JP2014143398A5 - - Google Patents
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- Publication number
- JP2014143398A5 JP2014143398A5 JP2013247176A JP2013247176A JP2014143398A5 JP 2014143398 A5 JP2014143398 A5 JP 2014143398A5 JP 2013247176 A JP2013247176 A JP 2013247176A JP 2013247176 A JP2013247176 A JP 2013247176A JP 2014143398 A5 JP2014143398 A5 JP 2014143398A5
- Authority
- JP
- Japan
- Prior art keywords
- barrier structure
- multilayer barrier
- layers
- layer
- binary compound
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 claims 9
- 230000004888 barrier function Effects 0.000 claims 8
- 239000002184 metal Substances 0.000 claims 7
- 239000000956 alloy Substances 0.000 claims 6
- 229910045601 alloy Inorganic materials 0.000 claims 6
- 150000001875 compounds Chemical class 0.000 claims 6
- 230000005294 ferromagnetic effect Effects 0.000 claims 4
- 230000005415 magnetization Effects 0.000 claims 3
- 238000000151 deposition Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/690,532 US9034491B2 (en) | 2012-11-30 | 2012-11-30 | Low resistance area magnetic stack |
| US13/690,532 | 2012-11-30 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2014143398A JP2014143398A (ja) | 2014-08-07 |
| JP2014143398A5 true JP2014143398A5 (enExample) | 2014-10-09 |
| JP5908882B2 JP5908882B2 (ja) | 2016-04-26 |
Family
ID=49667095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013247176A Active JP5908882B2 (ja) | 2012-11-30 | 2013-11-29 | 磁気スタックおよび磁気素子を含む装置 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9034491B2 (enExample) |
| EP (1) | EP2738770B1 (enExample) |
| JP (1) | JP5908882B2 (enExample) |
| KR (1) | KR101536629B1 (enExample) |
| CN (1) | CN103854673B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9218826B1 (en) * | 2013-08-16 | 2015-12-22 | Seagate Technology Llc | Tuned horizontally symmetric magnetic stack |
| TWI569484B (zh) * | 2014-01-24 | 2017-02-01 | 國立臺灣大學 | 具超晶格勢壘之磁穿隧接面及包含具超晶格勢壘磁穿隧接面之裝置 |
| DE102016100750A1 (de) * | 2016-01-18 | 2017-07-20 | Airbus Operations Gmbh | Fahrzeugrumpf und Verfahren zur Montage eines Fahrzeugrumpfs |
| US9856557B1 (en) | 2016-01-22 | 2018-01-02 | Seagate Technology Llc | Fabrication of a multi-layered magnetic element |
Family Cites Families (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3657916B2 (ja) * | 2001-02-01 | 2005-06-08 | 株式会社東芝 | 磁気抵抗効果ヘッドおよび垂直磁気記録再生装置 |
| US6847509B2 (en) * | 2001-02-01 | 2005-01-25 | Kabushiki Kaisha Toshiba | Magnetoresistive head and perpendicular magnetic recording-reproducing apparatus |
| US6347049B1 (en) * | 2001-07-25 | 2002-02-12 | International Business Machines Corporation | Low resistance magnetic tunnel junction device with bilayer or multilayer tunnel barrier |
| JP3749873B2 (ja) * | 2002-03-28 | 2006-03-01 | 株式会社東芝 | 磁気抵抗効果素子、磁気ヘッド及び磁気再生装置 |
| US6849464B2 (en) * | 2002-06-10 | 2005-02-01 | Micron Technology, Inc. | Method of fabricating a multilayer dielectric tunnel barrier structure |
| US6743642B2 (en) * | 2002-11-06 | 2004-06-01 | International Business Machines Corporation | Bilayer CMP process to improve surface roughness of magnetic stack in MRAM technology |
| US7780820B2 (en) * | 2005-11-16 | 2010-08-24 | Headway Technologies, Inc. | Low resistance tunneling magnetoresistive sensor with natural oxidized double MgO barrier |
| SE531384C2 (sv) * | 2006-02-10 | 2009-03-17 | Vnk Innovation Ab | Multipla magnetoresistansanordningar baserade på metalldopad magnesiumoxid |
| JP4496189B2 (ja) * | 2006-09-28 | 2010-07-07 | 株式会社東芝 | 磁気抵抗効果型素子および磁気抵抗効果型ランダムアクセスメモリ |
| JP4343941B2 (ja) * | 2006-11-06 | 2009-10-14 | Tdk株式会社 | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリ、ハードディスク装置、および、磁気抵抗効果素子の製造方法 |
| JP4492604B2 (ja) * | 2006-11-10 | 2010-06-30 | Tdk株式会社 | 磁気抵抗効果素子、薄膜磁気ヘッド、ヘッドジンバルアセンブリおよびハードディスク装置 |
| US7929257B2 (en) * | 2007-02-23 | 2011-04-19 | Tdk Corporation | Magnetic thin film having spacer layer that contains CuZn |
| US7888756B2 (en) * | 2007-03-22 | 2011-02-15 | Everspin Technologies, Inc. | MRAM tunnel barrier structure and methods |
| JP2008263031A (ja) * | 2007-04-11 | 2008-10-30 | Toshiba Corp | 磁気抵抗効果素子とその製造方法、磁気抵抗効果素子を備えた磁気記憶装置とその製造方法 |
| JP4996390B2 (ja) * | 2007-08-28 | 2012-08-08 | 株式会社東芝 | スピンfet及び磁気抵抗効果素子 |
| JP4703660B2 (ja) * | 2008-01-11 | 2011-06-15 | 株式会社東芝 | スピンmos電界効果トランジスタ |
| US8289663B2 (en) | 2008-04-25 | 2012-10-16 | Headway Technologies, Inc. | Ultra low RA (resistance x area) sensors having a multilayer non-magnetic spacer between pinned and free layers |
| WO2010026667A1 (en) * | 2008-09-03 | 2010-03-11 | Canon Anelva Corporation | Ferromagnetic preferred grain growth promotion seed layer for amorphous or microcrystalline mgo tunnel barrier |
| JP2010080839A (ja) * | 2008-09-29 | 2010-04-08 | Toshiba Corp | 磁気抵抗効果素子の製造方法、磁気抵抗効果素子、磁気ヘッドアセンブリおよび磁気記録再生装置 |
| JP2010109319A (ja) * | 2008-09-30 | 2010-05-13 | Canon Anelva Corp | 磁気抵抗素子の製造法および記憶媒体 |
| US8031445B2 (en) * | 2008-10-08 | 2011-10-04 | Headway Technologies, Inc. | Low noise magneto-resistive sensor utilizing magnetic noise cancellation |
| WO2010140980A1 (en) | 2009-06-02 | 2010-12-09 | Agency For Science, Technology And Research | Multilayer barrier film |
| TWI440236B (zh) * | 2009-12-28 | 2014-06-01 | Canon Anelva Corp | Method for manufacturing magnetoresistive elements |
| US8659855B2 (en) * | 2010-03-19 | 2014-02-25 | Seagate Technology Llc | Trilayer reader with current constraint at the ABS |
| US8202572B2 (en) * | 2010-11-22 | 2012-06-19 | Headway Technologies, Inc. | TMR device with improved MgO barrier |
| US8427791B2 (en) | 2010-11-23 | 2013-04-23 | HGST Netherlands B.V. | Magnetic tunnel junction having a magnetic insertion layer and methods of producing the same |
| US8405935B2 (en) * | 2010-12-28 | 2013-03-26 | Tdk Corporation | Magneto-resistive effect element having spacer layer including main spacer layer containing gallium oxide and nonmagnetic layer |
| US8570691B2 (en) | 2011-04-07 | 2013-10-29 | HGST Netherlands B.V. | TMR sensor film using a tantalum insertion layer and systems thereof |
| US8987006B2 (en) | 2011-04-22 | 2015-03-24 | Samsung Electronics Co., Ltd. | Method and system for providing a magnetic junction having an engineered barrier layer |
-
2012
- 2012-11-30 US US13/690,532 patent/US9034491B2/en active Active
-
2013
- 2013-11-22 KR KR1020130143042A patent/KR101536629B1/ko not_active Expired - Fee Related
- 2013-11-29 JP JP2013247176A patent/JP5908882B2/ja active Active
- 2013-11-29 CN CN201310629462.5A patent/CN103854673B/zh not_active Expired - Fee Related
- 2013-11-29 EP EP13195190.7A patent/EP2738770B1/en not_active Not-in-force
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