WO2009104871A3 - 암시야 검사장치 - Google Patents

암시야 검사장치 Download PDF

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Publication number
WO2009104871A3
WO2009104871A3 PCT/KR2009/000249 KR2009000249W WO2009104871A3 WO 2009104871 A3 WO2009104871 A3 WO 2009104871A3 KR 2009000249 W KR2009000249 W KR 2009000249W WO 2009104871 A3 WO2009104871 A3 WO 2009104871A3
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WO
WIPO (PCT)
Prior art keywords
examination object
unit
light
dark
examination
Prior art date
Application number
PCT/KR2009/000249
Other languages
English (en)
French (fr)
Other versions
WO2009104871A2 (ko
Inventor
김태욱
박희재
이일환
Original Assignee
에스엔유 프리시젼 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엔유 프리시젼 주식회사 filed Critical 에스엔유 프리시젼 주식회사
Priority to US12/673,525 priority Critical patent/US8223326B2/en
Priority to CN200980100216A priority patent/CN101836153A/zh
Priority to JP2010522831A priority patent/JP4956725B2/ja
Publication of WO2009104871A2 publication Critical patent/WO2009104871A2/ko
Publication of WO2009104871A3 publication Critical patent/WO2009104871A3/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8822—Dark field detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N2021/9513—Liquid crystal panels

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Microscoopes, Condenser (AREA)
  • Apparatus For Radiation Diagnosis (AREA)

Abstract

본 발명은 암시야 검사장치에 관한 것으로서, 본 발명에 따른 암시야 검사장치는 베이스 상의 피검사체 측으로 광을 조사하는 조명부; 상기 피검사체에 의해 반사되어 입사되는 광 또는 상기 베이스를 투과하여 입사되는 광을 상기 피검사체 측으로 다시 반사하는 반사부; 및 상기 피검사체에 의해 산란된 광을 수광하여 상기 피검사체를 촬상하는 촬상부;를 포함하며, 상기 조명부로부터 조사된 광 중 일부는 상기 피검사체에 의해 산란되어 상기 촬상부에 입사되고, 상기 조명부로부터 조사된 광 중 다른 일부는 상기 반사부에 입사되며, 상기 반사부에 의해 상기 피검사체 측으로 다시 반사된 광은 상기 피검사체에 의해 산란되어 상기 촬상부에 입사되도록, 상기 조명부, 상기 반사부 및 상기 촬상부가 배치되는 것을 특징으로 한다.
PCT/KR2009/000249 2008-02-19 2009-01-16 암시야 검사장치 WO2009104871A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US12/673,525 US8223326B2 (en) 2008-02-19 2009-01-16 Dark-field examination device
CN200980100216A CN101836153A (zh) 2008-02-19 2009-01-16 暗场检测装置
JP2010522831A JP4956725B2 (ja) 2008-02-19 2009-01-16 暗視野検査装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2008-0014859 2008-02-19
KR1020080014859A KR100913484B1 (ko) 2008-02-19 2008-02-19 암시야 검사장치

Publications (2)

Publication Number Publication Date
WO2009104871A2 WO2009104871A2 (ko) 2009-08-27
WO2009104871A3 true WO2009104871A3 (ko) 2009-10-22

Family

ID=40986023

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2009/000249 WO2009104871A2 (ko) 2008-02-19 2009-01-16 암시야 검사장치

Country Status (6)

Country Link
US (1) US8223326B2 (ko)
JP (1) JP4956725B2 (ko)
KR (1) KR100913484B1 (ko)
CN (1) CN101836153A (ko)
TW (1) TWI390200B (ko)
WO (1) WO2009104871A2 (ko)

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KR101685703B1 (ko) * 2010-02-25 2016-12-12 가부시끼가이샤 야마나시 기쥬쯔 고오보오 이물질 검사 장치 및 검사 방법
JP2012073040A (ja) * 2010-09-27 2012-04-12 Nidec Sankyo Corp パーティクル検出用光学装置およびパーティクル検出装置
JP5648185B2 (ja) * 2010-09-27 2015-01-07 Ｎｃｃ株式会社 パーティクル検出用光学装置およびパーティクル検出装置
JP2012163533A (ja) * 2011-02-09 2012-08-30 Fujifilm Corp レンチキュラシートの欠陥検査装置及び方法
CN103562710B (zh) * 2011-05-30 2015-09-16 狮王株式会社 照明系统、检查系统以及控制系统
JP5414743B2 (ja) * 2011-06-07 2014-02-12 スミックス株式会社 マクロ検査装置
US20130245985A1 (en) * 2012-03-14 2013-09-19 Kla-Tencor Corporation Calibration Of An Optical Metrology System For Critical Dimension Application Matching
CA2872898A1 (en) 2012-05-09 2013-11-14 Seagate Technology Llc Surface features mapping
US9212900B2 (en) 2012-08-11 2015-12-15 Seagate Technology Llc Surface features characterization
US9297751B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Chemical characterization of surface features
US9297759B2 (en) 2012-10-05 2016-03-29 Seagate Technology Llc Classification of surface features using fluorescence
US9377394B2 (en) 2012-10-16 2016-06-28 Seagate Technology Llc Distinguishing foreign surface features from native surface features
US9217714B2 (en) * 2012-12-06 2015-12-22 Seagate Technology Llc Reflective surfaces for surface features of an article
US9513215B2 (en) 2013-05-30 2016-12-06 Seagate Technology Llc Surface features by azimuthal angle
US9201019B2 (en) 2013-05-30 2015-12-01 Seagate Technology Llc Article edge inspection
US9274064B2 (en) 2013-05-30 2016-03-01 Seagate Technology Llc Surface feature manager
US9217715B2 (en) 2013-05-30 2015-12-22 Seagate Technology Llc Apparatuses and methods for magnetic features of articles
CN103353459A (zh) * 2013-06-18 2013-10-16 深圳市华星光电技术有限公司 一种检测装置及检测方法
KR20160004099A (ko) * 2014-07-02 2016-01-12 한화테크윈 주식회사 결함 검사 장치
CN105372256B (zh) * 2014-08-20 2019-01-18 上海微电子装备（集团）股份有限公司 表面检测系统及方法
JP2016125968A (ja) * 2015-01-07 2016-07-11 旭硝子株式会社 検査装置および検査方法
KR102374381B1 (ko) * 2020-08-21 2022-03-14 최종명 실린더 라이트 교체가 용이한 솔더링 검사장치

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KR20030081579A (ko) * 2002-04-12 2003-10-22 주식회사 유브이티 피검사체의 표면 검사장치
KR20070084560A (ko) * 2004-10-28 2007-08-24 코닝 인코포레이티드 유리 시트의 표면 및 바디 결함을 식별하기 위한 검사시스템 및 방법

Also Published As

Publication number Publication date
KR100913484B1 (ko) 2009-08-25
TW200937007A (en) 2009-09-01
WO2009104871A2 (ko) 2009-08-27
US20110043794A1 (en) 2011-02-24
JP2010537219A (ja) 2010-12-02
JP4956725B2 (ja) 2012-06-20
KR20090089603A (ko) 2009-08-24
TWI390200B (zh) 2013-03-21
US8223326B2 (en) 2012-07-17
CN101836153A (zh) 2010-09-15

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