JP2014177683A - 基板搬送トレイ、及び成膜装置 - Google Patents

基板搬送トレイ、及び成膜装置 Download PDF

Info

Publication number
JP2014177683A
JP2014177683A JP2013053259A JP2013053259A JP2014177683A JP 2014177683 A JP2014177683 A JP 2014177683A JP 2013053259 A JP2013053259 A JP 2013053259A JP 2013053259 A JP2013053259 A JP 2013053259A JP 2014177683 A JP2014177683 A JP 2014177683A
Authority
JP
Japan
Prior art keywords
substrate
tray
transport
transport tray
substrate transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2013053259A
Other languages
English (en)
Japanese (ja)
Inventor
Makoto Maehara
誠 前原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to JP2013053259A priority Critical patent/JP2014177683A/ja
Priority to TW102142841A priority patent/TW201434725A/zh
Priority to KR1020130147070A priority patent/KR20140113289A/ko
Priority to CN201310643678.7A priority patent/CN104046952A/zh
Publication of JP2014177683A publication Critical patent/JP2014177683A/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6734—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders specially adapted for supporting large square shaped substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Physical Vapour Deposition (AREA)
JP2013053259A 2013-03-15 2013-03-15 基板搬送トレイ、及び成膜装置 Pending JP2014177683A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013053259A JP2014177683A (ja) 2013-03-15 2013-03-15 基板搬送トレイ、及び成膜装置
TW102142841A TW201434725A (zh) 2013-03-15 2013-11-25 基板傳送托盤及成膜裝置
KR1020130147070A KR20140113289A (ko) 2013-03-15 2013-11-29 기판반송트레이, 및 성막장치
CN201310643678.7A CN104046952A (zh) 2013-03-15 2013-12-03 基板传送托盘及成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013053259A JP2014177683A (ja) 2013-03-15 2013-03-15 基板搬送トレイ、及び成膜装置

Publications (1)

Publication Number Publication Date
JP2014177683A true JP2014177683A (ja) 2014-09-25

Family

ID=51500338

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013053259A Pending JP2014177683A (ja) 2013-03-15 2013-03-15 基板搬送トレイ、及び成膜装置

Country Status (4)

Country Link
JP (1) JP2014177683A (ko)
KR (1) KR20140113289A (ko)
CN (1) CN104046952A (ko)
TW (1) TW201434725A (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106746720B (zh) * 2016-12-02 2019-01-22 徐州市凯诺机械有限公司 一种玻璃基板镀膜机构
CN109207954B (zh) * 2018-10-19 2021-04-20 布勒莱宝光学设备（北京）有限公司 多色膜玻璃及其生产方法与设备
CN113122827A (zh) * 2021-03-19 2021-07-16 苏州晟成光伏设备有限公司 一种制备背钝化太阳能电池的设备及其工艺
CN113445050B (zh) * 2021-05-27 2024-03-26 苏州晟成光伏设备有限公司 一种制备Topcon太阳能电池的设备

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3659824B2 (ja) * 1998-11-17 2005-06-15 三菱重工業株式会社 基板搬送装置
KR100639004B1 (ko) * 2005-01-05 2006-10-26 삼성에스디아이 주식회사 트레이의 감지 및 이송장치
JPWO2011024853A1 (ja) * 2009-08-26 2013-01-31 キヤノンアネルバ株式会社 成膜装置
JP5639431B2 (ja) * 2010-09-30 2014-12-10 キヤノントッキ株式会社 成膜装置

Also Published As

Publication number Publication date
KR20140113289A (ko) 2014-09-24
TW201434725A (zh) 2014-09-16
CN104046952A (zh) 2014-09-17

Similar Documents

Publication Publication Date Title
JP2014177683A (ja) 基板搬送トレイ、及び成膜装置
JP2008512565A5 (ko)
TWI444496B (zh) Vacuum processing device
JP2007051001A (ja) 薄板状材料の搬送方法及び装置
JP2014078601A (ja) 成膜装置用基板搬送トレイ、及び外部開閉駆動装置
WO2014057736A1 (ja) ガラス板搬送装置及びガラス板搬送方法
JP4629007B2 (ja) 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置
JP2014077170A (ja) 成膜装置
JP2016211030A (ja) 真空処理装置
JP2010155683A (ja) 基板搬送機構および基板処理装置
KR101511179B1 (ko) 성막장치, 및 성막장치용 반송트레이
JP2014078602A (ja) 基板搬送トレイ起伏装置
JP4976358B2 (ja) 基板乾燥装置
KR101071268B1 (ko) 기판 이송 장치
US20220018014A1 (en) Vacuum processing apparatus
JP4582628B2 (ja) 縦型基板搬送機構及びこれを備えた基板搬送装置
JP2015206576A (ja) 脱ガス装置
JP2014078600A (ja) 成膜装置
KR101040696B1 (ko) 기판 이송 장치
JP5759756B2 (ja) ボール供給装置、及びボール供給方法
JP6803654B2 (ja) ガラス基板の検査装置
JP7212662B2 (ja) 搬送装置、成膜装置、成膜方法および電子デバイスの製造方法
JP2012001283A (ja) 基板搬送装置及び真空処理装置
KR101040695B1 (ko) 기판 이송 장치
JP2021068798A (ja) 基材処理装置