JP2007220767A5 - - Google Patents

Download PDF

Info

Publication number
JP2007220767A5
JP2007220767A5 JP2006037422A JP2006037422A JP2007220767A5 JP 2007220767 A5 JP2007220767 A5 JP 2007220767A5 JP 2006037422 A JP2006037422 A JP 2006037422A JP 2006037422 A JP2006037422 A JP 2006037422A JP 2007220767 A5 JP2007220767 A5 JP 2007220767A5
Authority
JP
Japan
Prior art keywords
polarization
exposure apparatus
optical system
unit
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2006037422A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007220767A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006037422A priority Critical patent/JP2007220767A/ja
Priority claimed from JP2006037422A external-priority patent/JP2007220767A/ja
Priority to US11/675,204 priority patent/US7508493B2/en
Priority to KR1020070015765A priority patent/KR100856976B1/ko
Priority to EP07003213A priority patent/EP1821149A3/en
Priority to TW096105986A priority patent/TW200745772A/zh
Publication of JP2007220767A publication Critical patent/JP2007220767A/ja
Publication of JP2007220767A5 publication Critical patent/JP2007220767A5/ja
Abandoned legal-status Critical Current

Links

JP2006037422A 2006-02-15 2006-02-15 露光装置及びデバイス製造方法 Abandoned JP2007220767A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006037422A JP2007220767A (ja) 2006-02-15 2006-02-15 露光装置及びデバイス製造方法
US11/675,204 US7508493B2 (en) 2006-02-15 2007-02-15 Exposure apparatus and device manufacturing method
KR1020070015765A KR100856976B1 (ko) 2006-02-15 2007-02-15 노광장치 및 디바이스 제조방법
EP07003213A EP1821149A3 (en) 2006-02-15 2007-02-15 Exposure apparatus and device manufacturing method
TW096105986A TW200745772A (en) 2006-02-15 2007-02-15 Exposure apparatus and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006037422A JP2007220767A (ja) 2006-02-15 2006-02-15 露光装置及びデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007220767A JP2007220767A (ja) 2007-08-30
JP2007220767A5 true JP2007220767A5 (enExample) 2009-04-02

Family

ID=38171301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006037422A Abandoned JP2007220767A (ja) 2006-02-15 2006-02-15 露光装置及びデバイス製造方法

Country Status (5)

Country Link
US (1) US7508493B2 (enExample)
EP (1) EP1821149A3 (enExample)
JP (1) JP2007220767A (enExample)
KR (1) KR100856976B1 (enExample)
TW (1) TW200745772A (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101547077B1 (ko) 2003-04-09 2015-08-25 가부시키가이샤 니콘 노광 방법 및 장치, 그리고 디바이스 제조 방법
TWI569308B (zh) 2003-10-28 2017-02-01 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法
TWI385414B (zh) 2003-11-20 2013-02-11 尼康股份有限公司 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法
TWI395068B (zh) 2004-01-27 2013-05-01 尼康股份有限公司 光學系統、曝光裝置以及曝光方法
TWI379344B (en) 2004-02-06 2012-12-11 Nikon Corp Polarization changing device, optical illumination apparatus, light-exposure apparatus and light-exposure method
JP2008108851A (ja) * 2006-10-24 2008-05-08 Canon Inc 照明装置及び当該照明装置を有する露光装置、並びに、デバイス製造方法
US7952685B2 (en) * 2007-03-15 2011-05-31 Carl Zeiss Smt Ag Illuminator for a lithographic apparatus and method
WO2008119794A1 (en) 2007-04-03 2008-10-09 Carl Zeiss Smt Ag Optical system, in particular illumination device or projection objective of a microlithographic projection exposure apparatus
JP4971932B2 (ja) * 2007-10-01 2012-07-11 キヤノン株式会社 照明光学系、露光装置、デバイス製造方法および偏光制御ユニット
NL1036407A1 (nl) * 2008-01-23 2009-07-27 Asml Netherlands Bv Polarization control apparatus and method.
JP2009206373A (ja) * 2008-02-28 2009-09-10 Canon Inc 露光装置及びデバイス製造方法
TW200938957A (en) * 2008-03-05 2009-09-16 Nanya Technology Corp Feedback system and feedback method for controlling power ratio of light source
JP5319766B2 (ja) * 2008-06-20 2013-10-16 カール・ツァイス・エスエムティー・ゲーエムベーハー マイクロリソグラフィ投影露光装置の光学系及びマイクロリソグラフィ露光方法
DE102008040611A1 (de) * 2008-07-22 2010-01-28 Carl Zeiss Smt Ag Verfahren zum Modifizieren einer Polarisationsverteilung in einer mikrolithographischen Projektionsbelichtungsanlage, sowie mikrolithographische Projektionsbelichtungsanlage
US20110144505A1 (en) * 2008-08-20 2011-06-16 Masaki Yamamoto Optical device and method for shape and gradient detection and/or measurement and associated device
JP2011014707A (ja) * 2009-07-01 2011-01-20 Canon Inc 露光装置およびデバイス製造方法
DE102011003035A1 (de) * 2010-02-08 2011-08-11 Carl Zeiss SMT GmbH, 73447 Polarisationsbeeinflussende optische Anordnung, sowie optisches System einer mikrolithographischen Projektionsbelichtungsanlage
NL2005958A (en) * 2010-02-09 2011-08-10 Asml Netherlands Bv Lithographic method and apparatus.
DE102010029905A1 (de) 2010-06-10 2011-12-15 Carl Zeiss Smt Gmbh Optisches System einer mikrolithographischen Projektionsbelichtungsanlage
WO2012041339A1 (en) * 2010-09-28 2012-04-05 Carl Zeiss Smt Gmbh Optical system of a microlithographic projection exposure apparatus and method of reducing image placement errors
TWI519816B (zh) 2011-06-13 2016-02-01 尼康股份有限公司 照明光學系統、曝光裝置以及元件製造方法
US9732934B2 (en) 2011-10-28 2017-08-15 Nikon Corporation Illumination device for optimizing polarization in an illumination pupil
DE102012203944A1 (de) * 2012-03-14 2013-10-02 Carl Zeiss Smt Gmbh Verfahren zur Justage eines optischen Systems einer mikrolithographischen Projektionsbelichtungsanlage
US10133184B2 (en) * 2012-04-25 2018-11-20 Nikon Corporation Using customized lens pupil optimization to enhance lithographic imaging in a source-mask optimization scheme

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100426097B1 (ko) * 2002-04-30 2004-04-06 삼성전자주식회사 포토닉 크리스탈을 이용한 편광변환장치 및 이를 이용한디스플레이장치
JP3689681B2 (ja) 2002-05-10 2005-08-31 キヤノン株式会社 測定装置及びそれを有する装置群
TW200412617A (en) * 2002-12-03 2004-07-16 Nikon Corp Optical illumination device, method for adjusting optical illumination device, exposure device and exposure method
US20040248043A1 (en) * 2003-06-03 2004-12-09 Nikon Corporation Exposure method, exposure apparatus and device manufacturing method
JP4323903B2 (ja) * 2003-09-12 2009-09-02 キヤノン株式会社 照明光学系及びそれを用いた露光装置
JP4470095B2 (ja) * 2003-11-20 2010-06-02 株式会社ニコン 照明光学装置、露光装置および露光方法
JP4552428B2 (ja) 2003-12-02 2010-09-29 株式会社ニコン 照明光学装置、投影露光装置、露光方法及びデバイス製造方法
JP4497968B2 (ja) * 2004-03-18 2010-07-07 キヤノン株式会社 照明装置、露光装置及びデバイス製造方法
JP4776891B2 (ja) * 2004-04-23 2011-09-21 キヤノン株式会社 照明光学系、露光装置、及びデバイス製造方法
TWI423301B (zh) * 2005-01-21 2014-01-11 尼康股份有限公司 照明光學裝置、曝光裝置、曝光方法以及元件製造方法

Similar Documents

Publication Publication Date Title
JP2007220767A5 (enExample)
JP2005268489A5 (enExample)
TW200745772A (en) Exposure apparatus and device manufacturing method
JP2006019702A5 (enExample)
JP2007035671A5 (enExample)
JP2011003908A5 (enExample)
KR101737680B1 (ko) 기판 처리 장치, 디바이스 제조 시스템 및 디바이스 제조 방법
JP2005093522A5 (enExample)
TWI707211B (zh) 圖案曝光裝置
JP2010192914A5 (enExample)
TW200717186A (en) Exposure apparatus and method
CN102939566B (zh) 微光刻投射曝光设备的光学系统
JP2009527113A5 (enExample)
JP2005236088A5 (enExample)
JP2011029655A5 (enExample)
JP2008171960A5 (enExample)
JP2015132848A5 (ja) 照明光学系、露光装置、照明方法、露光方法、およびデバイス製造方法
EP1331519A3 (en) Exposure control
US20090135397A1 (en) Illumination system of a microlithographic projection exposure apparatus
JP2009016761A5 (enExample)
JP2009036916A5 (enExample)
JP2005244126A5 (enExample)
JP2009021450A5 (enExample)
JP2005156592A5 (enExample)
JP2007158225A5 (enExample)