JP6008917B2 - 基板検出装置および基板処理装置 - Google Patents

基板検出装置および基板処理装置 Download PDF

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Publication number
JP6008917B2
JP6008917B2 JP2014184103A JP2014184103A JP6008917B2 JP 6008917 B2 JP6008917 B2 JP 6008917B2 JP 2014184103 A JP2014184103 A JP 2014184103A JP 2014184103 A JP2014184103 A JP 2014184103A JP 6008917 B2 JP6008917 B2 JP 6008917B2
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substrate
swing
detection
initial position
swinging
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JP2014225711A (ja
JP2014225711A5 (enExample
Inventor
末吉　秀樹
秀樹 末吉
久顕 宮迫
久顕 宮迫
潔 荻原
潔 荻原
崇広 濱田
崇広 濱田
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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JP2014184103A 2014-09-10 2014-09-10 基板検出装置および基板処理装置 Active JP6008917B2 (ja)

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JP2014184103A JP6008917B2 (ja) 2014-09-10 2014-09-10 基板検出装置および基板処理装置

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JP2014184103A JP6008917B2 (ja) 2014-09-10 2014-09-10 基板検出装置および基板処理装置

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JP2012182964A Division JP6000019B2 (ja) 2012-08-22 2012-08-22 基板処理装置

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JP2014225711A JP2014225711A (ja) 2014-12-04
JP2014225711A5 JP2014225711A5 (enExample) 2015-10-08
JP6008917B2 true JP6008917B2 (ja) 2016-10-19

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7148289B2 (ja) * 2018-06-20 2022-10-05 芝浦メカトロニクス株式会社 基板検出装置及び基板処理装置
JP6857682B2 (ja) * 2019-03-29 2021-04-14 芝浦メカトロニクス株式会社 基板処理装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10265026A (ja) * 1997-03-25 1998-10-06 Hitachi Electron Eng Co Ltd ワーク通過検出装置
JPH1111640A (ja) * 1997-06-30 1999-01-19 Okamura Corp ローラコンベヤにおける搬送物検出装置
JP3679924B2 (ja) * 1998-05-07 2005-08-03 大日本スクリーン製造株式会社 基板処理装置
JP2007066985A (ja) * 2005-08-29 2007-03-15 Shibaura Mechatronics Corp 基板の検出装置及び処理装置
WO2009063562A1 (ja) * 2007-11-15 2009-05-22 Hirata Corporation 基板搬送装置
JP2010133884A (ja) * 2008-12-08 2010-06-17 Sharp Corp 振り子センサ

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