JP2013534714A - アンダーフィル用ダムを含む印刷回路基板およびその製造方法 - Google Patents
アンダーフィル用ダムを含む印刷回路基板およびその製造方法 Download PDFInfo
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Images
Classifications
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
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- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
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- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3452—Solder masks
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- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
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- H01L2224/2612—Auxiliary members for layer connectors, e.g. spacers
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- H01L2224/83104—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector the layer connector being supplied to the parts to be connected in the bonding apparatus by applying pressure, e.g. by injection
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- H—ELECTRICITY
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Abstract
Description
前記感光性樹脂組成物は、カルボキシ基(−COOH)と、光硬化可能な作用基を有する酸変性オリゴマーを含む。このような酸変性オリゴマーは、光硬化により樹脂組成物の他の成分、つまり、光重合性モノマーおよび/または熱硬化性バインダー樹脂と架橋結合を形成することができ、カルボキシ基を含んで樹脂組成物がアルカリ現像性を有することができるようにする。
(2)不飽和カルボン酸(a)と不飽和二重結合を有する化合物(b)の共重合体の一部に、ビニル基、アリル基、(メタ)アクリロイル基などのエチレン性不飽和基とエポキシ基、酸クロライドなどの反応性基を有する化合物、例えば、グリシジル(メタ)アクリレートを反応させてエチレン性不飽和基をペンダントとして付加させることによって得られるカルボキシ基含有感光性樹脂;
(3)グリシジル(メタ)アクリレート、α−メチルグリシジル(メタ)アクリレートなどのエポキシ基と不飽和二重結合を有する化合物(c)と不飽和二重結合を有する化合物(b)の共重合体に不飽和カルボン酸(a)を反応させ、生成された2級のヒドロキシ基に無水フタル酸、テトラヒドロ無水フタル酸、ヘキサヒドロ無水フタル酸などの飽和または不飽和多塩基酸無水物(d)を反応させて得られるカルボキシ基含有感光性樹脂;
(4)無水マレイン酸、無水イタコン酸などの不飽和二重結合を有する酸無水物(e)と不飽和二重結合を有する化合物(b)の共重合体にヒドロキシアルキル(メタ)アクリレートなどの1個のヒドロキシ基と1個以上のエチレン性不飽和二重結合を有する化合物(f)を反応させて得られるカルボキシ基含有感光性樹脂;
(5)後述するような分子中に2個以上のエポキシ基を有する多官能エポキシ化合物(g)または多官能エポキシ化合物のヒドロキシ基を追加的にエピクロロヒドリンでエポキシ化した多官能エポキシ樹脂のエポキシ基と、(メタ)アクリル酸などの不飽和モノカルボン酸(h)のカルボキシ基をエステル化反応(全体エステル化または部分エステル化、好ましくは全体エステル化)させ、生成されたヒドロキシ基に追加的に飽和または不飽和多塩基酸無水物(d)を反応させて得られるカルボキシ基含有感光性化合物;
(6)不飽和二重結合を有する化合物(b)とグリシジル(メタ)アクリレートの共重合体のエポキシ基に炭素数2〜17のアルキルカルボン酸、芳香族基含有アルキルカルボン酸などの1分子中に1個のカルボキシ基を有し、エチレン性不飽和結合を有していない有機酸(i)を反応させ、生成された2級のヒドロキシ基に飽和または不飽和多塩基酸無水物(d)を反応させて得られるカルボキシ基含有樹脂;
(7)脂肪族ジイソシアナート、分枝脂肪族ジイソシアナート、指環式ジイソシアナート、芳香族ジイソシアナートなどのジイソシアナート(j)と、ジメチロールプロピオン酸、ジメチロールブタン酸などのカルボキシ基含有ジアルコール化合物(k)、およびポリカーボネート系ポリオール、ポリエーテル系ポリオール、ポリエステル系ポリオール、ポリオレフィン系ポリオール、アクリル系ポリオール、ビスフェノールA系アルキレンオキシド付加体ジオール、フェノール性ヒドロキシル基およびアルコール性ヒドロキシル基を有する化合物などのジオール化合物(m)の重付加反応により得られるカルボキシ基含有ウレタン樹脂;
(8)ジイソシアナート(j)と、ビスフェノールA型エポキシ樹脂、水素添加ビスフェノールA型エポキシ樹脂、臭素化ビスフェノールA型エポキシ樹脂、ビスフェノールF型エポキシ樹脂、ビスフェノールS型エポキシ樹脂、ビキシレノール型エポキシ樹脂、ビフェノール型エポキシ樹脂などの2官能エポキシ樹脂の(メタ)アクリレートまたはその部分酸無水物変性物(n)、カルボキシ基含有ジアルコール化合物(k)、およびジオール化合物(m)の重付加反応により得られる感光性のカルボキシ基含有ウレタン樹脂;
(9)前記(7)または(8)の樹脂の合成中にヒドロキシアルキル(メタ)アクリレートなどの1個のヒドロキシ基と1個以上のエチレン性不飽和二重結合を有する化合物(f)を加えて、末端に不飽和二重結合を導入したカルボキシ基含有ウレタン樹脂;
(10)前記(7)または(8)の樹脂の合成中にイソホロンジイソシアナートとペンタエリトリトルトリアクリレートの等モル反応物などの分子内に1個のイソシアネート基と1個以上の(メタ)アクリロイル基を有する化合物を加え、末端(メタ)アクリル化したカルボキシ基含有ウレタン樹脂;
(11)後述するような分子中に2個以上のオキセタン環を有する多官能オキセタン化合物に不飽和モノカルボン酸(h)を反応させ、得られた変性オキセタン化合物中の1級ヒドロキシ基に対して飽和または不飽和多塩基酸無水物(d)を反応させて得られるカルボキシ基含有感光性樹脂;
(12)ビスエポキシ化合物とビスフェノール類との反応生成物に不飽和二重結合を導入し、続いて飽和または不飽和多塩基酸無水物(d)を反応させて得られるカルボキシ基含有感光性樹脂;
(13)ノボラック型フェノール樹脂と、エチレンオキシド、プロピレンオキシド、ブチレンオキシド、トリメチレンオキシド、テトラヒドロフラン、テトラヒドロピランなどのアルキレンオキシドおよび/またはエチレンカーボネート、プロピレンカーボネート、ブチレンカーボネート、2,3−カーボネートプロピルメタクリレートなどの環状カーボネートとの反応生成物に不飽和モノカルボン酸(h)を反応させ、得られた反応生成物に飽和または不飽和多塩基酸無水物(d)を反応させて得られるカルボキシ基含有感光性樹脂;
上述した成分の中でも、前記(7)〜(10)で、樹脂合成に利用されるイソシアネート基含有化合物がベンゼン環を含まないジイソシアナートになる場合と、前記(5)および(8)で、樹脂合成に利用される多官能および2官能エポキシ樹脂がビスフェノールA骨格、ビスフェノールF骨格、ビフェニル骨格またはビキシレノール骨格を有する鎖状構造の化合物やその水素添加化合物になる場合、DFSRの可撓性などの側面で酸変性オリゴマーとして好ましく使用可能な成分が得られる。また、他の側面で、前記(7)〜(10)の樹脂の変性物は、主鎖にウレタン結合を含んで撓みに対して好ましい。
前記感光性樹脂組成物は、光重合性モノマーを含むことができる。このような光重合性モノマーを含むことによって光照射時に一定した硬化物または架橋構造を形成することができる。このような光重合性モノマーは、組成物に光硬化性を付与することができるばかりか、各種塗布方法に適した粘度に調整したりアルカリ水溶液に対する適切な溶解性を付与する役割も果たすことができる。
前記感光性樹脂組成物は、光開始剤を含むことができる。このような光開始剤は、例えば、樹脂組成物の露光部でラジカル光硬化を開始する役割を果たす。
また、前記感光性樹脂組成物は、熱硬化可能な作用基、例えば、エポキシ基、オキセタニル基、環状エーテル基および環状チオエーテル基の中で選択された1種以上の作用基を有する熱硬化性バインダー樹脂を含むことができる。このような熱硬化性バインダーは、熱硬化により酸変性オリゴマーおよび/または光重合性モノマーと架橋結合を形成してドライフィルムソルダレジストまたはアンダーフィル用ダムの耐熱性または機械的物性を担保することができる。
前記感光性樹脂組成物は、それぞれの成分を溶解したり適切な粘度を付与するために1個以上の有機溶媒を混用して使用することができる。
前記アンダーフィル用ダムの色を白色(White)で示そうとする時、顔料としてピグメントホワイト6である酸化チタンを使用することができる。白色顔料として使用される酸化チタンは、ルチル型とアナターゼ型がある。アナターゼ型の場合、ルチル型に比べて白色度に優れているが、光学活性を有することによって光による黄変が発生する可能性があるため、白色度は落ちるが光学活性を有していないルチル型を使用することが好ましい。
前記感光性樹脂組成物は、選択的に熱硬化性バインダー樹脂の硬化度を高めることができる熱硬化性バインダー樹脂硬化剤をさらに含むことができる。
熱硬化性バインダー樹脂触媒は、熱硬化性バインダー樹脂の硬化速度を向上させることができる。
フィラーは、耐熱安定性、熱による寸法安定性、樹脂接着力を向上させる役割を果たす。また、色を補強することによって体質顔料の役割も果たす。
レーベリング剤は、フィルムコーティング時に表面のポッピング(Popping)やクレーター(Crater)を除去する役割を果たす。
分散剤は、フィラー、顔料などの分散安定性を向上させる役割を果たす。
〔実施例1〕
(1)感光性樹脂組成物の製造
酸変性オリゴマーとして日本化薬のCCR−1235を35重量%、光重合性モノマーとしてカヤラドのDPEA−12を13重量%、光開始剤としてTPOを3重量%、エポキシ樹脂として日本化薬のEOCN−1020を13重量%、エポキシ硬化剤としてジシアンジアミドを0.5重量%、エポキシ触媒として2MIを0.5重量%、白色顔料としてルチル型酸化チタン(デュポン社のtie pure R−931)を19重量%、レーベリング剤としてBYK−380Nを0.5重量%、分散剤としてDisperbyk−110を0.5重量%、溶媒としてDMFを15重量%を使用して白色感光性樹脂組成物を製造した。
前記製造された感光性樹脂組成物をキャリアフイルムでPETに塗布した後、75℃のオーブンを通過させて乾燥させた後、離型フィルムでPEを積層することによって、下からキャリアフィルム、感光性フィルム(厚さ15μm)、離型フィルムから構成されるドライフィルムを製造した。
製造されたドライフィルムのカバーフィルムを剥がした後、回路が形成された基板上に感光性フィルム層を真空積層した。そして、所望のアンダーフィル用ダムパターンに対応するフォトマスクをドライフィルムに載せてUVで露光した後、アルカリ溶液で現像して不必要な部分を除去して所望のアンダーフィル用ダムパターンを形成した。そして、得られたアンダーフィル用ダムを加熱硬化することによって、ドライフィルムタイプのソルダレジストからなるダムが形成された印刷回路基板を完成した。
(1)感光性樹脂組成物の製造
酸変性オリゴマーとして日本化薬のCCR−1235を35重量%、光重合性モノマーとしてカヤラドのDPEA−12を13重量%、光開始剤としてTPOを3重量%、エポキシ樹脂として日本化薬のEOCN−1020を13重量%、エポキシ硬化剤としてジシアンジアミドを0.5重量%、エポキシ触媒として2MIを0.5重量%、フィラーとしてBaSO4を18重量%、顔料としてピグメントブルー15:3、ピグメントイエロー151をそれぞれ0.5重量%、レーベリング剤としてBYK−380Nを0.5重量%、分散剤としてDisperbyk−110を0.5重量%、溶媒としてDMFを15重量%を使用して緑色感光性樹脂組成物を製造した。
前記製造された感光性樹脂組成物を使用した点を除いては、実施例1と同様な方法でドライフィルムおよび印刷回路基板を製造した。
(1)感光性樹脂組成物の製造
酸変性オリゴマーとして日本化薬のCCR−1235を35重量%、光重合性モノマーとしてカヤラドのDPEA−12を13重量%、光開始剤としてTPOを3重量%、エポキシ樹脂として日本化薬のEOCN−1020を13重量%、エポキシ硬化剤としてジシアンジアミドを0.5重量%、エポキシ触媒として2MIを0.5重量%、フィラーとしてBaSO4を18重量%、顔料としてピグメントイエロー151を1.0重量%、レーベリング剤としてBYK−380Nを0.5重量%、分散剤としてDisperbyk−110を0.5重量%、溶媒としてDMFを15重量%使用して黄色感光性樹脂組成物を製造した。
前記製造された感光性樹脂組成物を使用した点を除いては、実施例1と同様な方法でドライフィルムおよび印刷回路基板を製造した。
特許文献1に開示された液状ソルダレジストを利用してアンダーフィル用ダムを形成した点を除いては、実施例1と同一な構造の印刷回路基板を製造した。
2:ソルダバンプ
3:電極パッド
4:基板
5:アンダーフィル
6:ダム
Claims (19)
- 印刷回路基板であって、
半導体チップが形成された基板の外側端に沿って形成されたアンダーフィル用ダムを備えてなり、
前記アンダーフィル用ダムが、カルボキシ基(−COOH)および光硬化可能な作用基を有する酸変性オリゴマー;光重合性モノマー;熱硬化性バインダー樹脂;および顔料を含む感光性樹脂組成物の乾燥物または硬化物を含んでなるドライフィルムソルダレジストを備えてなるものである、印刷回路基板。 - 前記感光性樹脂組成物の硬化物が、前記酸変性オリゴマーおよび光重合性モノマーの光硬化物;前記酸変性オリゴマーおよび熱硬化性バインダー樹脂の熱硬化物;および顔料を含んでなる、請求項1に記載の印刷回路基板。
- 前記基板上に形成された電極パッド;前記電極パッド上に形成されたソルダバンプ;および前記ソルダバンプを媒介としてフリップチップ結合された半導体チップを備えてなる、請求項1に記載の印刷回路基板。
- 前記アンダーフィル用ダムが、基板と半導体チップとの間に埋めるアンダーフィル材料の漏出を防止するものである、請求項1に記載の印刷回路基板。
- 前記アンダーフィル用ダムが、前記基板の外側端と半導体チップの外側端との間に形成され、
基板と半導体チップとの間の間隔以上の高さを有するものである、請求項3に記載の印刷回路基板。 - 前記アンダーフィル用ダムが、白色、黄色、緑色、黒色および赤色からなる群より選択された1種の色を有する、請求項1に記載の印刷回路基板。
- 前記アンダーフィル用ダムが、前記基板または前記基板上のソルダレジストと異なる色を有する、請求項6に記載の印刷回路基板。
- 前記アンダーフィル用ダムが、10〜20μmの厚さを有する、請求項1に記載の印刷回路基板。
- 前記酸変性オリゴマーの光硬化可能な作用基が、アクリレート基である、請求項1に記載の印刷回路基板。
- 前記酸変性オリゴマーが、カルボキシ基を有する重合可能なモノマーおよびアクリレート系化合物を含むモノマーの共重合体である、請求項1に記載の印刷回路基板。
- 前記酸変性オリゴマーの酸価が、40〜120mgKOH/gである、請求項1に記載の印刷回路基板。
- 前記光重合性モノマーが、ヒドロキシ基含有アクリレート系化合物;水溶性アクリレート系化合物;多価アルコールの多官能ポリエステルアクリレート系化合物;多官能アルコールまたは多価フェノールのエチレンオキシド付加物のアクリレート系化合物;多官能アルコールまたは多価フェノールのプロピレンオキシド付加物のアクリレート系化合物;多官能または単官能ポリウレタンアクリレート;エポキシアクリレート系化合物;カプロラクトン変性のアクリレート系化合物および感光性(メタ)アクリレート系化合物からなる群より選択された1種以上の化合物を含んでなるものである、請求項1に記載の印刷回路基板。
- 前記光開始剤が、ベンゾインとそのアルキルエーテル類、アセトフェノン類、アントラキノン類、チオキサントン類、ケタール類、ベンゾフェノン類、α−アミノアセトフェノン類、アシルホスフィンオキシド類およびオキスムエステル類からなる群より選択された1種以上である、請求項1に記載の印刷回路基板。
- 前記熱硬化性バインダー樹脂が、エポキシ基、オキセタニル基、環状エーテル基および環状チオエーテル基からなる群より選択された1種以上の作用基が置換された化合物を含んでなる、請求項1に記載の印刷回路基板。
- 前記感光性樹脂組成物が、光開始剤および有機溶媒をさらに含んでなる、請求項1に記載の印刷回路基板。
- 前記感光性樹脂組成物が、
10〜80重量%のカルボキシ基(−COOH)および光硬化可能な作用基を有する酸変性オリゴマーと;
1〜30重量%の光重合性モノマーと;
0.1〜10重量%の光開始剤と;
1〜30重量%の熱硬化性バインダー樹脂と;
0.01〜10重量%の顔料と;および
5〜50重量%の溶媒とを含んでなる、請求項15に記載の印刷回路基板。 - カルボキシ基(−COOH)および光硬化可能な作用基を有する酸変性オリゴマー;光重合性モノマー;光開始剤;熱硬化性バインダー樹脂;有機溶媒および顔料を含む感光性樹脂組成物の乾燥物または硬化物を含むドライフィルムを基板上に積層する段階と;
前記基板の外側端部位のドライフィルムを露光する段階と;および
前記露光されたドライフィルムを洗浄する段階とを含んでなる、印刷回路基板の製造方法。 - 前記基板上に電極パッドを形成する段階と;
前記電極パッド上にソルダバンプを位置させる段階と;および
半導体チップを前記ソルダバンプを媒介としてフリップチップ結合させる段階とをさらに含んでなる、請求項17に記載の印刷回路基板の製造方法。 - 前記基板と前記半導体チップとの間にアンダフィル材料を注入する段階をさらに含んでなる、請求項18に記載の印刷回路基板の製造方法。
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KR1020110044011A KR101450727B1 (ko) | 2010-05-20 | 2011-05-11 | 언더-필용 댐을 포함하는 인쇄 회로 기판 및 이의 제조 방법 |
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KR20110128135A (ko) | 2011-11-28 |
KR101450727B1 (ko) | 2014-10-16 |
TW201220972A (en) | 2012-05-16 |
CN102906867A (zh) | 2013-01-30 |
US20130063917A1 (en) | 2013-03-14 |
TWI503055B (zh) | 2015-10-01 |
CN102906867B (zh) | 2016-04-27 |
US9865480B2 (en) | 2018-01-09 |
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