JP2014033104A - 放熱部品及びその製造方法 - Google Patents

放熱部品及びその製造方法 Download PDF

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Publication number
JP2014033104A
JP2014033104A JP2012173143A JP2012173143A JP2014033104A JP 2014033104 A JP2014033104 A JP 2014033104A JP 2012173143 A JP2012173143 A JP 2012173143A JP 2012173143 A JP2012173143 A JP 2012173143A JP 2014033104 A JP2014033104 A JP 2014033104A
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Japan
Prior art keywords
carbon
plating layer
carbon nanotubes
carbon material
base material
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Pending
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JP2012173143A
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English (en)
Japanese (ja)
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JP2014033104A5 (enrdf_load_stackoverflow
Inventor
Kenji Kawamura
賢二 川村
Shuzo Aoki
周三 青木
Masao Nakazawa
昌夫 中沢
Yoriyuki Suwa
順之 諏訪
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Shinko Electric Industries Co Ltd
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Shinko Electric Industries Co Ltd
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Publication date
Application filed by Shinko Electric Industries Co Ltd filed Critical Shinko Electric Industries Co Ltd
Priority to JP2012173143A priority Critical patent/JP2014033104A/ja
Priority to US13/951,582 priority patent/US20140034282A1/en
Priority to TW102127221A priority patent/TW201423920A/zh
Priority to CN201310332818.9A priority patent/CN103579140A/zh
Publication of JP2014033104A publication Critical patent/JP2014033104A/ja
Publication of JP2014033104A5 publication Critical patent/JP2014033104A5/ja
Pending legal-status Critical Current

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/007Electroplating using magnetic fields, e.g. magnets
    • C25D5/009Deposition of ferromagnetic material
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B32/00Carbon; Compounds thereof
    • C01B32/15Nano-sized carbon materials
    • C01B32/158Carbon nanotubes
    • C01B32/16Preparation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1646Characteristics of the product obtained
    • C23C18/165Multilayered product
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1655Process features
    • C23C18/1662Use of incorporated material in the solution or dispersion, e.g. particles, whiskers, wires
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/1601Process or apparatus
    • C23C18/1633Process of electroless plating
    • C23C18/1655Process features
    • C23C18/1664Process features with additional means during the plating process
    • C23C18/1673Magnetic field
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D15/00Electrolytic or electrophoretic production of coatings containing embedded materials, e.g. particles, whiskers, wires
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/007Electroplating using magnetic fields, e.g. magnets
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3736Metallic materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00Nanotechnology for materials or surface science, e.g. nanocomposites
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/20Nanotubes characterized by their properties
    • C01B2202/34Length
    • CCHEMISTRY; METALLURGY
    • C01INORGANIC CHEMISTRY
    • C01BNON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2202/00Structure or properties of carbon nanotubes
    • C01B2202/20Nanotubes characterized by their properties
    • C01B2202/36Diameter
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F21/00Constructions of heat-exchange apparatus characterised by the selection of particular materials
    • F28F21/02Constructions of heat-exchange apparatus characterised by the selection of particular materials of carbon, e.g. graphite
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F28HEAT EXCHANGE IN GENERAL
    • F28FDETAILS OF HEAT-EXCHANGE AND HEAT-TRANSFER APPARATUS, OF GENERAL APPLICATION
    • F28F3/00Plate-like or laminated elements; Assemblies of plate-like or laminated elements
    • F28F3/02Elements or assemblies thereof with means for increasing heat-transfer area, e.g. with fins, with recesses, with corrugations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Nanotechnology (AREA)
  • Dispersion Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
JP2012173143A 2012-08-03 2012-08-03 放熱部品及びその製造方法 Pending JP2014033104A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2012173143A JP2014033104A (ja) 2012-08-03 2012-08-03 放熱部品及びその製造方法
US13/951,582 US20140034282A1 (en) 2012-08-03 2013-07-26 Heat radiation component and method for manufacturing heat radiation component
TW102127221A TW201423920A (zh) 2012-08-03 2013-07-30 散熱元件及其製造方法
CN201310332818.9A CN103579140A (zh) 2012-08-03 2013-08-02 散热元件及其制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012173143A JP2014033104A (ja) 2012-08-03 2012-08-03 放熱部品及びその製造方法

Publications (2)

Publication Number Publication Date
JP2014033104A true JP2014033104A (ja) 2014-02-20
JP2014033104A5 JP2014033104A5 (enrdf_load_stackoverflow) 2015-09-10

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JP2012173143A Pending JP2014033104A (ja) 2012-08-03 2012-08-03 放熱部品及びその製造方法

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US (1) US20140034282A1 (enrdf_load_stackoverflow)
JP (1) JP2014033104A (enrdf_load_stackoverflow)
CN (1) CN103579140A (enrdf_load_stackoverflow)
TW (1) TW201423920A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016012448A (ja) * 2014-06-27 2016-01-21 Tdk株式会社 導電線
WO2017115832A1 (ja) * 2015-12-28 2017-07-06 日立造船株式会社 カーボンナノチューブ複合材およびカーボンナノチューブ複合材の製造方法
WO2017154885A1 (ja) * 2016-03-09 2017-09-14 日立造船株式会社 カーボンナノチューブ構造体の起毛方法、カーボンナノチューブ構造体の製造方法およびカーボンナノチューブ構造体

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9210806B2 (en) * 2004-06-02 2015-12-08 Joel S. Douglas Bondable conductive ink
JP6118540B2 (ja) * 2012-11-08 2017-04-19 新光電気工業株式会社 放熱部品及びその製造方法
WO2016180278A1 (zh) * 2015-05-08 2016-11-17 宁波信远工业集团有限公司 一种波热转化结构及其应用
JP6489979B2 (ja) * 2015-09-07 2019-03-27 新光電気工業株式会社 放熱部品及びその製造方法
US12035448B2 (en) * 2015-11-23 2024-07-09 Daniel Paul Hashim Dielectric heating of three-dimensional carbon nanostructured porous foams as a heat exchanger for volumetric heating of flowing fluids
US10082918B2 (en) 2016-11-08 2018-09-25 International Business Machines Corporation In-cell capacitive touch and fingerprint detector
FR3087938A1 (fr) * 2018-10-25 2020-05-01 Thales Interface de diffusion thermique

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005089836A (ja) * 2003-09-18 2005-04-07 Shinko Electric Ind Co Ltd 放熱部材及びその製造方法
JP2007532335A (ja) * 2004-04-13 2007-11-15 ユナイテッド ステイツ オブ アメリカ アズ リプリゼンティッド バイ ザ アドミニストレイター オブ ザ ナサ カーボンナノチューブ・アレイ複合材料をベースにするナノ加工熱材料
JP2010192661A (ja) * 2009-02-18 2010-09-02 Sumitomo Electric Ind Ltd 放熱部品とその製造方法、およびこれを用いた放熱装置と放熱方法

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US6340822B1 (en) * 1999-10-05 2002-01-22 Agere Systems Guardian Corp. Article comprising vertically nano-interconnected circuit devices and method for making the same
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JP5239768B2 (ja) * 2008-11-14 2013-07-17 富士通株式会社 放熱材料並びに電子機器及びその製造方法
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JP2005089836A (ja) * 2003-09-18 2005-04-07 Shinko Electric Ind Co Ltd 放熱部材及びその製造方法
JP2007532335A (ja) * 2004-04-13 2007-11-15 ユナイテッド ステイツ オブ アメリカ アズ リプリゼンティッド バイ ザ アドミニストレイター オブ ザ ナサ カーボンナノチューブ・アレイ複合材料をベースにするナノ加工熱材料
JP2010192661A (ja) * 2009-02-18 2010-09-02 Sumitomo Electric Ind Ltd 放熱部品とその製造方法、およびこれを用いた放熱装置と放熱方法

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016012448A (ja) * 2014-06-27 2016-01-21 Tdk株式会社 導電線
WO2017115832A1 (ja) * 2015-12-28 2017-07-06 日立造船株式会社 カーボンナノチューブ複合材およびカーボンナノチューブ複合材の製造方法
KR20180099695A (ko) * 2015-12-28 2018-09-05 히다치 조센 가부시키가이샤 카본나노튜브 복합재 및 카본나노튜브 복합재의 제조방법
JPWO2017115832A1 (ja) * 2015-12-28 2018-11-29 日立造船株式会社 カーボンナノチューブ複合材およびカーボンナノチューブ複合材の製造方法
US10836633B2 (en) 2015-12-28 2020-11-17 Hitachi Zosen Corporation Carbon nanotube composite material and method for producing carbon nanotube composite material
CN114133918A (zh) * 2015-12-28 2022-03-04 日立造船株式会社 碳纳米管复合材料以及碳纳米管复合材料的制造方法
US11414321B2 (en) 2015-12-28 2022-08-16 Hitachi Zosen Corporation Carbon nanotube composite material and method for producing carbon nanotube composite material
KR102570247B1 (ko) 2015-12-28 2023-08-23 히다치 조센 가부시키가이샤 카본나노튜브 복합재 및 카본나노튜브 복합재의 제조방법
WO2017154885A1 (ja) * 2016-03-09 2017-09-14 日立造船株式会社 カーボンナノチューブ構造体の起毛方法、カーボンナノチューブ構造体の製造方法およびカーボンナノチューブ構造体
JPWO2017154885A1 (ja) * 2016-03-09 2019-02-14 日立造船株式会社 カーボンナノチューブ構造体の起毛方法、カーボンナノチューブ構造体の製造方法およびカーボンナノチューブ構造体
US10710880B2 (en) 2016-03-09 2020-07-14 Hitachi Zosen Corporation Method for uplifting carbon nanotube structure, method for producing carbon nanotube structure, and carbon nanotube structure

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TW201423920A (zh) 2014-06-16
CN103579140A (zh) 2014-02-12
US20140034282A1 (en) 2014-02-06

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