CN103180717B - 用于检查物质的设备和方法 - Google Patents

用于检查物质的设备和方法 Download PDF

Info

Publication number
CN103180717B
CN103180717B CN201180046188.8A CN201180046188A CN103180717B CN 103180717 B CN103180717 B CN 103180717B CN 201180046188 A CN201180046188 A CN 201180046188A CN 103180717 B CN103180717 B CN 103180717B
Authority
CN
China
Prior art keywords
radiation
unit
pick
equipment according
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201180046188.8A
Other languages
English (en)
Chinese (zh)
Other versions
CN103180717A (zh
Inventor
阿尔内·克洛克鲁德
马丁·克尔米特
奥勒·奥恩斯鲁德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tomra Sorting AS
Original Assignee
Tomra Sorting AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tomra Sorting AS filed Critical Tomra Sorting AS
Publication of CN103180717A publication Critical patent/CN103180717A/zh
Application granted granted Critical
Publication of CN103180717B publication Critical patent/CN103180717B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G01N21/278—Constitution of standards
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4785—Standardising light scatter apparatus; Standards therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/49—Scattering, i.e. diffuse reflection within a body or fluid
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors
    • G02B26/124—Details of the optical system between the light source and the polygonal mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201180046188.8A 2010-09-24 2011-09-19 用于检查物质的设备和方法 Active CN103180717B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
NO20101332A NO336546B1 (no) 2010-09-24 2010-09-24 Apparat og fremgangsmåte for inspeksjon av materie
NO20101332 2010-09-24
PCT/NO2011/000260 WO2012039622A1 (en) 2010-09-24 2011-09-19 An apparatus and method for inspecting matter

Publications (2)

Publication Number Publication Date
CN103180717A CN103180717A (zh) 2013-06-26
CN103180717B true CN103180717B (zh) 2015-08-12

Family

ID=44720090

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180046188.8A Active CN103180717B (zh) 2010-09-24 2011-09-19 用于检查物质的设备和方法

Country Status (11)

Country Link
US (1) US8902416B2 (enExample)
EP (1) EP2619552B1 (enExample)
JP (1) JP5860882B2 (enExample)
CN (1) CN103180717B (enExample)
AU (1) AU2011306522B2 (enExample)
CA (1) CA2811877C (enExample)
DK (1) DK2619552T3 (enExample)
ES (1) ES2749466T3 (enExample)
NO (1) NO336546B1 (enExample)
PL (1) PL2619552T3 (enExample)
WO (1) WO2012039622A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6335499B2 (ja) * 2013-12-13 2018-05-30 株式会社イシダ 光学検査装置
US9266148B2 (en) 2014-06-27 2016-02-23 Key Technology, Inc. Method and apparatus for sorting
US10363582B2 (en) 2016-01-15 2019-07-30 Key Technology, Inc. Method and apparatus for sorting
KR101674062B1 (ko) * 2015-11-09 2016-11-08 주식회사 오토시스 광 스캐너
US10195647B2 (en) 2016-01-15 2019-02-05 Key Technology, Inc Method and apparatus for sorting
KR20180126491A (ko) * 2016-03-30 2018-11-27 가부시키가이샤 니콘 빔 주사 장치 및 패턴 묘화 장치
JP6724663B2 (ja) * 2016-09-01 2020-07-15 船井電機株式会社 スキャナミラー
CN110763689B (zh) * 2019-11-14 2020-07-31 上海精测半导体技术有限公司 一种表面检测装置及方法
DE102020214216A1 (de) * 2020-11-12 2022-05-12 Robert Bosch Gesellschaft mit beschränkter Haftung Lidar-Sensor
DE102021202234A1 (de) * 2021-03-09 2022-09-15 Robert Bosch Gesellschaft mit beschränkter Haftung LiDAR-System zur Entfernungsbestimmung von Objekten
CN119757357B (zh) * 2024-12-23 2025-12-16 西安电子科技大学广州研究院 一种线扫共聚焦显微系统

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1305192A (enExample) 1969-05-19 1973-01-31
US4283147A (en) * 1979-06-14 1981-08-11 Dreyfus-Pellman Electro-optical scanning system
US4600105A (en) * 1983-03-23 1986-07-15 Sphere Investments Limited Method and apparatus for sorting objects of ore by monitoring reflected radiation
GB8424084D0 (en) * 1984-09-24 1984-10-31 Sira Ltd Inspection apparatus
JPH0690149B2 (ja) 1986-01-31 1994-11-14 東洋ガラス株式会社 透光度検査装置
JPH0343707A (ja) * 1989-07-11 1991-02-25 Canon Inc 走査光学装置
JPH0469547A (ja) * 1990-07-10 1992-03-04 Fujitsu Ltd 物体表面情報検知装置及び物体表面情報検知方法
US5241329A (en) * 1990-12-14 1993-08-31 Xerox Corporation Multiple resolution ros
WO1993007468A1 (en) 1991-10-01 1993-04-15 Oseney Limited Scattered/transmitted light information system
JP2511391B2 (ja) * 1991-12-04 1996-06-26 シーメンス アクチエンゲゼルシヤフト 光学式間隔センサ
DE4207760A1 (de) * 1992-03-11 1993-09-16 Rodenstock Instr Vorrichtung zur beobachtung des auges und insbesondere des augenhintergrundes
JPH0634557A (ja) * 1992-07-13 1994-02-08 Asahi Optical Co Ltd レーザ光学系、及びレーザビームを用いた被検面の表面状態の読取方法
US5559627A (en) * 1994-12-19 1996-09-24 Xerox Corporation Optics for passive facet tracking
US5546201A (en) * 1994-12-20 1996-08-13 Xerox Corporation Double bounce passive facet tracking with a reflective diffraction grating on a flat facet
JPH09311109A (ja) 1996-05-22 1997-12-02 Matsushita Electric Ind Co Ltd 光を使用した欠陥検査方法、およびその装置
EP0894262B1 (en) * 1996-12-24 2008-06-11 ASML Netherlands B.V. Optical inspection device and lithographic apparatus provided with such a device
BE1011076A3 (nl) * 1997-03-28 1999-04-06 Ruymen Marc Werkwijze en inrichting voor het detecteren van onregelmatigheden in een produkt.
US5945685A (en) 1997-11-19 1999-08-31 International Business Machines Corporation Glass substrate inspection tool having a telecentric lens assembly
US6438396B1 (en) 1998-11-05 2002-08-20 Cytometrics, Inc. Method and apparatus for providing high contrast imaging
US6509537B1 (en) * 1999-05-14 2003-01-21 Gunther Krieg Method and device for detecting and differentiating between contaminations and accepts as well as between different colors in solid particles
JP4499341B2 (ja) * 2002-05-09 2010-07-07 ソニー株式会社 生体認証装置及び生体認証方法
GB0409691D0 (en) * 2004-04-30 2004-06-02 Titech Visionsort As Apparatus and method
US7768629B2 (en) * 2006-05-12 2010-08-03 Voith Patent Gmbh Device and process for optical distance measurement
US8488895B2 (en) * 2006-05-31 2013-07-16 Indiana University Research And Technology Corp. Laser scanning digital camera with pupil periphery illumination and potential for multiply scattered light imaging
US7474389B2 (en) * 2006-12-19 2009-01-06 Dean Greenberg Cargo dimensional and weight analyzing system
BE1017898A3 (nl) * 2007-12-14 2009-10-06 Technology & Design B V B A Sorteerapparaat en werkwijze voor het sorteren van producten.
CN101498663B (zh) * 2008-02-01 2011-08-31 凯迈（洛阳）测控有限公司 一种大气散射信号量测量装置及测量方法
CN102033308B (zh) * 2010-10-22 2012-08-29 浙江大学 一种超高分辨率的光学显微成像方法及装置

Also Published As

Publication number Publication date
US8902416B2 (en) 2014-12-02
WO2012039622A1 (en) 2012-03-29
NO20101332A1 (no) 2012-03-26
DK2619552T3 (da) 2019-10-21
PL2619552T3 (pl) 2020-05-18
NO336546B1 (no) 2015-09-21
JP2013537976A (ja) 2013-10-07
EP2619552B1 (en) 2019-07-17
AU2011306522A1 (en) 2013-04-04
EP2619552A1 (en) 2013-07-31
WO2012039622A8 (en) 2012-04-26
JP5860882B2 (ja) 2016-02-16
CA2811877A1 (en) 2012-03-29
US20130222806A1 (en) 2013-08-29
AU2011306522B2 (en) 2015-01-29
ES2749466T3 (es) 2020-03-20
CA2811877C (en) 2019-08-13
CN103180717A (zh) 2013-06-26

Similar Documents

Publication Publication Date Title
CN103180717B (zh) 用于检查物质的设备和方法
JP6209536B2 (ja) 物質を検出する装置、システムおよび方法
US8451440B2 (en) Apparatus for the optical inspection of wafers
TWI557434B (zh) 照明系統
CN205655922U (zh) 漫反射分光镜仪器
JP7379305B2 (ja) 光学装置
KR102395039B1 (ko) 벌크재 검사장치 및 방법
JP6302578B2 (ja) 光学センサ
US8174690B2 (en) Apparatus for characterizing a surface structure
JP2025144166A (ja) 光学装置、光学検査システム、物体のイメージング方法、及び、物体のイメージングプログラム
JP2565468B2 (ja) 位置および幅検知装置
WO2013117769A1 (en) Illumination and detection system
JP2020176861A (ja) 光検査装置
KR20080028998A (ko) 단부 흠집 검사 장치

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant