JP5860882B2 - 物体を検査するための装置および方法 - Google Patents

物体を検査するための装置および方法 Download PDF

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Publication number
JP5860882B2
JP5860882B2 JP2013530107A JP2013530107A JP5860882B2 JP 5860882 B2 JP5860882 B2 JP 5860882B2 JP 2013530107 A JP2013530107 A JP 2013530107A JP 2013530107 A JP2013530107 A JP 2013530107A JP 5860882 B2 JP5860882 B2 JP 5860882B2
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radiation
detection device
scanning device
scattered
stop element
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Japanese (ja)
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JP2013537976A (ja
JP2013537976A5 (enExample
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アーナ クロッケルド
アーナ クロッケルド
マーティン ケルミット
マーティン ケルミット
オーレ オンスラッド
オーレ オンスラッド
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トムラ ソーティング エーエス
トムラ ソーティング エーエス
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G01N21/278—Constitution of standards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4785—Standardising light scatter apparatus; Standards therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/124—Details of the optical system between the light source and the polygonal mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2013530107A 2010-09-24 2011-09-19 物体を検査するための装置および方法 Active JP5860882B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NO20101332 2010-09-24
NO20101332A NO336546B1 (no) 2010-09-24 2010-09-24 Apparat og fremgangsmåte for inspeksjon av materie
PCT/NO2011/000260 WO2012039622A1 (en) 2010-09-24 2011-09-19 An apparatus and method for inspecting matter

Publications (3)

Publication Number Publication Date
JP2013537976A JP2013537976A (ja) 2013-10-07
JP2013537976A5 JP2013537976A5 (enExample) 2015-08-27
JP5860882B2 true JP5860882B2 (ja) 2016-02-16

Family

ID=44720090

Family Applications (1)

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JP2013530107A Active JP5860882B2 (ja) 2010-09-24 2011-09-19 物体を検査するための装置および方法

Country Status (11)

Country Link
US (1) US8902416B2 (enExample)
EP (1) EP2619552B1 (enExample)
JP (1) JP5860882B2 (enExample)
CN (1) CN103180717B (enExample)
AU (1) AU2011306522B2 (enExample)
CA (1) CA2811877C (enExample)
DK (1) DK2619552T3 (enExample)
ES (1) ES2749466T3 (enExample)
NO (1) NO336546B1 (enExample)
PL (1) PL2619552T3 (enExample)
WO (1) WO2012039622A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6335499B2 (ja) * 2013-12-13 2018-05-30 株式会社イシダ 光学検査装置
US10363582B2 (en) 2016-01-15 2019-07-30 Key Technology, Inc. Method and apparatus for sorting
US9266148B2 (en) 2014-06-27 2016-02-23 Key Technology, Inc. Method and apparatus for sorting
KR101674062B1 (ko) * 2015-11-09 2016-11-08 주식회사 오토시스 광 스캐너
US10195647B2 (en) 2016-01-15 2019-02-05 Key Technology, Inc Method and apparatus for sorting
KR20180126491A (ko) * 2016-03-30 2018-11-27 가부시키가이샤 니콘 빔 주사 장치 및 패턴 묘화 장치
JP6724663B2 (ja) * 2016-09-01 2020-07-15 船井電機株式会社 スキャナミラー
CN110763689B (zh) * 2019-11-14 2020-07-31 上海精测半导体技术有限公司 一种表面检测装置及方法
DE102020214216A1 (de) * 2020-11-12 2022-05-12 Robert Bosch Gesellschaft mit beschränkter Haftung Lidar-Sensor
DE102021202234A1 (de) * 2021-03-09 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-System zur Entfernungsbestimmung von Objekten

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GB1305192A (enExample) 1969-05-19 1973-01-31
US4283147A (en) * 1979-06-14 1981-08-11 Dreyfus-Pellman Electro-optical scanning system
AU563981B2 (en) * 1983-03-23 1987-07-30 Sphere Investments Ltd. Ore sorting
GB8424084D0 (en) * 1984-09-24 1984-10-31 Sira Ltd Inspection apparatus
JPH0690149B2 (ja) 1986-01-31 1994-11-14 東洋ガラス株式会社 透光度検査装置
JPH0343707A (ja) * 1989-07-11 1991-02-25 Canon Inc 走査光学装置
JPH0469547A (ja) * 1990-07-10 1992-03-04 Fujitsu Ltd 物体表面情報検知装置及び物体表面情報検知方法
US5241329A (en) * 1990-12-14 1993-08-31 Xerox Corporation Multiple resolution ros
AU2575792A (en) 1991-10-01 1993-05-03 Oseney Limited Scattered/transmitted light information system
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
DE4207760A1 (de) 1992-03-11 1993-09-16 Rodenstock Instr Vorrichtung zur beobachtung des auges und insbesondere des augenhintergrundes
JPH0634557A (ja) * 1992-07-13 1994-02-08 Asahi Optical Co Ltd レーザ光学系、及びレーザビームを用いた被検面の表面状態の読取方法
US5559627A (en) * 1994-12-19 1996-09-24 Xerox Corporation Optics for passive facet tracking
US5546201A (en) 1994-12-20 1996-08-13 Xerox Corporation Double bounce passive facet tracking with a reflective diffraction grating on a flat facet
JPH09311109A (ja) 1996-05-22 1997-12-02 Matsushita Electric Ind Co Ltd 光を使用した欠陥検査方法、およびその装置
JP2000505906A (ja) * 1996-12-24 2000-05-16 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 光学式検査装置及びこの検査装置が設けられているリソグラフィ装置
BE1011076A3 (nl) * 1997-03-28 1999-04-06 Ruymen Marc Werkwijze en inrichting voor het detecteren van onregelmatigheden in een produkt.
US5945685A (en) * 1997-11-19 1999-08-31 International Business Machines Corporation Glass substrate inspection tool having a telecentric lens assembly
US6438396B1 (en) * 1998-11-05 2002-08-20 Cytometrics, Inc. Method and apparatus for providing high contrast imaging
EP1105715B1 (de) * 1999-05-14 2016-12-07 Krieg, Gunther, Prof.Dr.Ing. Verfahren und vorrichtung zur detektion und unterscheidung zwischen kontaminationen und gutstoffen sowie zwischen verschiedenen farben in feststoffpartikeln
JP4499341B2 (ja) * 2002-05-09 2010-07-07 ソニー株式会社 生体認証装置及び生体認証方法
GB0409691D0 (en) * 2004-04-30 2004-06-02 Titech Visionsort As Apparatus and method
US7768629B2 (en) * 2006-05-12 2010-08-03 Voith Patent Gmbh Device and process for optical distance measurement
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CN101498663B (zh) * 2008-02-01 2011-08-31 凯迈（洛阳）测控有限公司 一种大气散射信号量测量装置及测量方法
CN102033308B (zh) * 2010-10-22 2012-08-29 浙江大学 一种超高分辨率的光学显微成像方法及装置

Also Published As

Publication number Publication date
US8902416B2 (en) 2014-12-02
JP2013537976A (ja) 2013-10-07
EP2619552A1 (en) 2013-07-31
WO2012039622A1 (en) 2012-03-29
CA2811877C (en) 2019-08-13
AU2011306522A1 (en) 2013-04-04
ES2749466T3 (es) 2020-03-20
NO336546B1 (no) 2015-09-21
CA2811877A1 (en) 2012-03-29
NO20101332A1 (no) 2012-03-26
CN103180717A (zh) 2013-06-26
PL2619552T3 (pl) 2020-05-18
AU2011306522B2 (en) 2015-01-29
CN103180717B (zh) 2015-08-12
EP2619552B1 (en) 2019-07-17
US20130222806A1 (en) 2013-08-29
WO2012039622A8 (en) 2012-04-26
DK2619552T3 (da) 2019-10-21

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