JP2014086579A5 - - Google Patents
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- Publication number
- JP2014086579A5 JP2014086579A5 JP2012234584A JP2012234584A JP2014086579A5 JP 2014086579 A5 JP2014086579 A5 JP 2014086579A5 JP 2012234584 A JP2012234584 A JP 2012234584A JP 2012234584 A JP2012234584 A JP 2012234584A JP 2014086579 A5 JP2014086579 A5 JP 2014086579A5
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- layer
- metal
- reflecting
- reflective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 7
- 229910052751 metal Inorganic materials 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 5
- 235000012239 silicon dioxide Nutrition 0.000 claims 4
- 239000010453 quartz Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 239000007769 metal material Substances 0.000 claims 2
- 239000011241 protective layer Substances 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 239000000377 silicon dioxide Substances 0.000 claims 1
- 230000003746 surface roughness Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261716062P | 2012-10-19 | 2012-10-19 | |
| US61/716,062 | 2012-10-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2014086579A JP2014086579A (ja) | 2014-05-12 |
| JP2014086579A5 true JP2014086579A5 (enExample) | 2015-12-10 |
Family
ID=50792615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012234584A Pending JP2014086579A (ja) | 2012-10-19 | 2012-10-24 | 真空チャンバ用反射部材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2014086579A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220124154A (ko) * | 2020-01-06 | 2022-09-13 | 샌트랄 글래스 컴퍼니 리미티드 | 금속 재료, 금속 재료의 제조 방법, 반도체 처리 장치의 패시베이션 방법, 반도체 디바이스의 제조 방법, 및, 충전이 끝난 용기의 제조 방법 |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01303737A (ja) * | 1988-05-31 | 1989-12-07 | Canon Inc | 位置決め装置 |
| JPH04280430A (ja) * | 1991-03-08 | 1992-10-06 | Fuji Electric Co Ltd | プラズマ処理装置 |
| JPH05173005A (ja) * | 1991-12-19 | 1993-07-13 | Asahi Optical Co Ltd | アルミニウム表面反射鏡 |
| JPH07183361A (ja) * | 1993-12-24 | 1995-07-21 | Kokusai Electric Co Ltd | ウェーハ検知方法 |
| JPH0915407A (ja) * | 1995-06-29 | 1997-01-17 | Nikon Corp | 反射光学素子 |
| JPH09195034A (ja) * | 1996-01-09 | 1997-07-29 | Canon Inc | 光学素子の製造方法 |
| JPH10242233A (ja) * | 1997-02-26 | 1998-09-11 | Hitachi Ltd | 半導体製造方法 |
| JPH11145254A (ja) * | 1997-11-07 | 1999-05-28 | Nikon Corp | 基板角度位置検出装置 |
| JP4942880B2 (ja) * | 2001-03-14 | 2012-05-30 | 東京エレクトロン株式会社 | 熱処理装置 |
| DE102005028456A1 (de) * | 2005-06-17 | 2006-12-28 | Schott Ag | Metallreflektor und Verfahren zu dessen Herstellung |
| JP4785389B2 (ja) * | 2005-02-10 | 2011-10-05 | キヤノン株式会社 | 反射ミラー、露光装置及びデバイス製造方法 |
| JP2007157968A (ja) * | 2005-12-05 | 2007-06-21 | Yaskawa Electric Corp | 半導体ウエハ角度調整装置 |
| JP2007165655A (ja) * | 2005-12-14 | 2007-06-28 | Varian Semiconductor Equipment Associates Inc | ウエハ方向センサー |
| JP2009281990A (ja) * | 2008-05-26 | 2009-12-03 | Nikon Corp | 光学式エンコーダのスケール及びその製造方法 |
| JP2011186401A (ja) * | 2010-03-11 | 2011-09-22 | Nagoya City | アルミニウム反射鏡及びアルミニウム反射鏡の製造方法 |
| JP5413281B2 (ja) * | 2010-04-08 | 2014-02-12 | コニカミノルタ株式会社 | アルミニウム表面反射鏡 |
| JP5477133B2 (ja) * | 2010-04-09 | 2014-04-23 | 日新イオン機器株式会社 | ウェーハハンドリング方法およびイオン注入装置 |
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2012
- 2012-10-24 JP JP2012234584A patent/JP2014086579A/ja active Pending