic materials 0.000 description 147
- 239000010703 silicon Substances 0.000 description 147
- 238000010926 purge Methods 0.000 description 66
- 239000010410 layer Substances 0.000 description 50
- 238000000151 deposition Methods 0.000 description 36
- 239000010409 thin film Substances 0.000 description 36
- 239000012686 silicon precursor Substances 0.000 description 29
- 238000006243 chemical reaction Methods 0.000 description 24
- 239000006227 byproduct Substances 0.000 description 17
- 230000008021 deposition Effects 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 13
- 125000004122 cyclic group Chemical group 0.000 description 12
- 238000007736 thin film deposition technique Methods 0.000 description 12
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 10
- 239000002243 precursor Substances 0.000 description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 9
- 238000010586 diagram Methods 0.000 description 8
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 125000004433 nitrogen atom Chemical group N* 0.000 description 7
- 125000004430 oxygen atom Chemical group O* 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 6
- -1 Oxygen anion Chemical class 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000007740 vapor deposition Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000009616 inductively coupled plasma Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 238000000280 densification Methods 0.000 description 3
- 238000005137 deposition process Methods 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- 229910052743 krypton Inorganic materials 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 229910052724 xenon Inorganic materials 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- FZHAPNGMFPVSLP-UHFFFAOYSA-N silanamine Chemical compound [SiH3]N FZHAPNGMFPVSLP-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000007790 solid phase Substances 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- HQSLRIXPNFGAQR-UHFFFAOYSA-N [SiH4].Cl Chemical compound [SiH4].Cl HQSLRIXPNFGAQR-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 238000010494 dissociation reaction Methods 0.000 description 1
- 230000005593 dissociations Effects 0.000 description 1
- 230000003028 elevating effect Effects 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
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- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45527—Atomic layer deposition [ALD] characterized by the ALD cycle, e.g. different flows or temperatures during half-reactions, unusual pulsing sequence, use of precursor mixtures or auxiliary reactants or activations
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/507—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using external electrodes, e.g. in tunnel type reactors
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Abstract
【解決手段】本発明の一実施形態によれば,基板処理装置は,基板に対する工程が行われるチャンバ;前記チャンバの内部に設けられ,前記基板が載置される基板支持台;及び前記チャンバの上部に設けられ前記チャンバの内部に電界を形成するアンテナを含み,前記アンテナは,あらかじめ設定された中心線を基準に対称をなすように配置される第1及び第2アンテナを備え,前記第1アンテナは,第1及び第2半径をそれぞれ有しあらかじめ設定された中心線を基準に一側及び他側にそれぞれ位置する半円形状の第1内側アンテナ及び第1中間アンテナと,前記第1内側アンテナ及び前記第1中間アンテナを互いに連結する第1連結アンテナとを有し,前記第2アンテナは,前記第1及び第2半径をそれぞれ有し前記中心線を基準に一側及び他側にそれぞれ位置する半円形状の第2中間アンテナ及び第2内側アンテナと,前記第2中間アンテナ及び前記第2内側アンテナを互いに連結する第2連結アンテナを備える。
【選択図】図1
Description
Claims (8)
- 基板に対する工程が行われるチャンバ;
前記チャンバの内部に設けられ,前記基板が載置される基板支持台;及び
前記チャンバの上部に設けられ前記チャンバの内部に電界(electric field)を形成するアンテナを含み,
前記アンテナは,あらかじめ設定された中心を基準に回転対称をなすように配置される第1及び第2アンテナを備え,
前記第1アンテナは,第1及び第2半径をそれぞれ有しあらかじめ設定された中心線を基準に一側及び他側にそれぞれ位置する半円形状の第1内側アンテナ及び第1中間アンテナと,前記第1内側アンテナ及び前記第1中間アンテナを互いに連結する第1連結アンテナとを有し,
前記第2アンテナは,前記第1及び第2半径をそれぞれ有し前記中心線を基準に一側及び他側にそれぞれ位置する半円形状の第2中間アンテナ及び第2内側アンテナと,前記第2中間アンテナ及び前記第2内側アンテナを互いに連結する第2連結アンテナを備えることを特徴とする基板処理装置。 - 前記第1アンテナは,第3半径を有し前記中心線を基準に一側に位置する半円形状の第1外側アンテナをさらに有し,
前記第2アンテナは,第3半径を有し前記中心線を基準に他側に位置する半円形状の第2外側アンテナをさらに有し,
前記第1中間アンテナは,前記第2内側アンテナ及び前記第2外側アンテナの間に配置され,
前記第2中間アンテナは,前記第1内側アンテナ及び前記第1外側アンテナの間に配置されることを特徴とする請求項1に記載の基板処理装置。 - 前記アンテナは,前記第1及び第2アンテナが同一平面上に位置するフラット(flat)形であることを特徴とする請求項1に記載の基板処理装置。
- 前記チャンバは,上部が開放された下部チャンバ,前記下部チャンバの上部を開閉し前記アンテナの下部に位置するチャンバ蓋,及び前記アンテナと前記チャンバ蓋の間に位置して前記チャンバの内部に形成された電界を調節する調節プレートを備えることを特徴とする請求項1に記載の基板処理装置。
- 前記調節プレートの厚さは,前記チャンバの内部で行われる工程率に応じて決定されることを特徴とする請求項4に記載の基板処理装置。
- 前記基板処理装置は,前記チャンバの内部に反応ガスを供給する流入口及び前記チャンバ内部に供給された前記反応ガスを排出する流出口が対称をなして形成されるシャワーヘッドを備え,
前記シャワーヘッドは,前記流入口に連結され前記反応ガスの流動方向に沿って断面積が増加する複数の拡散流路と前記拡散流路を互いに連結する流入連結流路とを有することを特徴とする請求項1に記載の基板処理装置。 - 前記拡散流入流路は,上下に配置されることを特徴とする請求項1に記載の基板処理装置。
- 前記シャワーヘッドは,前記流出口に連結され前記反応ガスの流動方向に沿って断面積が減少する複数の収斂流路と前記収斂流路を互いに連結する流出連結流路とを有することを特徴とする請求項1に記載の基板処理装置。
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JP7461926B2 (ja) | 2018-07-31 | 2024-04-04 | アプライド マテリアルズ インコーポレイテッド | 3d nandのためのon積層体オーバレイの改善 |
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US9416451B2 (en) | 2016-08-16 |
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TW201230172A (en) | 2012-07-16 |
WO2012047034A3 (ko) | 2012-06-21 |
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