JP2014187353A - フィルム状接着剤、フィルム状接着剤付きダイシングテープ、半導体装置の製造方法、及び半導体装置 - Google Patents
フィルム状接着剤、フィルム状接着剤付きダイシングテープ、半導体装置の製造方法、及び半導体装置 Download PDFInfo
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- JP2014187353A JP2014187353A JP2014001514A JP2014001514A JP2014187353A JP 2014187353 A JP2014187353 A JP 2014187353A JP 2014001514 A JP2014001514 A JP 2014001514A JP 2014001514 A JP2014001514 A JP 2014001514A JP 2014187353 A JP2014187353 A JP 2014187353A
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- film adhesive
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- dicing tape
- resin
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Images
Classifications
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
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- C—CHEMISTRY; METALLURGY
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
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- C—CHEMISTRY; METALLURGY
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
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Abstract
【解決手段】
熱可塑性樹脂及び導電性粒子を含み、ミラーシリコンウエハへ40℃で貼りつけた後、25℃で測定した密着力が0.5N/10mm以上であるフィルム状接着剤に関する。
【選択図】図1
Description
半導体装置の製造に前記フィルム状接着剤付きダイシングテープを用いると、フィルム状接着剤付きダイシングテープに貼り付けられた状態の半導体ウエハをハンドリングできるので、半導体ウエハ単体でハンドリングする機会を減らすことができる。したがって、近年の薄型の半導体ウエハであっても良好にハンドリングできる。また、前記フィルム状接着剤付きダイシングテープを用いる場合、フィルム状接着剤に半導体ウエハを貼り付けることになるが、前記フィルム状接着剤を用いるため、半導体ウエハの反りを抑制できる。
本発明はまた、前記製造方法により得られる半導体装置に関する。
本明細書において、密着力は、ミラーシリコンウエハからフィルム状接着剤を剥離するときの剥離力を意味し、実施例に記載の方法で測定できる。
貯蔵弾性率は、実施例に記載の方法で測定できる。
本明細書において、熱可塑性樹脂のガラス転移温度は、Fox式により求めた理論値をいう。
また、ガラス転移温度を求める他の方法として、示差走査熱量計(DSC)によって測定される最大熱吸収ピーク時の温度により、熱可塑性樹脂のガラス転移温度を求める方法もある。具体的には、測定する試料を示差走査熱量計(ティー・エイ・インスツルメント社製の「Q−2000」)を用い、予測される試料のガラス転移温度(予測温度)より約50℃高い温度で10分加熱した後、予測温度より50℃低い温度まで冷却して前処理し、その後、窒素雰囲気下、昇温速度5℃/分にて昇温して吸熱開始点温度を測定し、これをガラス転移温度とする。
本明細書において、25℃において液状とは、25℃において粘度が5000Pa・s未満であることをいう。一方、25℃において固形とは、25℃において粘度が5000Pa・s以上であることをいう。
なお、粘度は、Thermo Scientific社製の型番HAAKE Roto VISCO1を用いて測定できる。
49/51より、25℃で固形の硬化性樹脂の比率が多くなると、40℃程度の低温でフィルム状接着剤を半導体ウエハに張り付けることが困難になる(低温貼りつき性が低下する)傾向がある。一方、10/90より、25℃で固形の硬化性樹脂の比率が少なくなると、フィルム状接着剤がベタベタになり、ダイシングテープとくっつき過ぎてピックアップ性が悪くなる傾向がある。
なお、導電性粒子の平均粒径は、光度式の粒度分布計(HORIBA製、装置名;LA−910)により求めた値である。
以下、本発明のフィルム状接着剤付きダイシングテープについて説明する。図1は、本発明の一実施形態に係るフィルム状接着剤付きダイシングテープの断面模式図である。図2は、本発明の他の実施形態に係るフィルム状接着剤付きダイシングテープの断面模式図である。
該剥離力は、実施例に記載の方法で測定できる。
本発明の半導体装置の製造方法は、フィルム状接着剤を用いて半導体チップを被着体にダイアタッチする工程を含む。
加熱処理の温度は、好ましくは80℃以上、より好ましくは170℃以上である。加熱処理の温度は、好ましくは200℃以下、より好ましくは180℃以下である。加熱処理の温度が上記範囲であると、良好に接着できる。また、加熱処理の時間は、適宜設定できる。
アロンタックS−2060:東亜合成(株)製のアロンタックS−2060(アクリル共重合体、Mw:55万、ガラス転移温度:−22℃)
テイサンレジンSG−70L:ナガセケムテックス(株)製のテイサンレジンSG−70L(アクリル共重合体、Mw:90万、ガラス転移温度:−13℃)
テイサンレジンSG−P3:ナガセケムテックス(株)製のテイサンレジンSG−P3(アクリル共重合体、Mw:85万、ガラス転移温度:12℃)
EOCN−1020−4:日本化薬(株)製のEOCN−1020−4(25℃で固形のエポキシ樹脂)
JER828:三菱化学(株)製のJER828(25℃で液状のエポキシ樹脂)
MEH−7851SS:明和化成社製のMEH−7851SS(フェノールアラルキル樹脂)
1400YM:三井金属鉱業(株)製の1400YM(銅粉、平均粒径4μm、比重8.9)
ES−6000:ポッターズ・パロティーニ(株)製のES−6000(シルバーガラスビーズ、平均粒径6μm、比重3.9〜4.0)
AUP−1000:大崎工業(株)製のAUP−1000(金粉末、平均粒径1μm、比重19.3)
(実施例1〜3及び比較例1〜3)
表1に記載の配合比に従い、表1に記載の各成分及び溶媒(メチルエチルケトン)を、ハイブリッドミキサー(キーエンス製 HM−500)の攪拌釜に入れ、攪拌モード、3分で攪拌・混合した。得られたワニスを、離型処理フィルム(三菱樹脂(株)製のMRA50)にダイコーターにて塗布した後,乾燥させて、フィルム状接着剤を作製した。
表2に記載の配合比に従い、表2に記載の各成分を、プラネタリーミキサー(プライミクス(株)製 T.K. HIVIS MIX “P−03”)の攪拌釜に入れ、90℃、20分で攪拌・混合した。得られた混合物を、成形プレス(北川精機(株)VH1−1572)にて120℃、圧力1kg/cm2にて加圧し、フィルム状接着剤を作製した。
バックグラインダー((株)DISCO製のDFG−8560)を用いて、シリコンウエハ(信越化学工業(株)製、厚み0.6mm)の厚みが0.05mmとなるように研削し、ミラーシリコンウエハを作製した。
得られたフィルム状接着剤、フィルム状接着剤付きダイシングテープ、ミラーシリコンウエハを用いて以下の評価を行った。結果を表1及び表2に示す。
ウエハマウンター(日東精機(株)製のMA−3000III)を用いて、貼り付け速度10mm/min、貼り付け温度40℃にて、フィルム状接着剤付きダイシングテープのフィルム状接着剤上に、ミラーシリコンウエハを貼り合わせた。
貼り合わせにより得られたものを、ミラーシリコンウエハが下側(地面側)となるように配置し、ミラーシリコンウエハがフィルム状接着剤から一部でも脱落した場合を×、脱落しない場合を○と判定した。
フィルム状接着剤付きダイシングテープのフィルム状接着剤上に、保持目的にポリエステル粘着テープ(日東電工(株)製のBT−315)を貼り合わせた後、10mm幅で切断した。次いで、ポリエステル粘着テープからフィルム状接着剤及びダイシングテープからなる積層体を分離した。2kgローラーを用いて、積層体のフィルム状接着剤面に、40℃のミラーシリコンウエハを貼り付けた後、2分間、40℃にて放置した。その後、常温(25℃)にて20分間放置し、サンプルを得た。
サンプルについて、引張試験機((株)島津製作所製のAGS−J)を用いて、剥離角度180度、剥離温度25℃、剥離速度300mm/minにて、剥離試験を行った(ミラーシリコンウエハとフィルム状接着剤間の剥離試験)。
ウエハマウンター(日東精機(株)製のMA−3000III)を用いて、貼り付け速度10mm/min、貼り付け温度40℃にて、フィルム状接着剤付きダイシングテープのフィルム状接着剤上に、ミラーシリコンウエハを貼り合わせた。
貼り合わせにより得られたものを、ダイサー((株)DISCO製のDFD−6361)を用いて、10mm×10mm□にダイシング(個片化)し、個片を得た。ダイボンダー(株)新川製のSPA−300)を用いて、120℃、0.1MPa、1秒にて、個片(チップ及びフィルム状接着剤からなる個片)をリードフレームにダイアタッチした。ダイアタッチ後に個片の側面を走査型電子顕微鏡で観察し、個片とリードフレームの間に隙間が無ければ「無」と判定し、隙間があれば「有」と判定した。
ウエハマウンター(日東精機(株)製のMA−3000III)を用いて、貼り付け速度10mm/min、貼り付け温度40℃にて、フィルム状接着剤付きダイシングテープのフィルム状接着剤上に、ミラーシリコンウエハを貼り合わせた。
貼り合わせにより得られたものを、ダイサー((株)DISCO製のDFD−6361)を用いて、10×10mm□にダイシング(個片化)し、個片を得た。ダイボンダー((株)新川製のSPA−300)を用いて、120℃、0.4MPa、1秒にて、個片(チップ及びフィルム状接着剤からなる個片)をリードフレームにダイアタッチした。ダイアタッチ後に光学顕微鏡を用いて、上面から個片を観察し、チップの端面からフィルム状接着剤がはみ出した距離(はみ出し距離)を測定した。
フィルム状接着剤付きダイシングテープからフィルム状接着剤を分離して、厚みが300μmになるまでフィルム状接着剤を重ね合わせて、フィルム状接着剤からなる積層体を作製した。この積層体から幅10mmの短冊状のサンプルを切り出した。
このサンプルについて、動的粘弾性測定装置(レオメトリクスサイエンティフィク社製のRSAIII)を用いて、チャック間距離20mm、昇温速度10℃/分、引張測定モードにて0〜50℃で測定し、25℃時の貯蔵弾性率を求めた。
フィルム状接着剤付きダイシングテープのフィルム状接着剤上に、保持目的にポリエステル粘着テープ(日東電工(株)製のBT−315)を貼り合わせた後、100mm×100mm幅で切断し、サンプルを作製した。このサンプルについて、剥離速度300mm/min、剥離温度25℃でTピールにてダイシングテープからフィルム状接着剤を剥離し、剥離力を測定した。
以下の全ての条件を満たす場合を○と判定し、いずれかひとつでも満たさない場合を×と判定した。
条件(1):低温貼りつき性評価(1)の判定結果が○である。
条件(2):低温貼りつき性評価(2)で測定した密着力が0.5N/10mm以上である。
条件(3):接着性評価の判定結果が「無」である。
条件(4):はみ出し評価で測定したはみ出し距離が100μm以下である。
条件(5):25℃の貯蔵弾性率評価の測定結果が、5MPa以上である。
条件(6):フィルム状接着剤とダイシングテープ間の剥離力測定の測定結果が、0.01〜3.00N/20mmである。
2 粘着剤層
3、3’ フィルム状接着剤
4 半導体ウエハ
5 半導体チップ
6 被着体
7 ボンディングワイヤー
8 封止樹脂
10、12 フィルム状接着剤付きダイシングテープ
11 ダイシングテープ
Claims (11)
- 熱可塑性樹脂及び導電性粒子を含み、
ミラーシリコンウエハへ40℃で貼りつけた後、25℃で測定した密着力が0.5N/10mm以上であるフィルム状接着剤。 - 前記熱可塑性樹脂のガラス転移温度が−40〜−10℃である請求項1に記載のフィルム状接着剤。
- 硬化性樹脂を含む請求項1又は2に記載のフィルム状接着剤。
- 前記硬化性樹脂は、25℃で固形の硬化性樹脂及び25℃で液状の硬化性樹脂を含み、
25℃で固形の硬化性樹脂の重量/25℃で液状の硬化性樹脂の重量
で表される重量比率が、49/51〜10/90である請求項3に記載のフィルム状接着剤。 - 厚みが5〜100μmである請求項1〜4のいずれかに記載のフィルム状接着剤。
- 25℃における貯蔵弾性率が5MPa以上である請求項1〜5のいずれかに記載のフィルム状接着剤。
- ダイアタッチフィルムとして使用される請求項1〜6のいずれかに記載のフィルム状接着剤。
- 請求項1〜7のいずれかに記載のフィルム状接着剤が、ダイシングテープ上に積層されているフィルム状接着剤付きダイシングテープ。
- 剥離温度25℃、剥離速度300mm/minの条件下で、前記フィルム状接着剤を前記ダイシングテープから引き剥がしたときの剥離力が0.01〜3.00N/20mmである請求項8に記載のフィルム状接着剤付きダイシングテープ。
- 請求項1〜7のいずれかに記載のフィルム状接着剤を用いて半導体チップを被着体にダイアタッチする工程を含む半導体装置の製造方法。
- 請求項10に記載の製造方法により得られる半導体装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
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JP2014001514A JP6542504B2 (ja) | 2013-02-20 | 2014-01-08 | フィルム状接着剤、フィルム状接着剤付きダイシングテープ、半導体装置の製造方法、及び半導体装置 |
KR1020140008968A KR102062409B1 (ko) | 2013-02-20 | 2014-01-24 | 필름형 접착제, 필름형 접착제를 지닌 다이싱 테이프, 반도체 장치의 제조 방법 및 반도체 장치 |
TW103105325A TWI615452B (zh) | 2013-02-20 | 2014-02-18 | 膜狀接著劑、附膜狀接著劑之切晶帶、半導體裝置之製造方法及半導體裝置 |
CN201410054163.8A CN103992755A (zh) | 2013-02-20 | 2014-02-18 | 膜状胶粘剂、带有膜状胶粘剂的切割胶带、半导体装置的制造方法、及半导体装置 |
US14/183,823 US9484240B2 (en) | 2013-02-20 | 2014-02-19 | Film adhesive, dicing tape with film adhesive, method of manufacturing semiconductor device, and semiconductor device |
EP14155678.7A EP2770032A3 (en) | 2013-02-20 | 2014-02-19 | Film adhesive, dicing tape with film adhesive, method of manufacturing semiconductor device, and semiconductor device |
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- 2014-02-18 CN CN201410054163.8A patent/CN103992755A/zh active Pending
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WO2017082926A1 (en) * | 2015-11-13 | 2017-05-18 | Intel Corporation | Apparatus and method for mitigating surface imperfections on die backside film |
US10546823B2 (en) | 2015-11-13 | 2020-01-28 | Intel Corporation | Apparatus and method for mitigating surface imperfections on die backside film using fluorocarbon material |
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US9484240B2 (en) | 2016-11-01 |
EP2770032A2 (en) | 2014-08-27 |
US20140231983A1 (en) | 2014-08-21 |
CN103992755A (zh) | 2014-08-20 |
EP2770032A3 (en) | 2017-07-19 |
KR102062409B1 (ko) | 2020-01-03 |
TWI615452B (zh) | 2018-02-21 |
KR20140104346A (ko) | 2014-08-28 |
TW201437311A (zh) | 2014-10-01 |
JP6542504B2 (ja) | 2019-07-10 |
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