JP2014022487A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2014022487A JP2014022487A JP2012158405A JP2012158405A JP2014022487A JP 2014022487 A JP2014022487 A JP 2014022487A JP 2012158405 A JP2012158405 A JP 2012158405A JP 2012158405 A JP2012158405 A JP 2012158405A JP 2014022487 A JP2014022487 A JP 2014022487A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 124
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 239000004020 conductor Substances 0.000 claims abstract description 40
- 238000002955 isolation Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 2
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- 239000010410 layer Substances 0.000 description 64
- 238000000034 method Methods 0.000 description 49
- 210000000746 body region Anatomy 0.000 description 33
- 239000012535 impurity Substances 0.000 description 33
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 29
- 229910052710 silicon Inorganic materials 0.000 description 29
- 239000010703 silicon Substances 0.000 description 29
- 229920002120 photoresistant polymer Polymers 0.000 description 23
- 238000010586 diagram Methods 0.000 description 20
- 238000004519 manufacturing process Methods 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 9
- 229910052814 silicon oxide Inorganic materials 0.000 description 9
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- 238000009792 diffusion process Methods 0.000 description 6
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- 238000000206 photolithography Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 238000002513 implantation Methods 0.000 description 5
- 230000003647 oxidation Effects 0.000 description 4
- 238000007254 oxidation reaction Methods 0.000 description 4
- -1 phosphorus ions Chemical class 0.000 description 4
- 239000012298 atmosphere Substances 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 3
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- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 238000011960 computer-aided design Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
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Abstract
【解決手段】第1導電型の半導体基板と、半導体基板内に形成された第2導電型の第1領域と、第1領域内に形成された第1導電型の第2領域と、第2領域内に形成された第2導電型のソース領域と、第1領域内に形成された第2導電型のドレイン領域と、第1領域と第2領域との境界のドレイン領域側の一部を有する第1接合部と、第1接合部とは異なる位置の第1領域と第2の領域との境界の一部を有する第2接合部と、第1接合部の上方に形成されたゲート電極と、第2接合部の上方に形成され、前記ゲート電極から電気的に独立した導電体とを有する。
【選択図】図1
Description
12…シリコン酸化膜
14,22,42,50,54…フォトレジスト膜
16,44,52…n型不純物領域
18…n型ドリフト領域
20…素子分離絶縁膜
20a,20b,20c,20d,20e,20f,20g,20h…活性領域
24,46,56…p型不純物領域
26…p型ボディ領域
28…pウェル
30…nウェル
32,34…ゲート絶縁膜
36,40…ゲート電極
38…導電体パターン
48…サイドウォール絶縁膜
58…n型ドレイン領域
60…n型ソース領域
62,68…p型タップ領域
64…p型コンタクト領域
66…n型ソース/ドレイン領域
70…p型ソース/ドレイン領域
72…n型コンタクト領域
74…層間絶縁膜
76…コンタクトプラグ
78,78a,78b,78c,78d,80,80a,80b,80d…配線層
102,104…pn接合部
110…p型寄生トランジスタ
Claims (9)
- 第1導電型の半導体基板と、
前記半導体基板内に形成された、前記第1導電型と反対の第2導電型の第1領域と、
前記第1領域内に形成された前記第1導電型の第2領域と、
前記第2領域内に形成された前記第2導電型のソース領域と、
前記第1領域内に形成された前記第2導電型のドレイン領域と、
前記第1領域と前記第2領域との境界の、前記ドレイン領域側の一部を有する第1接合部と、
前記第1接合部とは異なる位置の、前記第1領域と前記第2の領域との境界の一部を有する第2接合部と、
前記第1接合部の上方に形成されたゲート電極と、
前記第2接合部の上方に形成され、前記ゲート電極から電気的に独立した導電体と
を有することを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記導電体は、前記半導体基板に電気的に接続されている
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記ゲート電極は、第1の幅を有し、
前記導電体は、前記第1の幅よりも太い第2の幅を有する
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記ゲート電極及び前記導電体は、前記第2の領域を囲むように環状に配置されている
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記導電体は、前記ゲート電極の近傍に位置する第1の部分と、前記第1の部分に接続された第2の部分とを有し、
前記第1の部分の幅は、前記第2の部分の幅よりも細い
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記導電体は、素子分離絶縁膜を介して前記第2接合部の上方に形成されている
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記ソース領域は、前記第1の接合部から第1の距離を離れて位置し、
前記ドレイン領域は、前記第1の接合部から前記第1の距離よりも長い第2の距離を離れて位置している
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記ゲート電極と前記導電体とは、同一の材料により形成されている
ことを特徴とする半導体装置。 - 請求項1記載の半導体装置において、
前記半導体基板及び前記導電体に第1の電圧が印加され、
前記第2の領域に前記第1の電圧よりも低い第2の電圧が印加される
ことを特徴とする半導体装置。
Priority Applications (3)
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JP2012158405A JP5983122B2 (ja) | 2012-07-17 | 2012-07-17 | 半導体装置 |
US13/915,088 US9054185B2 (en) | 2012-07-17 | 2013-06-11 | Semiconductor device |
CN201310300798.7A CN103545374B (zh) | 2012-07-17 | 2013-07-17 | 半导体器件 |
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JP2012158405A JP5983122B2 (ja) | 2012-07-17 | 2012-07-17 | 半導体装置 |
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JP2014022487A true JP2014022487A (ja) | 2014-02-03 |
JP5983122B2 JP5983122B2 (ja) | 2016-08-31 |
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US (1) | US9054185B2 (ja) |
JP (1) | JP5983122B2 (ja) |
CN (1) | CN103545374B (ja) |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP6198292B2 (ja) * | 2012-08-17 | 2017-09-20 | ローム株式会社 | 半導体装置および半導体装置の製造方法 |
US9153691B1 (en) | 2014-07-22 | 2015-10-06 | Qualcomm Incorporated | High voltage MOS transistor |
ITUB20161081A1 (it) * | 2016-02-25 | 2017-08-25 | St Microelectronics Srl | Dispositivo a semiconduttore con regione conduttiva sepolta, e metodo di fabbricazione del dispositivo a semiconduttore |
JP7300968B2 (ja) * | 2019-11-14 | 2023-06-30 | 三菱電機株式会社 | 半導体装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02138773A (ja) * | 1988-05-25 | 1990-05-28 | Toshiba Corp | Mosfet |
JPH09289305A (ja) * | 1996-04-19 | 1997-11-04 | Rohm Co Ltd | 半導体装置 |
JPH09293859A (ja) * | 1996-04-25 | 1997-11-11 | Rohm Co Ltd | 半導体装置 |
US20070090454A1 (en) * | 2005-10-26 | 2007-04-26 | Huang Chin D | Transistor device |
JP2010147181A (ja) * | 2008-12-17 | 2010-07-01 | Mitsubishi Electric Corp | 半導体装置 |
JP2012104678A (ja) * | 2010-11-11 | 2012-05-31 | Fujitsu Semiconductor Ltd | 半導体装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5023678A (en) * | 1987-05-27 | 1991-06-11 | International Rectifier Corporation | High power MOSFET and integrated control circuit therefor for high-side switch application |
US6900101B2 (en) * | 2003-06-13 | 2005-05-31 | Texas Instruments Incorporated | LDMOS transistors and methods for making the same |
JP5280056B2 (ja) | 2008-01-10 | 2013-09-04 | シャープ株式会社 | Mos電界効果トランジスタ |
JP5458809B2 (ja) | 2009-11-02 | 2014-04-02 | 富士電機株式会社 | 半導体装置 |
US8546889B2 (en) * | 2010-06-04 | 2013-10-01 | Fuji Electric Co., Ltd. | Semiconductor device and driving circuit |
-
2012
- 2012-07-17 JP JP2012158405A patent/JP5983122B2/ja not_active Expired - Fee Related
-
2013
- 2013-06-11 US US13/915,088 patent/US9054185B2/en not_active Expired - Fee Related
- 2013-07-17 CN CN201310300798.7A patent/CN103545374B/zh not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02138773A (ja) * | 1988-05-25 | 1990-05-28 | Toshiba Corp | Mosfet |
JPH09289305A (ja) * | 1996-04-19 | 1997-11-04 | Rohm Co Ltd | 半導体装置 |
JPH09293859A (ja) * | 1996-04-25 | 1997-11-11 | Rohm Co Ltd | 半導体装置 |
US20070090454A1 (en) * | 2005-10-26 | 2007-04-26 | Huang Chin D | Transistor device |
JP2010147181A (ja) * | 2008-12-17 | 2010-07-01 | Mitsubishi Electric Corp | 半導体装置 |
JP2012104678A (ja) * | 2010-11-11 | 2012-05-31 | Fujitsu Semiconductor Ltd | 半導体装置 |
Also Published As
Publication number | Publication date |
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US9054185B2 (en) | 2015-06-09 |
US20140021546A1 (en) | 2014-01-23 |
CN103545374B (zh) | 2017-04-26 |
CN103545374A (zh) | 2014-01-29 |
JP5983122B2 (ja) | 2016-08-31 |
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