JP2014225711A5 - - Google Patents

Download PDF

Info

Publication number
JP2014225711A5
JP2014225711A5 JP2014184103A JP2014184103A JP2014225711A5 JP 2014225711 A5 JP2014225711 A5 JP 2014225711A5 JP 2014184103 A JP2014184103 A JP 2014184103A JP 2014184103 A JP2014184103 A JP 2014184103A JP 2014225711 A5 JP2014225711 A5 JP 2014225711A5
Authority
JP
Japan
Prior art keywords
substrate
detection
swing
swinging member
initial position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014184103A
Other languages
English (en)
Japanese (ja)
Other versions
JP6008917B2 (ja
JP2014225711A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2014184103A priority Critical patent/JP6008917B2/ja
Priority claimed from JP2014184103A external-priority patent/JP6008917B2/ja
Publication of JP2014225711A publication Critical patent/JP2014225711A/ja
Publication of JP2014225711A5 publication Critical patent/JP2014225711A5/ja
Application granted granted Critical
Publication of JP6008917B2 publication Critical patent/JP6008917B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014184103A 2014-09-10 2014-09-10 基板検出装置および基板処理装置 Active JP6008917B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014184103A JP6008917B2 (ja) 2014-09-10 2014-09-10 基板検出装置および基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014184103A JP6008917B2 (ja) 2014-09-10 2014-09-10 基板検出装置および基板処理装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2012182964A Division JP6000019B2 (ja) 2012-08-22 2012-08-22 基板処理装置

Publications (3)

Publication Number Publication Date
JP2014225711A JP2014225711A (ja) 2014-12-04
JP2014225711A5 true JP2014225711A5 (enExample) 2015-10-08
JP6008917B2 JP6008917B2 (ja) 2016-10-19

Family

ID=52124101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014184103A Active JP6008917B2 (ja) 2014-09-10 2014-09-10 基板検出装置および基板処理装置

Country Status (1)

Country Link
JP (1) JP6008917B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7148289B2 (ja) * 2018-06-20 2022-10-05 芝浦メカトロニクス株式会社 基板検出装置及び基板処理装置
JP6857682B2 (ja) * 2019-03-29 2021-04-14 芝浦メカトロニクス株式会社 基板処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10265026A (ja) * 1997-03-25 1998-10-06 Hitachi Electron Eng Co Ltd ワーク通過検出装置
JPH1111640A (ja) * 1997-06-30 1999-01-19 Okamura Corp ローラコンベヤにおける搬送物検出装置
JP3679924B2 (ja) * 1998-05-07 2005-08-03 大日本スクリーン製造株式会社 基板処理装置
JP2007066985A (ja) * 2005-08-29 2007-03-15 Shibaura Mechatronics Corp 基板の検出装置及び処理装置
WO2009063562A1 (ja) * 2007-11-15 2009-05-22 Hirata Corporation 基板搬送装置
JP2010133884A (ja) * 2008-12-08 2010-06-17 Sharp Corp 振り子センサ

Similar Documents

Publication Publication Date Title
JP2014041897A5 (enExample)
CN103633000B (zh) 基板处理装置
JP2010135381A5 (enExample)
JP2015084093A5 (ja) 表示装置
JP2017177238A5 (enExample)
JP2010515937A5 (enExample)
TWD180743S (zh) 旋轉致動器之部分
JP2016519626A5 (enExample)
JP2006315772A5 (enExample)
JP2014190953A5 (enExample)
JP2015045644A5 (enExample)
JP2014225711A5 (enExample)
JP2008057533A5 (enExample)
AR100245A1 (es) Rascador de cinta con inclinación de módulos
JP2013019745A5 (enExample)
JP2012240182A5 (enExample)
JP2018509625A5 (enExample)
JP6157304B2 (ja) 脱酸素剤の検出装置
FR3075240B1 (fr) Serrure electronique
JP6008917B2 (ja) 基板検出装置および基板処理装置
KR101289173B1 (ko) 컨베이어벨트 사행감지장치
JP2017095227A5 (ja) シート搬送装置
WO2017216198A3 (de) Sensoranordnung zur winkelerfassung und schaltgetriebe
JP3123736U (ja) 搬送ワーク確認用ストライカ
JP2016047767A (ja) ワーク検知装置