JP2014239218A - 半導体パッケージ基板及び半導体パッケージ基板の製造方法 - Google Patents
半導体パッケージ基板及び半導体パッケージ基板の製造方法 Download PDFInfo
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- 239000010410 layer Substances 0.000 claims description 219
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- 229910000679 solder Inorganic materials 0.000 claims description 49
- 239000002335 surface treatment layer Substances 0.000 claims description 26
- 238000007747 plating Methods 0.000 description 68
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 17
- 229910052802 copper Inorganic materials 0.000 description 12
- 239000010949 copper Substances 0.000 description 12
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 8
- 239000010931 gold Substances 0.000 description 8
- 229910052737 gold Inorganic materials 0.000 description 8
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- -1 for example Substances 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
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- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- XQUPVDVFXZDTLT-UHFFFAOYSA-N 1-[4-[[4-(2,5-dioxopyrrol-1-yl)phenyl]methyl]phenyl]pyrrole-2,5-dione Chemical compound O=C1C=CC(=O)N1C(C=C1)=CC=C1CC1=CC=C(N2C(C=CC2=O)=O)C=C1 XQUPVDVFXZDTLT-UHFFFAOYSA-N 0.000 description 1
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- 239000011229 interlayer Substances 0.000 description 1
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- 229920003192 poly(bis maleimide) Polymers 0.000 description 1
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Abstract
【解決手段】本発明の半導体パッケージ基板100は、絶縁層111と、絶縁層111の一面に形成され、バンプパッド132を有する第1回路層130と、バンプパッド132に形成され、バンプパッド132と一体に形成されたポストバンプ160と、絶縁層111及び第1回路層130に形成され、バンプパッド132及びポストバンプ160を露出させる第1開口部171が形成された第1ソルダーレジスト層170と、を含むものである。
【選択図】図1
Description
図1は、本発明の実施例による半導体パッケージ基板の例示図である。
図2から図17は、本発明の実施例による半導体パッケージ基板の製造方法を示した例示図である。
110 ベース基板
111 絶縁層
112 銅箔
113 貫通ビアホール
120 シード層
130 第1回路層
131 第1回路パターン
132 バンプパッド
140 第2回路層
141 第2回路パターン
142 接続パッド
150 貫通ビア
160 ポストバンプ
170 第1ソルダーレジスト層
171 第1開口部
180 第2ソルダーレジスト層
181 第2開口部
191 第1表面処理層
192 第2表面処理層
210 第1めっきレジスト
211 第1めっき開口部
220 第2めっきレジスト
221 第2めっき開口部
230 第3めっきレジスト
231 第3めっき開口部
240 第4めっきレジスト
Claims (18)
- 絶縁層と、
前記絶縁層の一面に形成され、バンプパッドを有する第1回路層と、
前記バンプパッドに形成され、前記バンプパッドと一体に形成されたポストバンプと、
前記絶縁層及び第1回路層に形成され、前記バンプパッド及び前記ポストバンプを露出させる第1開口部が形成された第1ソルダーレジスト層と、を含む半導体パッケージ基板。 - 前記バンプパッドと前記ポストバンプは、同一の物質で形成される、請求項1に記載の半導体パッケージ基板。
- 前記第1開口部を介して露出された前記バンプパッド及び前記ポストバンプ上に形成された第1表面処理層をさらに含む、請求項1に記載の半導体パッケージ基板。
- 前記絶縁層の他面に形成され、接続パッドを有する第2回路層をさらに含む、請求項1に記載の半導体パッケージ基板。
- 前記絶縁層を貫通し、前記第1回路層と前記第2回路層とを電気的に連結する貫通ビアをさらに含む、請求項4に記載の半導体パッケージ基板。
- 前記貫通ビアは、前記バンプパッドと前記接続パッドとを電気的に連結する、請求項5に記載の半導体パッケージ基板。
- 前記絶縁層の他面及び前記第2回路層に形成され、前記接続パッドを露出させる第2開口部が形成された第2ソルダーレジスト層をさらに含む、請求項4に記載の半導体パッケージ基板。
- 前記第2開口部を介して露出された接続パッド上に形成された第2表面処理層をさらに含む、請求項7に記載の半導体パッケージ基板。
- 前記ポストバンプは、前記第1ソルダーレジスト層の一面より突出するように形成される、請求項1に記載の半導体パッケージ基板。
- 絶縁層を準備する段階と、
前記絶縁層の一面にバンプパッドを有する第1回路層を形成する段階と、
前記バンプパッド上にポストバンプを形成する段階と、
前記バンプパッド及び前記ポストバンプを露出させる第1開口部を有する第1ソルダーレジスト層を形成する段階と、を含む半導体パッケージ基板の製造方法。 - 前記ポストバンプを形成する段階で、前記ポストバンプは前記バンプパッドと同一の物質で形成する、請求項10に記載の半導体パッケージ基板の製造方法。
- 前記第1ソルダーレジスト層を形成する段階の後に、
前記第1開口部を介して露出された前記バンプパッド及びポストバンプ上に第1表面処理層を形成する段階をさらに含む、請求項10に記載の半導体パッケージ基板の製造方法。 - 前記第1回路層を形成する段階で、
前記絶縁層の他面に接続パッドを有する第2回路層を形成する段階を含む、請求項10に記載の半導体パッケージ基板の製造方法。 - 前記第1回路層を形成する段階で、
前記絶縁層を貫通し、前記第1回路層と前記第2回路層とを電気的に連結する貫通ビアを形成する段階をさらに含む、請求項13に記載の半導体パッケージ基板の製造方法。 - 前記貫通ビアは、前記バンプパッドと前記接続パッドとを電気的に連結するように形成する、請求項14に記載の半導体パッケージ基板の製造方法。
- 前記第2回路層を形成する段階の後に、
前記絶縁層の他面及び前記第2回路層に、前記接続パッドを露出させる第2開口部を有する第2ソルダーレジスト層を形成する段階をさらに含む、請求項13に記載の半導体パッケージ基板の製造方法。 - 前記第2ソルダーレジスト層を形成する段階の後に、
前記第2開口部を介して露出された前記接続パッド上に第2表面処理層を形成する段階をさらに含む、請求項16に記載の半導体パッケージ基板の製造方法。 - 前記第2回路層を形成する段階の後に、
前記接続パッド上にソルダーボールを形成する段階をさらに含む、請求項14に記載の半導体パッケージ基板の製造方法。
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JP2015231003A (ja) * | 2014-06-06 | 2015-12-21 | イビデン株式会社 | 回路基板および回路基板の製造方法 |
JP2016021496A (ja) * | 2014-07-15 | 2016-02-04 | イビデン株式会社 | 配線基板及びその製造方法 |
JP2016076534A (ja) * | 2014-10-03 | 2016-05-12 | イビデン株式会社 | 金属ポスト付きプリント配線板およびその製造方法 |
TWI554174B (zh) * | 2014-11-04 | 2016-10-11 | 上海兆芯集成電路有限公司 | 線路基板和半導體封裝結構 |
US11233025B2 (en) * | 2017-05-31 | 2022-01-25 | Futurewei Technologies, Inc. | Merged power pad for improving integrated circuit power delivery |
JP2021093417A (ja) * | 2019-12-09 | 2021-06-17 | イビデン株式会社 | プリント配線板、及び、プリント配線板の製造方法 |
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