JP2014018921A - Tape polishing apparatus - Google Patents

Tape polishing apparatus Download PDF

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Publication number
JP2014018921A
JP2014018921A JP2012160445A JP2012160445A JP2014018921A JP 2014018921 A JP2014018921 A JP 2014018921A JP 2012160445 A JP2012160445 A JP 2012160445A JP 2012160445 A JP2012160445 A JP 2012160445A JP 2014018921 A JP2014018921 A JP 2014018921A
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tape
polishing
dancer roll
reel
roll
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JP5794210B2 (en
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Nobukazu Hosogai
信和 細貝
Norihisa Ochiai
典久 落合
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Sanshin Co Ltd
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Sanshin Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To improve polishing work efficiency by eliminating interruption of polishing processing with a polishing head, in co-operation with a tape fixing mechanism and a dancer roll mechanism during replacement work of a polishing tape.SOLUTION: A tape polishing apparatus includes: a tape reel 1 on which a polishing tape T is wound; a polishing head 2 for carrying out polishing processing by bringing a polishing surface of the polishing tape into pressure contact with a surface to be polished of a work piece W; a tape feeding mechanism 3 for feeding unfastened polishing tape from the tape reel to the polishing head; a brake mechanism 4 for freely rotating or stopping and holding the tape reel; a dancer roll mechanism 5 having a dancer roll 5a for applying tension to the polishing tape fed from the tape reel to the polishing head; and controlling means 6 for on-off controlling the brake mechanism according to a movement position of the dancer roll. The tape polishing apparatus is provided with a tape fixing mechanism 7 for fixing and holding the polishing tape between the tape reel and the dancer roll during replacement work of the polishing tape.

Description

本発明は、例えば、板状材や棒状材等の被加工物の被研磨面を研磨テープにより研磨する際に用いられるテープ研磨装置に関するものである。   The present invention relates to a tape polishing apparatus used when, for example, a surface to be polished of a workpiece such as a plate-shaped material or a rod-shaped material is polished with a polishing tape.

従来、この種のテープ研磨装置として、テープリールから解かれた研磨テープを研磨ヘッドに連続的又は間欠的に移送し、研磨ヘッドにより研磨テープの研磨面を被加工物の被研磨面に圧接させ、被加工物の研磨加工を行う構造のものが知られている。   Conventionally, as this type of tape polishing apparatus, the polishing tape unwound from the tape reel is transferred continuously or intermittently to the polishing head, and the polishing surface of the polishing tape is pressed against the polishing surface of the workpiece by the polishing head. A structure for polishing a workpiece is known.

特開平5−8163号公報Japanese Patent Laid-Open No. 5-8163

しかしながらこれら従来構造の場合、研磨加工の長時間継続により研磨テープが消耗して研磨テープを交換する際、研磨テープの移送停止及び研磨ヘッドの研磨加工を中断してから行うこととなり、このため、研磨テープの交換が完了するまで研磨ヘッドによる研磨加工を中断することになり、それだけ、研磨作業効率を低下させることがあるという不都合を有している。   However, in the case of these conventional structures, when the polishing tape is consumed due to the continuation of the polishing process for a long time and the polishing tape is replaced, the transfer of the polishing tape is stopped and the polishing process of the polishing head is interrupted. The polishing process by the polishing head is interrupted until the replacement of the polishing tape is completed, and there is a disadvantage in that the polishing work efficiency may be lowered accordingly.

本発明はこのような不都合を解決することを目的とするもので、本発明のうち、請求項1記載の発明は、研磨テープを巻回したテープリールと、該研磨テープの研磨面を被加工物の被研磨面に圧接させて研磨加工を行う研磨ヘッドと、該テープリールから解かれた研磨テープを該研磨ヘッドに移送させるテープ送り機構と、該テープリールを自由回転又は停止保持させるブレーキ機構と、該テープリールから該研磨ヘッドに移送される研磨テープに張力を付加するダンサーロールをもつダンサーロール機構と、該ダンサーロールの移動位置により該ブレーキ機構をオンオフ制御する制御手段とを備えてなり、上記研磨テープの交換作業時において、上記テープリールと該ダンサーロール機構との間の研磨テープを固定保持するテープ固定機構を設けてなることを特徴とするテープ研磨装置にある。   SUMMARY OF THE INVENTION The present invention aims to solve such inconveniences. Among the present inventions, the invention according to claim 1 is to process a tape reel around which a polishing tape is wound and a polishing surface of the polishing tape. A polishing head that presses against a surface to be polished to perform polishing, a tape feed mechanism that transfers the polishing tape unwound from the tape reel to the polishing head, and a brake mechanism that freely rotates or stops the tape reel And a dancer roll mechanism having a dancer roll for applying tension to the polishing tape transferred from the tape reel to the polishing head, and a control means for controlling on / off of the brake mechanism according to the movement position of the dancer roll. A tape fixing mechanism for fixing and holding the polishing tape between the tape reel and the dancer roll mechanism at the time of exchanging the polishing tape In a tape polishing apparatus characterized by comprising providing.

又、請求項2記載の発明は、上記テープ固定機構は、上記研磨テープを移送案内する案内ロール及び該案内ロールにより案内されている研磨テープを該案内ロールとで挟着して固定する挟着部材からなることを特徴とするものであり、又、請求項3記載の発明は、上記制御手段に上記ダンサーロールの異常な移動位置を検出して上記研磨ヘッドの研磨加工を停止させる非常停止手段を含んでなることを特徴とするものである。   According to a second aspect of the present invention, the tape fixing mechanism includes a guide roll for transporting and guiding the polishing tape, and a sandwiching mechanism for sandwiching and fixing the polishing tape guided by the guide roll with the guide roll. The invention according to claim 3 is characterized in that the control means detects an abnormal movement position of the dancer roll and stops the polishing process of the polishing head. It is characterized by comprising.

本発明は上述の如く、請求項1記載の発明にあっては、研磨テープの交換作業時においても、テープリールとダンサーロール機構との間の研磨テープを固定保持するテープ固定機構及び研磨テープを貯留するダンサーロール機構の協動により研磨ヘッドによる研磨加工を中断することがなくなり、研磨作業効率を向上することができる。   As described above, according to the first aspect of the present invention, there is provided a tape fixing mechanism and a polishing tape for fixing and holding the polishing tape between the tape reel and the dancer roll mechanism even when the polishing tape is replaced. The polishing process by the polishing head is not interrupted by the cooperation of the dancer roll mechanism for storing, and the polishing work efficiency can be improved.

又、請求項2記載の発明にあっては、上記テープ固定機構は、上記研磨テープを移送案内する案内ロール及び案内ロールにより案内されている研磨テープを案内ロールとで挟着して固定する挟着部材からなるので、構造を簡素化することができ、又、請求項3記載の発明にあっては、上記制御手段は上記ダンサーロールの異常な移動位置を検出して上記研磨ヘッドの研磨加工を停止させる非常停止手段を含んでなるから、ダンサーロール機構による研磨テープの貯留量内においてテープ交換が完了するまでの時間が間に合わなかった場合でも研磨加工を非常停止することができ、研磨加工の安全性を高めることができる。   In the invention according to claim 2, the tape fixing mechanism includes a guide roll that transports and guides the polishing tape, and a holding tape that fixes the polishing tape guided by the guide roll with the guide roll. Since it is made of a landing member, the structure can be simplified, and in the invention according to claim 3, the control means detects an abnormal movement position of the dancer roll and polishes the polishing head. Therefore, even if the time until the replacement of the tape is not completed within the storage amount of the polishing tape by the dancer roll mechanism, the polishing process can be stopped and the polishing process can be stopped. Safety can be increased.

本発明の実施の形態例の全体説明正面図である。It is the whole explanation front view of the example of an embodiment of the invention. 本発明の実施の形態例の部分側面図である。It is a partial side view of the embodiment of the present invention. 本発明の実施の形態例の作動説明部分正面図である。It is an operation explanation partial front view of an example of an embodiment of the invention. 本発明の実施の形態例の作動説明部分正面図である。It is an operation explanation partial front view of an example of an embodiment of the invention. 本発明の実施の形態例の作動説明部分正面図である。It is an operation explanation partial front view of an example of an embodiment of the invention. 本発明の実施の形態例の作動説明全体正面図である。It is a whole operation explanation front view of an example of an embodiment of the invention.

図1乃至図6は本発明の実施の形態例であって、1はテープリールであって、機台Mにリール軸1aを自由回転自在に横設し、リール軸1aにテープリール1を交換自在に取り付けてなり、このテープリール1には研磨テープTが巻回され、例えば、この研磨テープTは、ポリエステルフィルム、メタル、クロス等の基材に酸化アルミニュウム、酸化クロム、シリコンカーバイド、ダイヤモンド等の所定粒度の研磨粒子をコーティング又は結合してなる構造となっている。   1 to 6 show an embodiment of the present invention, in which 1 is a tape reel, and a reel shaft 1a is installed on a machine base M so as to be freely rotatable, and the tape reel 1 is replaced with a reel shaft 1a. Abrasive tape T is wound around this tape reel 1, and for example, this abrasive tape T is made of aluminum oxide, chromium oxide, silicon carbide, diamond, etc. on a base material such as polyester film, metal, cloth, etc. The structure is formed by coating or bonding abrasive particles having a predetermined particle size.

2は研磨ヘッドであって、この場合、機台Mに上下移動台2aを移動案内機構2b、移動用モータ2c及びボールネジ機構2dにより上下移動自在に設け、上下移動台2aに圧接用部材2eを圧接用シリンダ2fにより弾圧移動自在に設け、圧接用部材2eに圧接ロール2gを配置し、移動用モータ2cにより上下移動台2aを上下動させると共に圧接用シリンダ2fにより圧接用部材2eを介して圧接ロール2gで研磨テープTの研磨面を被加工物Wの被研磨面に圧接させて研磨加工を行うように構成している。   Reference numeral 2 denotes a polishing head. In this case, a vertical movement table 2a is provided on the machine table M so as to be movable up and down by a movement guide mechanism 2b, a movement motor 2c and a ball screw mechanism 2d, and a pressure contact member 2e is provided on the vertical movement table 2a. The pressure contact roll 2g is disposed on the pressure contact member 2e, the vertical movement table 2a is moved up and down by the movement motor 2c, and the pressure contact cylinder 2f is pressed through the pressure contact member 2e. The polishing process is performed by pressing the polishing surface of the polishing tape T against the surface to be polished of the workpiece W with the roll 2g.

3はテープ送り機構であって、この場合、機台Mに送りロール3a及び挟持ロール3bを配置し、送りロール3aを送り回転させる送り用モータ3cを設け、テープリール1から解かれた研磨テープTを送りロール3aと挟持ロール3bとの間で挟持し、送り用モータ3cで送りロール3aを送り回転させることにより研磨テープTを連続的又は間欠的に移送してボックス3dに移送するように構成している。   Reference numeral 3 denotes a tape feed mechanism. In this case, a feed roll 3 a and a sandwiching roll 3 b are arranged on the machine base M, a feed motor 3 c for feeding and rotating the feed roll 3 a is provided, and the polishing tape unwound from the tape reel 1 T is sandwiched between the feed roll 3a and the sandwiching roll 3b, and the feed roll 3a is fed and rotated by the feed motor 3c so that the polishing tape T is transferred continuously or intermittently to the box 3d. It is composed.

4はブレーキ機構であって、図2の如く、上記機台Mに自由回転自在に横設されたリール軸1aの後部に配置され、この場合、ブレーキ機構4はオンオフ制御される電磁ブレーキからなり、ブレーキ機構4のオフ制御により上記テープリール1を保持するリール軸1aを自由回転自在に設けると共にブレーキ機構4のオン制御により上記テープリール1を保持するリール軸1aを停止保持させるように構成している。   Reference numeral 4 denotes a brake mechanism, which is disposed at the rear part of the reel shaft 1a which is horizontally provided on the machine base M so as to freely rotate as shown in FIG. 2. In this case, the brake mechanism 4 comprises an electromagnetic brake which is controlled to be turned on and off. The reel shaft 1a for holding the tape reel 1 is provided to be freely rotatable by turning off the brake mechanism 4, and the reel shaft 1a for holding the tape reel 1 is stopped and held by turning on the brake mechanism 4. ing.

5はダンサーロール機構であって、テープリール1から研磨ヘッド2に移送される研磨テープTに巻き解き方向と反対方向の張力であるバックテンションを付加するダンサーロール5aを有してなり、この場合、機台Mにダンサーロール5aをガイド部5bにより上下移動自在に配置し、ダンサーロール5aを常時下方に弾引するバックテンション用シリンダ5cを配置して構成している。   A dancer roll mechanism 5 has a dancer roll 5a for applying a back tension which is a tension opposite to the unwinding direction to the polishing tape T transferred from the tape reel 1 to the polishing head 2. The dancer roll 5a is arranged on the machine base M so as to be movable up and down by a guide portion 5b, and a back tension cylinder 5c for always pulling the dancer roll 5a downward is arranged.

6は制御手段であって、パソコンなどによるプログラムを含む制御回路が組み込まれ、上記ダンサーロール5aの上限及び下限の移動位置を検出する位置検出センサS・Sを配置し、位置検出センサSがダンサーロール5aの上限の移動位置を検出するとブレーキ機構4をオフ制御し、ブレーキ機構4のオフ制御によりテープリール1は自由回転自在となり、バックテンション用シリンダ5cにより常時下方に弾引されたダンサーロール5aにより研磨テープTはテープリール1から引き出されると共にダンサーロール5aは下降移動し、又、位置検出センサSがダンサーロール5aの下限の移動位置を検出するとブレーキ機構4をオン制御し、ブレーキ機構4のオン制御によりテープリール1は停止保持され、テープ送り機構3の送りロール3aの送り回転により研磨テープTは移送されると共にダンサーロール5aはバックテンション用シリンダ5cの常時下方への弾引力に抗して上昇移動し、制御手段6によるブレーキ機構4のオンオフ制御及びダンサーロール機構5のダンサーロール5aの移動位置制御により研磨テープTを移送するように構成している。 A control means 6 includes a control circuit including a program such as a personal computer, and is provided with position detection sensors S 1 and S 2 for detecting the upper and lower movement positions of the dancer roll 5a. When 1 detects the upper limit movement position of the dancer roll 5a, the brake mechanism 4 is controlled to be off, and the tape reel 1 is freely rotatable by the off-control of the brake mechanism 4, and is always pulled downward by the back tension cylinder 5c. abrasive tape T by the dancer roll 5a is dancer roller 5a with drawn from the tape reel 1 moves downward, also a braking mechanism 4 on-controlled when the position detection sensor S 2 for detecting the moving position of the lower limit of the dancer roll 5a, The tape reel 1 is stopped and held by the on-control of the brake mechanism 4, and the tape feed mechanism 3 The polishing tape T is transferred by the feed rotation of the feed roll 3a, and the dancer roll 5a moves up against the elastic force of the back tension cylinder 5c. The control means 6 controls on / off of the brake mechanism 4. In addition, the polishing tape T is transferred by controlling the movement position of the dancer roll 5a of the dancer roll mechanism 5.

7はテープ固定機構であって、この場合、上記研磨テープTを移送案内する案内ロール7a及び案内ロール7aにより案内されている研磨テープTを案内ロール7aとで挟着して固定する挟着部材7bからなり、挟着部材7bは挟着用シリンダ7cにより挟着解放作動し、上記研磨テープTの交換作業時において、上記テープリール1とダンサーロール機構5との間の研磨テープTを固定保持するように構成されている。   7 is a tape fixing mechanism. In this case, a guide roll 7a for transporting and guiding the polishing tape T, and a clamping member for clamping and fixing the polishing tape T guided by the guide roll 7a with the guide roll 7a. 7b, and the sandwiching member 7b is sandwiched and released by the sandwiching cylinder 7c to fix and hold the polishing tape T between the tape reel 1 and the dancer roll mechanism 5 when the polishing tape T is replaced. It is configured as follows.

8は非常停止手段であって、上記制御手段6に含まれてなり、上記ダンサーロール5aの異常な上限及び下限の移動位置を検出する位置検出センサS・Sを配置し、位置検出センサSがダンサーロール5aの異常な上限の移動位置を検出するとブレーキ機構4が異常であるとしてテープ送り機構3及び研磨ヘッド2による研磨加工を非常停止し、又、位置検出センサSがダンサーロール5aの異常な下限の移動位置を検出するとブレーキ機構4が異常であるか、あるいはテープ切れ、例えば、ダンサーロール機構5による研磨テープTの貯留量内においてテープ交換が完了するまでの時間が間に合わなかった場合でも、研磨加工を非常停止することができ、研磨加工の安全性を高めることができるように構成されている。 8 is an emergency stop means which is included in the control means 6 and is provided with position detection sensors S 3 and S 4 for detecting abnormal upper and lower movement positions of the dancer roll 5a. S 3 is emergency stop polished by the tape feed mechanism 3 and the polishing head 2 as it is when it detects an abnormal limit movement position of the brake mechanism 4 abnormalities dancer roll 5a, the position detection sensor S 4 dancer roll When the moving position of the abnormal lower limit 5a is detected, the brake mechanism 4 is abnormal, or the time until tape replacement is completed within the storage amount of the polishing tape T by the dancer roll mechanism 5 is not in time. Even in such a case, the polishing process can be stopped urgently and the safety of the polishing process can be increased.

この実施の形態例は上記構成であるから、図1の如く、研磨テープTは、テープリール1から案内ロール7a、ダンサーロール5a、案内ロールR、案内ロールR、案内ロールR、上下移動台2aに設けた案内ロールR、案内ロールR、上記圧接ロール2g、案内ロールR、上下移動台2aに設けた案内ロールR、案内ロールR、送りロール3aと挟持ロール3bの間を経てボックス3d内に廃棄移送され、ブレーキ機構4によりテープリール1は自由回転又は停止保持され、ダンサーロール機構5のダンサーロール5aの移動位置によりブレーキ機構4をオンオフ制御されると共にダンサーロール5aにより研磨テープTに巻き解き方向と反対方向の張力であるバックテンションが付加され、研磨ヘッド2により研磨テープTの研磨面は被加工物Wの被研磨面に圧接され、研磨加工が行われることになる。 Since this embodiment has the above-described configuration, as shown in FIG. 1, the polishing tape T is composed of a guide roll 7a, a dancer roll 5a, a guide roll R 1 , a guide roll R 2 , a guide roll R 3 , Guide roll R 4 , guide roll R 5 , guide roll R 2 g, guide roll R 6 , guide roll R 7 , guide roll R 8 , feed roll 3 a and sandwiching roll 3 b provided on the movable table 2 a. The tape reel 1 is freely rotated or stopped and held by the brake mechanism 4, and the brake mechanism 4 is controlled to be turned on and off by the moving position of the dancer roll 5a of the dancer roll mechanism 5 and the dancer roll. The back tension, which is the tension opposite to the unwinding direction, is applied to the polishing tape T by 5a. The polishing surface of the polishing tape T is brought into pressure contact with the surface to be polished of the workpiece W, and polishing is performed.

そして、研磨テープTの交換作業においては、図3の如く、研磨加工の長時間継続により研磨テープTの消耗をテープ切れセンサーSが検出すると、先ず、制御手段6によりブレーキ機構4は自由回転自在となり、ダンサーロール5aは下限の移動位置となって研磨テープTを貯留することになると共に、図4の如く、テープ固定機構7の挟着用シリンダ7cの作動により研磨テープTは案内ロール7aと挟着部材7bとで挟着され、研磨テープTは固定保持されることになり、テープ固定機構7により研磨テープTが固定保持されたらテープリール1とテープ固定機構7との間において、研磨テープTを手動又は自動的に切断することになり、研磨テープTの切断後、消耗したテープリール1をリール軸1aから取り外し、図5の如く、新たな研磨テープTを巻回したテープリール1をリール軸1aに取り付けて交換作業を行い、そして、両面テープや接着剤等の継合手段Kにより新たな研磨テープTの端末と切断端末とを継合し、このテープ切断及び新たな研磨テープTの端末と切断端末との継合の際にもダンサーロール5aが上昇して研磨テープTの貯留により研磨加工が停止することなく継続され、新たなテープリール1に交換したら、図6の如く、交換完了スイッチを操作することにより新たな研磨テープTの端末と切断端末との継目部分Hがテープ送り機構3の送りロール3aと挟持ロール3bとの間を通過するまで早送りされ、継目部分Hがテープ送り機構3を通過したら制御手段6によるブレーキ機構4のオンオフ制御及びダンサーロール機構5の張力付加作用が行われて研磨テープTは移送され、研磨ヘッド2により被加工物Wの研磨加工が行われることになる。 The abrasive in the replacement of the tape T, as shown in FIG. 3, when the tape breakage sensor S 5 the consumption of the polishing tape T by long continued polishing detecting, first, brake mechanism 4 by the control means 6 free rotation The dancer roll 5a becomes the lower limit moving position to store the polishing tape T, and as shown in FIG. 4, the polishing tape T and the guide roll 7a are moved by the operation of the pinching cylinder 7c of the tape fixing mechanism 7. The abrasive tape T is fixedly held by the clamping member 7b. When the abrasive tape T is fixed and held by the tape fixing mechanism 7, the abrasive tape is interposed between the tape reel 1 and the tape fixing mechanism 7. T is cut manually or automatically. After cutting the polishing tape T, the worn tape reel 1 is removed from the reel shaft 1a, and as shown in FIG. The tape reel 1 around which the new abrasive tape T is wound is attached to the reel shaft 1a, and the replacement work is performed. Then, the terminal of the new abrasive tape T and the cutting terminal are joined by the joining means K such as double-sided tape and adhesive. When the tape is cut and when the terminal of the new polishing tape T is connected to the cutting terminal, the dancer roll 5a rises and the polishing process is continued without stopping by the storage of the polishing tape T. When the tape reel 1 is exchanged, as shown in FIG. 6, by operating the exchange completion switch, the joint portion H between the terminal of the new polishing tape T and the cutting terminal becomes the feed roll 3a and the sandwiching roll 3b of the tape feed mechanism 3. When the seam portion H passes through the tape feeding mechanism 3, the brake mechanism 4 is turned on and off by the control means 6 and the tension applied by the dancer roll mechanism 5 is applied. Performed by abrasive tape T is transported, so that the grinding of the workpiece W is performed by the polishing head 2.

したがって、研磨テープTの交換作業時においても、テープリール1とダンサーロール機構5との間の研磨テープTを固定保持するテープ固定機構7及び研磨テープTを貯留するダンサーロール機構5の協動により研磨ヘッド2による研磨加工を中断することがなくなり、研磨作業効率を向上することができる。   Therefore, even when the polishing tape T is exchanged, the tape fixing mechanism 7 that fixes and holds the polishing tape T between the tape reel 1 and the dancer roll mechanism 5 and the dancer roll mechanism 5 that stores the polishing tape T cooperate. The polishing process by the polishing head 2 is not interrupted, and the polishing work efficiency can be improved.

この場合、テープ固定機構7は、上記研磨テープTを移送案内する案内ロール7a及び案内ロール7aにより案内されている研磨テープTを案内ロール7aとで挟着して固定する挟着部材7bからなるので、構造を簡素化することができ、又、この場合、上記制御手段6に上記ダンサーロール5aの異常な移動位置を検出して上記研磨ヘッド2の研磨加工を停止させる非常停止手段8を含んでなるから、ダンサーロール機構5による研磨テープTの貯留量内においてテープ交換が完了するまでの時間が間に合わなかった場合でも、研磨加工を非常停止することができ、研磨加工の安全性を高めることができる。   In this case, the tape fixing mechanism 7 includes a guide roll 7a for transporting and guiding the polishing tape T and a sandwiching member 7b for sandwiching and fixing the polishing tape T guided by the guide roll 7a with the guide roll 7a. Therefore, the structure can be simplified, and in this case, the control means 6 includes an emergency stop means 8 for detecting an abnormal movement position of the dancer roll 5a and stopping the polishing process of the polishing head 2. Therefore, even if the time until the tape replacement is completed within the storage amount of the polishing tape T by the dancer roll mechanism 5 is not in time, the polishing process can be stopped and the safety of the polishing process can be improved. Can do.

尚、本発明は上記実施の形態例に限られるものではなく、テープリール1、研磨ヘッド2、テープ送り機構3、ブレーキ機構4、ダンサーロール機構5、制御手段6、テープ固定機構7、非常停止手段8の構造や回路構成等は適宜変更して設計される。   The present invention is not limited to the above embodiment, but the tape reel 1, the polishing head 2, the tape feeding mechanism 3, the brake mechanism 4, the dancer roll mechanism 5, the control means 6, the tape fixing mechanism 7, and the emergency stop. The structure and circuit configuration of the means 8 are designed with appropriate changes.

又、上記実施の形態例のテープ送り機構3においては、テープリール1から解かれた研磨テープTを研磨ヘッド2に連続的又は間欠的に移送し、研磨ヘッド2により研磨加工使用された使用済みの研磨テープTをボックス3dに廃棄移送するように構成しているが、これに代えて、使用済みの研磨テープTを別途に設けた廃棄用のテープリールで巻き取る構造とすることもある。   In the tape feeding mechanism 3 of the above-described embodiment, the polishing tape T unwound from the tape reel 1 is transferred to the polishing head 2 continuously or intermittently, and used by the polishing head 2 for polishing. However, instead of this, the used polishing tape T may be wound up by a separate tape reel provided separately.

以上、所期の目的を充分達成することができる。   As described above, the intended purpose can be sufficiently achieved.

T 研磨テープ
W 被加工物
1 テープリール
2 研磨ヘッド
3 テープ送り機構
4 ブレーキ機構
5 ダンサーロール機構
5a ダンサーロール
6 制御手段
7 テープ固定機構
7a 案内ロール
7b 挟着部材
8 非常停止手段
T polishing tape W workpiece 1 tape reel 2 polishing head 3 tape feeding mechanism 4 brake mechanism 5 dancer roll mechanism 5a dancer roll 6 control means 7 tape fixing mechanism 7a guide roll 7b clamping member 8 emergency stop means

Claims (3)

研磨テープを巻回したテープリールと、該研磨テープの研磨面を被加工物の被研磨面に圧接させて研磨加工を行う研磨ヘッドと、該テープリールから解かれた研磨テープを該研磨ヘッドに移送させるテープ送り機構と、該テープリールを自由回転又は停止保持させるブレーキ機構と、該テープリールから該研磨ヘッドに移送される研磨テープに張力を付加するダンサーロールをもつダンサーロール機構と、該ダンサーロールの移動位置により該ブレーキ機構をオンオフ制御する制御手段とを備えてなり、上記研磨テープの交換作業時において、上記テープリールと該ダンサーロール機構との間の研磨テープを固定保持するテープ固定機構を設けてなることを特徴とするテープ研磨装置。   A tape reel wound with a polishing tape, a polishing head for performing polishing by pressing the polishing surface of the polishing tape against a surface to be polished of the workpiece, and a polishing tape unwound from the tape reel to the polishing head A tape feed mechanism for transporting, a brake mechanism for freely rotating or holding the tape reel, a dancer roll mechanism having a dancer roll for applying tension to the polishing tape transferred from the tape reel to the polishing head, and the dancer A tape fixing mechanism for holding the polishing tape between the tape reel and the dancer roll mechanism when the polishing tape is exchanged. A tape polishing apparatus comprising: 上記テープ固定機構は、上記研磨テープを移送案内する案内ロール及び該案内ロールにより案内されている研磨テープを該案内ロールとで挟着して固定する挟着部材からなることを特徴とする請求項1記載のテープ研磨装置。   The tape fixing mechanism includes a guide roll that transports and guides the polishing tape, and a sandwiching member that sandwiches and fixes the polishing tape guided by the guide roll with the guide roll. The tape polishing apparatus according to 1. 上記制御手段は、上記ダンサーロールの異常な移動位置を検出して上記研磨ヘッドの研磨加工を停止させる非常停止手段を含んでなることを特徴とする請求項1又は2記載のテープ研磨装置。   3. The tape polishing apparatus according to claim 1, wherein the control means includes an emergency stop means for detecting an abnormal movement position of the dancer roll and stopping the polishing process of the polishing head.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106625137A (en) * 2017-03-03 2017-05-10 东莞市铁犀智能科技有限公司 Sanding belt automatic replacing device of belt sander
JP2018001375A (en) * 2016-07-06 2018-01-11 セイコータイムシステム株式会社 Drilling device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940248U (en) * 1982-09-03 1984-03-14 花王株式会社 Strip joining machine
JPS6155050A (en) * 1984-08-24 1986-03-19 Fuji Color Service:Kk Device for continuous feed of rolled printing paper
JPH03228562A (en) * 1989-11-10 1991-10-09 Sansho Tohoku:Kk Tape type polishing device
JPH04305442A (en) * 1991-04-03 1992-10-28 Mitsubishi Heavy Ind Ltd Method for driving corrugator
JPH09248752A (en) * 1996-03-11 1997-09-22 Sanshin:Kk Polishing method for flattening device wafer surface, and device therefor
JP2004126217A (en) * 2002-10-02 2004-04-22 Canon Inc Post-processing method for electrophotographic sensitive body and grinding device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5940248U (en) * 1982-09-03 1984-03-14 花王株式会社 Strip joining machine
JPS6155050A (en) * 1984-08-24 1986-03-19 Fuji Color Service:Kk Device for continuous feed of rolled printing paper
JPH03228562A (en) * 1989-11-10 1991-10-09 Sansho Tohoku:Kk Tape type polishing device
JPH04305442A (en) * 1991-04-03 1992-10-28 Mitsubishi Heavy Ind Ltd Method for driving corrugator
JPH09248752A (en) * 1996-03-11 1997-09-22 Sanshin:Kk Polishing method for flattening device wafer surface, and device therefor
JP2004126217A (en) * 2002-10-02 2004-04-22 Canon Inc Post-processing method for electrophotographic sensitive body and grinding device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018001375A (en) * 2016-07-06 2018-01-11 セイコータイムシステム株式会社 Drilling device
CN106625137A (en) * 2017-03-03 2017-05-10 东莞市铁犀智能科技有限公司 Sanding belt automatic replacing device of belt sander

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