SG10201803820SA - Three-Dimensional Imaging Using a Multi-Phase Projector - Google Patents

Three-Dimensional Imaging Using a Multi-Phase Projector

Info

Publication number
SG10201803820SA
SG10201803820SA SG10201803820SA SG10201803820SA SG10201803820SA SG 10201803820S A SG10201803820S A SG 10201803820SA SG 10201803820S A SG10201803820S A SG 10201803820SA SG 10201803820S A SG10201803820S A SG 10201803820SA SG 10201803820S A SG10201803820S A SG 10201803820SA
Authority
SG
Singapore
Prior art keywords
light
polarized
light source
dimensional imaging
polarization direction
Prior art date
Application number
SG10201803820SA
Inventor
Wui Fung Sze
Lei Song
Jiangwen Deng
Original Assignee
Asm Tech Singapore Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asm Tech Singapore Pte Ltd filed Critical Asm Tech Singapore Pte Ltd
Publication of SG10201803820SA publication Critical patent/SG10201803820SA/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G03B15/02—Illuminating scene
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2531—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object using several gratings, projected with variable angle of incidence on the object, and one detection device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B35/00—Stereoscopic photography
    • G03B35/08—Stereoscopic photography by simultaneous recording
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/521—Depth or shape recovery from laser ranging, e.g. using interferometry; from the projection of structured light
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10024—Color image
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10141—Special mode during image acquisition
    • G06T2207/10152—Varying illumination
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30164—Workpiece; Machine component

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

THREE-DIMENSIONAL IMAGING USING A MULTI-PHASE PROJECTOR 5 An apparatus for inspecting a surface of an object has a first light source operative to illuminate the object without producing a patterned image onto the object. A second light source projects a patterned image produced from a first polarized light from the second light source onto the object, wherein the first polarized light is polarized in a first polarization direction. A third light 10 source projects the patterned image produced from a second polarized light from the third light source onto the object, wherein the second polarized light is polarized in a second polarization direction different from the first polarization direction. An imaging device views the surface of the object when the object is illuminated separately by the first, second and third light sources 15 respectively for determining a profile of the surface of the object. (FIG. 1) 20
SG10201803820SA 2017-05-22 2018-05-05 Three-Dimensional Imaging Using a Multi-Phase Projector SG10201803820SA (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US15/601,036 US10036630B1 (en) 2017-05-22 2017-05-22 Three-dimensional imaging using a multi-phase projector

Publications (1)

Publication Number Publication Date
SG10201803820SA true SG10201803820SA (en) 2018-12-28

Family

ID=62948539

Family Applications (1)

Application Number Title Priority Date Filing Date
SG10201803820SA SG10201803820SA (en) 2017-05-22 2018-05-05 Three-Dimensional Imaging Using a Multi-Phase Projector

Country Status (3)

Country Link
US (1) US10036630B1 (en)
CN (1) CN108957910B (en)
SG (1) SG10201803820SA (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017060014A1 (en) * 2015-10-08 2017-04-13 Asml Netherlands B.V. Topography measurement system
KR20220004771A (en) * 2019-06-28 2022-01-11 주식회사 고영테크놀러지 Apparatus and method for determining a three-dimensional shape of an object
CN110542392A (en) * 2019-09-06 2019-12-06 深圳中科飞测科技有限公司 Detection equipment and detection method
US11450083B2 (en) * 2019-09-27 2022-09-20 Honeywell International Inc. Dual-pattern optical 3D dimensioning
US11252386B1 (en) * 2020-10-23 2022-02-15 Himax Technologies Limited Structured-light scanning system and method
JP2024509390A (en) * 2021-02-23 2024-03-01 ホアウェイ・テクノロジーズ・カンパニー・リミテッド Optical systems, devices, and terminals

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2301822A1 (en) 2000-03-24 2001-09-24 9071 9410 Quebec Inc. Simultaneous projection of several patterns with simultaneous acquisition for inspection of objects in three-dimensions
TWI426296B (en) * 2009-06-19 2014-02-11 Ind Tech Res Inst Method and system for three-dimensional polarization-based confocal microscopy
CN202057901U (en) * 2011-04-27 2011-11-30 上海丽恒光微电子科技有限公司 Stereo projection system
TWI485361B (en) * 2013-09-11 2015-05-21 Univ Nat Taiwan Measuring apparatus for three-dimensional profilometry and method thereof
US10659699B2 (en) * 2014-07-09 2020-05-19 Asm Technology Singapore Pte Ltd Apparatus and method for reconstructing a three-dimensional profile of a target surface
CN104848803B (en) * 2015-05-04 2017-07-21 香港应用科技研究院有限公司 A kind of method and system of detection object surface profile
CN204902786U (en) * 2015-05-26 2015-12-23 东莞市盟拓光电科技有限公司 Can reduce three -dimensional measurement system of measured object surface reflection of light

Also Published As

Publication number Publication date
CN108957910B (en) 2022-02-11
US10036630B1 (en) 2018-07-31
CN108957910A (en) 2018-12-07

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