JP2013545893A5 - - Google Patents
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- JP2013545893A5 JP2013545893A5 JP2013535294A JP2013535294A JP2013545893A5 JP 2013545893 A5 JP2013545893 A5 JP 2013545893A5 JP 2013535294 A JP2013535294 A JP 2013535294A JP 2013535294 A JP2013535294 A JP 2013535294A JP 2013545893 A5 JP2013545893 A5 JP 2013545893A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- coating
- molybdenum
- film
- film according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000010410 layer Substances 0.000 claims 26
- 239000011248 coating agent Substances 0.000 claims 18
- 238000000576 coating method Methods 0.000 claims 18
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 claims 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 8
- 229910052757 nitrogen Inorganic materials 0.000 claims 7
- 229910052751 metal Inorganic materials 0.000 claims 6
- 239000002184 metal Substances 0.000 claims 6
- 229910052760 oxygen Inorganic materials 0.000 claims 6
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 4
- 229910052799 carbon Inorganic materials 0.000 claims 4
- 229910052750 molybdenum Inorganic materials 0.000 claims 4
- 229910000476 molybdenum oxide Inorganic materials 0.000 claims 4
- 239000001301 oxygen Substances 0.000 claims 4
- 238000005240 physical vapour deposition Methods 0.000 claims 4
- 239000011733 molybdenum Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 claims 2
- 238000005229 chemical vapour deposition Methods 0.000 claims 2
- 229910052804 chromium Inorganic materials 0.000 claims 2
- 229910052802 copper Inorganic materials 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 150000002739 metals Chemical class 0.000 claims 2
- 229910052758 niobium Inorganic materials 0.000 claims 2
- 125000004430 oxygen atom Chemical group O* 0.000 claims 2
- 229910052710 silicon Inorganic materials 0.000 claims 2
- 229910052709 silver Inorganic materials 0.000 claims 2
- 229910052715 tantalum Inorganic materials 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 229910052721 tungsten Inorganic materials 0.000 claims 2
- 229910052720 vanadium Inorganic materials 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 239000011247 coating layer Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 claims 1
- 239000002346 layers by function Substances 0.000 claims 1
- 239000000314 lubricant Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 125000004433 nitrogen atom Chemical group N* 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US40765610P | 2010-10-28 | 2010-10-28 | |
| US61/407,656 | 2010-10-28 | ||
| DE102010053751.9 | 2010-12-08 | ||
| DE102010053751A DE102010053751A1 (de) | 2010-10-28 | 2010-12-08 | Molybdänmonoxidschichten und deren Herstellung mittels PVD |
| PCT/EP2011/004990 WO2012055485A1 (de) | 2010-10-28 | 2011-10-06 | Molybdänmonoxidschichten und deren herstellung mittels pvd |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017170564A Division JP2018035442A (ja) | 2010-10-28 | 2017-09-05 | 一酸化モリブデン層と物理的蒸着法（ｐｖｄ）を用いたその製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013545893A JP2013545893A (ja) | 2013-12-26 |
| JP2013545893A5 true JP2013545893A5 (enExample) | 2014-11-13 |
Family
ID=45935681
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013535294A Pending JP2013545893A (ja) | 2010-10-28 | 2011-10-06 | 一酸化モリブデン層と物理的蒸着法（ｐｖｄ）を用いたその製法 |
| JP2017170564A Pending JP2018035442A (ja) | 2010-10-28 | 2017-09-05 | 一酸化モリブデン層と物理的蒸着法（ｐｖｄ）を用いたその製法 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017170564A Pending JP2018035442A (ja) | 2010-10-28 | 2017-09-05 | 一酸化モリブデン層と物理的蒸着法（ｐｖｄ）を用いたその製法 |
Country Status (13)
| Country | Link |
|---|---|
| US (1) | US9822322B2 (enExample) |
| EP (1) | EP2633095B1 (enExample) |
| JP (2) | JP2013545893A (enExample) |
| KR (1) | KR101930564B1 (enExample) |
| CN (1) | CN103270188B (enExample) |
| BR (1) | BR112013010147A2 (enExample) |
| CA (1) | CA2815911A1 (enExample) |
| DE (1) | DE102010053751A1 (enExample) |
| MX (1) | MX350887B (enExample) |
| MY (1) | MY179397A (enExample) |
| RU (1) | RU2622553C2 (enExample) |
| SG (1) | SG190021A1 (enExample) |
| WO (1) | WO2012055485A1 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012200378A1 (de) * | 2012-01-12 | 2013-07-18 | Federal-Mogul Burscheid Gmbh | Kolbenring |
| US10041017B2 (en) | 2012-03-12 | 2018-08-07 | Oerlikon Surface Solutions Ag, Pfäffikon | Coating with enhanced sliding properties |
| DE102012207814A1 (de) * | 2012-05-10 | 2013-11-14 | Mahle International Gmbh | Bauelement, insbesondere ein Gleitelement |
| DE102012207813A1 (de) * | 2012-05-10 | 2013-11-14 | Mahle International Gmbh | Gleitkörper mit Beschichtung |
| SG11201501437YA (en) * | 2012-08-29 | 2015-03-30 | Oerlikon Surface Solutions Ag Trubbach | Arc pvd coating with enhanced reducing friction and reducing wear properties |
| DE102012017033A1 (de) * | 2012-08-29 | 2014-05-28 | Oerlikon Trading Ag, Trübbach | PVD Lichtbogenbeschichtung mit verbesserten reibungsmindernden und verschleissreduzierenden Eigenschaften |
| AR092945A1 (es) | 2012-10-10 | 2015-05-06 | Oerlikon Trading Ag Trübbach | Recubrimiento para usos a altas temperaturas con solicitacion tribologica |
| DE102012023260A1 (de) * | 2012-11-29 | 2014-06-05 | Oerlikon Trading Ag, Trübbach | Verfahren zur Strukturierung von Schichtoberflächen und Vorrichtung dazu |
| CN104372299B (zh) * | 2013-09-23 | 2017-08-04 | 中国科学院合肥物质科学研究院 | 多层结构硬质、耐磨、润滑涂层及其制备方法 |
| DE102013018007A1 (de) | 2013-11-29 | 2015-06-03 | Oerlikon Trading Ag, Trübbach | Verfahren zur Verbesserung des Gegenkörperverschleisses im tribologischen Kontakt |
| CN103789725B (zh) * | 2014-01-29 | 2016-08-31 | 仪征亚新科双环活塞环有限公司 | 一种活塞环表面的多层多元复合硬质pvd镀层、活塞环及制备工艺 |
| EP3172359B1 (en) * | 2014-07-24 | 2018-06-06 | Oerlikon Surface Solutions AG, Pfäffikon | Arc evaporated me11-ame2azi/mo1-b-csicbbzii multilayer coatings |
| KR101673712B1 (ko) * | 2014-12-10 | 2016-11-08 | 현대자동차주식회사 | 자동차 습동 부품용 코팅재 및 이를 이용한 자동차 습동부품 표면처리 방법 |
| CN108048809B (zh) * | 2017-09-22 | 2019-07-30 | 南京航空航天大学 | 耐蚀抗菌的含银MoO3-SiO2纳米晶复合涂层的制备方法 |
| US11149651B2 (en) * | 2019-08-07 | 2021-10-19 | Raytheon Technologies Corporation | Seal ring assembly for a gas turbine engine |
| WO2021053072A1 (de) * | 2019-09-19 | 2021-03-25 | Oerlikon Surface Solutions Ag, Pfäffikon | Substrat mit einem molydännitrid schichtsystem, sowie beschichtungsverfahren zur herstellung eines schichtsystems |
| KR20230115987A (ko) * | 2020-11-30 | 2023-08-03 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 마모 및 마찰 감소를 위한 질화몰리브덴 기반 다층 코팅 |
| CN114583055B (zh) * | 2022-02-18 | 2023-09-15 | 电子科技大学 | 一种喷涂MoO3薄膜的有机光电探测器及其制备方法 |
| CN114907900B (zh) * | 2022-05-31 | 2023-07-21 | 东莞市嘉丰润滑科技有限公司 | 一种自动变速箱油、i类金属切削液和新型润滑油 |
| JP2024018601A (ja) * | 2022-07-29 | 2024-02-08 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理方法および基板処理装置 |
| CN117488301B (zh) * | 2023-10-31 | 2025-10-24 | 深圳技术大学 | 一种金属表面的蜂窝状复合氧化钼涂层及其制备方法和在油水分离中的应用 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4847171A (en) * | 1988-03-10 | 1989-07-11 | Ford Motor Company | Molybdenum oxide electrodes for thermoelectric generators |
| SU1832751A1 (ru) | 1990-06-18 | 1998-01-20 | Научно-производственное объединение "НИИТавтопром" | Способ получения износостойких покрытий из соединений металлов |
| DK0617199T3 (da) * | 1993-03-26 | 1996-07-01 | Siemens Ag | Katalysator til nitrogenoxid-formindskelse i udstødsgassen fra en forbrændingsmotor |
| DK16494A (da) | 1994-02-08 | 1995-08-09 | Man B & W Diesel Gmbh | Fremgangsmåde til fremstilling af en cylinderforing samt en sådan foring |
| JP3452664B2 (ja) * | 1994-11-21 | 2003-09-29 | 帝国ピストンリング株式会社 | 摺動部材およびその製造方法 |
| JP3286097B2 (ja) * | 1994-12-22 | 2002-05-27 | 帝国ピストンリング株式会社 | 摺動部材およびその製造方法 |
| DE29620687U1 (de) | 1996-11-28 | 1997-01-30 | Fehling, Ulrike, 63791 Karlstein | Chirurgisches Instrument |
| JP3439949B2 (ja) * | 1997-06-09 | 2003-08-25 | 帝国ピストンリング株式会社 | 硬質被覆材およびそれを被覆した摺動部材ならびにその製造方法 |
| US6802457B1 (en) | 1998-09-21 | 2004-10-12 | Caterpillar Inc | Coatings for use in fuel system components |
| RU12540U1 (ru) * | 1999-07-02 | 2000-01-20 | Открытое акционерное общество "ГАЗ" | Устройство для электроискрового легирования металлических поверхностей |
| US6537613B1 (en) * | 2000-04-10 | 2003-03-25 | Air Products And Chemicals, Inc. | Process for metal metalloid oxides and nitrides with compositional gradients |
| US7311961B2 (en) * | 2000-10-24 | 2007-12-25 | Ppg Industries Ohio, Inc. | Method of making coated articles and coated articles made thereby |
| RU2196665C1 (ru) * | 2001-09-10 | 2003-01-20 | Открытое акционерное общество "Иркутское авиационное производственное объединение" | Способ электроискрового легирования |
| RU2211260C1 (ru) * | 2001-12-26 | 2003-08-27 | Федеральное государственное унитарное предприятие Всероссийский научно-исследовательский институт авиационных материалов | Антифрикционное композиционное покрытие |
| US7344806B2 (en) * | 2003-03-31 | 2008-03-18 | Shin-Etsu Chemical Co., Ltd. | Method of producing phase shift mask blank, method of producing phase shift mask, phase shift mask blank, and phase shift mask |
| US20060042728A1 (en) * | 2004-08-31 | 2006-03-02 | Brad Lemon | Molybdenum sputtering targets |
| US7332618B2 (en) * | 2004-09-28 | 2008-02-19 | Praxair Technology, Inc. | Organometallic precursor compounds |
| CA2599374A1 (en) * | 2005-03-18 | 2006-09-28 | Nano-Proprietary, Inc. | Gated gas sensor |
| US7950271B2 (en) | 2005-03-18 | 2011-05-31 | Applied Nanotech Holdings, Inc. | Gated beta-molybdenum oxide sensor |
| SG160397A1 (en) * | 2005-03-24 | 2010-04-29 | Oerlikon Trading Ag | Hard material layer |
| KR100655366B1 (ko) * | 2005-07-04 | 2006-12-08 | 한국과학기술연구원 | 내열, 내마모, 저마찰 특성을 가지는 코팅제 및 이의코팅방법 |
| DE102006036101A1 (de) | 2005-08-02 | 2007-02-08 | Caterpillar Motoren Gmbh & Co. Kg | Verfahren zur Herstellung von Ventilkomponenten |
| JP4824989B2 (ja) | 2005-11-02 | 2011-11-30 | 株式会社神戸製鋼所 | 硬質皮膜 |
| JP2006255708A (ja) | 2006-07-05 | 2006-09-28 | Mitsubishi Heavy Ind Ltd | 中空糸膜の逆洗方法及び中空糸膜水処理装置 |
| US20090087673A1 (en) | 2007-09-28 | 2009-04-02 | Taylor Steven C | Method for coating fuel system components |
| RU2501885C2 (ru) * | 2008-08-17 | 2013-12-20 | Эрликон Трейдинг Аг, Трюббах | Применение мишени для искрового напыления и способ получения подходящей для этого применения мишени |
| ES2377225T3 (es) * | 2008-09-19 | 2012-03-23 | OERLIKON TRADING AG, TRÜBBACH | Método para producir capas de óxido metálico mediante vaporización por arco |
| KR101127236B1 (ko) * | 2008-12-29 | 2012-03-29 | 주식회사 하이닉스반도체 | 저항성 메모리 소자의 제조 방법 |
-
2010
- 2010-12-08 DE DE102010053751A patent/DE102010053751A1/de not_active Withdrawn
-
2011
- 2011-10-06 MX MX2013004780A patent/MX350887B/es active IP Right Grant
- 2011-10-06 WO PCT/EP2011/004990 patent/WO2012055485A1/de not_active Ceased
- 2011-10-06 KR KR1020137013593A patent/KR101930564B1/ko not_active Expired - Fee Related
- 2011-10-06 JP JP2013535294A patent/JP2013545893A/ja active Pending
- 2011-10-06 CN CN201180063789.XA patent/CN103270188B/zh not_active Expired - Fee Related
- 2011-10-06 US US13/881,855 patent/US9822322B2/en not_active Expired - Fee Related
- 2011-10-06 SG SG2013032081A patent/SG190021A1/en unknown
- 2011-10-06 CA CA2815911A patent/CA2815911A1/en not_active Abandoned
- 2011-10-06 EP EP11779086.5A patent/EP2633095B1/de not_active Not-in-force
- 2011-10-06 RU RU2013124399A patent/RU2622553C2/ru not_active IP Right Cessation
- 2011-10-06 BR BR112013010147A patent/BR112013010147A2/pt active Search and Examination
- 2011-10-06 MY MYPI2013001508A patent/MY179397A/en unknown
-
2017
- 2017-09-05 JP JP2017170564A patent/JP2018035442A/ja active Pending
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