JP2014170955A5 - - Google Patents

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Publication number
JP2014170955A5
JP2014170955A5 JP2014091352A JP2014091352A JP2014170955A5 JP 2014170955 A5 JP2014170955 A5 JP 2014170955A5 JP 2014091352 A JP2014091352 A JP 2014091352A JP 2014091352 A JP2014091352 A JP 2014091352A JP 2014170955 A5 JP2014170955 A5 JP 2014170955A5
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JP
Japan
Prior art keywords
optical system
light
predetermined pattern
photosensitive substrate
illumination
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Application number
JP2014091352A
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English (en)
Japanese (ja)
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JP5839076B2 (ja
JP2014170955A (ja
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Priority to JP2014091352A priority Critical patent/JP5839076B2/ja
Priority claimed from JP2014091352A external-priority patent/JP5839076B2/ja
Publication of JP2014170955A publication Critical patent/JP2014170955A/ja
Publication of JP2014170955A5 publication Critical patent/JP2014170955A5/ja
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Publication of JP5839076B2 publication Critical patent/JP5839076B2/ja
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JP2014091352A 2014-04-25 2014-04-25 照明光学系、露光装置、およびデバイス製造方法 Active JP5839076B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014091352A JP5839076B2 (ja) 2014-04-25 2014-04-25 照明光学系、露光装置、およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014091352A JP5839076B2 (ja) 2014-04-25 2014-04-25 照明光学系、露光装置、およびデバイス製造方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2013173480A Division JP5534276B2 (ja) 2013-08-23 2013-08-23 照明光学系、露光装置、およびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2014170955A JP2014170955A (ja) 2014-09-18
JP2014170955A5 true JP2014170955A5 (enExample) 2014-10-30
JP5839076B2 JP5839076B2 (ja) 2016-01-06

Family

ID=51693077

Family Applications (1)

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JP2014091352A Active JP5839076B2 (ja) 2014-04-25 2014-04-25 照明光学系、露光装置、およびデバイス製造方法

Country Status (1)

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JP (1) JP5839076B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB201713740D0 (en) 2017-08-25 2017-10-11 Nkt Photonics As Depolarizing homogenizer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4936499B2 (ja) * 2004-06-21 2012-05-23 株式会社ニコン 露光装置および露光方法
TWI453795B (zh) * 2005-01-21 2014-09-21 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法
JP2007048871A (ja) * 2005-08-09 2007-02-22 Nikon Corp 照明光学装置、露光装置及びマイクロデバイスの製造方法
JP2007048996A (ja) * 2005-08-11 2007-02-22 Nikon Corp 照明光学装置の調整方法、照明光学装置、露光装置、およびデバイスの製造方法
JP4185102B2 (ja) * 2006-02-14 2008-11-26 株式会社東芝 露光装置
JP2008016516A (ja) * 2006-07-03 2008-01-24 Canon Inc 露光装置
JP2009033045A (ja) * 2007-07-30 2009-02-12 Canon Inc 調整方法、露光方法、デバイス製造方法及び露光装置
JP4952801B2 (ja) * 2010-01-12 2012-06-13 株式会社ニコン 照明光学系、露光装置および露光方法

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