JP2013537976A5 - - Google Patents

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Publication number
JP2013537976A5
JP2013537976A5 JP2013530107A JP2013530107A JP2013537976A5 JP 2013537976 A5 JP2013537976 A5 JP 2013537976A5 JP 2013530107 A JP2013530107 A JP 2013530107A JP 2013530107 A JP2013530107 A JP 2013530107A JP 2013537976 A5 JP2013537976 A5 JP 2013537976A5
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JP
Japan
Prior art keywords
radiation
stop element
scattered
scanning device
emitted
Prior art date
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Application number
JP2013530107A
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English (en)
Japanese (ja)
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JP2013537976A (ja
JP5860882B2 (ja
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Publication date
Priority claimed from NO20101332A external-priority patent/NO336546B1/no
Application filed filed Critical
Publication of JP2013537976A publication Critical patent/JP2013537976A/ja
Publication of JP2013537976A5 publication Critical patent/JP2013537976A5/ja
Application granted granted Critical
Publication of JP5860882B2 publication Critical patent/JP5860882B2/ja
Active legal-status Critical Current
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JP2013530107A 2010-09-24 2011-09-19 物体を検査するための装置および方法 Active JP5860882B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NO20101332 2010-09-24
NO20101332A NO336546B1 (no) 2010-09-24 2010-09-24 Apparat og fremgangsmåte for inspeksjon av materie
PCT/NO2011/000260 WO2012039622A1 (en) 2010-09-24 2011-09-19 An apparatus and method for inspecting matter

Publications (3)

Publication Number Publication Date
JP2013537976A JP2013537976A (ja) 2013-10-07
JP2013537976A5 true JP2013537976A5 (enExample) 2015-08-27
JP5860882B2 JP5860882B2 (ja) 2016-02-16

Family

ID=44720090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013530107A Active JP5860882B2 (ja) 2010-09-24 2011-09-19 物体を検査するための装置および方法

Country Status (11)

Country Link
US (1) US8902416B2 (enExample)
EP (1) EP2619552B1 (enExample)
JP (1) JP5860882B2 (enExample)
CN (1) CN103180717B (enExample)
AU (1) AU2011306522B2 (enExample)
CA (1) CA2811877C (enExample)
DK (1) DK2619552T3 (enExample)
ES (1) ES2749466T3 (enExample)
NO (1) NO336546B1 (enExample)
PL (1) PL2619552T3 (enExample)
WO (1) WO2012039622A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6335499B2 (ja) * 2013-12-13 2018-05-30 株式会社イシダ 光学検査装置
US10363582B2 (en) 2016-01-15 2019-07-30 Key Technology, Inc. Method and apparatus for sorting
US9266148B2 (en) 2014-06-27 2016-02-23 Key Technology, Inc. Method and apparatus for sorting
KR101674062B1 (ko) * 2015-11-09 2016-11-08 주식회사 오토시스 광 스캐너
US10195647B2 (en) 2016-01-15 2019-02-05 Key Technology, Inc Method and apparatus for sorting
KR20180126491A (ko) * 2016-03-30 2018-11-27 가부시키가이샤 니콘 빔 주사 장치 및 패턴 묘화 장치
JP6724663B2 (ja) * 2016-09-01 2020-07-15 船井電機株式会社 スキャナミラー
CN110763689B (zh) * 2019-11-14 2020-07-31 上海精测半导体技术有限公司 一种表面检测装置及方法
DE102020214216A1 (de) * 2020-11-12 2022-05-12 Robert Bosch Gesellschaft mit beschränkter Haftung Lidar-Sensor
DE102021202234A1 (de) * 2021-03-09 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-System zur Entfernungsbestimmung von Objekten

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AU563981B2 (en) * 1983-03-23 1987-07-30 Sphere Investments Ltd. Ore sorting
GB8424084D0 (en) * 1984-09-24 1984-10-31 Sira Ltd Inspection apparatus
JPH0690149B2 (ja) 1986-01-31 1994-11-14 東洋ガラス株式会社 透光度検査装置
JPH0343707A (ja) * 1989-07-11 1991-02-25 Canon Inc 走査光学装置
JPH0469547A (ja) * 1990-07-10 1992-03-04 Fujitsu Ltd 物体表面情報検知装置及び物体表面情報検知方法
US5241329A (en) * 1990-12-14 1993-08-31 Xerox Corporation Multiple resolution ros
AU2575792A (en) 1991-10-01 1993-05-03 Oseney Limited Scattered/transmitted light information system
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
DE4207760A1 (de) 1992-03-11 1993-09-16 Rodenstock Instr Vorrichtung zur beobachtung des auges und insbesondere des augenhintergrundes
JPH0634557A (ja) * 1992-07-13 1994-02-08 Asahi Optical Co Ltd レーザ光学系、及びレーザビームを用いた被検面の表面状態の読取方法
US5559627A (en) * 1994-12-19 1996-09-24 Xerox Corporation Optics for passive facet tracking
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JPH09311109A (ja) 1996-05-22 1997-12-02 Matsushita Electric Ind Co Ltd 光を使用した欠陥検査方法、およびその装置
JP2000505906A (ja) * 1996-12-24 2000-05-16 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 光学式検査装置及びこの検査装置が設けられているリソグラフィ装置
BE1011076A3 (nl) * 1997-03-28 1999-04-06 Ruymen Marc Werkwijze en inrichting voor het detecteren van onregelmatigheden in een produkt.
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JP4499341B2 (ja) * 2002-05-09 2010-07-07 ソニー株式会社 生体認証装置及び生体認証方法
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US7768629B2 (en) * 2006-05-12 2010-08-03 Voith Patent Gmbh Device and process for optical distance measurement
US8488895B2 (en) * 2006-05-31 2013-07-16 Indiana University Research And Technology Corp. Laser scanning digital camera with pupil periphery illumination and potential for multiply scattered light imaging
US7474389B2 (en) * 2006-12-19 2009-01-06 Dean Greenberg Cargo dimensional and weight analyzing system
BE1017898A3 (nl) * 2007-12-14 2009-10-06 Technology & Design B V B A Sorteerapparaat en werkwijze voor het sorteren van producten.
CN101498663B (zh) * 2008-02-01 2011-08-31 凯迈（洛阳）测控有限公司 一种大气散射信号量测量装置及测量方法
CN102033308B (zh) * 2010-10-22 2012-08-29 浙江大学 一种超高分辨率的光学显微成像方法及装置

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