JP2013532230A - 銅及び銅合金のエッチング方法 - Google Patents
銅及び銅合金のエッチング方法 Download PDFInfo
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- JP2013532230A JP2013532230A JP2013512871A JP2013512871A JP2013532230A JP 2013532230 A JP2013532230 A JP 2013532230A JP 2013512871 A JP2013512871 A JP 2013512871A JP 2013512871 A JP2013512871 A JP 2013512871A JP 2013532230 A JP2013532230 A JP 2013532230A
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- Prior art keywords
- copper
- etching
- iii
- alkyl
- vias
- Prior art date
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- Granted
Links
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title claims abstract description 105
- 239000010949 copper Substances 0.000 title claims abstract description 96
- 229910052802 copper Inorganic materials 0.000 title claims abstract description 91
- 238000000034 method Methods 0.000 title claims abstract description 68
- 238000005530 etching Methods 0.000 title claims abstract description 62
- 229910000881 Cu alloy Inorganic materials 0.000 title claims abstract description 17
- 238000007747 plating Methods 0.000 claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 46
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052717 sulfur Inorganic materials 0.000 claims abstract 2
- 239000011593 sulfur Substances 0.000 claims abstract 2
- -1 Fe (III) ions Chemical class 0.000 claims description 21
- 238000000151 deposition Methods 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 18
- 238000004070 electrodeposition Methods 0.000 claims description 10
- 239000000654 additive Substances 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 8
- 230000000996 additive effect Effects 0.000 claims description 6
- 238000000576 coating method Methods 0.000 claims description 6
- 125000001741 organic sulfur group Chemical group 0.000 claims description 6
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 5
- 229910021645 metal ion Inorganic materials 0.000 claims description 5
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 claims description 4
- 239000002253 acid Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- CWERGRDVMFNCDR-UHFFFAOYSA-N thioglycolic acid Chemical compound OC(=O)CS CWERGRDVMFNCDR-UHFFFAOYSA-N 0.000 claims description 4
- OBDVFOBWBHMJDG-UHFFFAOYSA-N 3-mercapto-1-propanesulfonic acid Chemical compound OS(=O)(=O)CCCS OBDVFOBWBHMJDG-UHFFFAOYSA-N 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims description 2
- 239000003989 dielectric material Substances 0.000 claims description 2
- 238000000608 laser ablation Methods 0.000 claims description 2
- 150000003839 salts Chemical class 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims description 2
- 239000004721 Polyphenylene oxide Substances 0.000 claims 2
- 229910052728 basic metal Inorganic materials 0.000 claims 2
- 150000003818 basic metals Chemical class 0.000 claims 2
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims 2
- 229920000570 polyether Polymers 0.000 claims 2
- 239000002659 electrodeposit Substances 0.000 claims 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims 1
- 229920000768 polyamine Polymers 0.000 claims 1
- 239000006259 organic additive Substances 0.000 abstract description 5
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 32
- 239000000243 solution Substances 0.000 description 28
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 23
- 229910001431 copper ion Inorganic materials 0.000 description 19
- 239000010410 layer Substances 0.000 description 17
- 230000008021 deposition Effects 0.000 description 12
- 229910052742 iron Inorganic materials 0.000 description 12
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 8
- 238000009713 electroplating Methods 0.000 description 8
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 8
- 239000003792 electrolyte Substances 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 239000011260 aqueous acid Substances 0.000 description 5
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 5
- FBAFATDZDUQKNH-UHFFFAOYSA-M iron chloride Chemical compound [Cl-].[Fe] FBAFATDZDUQKNH-UHFFFAOYSA-M 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 229920001223 polyethylene glycol Polymers 0.000 description 5
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 4
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 4
- 239000002202 Polyethylene glycol Substances 0.000 description 4
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 4
- 229910052741 iridium Inorganic materials 0.000 description 4
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 4
- 229910000510 noble metal Inorganic materials 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 229910052707 ruthenium Inorganic materials 0.000 description 4
- 0 *N(*)C(SCS*)=S Chemical compound *N(*)C(SCS*)=S 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 229920001451 polypropylene glycol Polymers 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 description 2
- AFVFQIVMOAPDHO-UHFFFAOYSA-N Methanesulfonic acid Chemical compound CS(O)(=O)=O AFVFQIVMOAPDHO-UHFFFAOYSA-N 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229960003280 cupric chloride Drugs 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 2
- 229910052762 osmium Inorganic materials 0.000 description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 description 2
- 238000004806 packaging method and process Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 229920001521 polyalkylene glycol ether Polymers 0.000 description 2
- 229920000151 polyglycol Polymers 0.000 description 2
- 239000010695 polyglycol Substances 0.000 description 2
- 229920001522 polyglycol ester Polymers 0.000 description 2
- WQGWDDDVZFFDIG-UHFFFAOYSA-N pyrogallol Chemical compound OC1=CC=CC(O)=C1O WQGWDDDVZFFDIG-UHFFFAOYSA-N 0.000 description 2
- 238000006479 redox reaction Methods 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 239000010948 rhodium Substances 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
- TUSDEZXZIZRFGC-UHFFFAOYSA-N 1-O-galloyl-3,6-(R)-HHDP-beta-D-glucose Natural products OC1C(O2)COC(=O)C3=CC(O)=C(O)C(O)=C3C3=C(O)C(O)=C(O)C=C3C(=O)OC1C(O)C2OC(=O)C1=CC(O)=C(O)C(O)=C1 TUSDEZXZIZRFGC-UHFFFAOYSA-N 0.000 description 1
- RILZRCJGXSFXNE-UHFFFAOYSA-N 2-[4-(trifluoromethoxy)phenyl]ethanol Chemical compound OCCC1=CC=C(OC(F)(F)F)C=C1 RILZRCJGXSFXNE-UHFFFAOYSA-N 0.000 description 1
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 description 1
- LUENVHHLGFLMFJ-UHFFFAOYSA-N 4-[(4-sulfophenyl)disulfanyl]benzenesulfonic acid Chemical compound C1=CC(S(=O)(=O)O)=CC=C1SSC1=CC=C(S(O)(=O)=O)C=C1 LUENVHHLGFLMFJ-UHFFFAOYSA-N 0.000 description 1
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 description 1
- FGUUSXIOTUKUDN-IBGZPJMESA-N C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 Chemical compound C1(=CC=CC=C1)N1C2=C(NC([C@H](C1)NC=1OC(=NN=1)C1=CC=CC=C1)=O)C=CC=C2 FGUUSXIOTUKUDN-IBGZPJMESA-N 0.000 description 1
- 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- PDQAZBWRQCGBEV-UHFFFAOYSA-N Ethylenethiourea Chemical compound S=C1NCCN1 PDQAZBWRQCGBEV-UHFFFAOYSA-N 0.000 description 1
- 239000001263 FEMA 3042 Substances 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N Nonylphenol Natural products CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- LRBQNJMCXXYXIU-PPKXGCFTSA-N Penta-digallate-beta-D-glucose Natural products OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-PPKXGCFTSA-N 0.000 description 1
- 229920000463 Poly(ethylene glycol)-block-poly(propylene glycol)-block-poly(ethylene glycol) Polymers 0.000 description 1
- 229920002560 Polyethylene Glycol 3000 Polymers 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 235000021355 Stearic acid Nutrition 0.000 description 1
- 229940045714 alkyl sulfonate alkylating agent Drugs 0.000 description 1
- 239000001768 carboxy methyl cellulose Substances 0.000 description 1
- 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
- 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 description 1
- RUTXIHLAWFEWGM-UHFFFAOYSA-H iron(3+) sulfate Chemical compound [Fe+3].[Fe+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O RUTXIHLAWFEWGM-UHFFFAOYSA-H 0.000 description 1
- 229910000359 iron(II) sulfate Inorganic materials 0.000 description 1
- 229910000360 iron(III) sulfate Inorganic materials 0.000 description 1
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 229940098779 methanesulfonic acid Drugs 0.000 description 1
- GOQYKNQRPGWPLP-UHFFFAOYSA-N n-heptadecyl alcohol Natural products CCCCCCCCCCCCCCCCCO GOQYKNQRPGWPLP-UHFFFAOYSA-N 0.000 description 1
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical compound CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920001515 polyalkylene glycol Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N propylene glycol Substances CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- LRBQNJMCXXYXIU-NRMVVENXSA-N tannic acid Chemical compound OC1=C(O)C(O)=CC(C(=O)OC=2C(=C(O)C=C(C=2)C(=O)OC[C@@H]2[C@H]([C@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)[C@@H](OC(=O)C=3C=C(OC(=O)C=4C=C(O)C(O)=C(O)C=4)C(O)=C(O)C=3)O2)OC(=O)C=2C=C(OC(=O)C=3C=C(O)C(O)=C(O)C=3)C(O)=C(O)C=2)O)=C1 LRBQNJMCXXYXIU-NRMVVENXSA-N 0.000 description 1
- 229940033123 tannic acid Drugs 0.000 description 1
- 235000015523 tannic acid Nutrition 0.000 description 1
- 229920002258 tannic acid Polymers 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/38—Electroplating: Baths therefor from solutions of copper
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/48—After-treatment of electroplated surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
- H01L21/288—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition
- H01L21/2885—Deposition of conductive or insulating materials for electrodes conducting electric current from a liquid, e.g. electrolytic deposition using an external electrical current, i.e. electro-deposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/32115—Planarisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
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Abstract
Description
銅又は回路構造、例えばプリント回路板及びウェハ基板のエッチングのためのエッチング組成物は当業者に公知である。通常、かかるエッチング組成物は、エッチング溶液、例えば塩化鉄又は塩化銅を含む。UK特許1,154,015は、塩化鉄、エチレンチオウレア並びに膜形成化合物、例えばピロガロール及びタンニン酸を含むエッチング組成物を開示している。
したがって、滑らかな銅表面を残す、かかる回路構造から望まれていない銅を効果的に取り除く方法で、銅又は銅合金のプリント回路板又はウェハ基板上で回路構造をエッチングするための改良された方法を提供することが、本発明の基礎となる目的である。
銅の電着のための水性酸浴は、プリント回路板及びチップキャリヤーの製造のために使用され、その際微細構造、例えば穴を介したトレンチ、ブラインドミクロバイア及び柱状バンプ(pillar bump)は、銅で満たされる必要がある。限界性能パラメータ、例えばスキースロープ、丸さ及びえくぼ形成は、最小化されるか、又はさらに避けられる必要がある。本発明による方法は、当業者に公知のウェハレベル実装(Wafer Level Packaging)、チップレベル実装(Chip Level Packaging)及びフィリップチップ技術(Flip chip techniques)において使用される基板に適用されうる。
からなる群から選択される。Rは、有利には、H、CH3、C2H5からなる群から選択される。R’は、有利には、H、CH3、C2H5からなる群から選択される。整数nは、有利には2、3又は4である。
1. 前記組成物の、しかしFe(II)/Fe(III)レドックス系を有さない電気メッキ浴を使用して、基板上に銅構造をメッキする工程、及びその後、
2. さらに、前記組成物の、しかしFe(II)/Fe(III)レドックス系を有する電気メッキ浴を使用して、前記基板上に銅構造をメッキする工程、及びその後、
3. 電流を適用しないで、工程2.による浴中でメッキされた銅をエッチングする工程。
1.Fe(II)/Fe(III)レドックス系を有する前記組成物の電気メッキ浴を使用して、基板上に銅構造をメッキする工程、及びその後、
2. 電流を適用しないで、工程1.による浴中でメッキされた銅をエッチングする工程。
方法3:
1. 前記組成物の、しかしFe(II)/Fe(III)レドックス系を有さない電気メッキ浴を使用して、基板上に銅構造をメッキする工程、及びその後、
2. 工程1.しかし電流を適用しないFe(II)/Fe(III)レドックス系に従った浴による組成物を有する別々の浴中でメッキした銅をエッチングする工程。
a)プリント回路板を提供する工程;
b)回路板を誘電体でそれらの少なくとも1つの側面上で被覆する工程;
c)レーザーアブレーションを使用してそれらにトレンチ及びバイアを製造するための誘電体を構築する工程;
d)誘電体の全面上にプライマー層を堆積する工程、又は製造されたトレンチ及びバイアにのみプライマー層を堆積する工程;
e)前記プライマー層上に銅又は銅合金を堆積する工程(その際トレンチ及びバイアは、それらに導体構造を形成するために銅又は銅合金で完全に満たされる);
f)トレンチ及びバイアを除いて、銅又は銅合金層及びプライマー層を取り除いて、プライマー層が方法工程d)において全面上に堆積される場合に誘電体を曝す工程。
全ての実験を、不活性白金化チタン陽極を使用して、ディッピングタイプの電気メッキ浴中で実施した。
銅イオン50g/l、硫酸100g/l、塩化物イオン50mg/l、有機硫黄化合物ビス−(p−スルホフェニル)−ジスルフィド2mg/l、及びポリエチレングリコール(M=1500〜2000)300mg/lを含有する塩基溶液を銅メッキのために使用した。メッキ順序及びパラメータを表1において示す。前記塩基溶液に加えて、メッキ工程2.による溶液は、鉄イオン6.0g/l(Fe2(SO4)3*9H2Oとして添加)を含む。
メッキ工程を、表1A及び1Bにおいて示される構造を有する基板をもたらす実施例1による基板及び方法で実施した。そして、かかるメッキした基板を、メッキ浴溶液から取り出した。エッチングを、銅イオン35g/l、硫酸170g/l、塩化物イオン50mg/l、鉄イオン6.0g/l(Fe2(SO4)3*9H2Oとして添加)、ポリエチレングリコール(PEG3000)300mg/lを含むが、有機硫黄化合物ビス−(ナトリウムスルホプロピル)−ジスルフィド(SPS)2mg/lを含まない溶液中で実施した。エッチング時間は30分であり、電流は適用しなかった。
銅イオン50g/l、硫酸100g/l、塩化物イオン50mg/l、有機硫黄化合物ビス−(p−スルホフェニル)−ジスルフィド2mg/l、及びポリエチレングリコール(M=1500〜2000)300mg/lを含有する基礎液を銅メッキのために使用した。メッキ順序及びパラメータを表1において示す。前記基礎液に加えて、メッキ工程2.による溶液は、鉄イオン6.0g/l(Fe2(SO4)3*9H2Oとして添加)を含む。
Claims (14)
- 基板上で、銅又は銅合金の回路構造の表面の滑らかなエッチング方法であって、銅又は銅合金の表面を、
(i)Cu(II)イオン、
(ii)Fe(II)/Fe(III)レドックス系(その際、Fe(III)イオン濃度は20g/l未満である)、
(iii)
からなる群から選択される少なくとも1つの有機硫黄光沢添加剤化合物
を含むエッチング溶液と接触させ、その際外部電流源を加工物に適用しない、方法。 - 前記Fe(III)イオンの濃度が、1〜15g/lの範囲である、請求項1に記載の方法。
- 前記Fe(III)イオンの濃度が、3〜10g/lの範囲である、請求項1に記載の方法。
- Rが、有利には、H、CH3及びC2H5からなる群から選択される、請求項1から3までのいずれか1項に記載の方法。
- R’が、有利には、H、CH3及びC2H5からなる群から選択される、請求項1から4までのいずれか1項に記載の方法。
- nが、有利には2、3又は4である、請求項1から5までのいずれか1項に記載の方法。
- 前記少なくとも1つの有機硫黄光沢添加剤が、3−(ベンズチアゾールイル−2−チオ)−プロピルスルホン酸、3−メルカプトプロパン−1−スルホン酸、エチレンジチオジプロピルスルホン酸、ビス−(p−スルホフェニル)−ジスルフィド、ビス−(ω−スルホブチル)−ジスルフィド、ビス−(ω−スルホヒドロキシプロピル)−ジスルフィド、ビス−(ω−スルホプロピル)−ジスルフィド、ビス−(ω−スルホプロピル)−スルフィド、メチル−(ω−スルホプロピル)−ジスルフィド、メチル−(ω−スルホプロピル)−トリスルフィド、O−エチル−ジチオ炭酸−S−(ω−スルホプロピル)−エステル、チオグリコール酸、チオリン酸−O−エチル−ビス−(ω−スルホプロピル)−エステル、チオリン酸−トリス−(ω−スルホプロピル)−エステル、及びそれらの対応する塩からなる群から選択される、請求項1又は2に記載の方法。
- 前記溶液が、さらに、ポリエーテル又はポリアミンを含む、請求項1から7までのいずれか1項に記載の方法。
- 前記溶液が、さらに、0.01mg/l〜100mg/lの濃度で塩化物イオンを含む、請求項1から9までのいずれか1項に記載の方法。
- 前記エッチングを、10〜60分の時間で実施する、請求項1から10までのいずれか1項に記載の方法。
- 前記エッチングを、20〜30℃の温度で実施する、請求項1から11までのいずれか1項に記載の方法。
- ライン及びバイアを含む基板上での銅又は銅合金の回路構造の電着方法であって、以下、
i.少なくとも1つのバイア(バイアは5μm〜30μmの範囲の内法幅の寸法、25μm〜500μmの深さを有する内部表面を含む)及び少なくとも1つのライン(ラインは、0.3μm〜100μmの範囲の内法幅の寸法、0.1μm〜100μmの深さを有する内部表面を含む)を含む基板を提供する工程、及び
ii.前記基板を、陰極として連結された塩基性金属層を有する、その組成において請求項1から12に記載のエッチング溶液に対応する電解銅メッキ浴中に浸漬する工程(その際、そのシステムは、さらに不溶性の寸法安定性の陽極を含む)、及び
iii.不溶性の寸法安定性の陽極と塩基性金属層との間に電圧を適用して、電流を、それらの間に、ライン及びバイアを含む構造において銅を電着するために十分な時間流す工程、並びに
iv.電圧を止め、請求項1から12までのいずれか1項に記載の方法による電解銅メッキ浴中で回路構造をエッチングする工程
を含む、電着方法。 - ライン及びバイアを含む基板上での銅又は銅合金の回路構造の電着方法であって、以下、
i.プリント回路板を提供する工程、
ii.回路板を誘電体でそれらの少なくとも1つの側面上で被覆する工程、及び
iii.レーザーアブレーションを使用してそれらにトレンチ及びバイアを製造するための誘電体を構築する工程、
iv.誘電体の全面上にプライマー層を堆積する工程、又は製造されたトレンチ及びバイアにのみプライマー層を堆積する工程、
v.前記プライマー層上に銅又は銅合金を、その組成において請求項1から12に記載のエッチング溶液に対応する銅メッキ浴中で堆積する工程(その際トレンチ及びバイアは、それらに導体構造を形成するために銅又は銅合金で完全に満たされる)、並びに
vi.トレンチ及びバイアを除いて、銅又は銅合金層及びプライマー層を取り除いて、プライマー層が方法工程v.)において全面上に堆積される場合に誘電体を曝す工程(その際、除去は、請求項1から12までのいずれか1項に記載の方法による電解銅メッキ浴中である)、
を含む、電着方法。
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EP10164728A EP2392694A1 (en) | 2010-06-02 | 2010-06-02 | Method for etching of copper and copper alloys |
EP10164728.7 | 2010-06-02 | ||
PCT/EP2011/058951 WO2011151328A1 (en) | 2010-06-02 | 2011-05-31 | Method for etching of copper and copper alloys |
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JP2017036499A (ja) * | 2015-08-06 | 2017-02-16 | ローム アンド ハース エレクトロニック マテリアルズ エルエルシーRohm and Haas Electronic Materials LLC | ピリジルアルキルアミンとビスエポキシドとの反応生成物を含有する電気銅めっき浴からフォトレジスト画定フィーチャを電気めっきする方法 |
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US9762418B2 (en) | 2014-11-06 | 2017-09-12 | Dell Products, Lp | Repeatable backchannel link adaptation for high speed serial interfaces |
US10006136B2 (en) * | 2015-08-06 | 2018-06-26 | Dow Global Technologies Llc | Method of electroplating photoresist defined features from copper electroplating baths containing reaction products of imidazole compounds, bisepoxides and halobenzyl compounds |
CN114686884B (zh) * | 2020-12-29 | 2023-07-07 | 苏州运宏电子有限公司 | 一种精密防侧蚀的蚀刻区域控制方法 |
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2010
- 2010-06-02 EP EP10164728A patent/EP2392694A1/en not_active Withdrawn
-
2011
- 2011-05-31 KR KR1020127031537A patent/KR101752945B1/ko active IP Right Grant
- 2011-05-31 WO PCT/EP2011/058951 patent/WO2011151328A1/en active Application Filing
- 2011-05-31 CN CN201180031352.8A patent/CN103003473B/zh active Active
- 2011-05-31 JP JP2013512871A patent/JP5795059B2/ja active Active
- 2011-05-31 EP EP11723436.9A patent/EP2576867B1/en active Active
- 2011-05-31 US US13/701,063 patent/US20130112566A1/en not_active Abandoned
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KR101752945B1 (ko) | 2017-07-03 |
WO2011151328A1 (en) | 2011-12-08 |
US20130112566A1 (en) | 2013-05-09 |
EP2576867B1 (en) | 2018-04-04 |
JP5795059B2 (ja) | 2015-10-14 |
EP2576867A1 (en) | 2013-04-10 |
CN103003473A (zh) | 2013-03-27 |
EP2392694A1 (en) | 2011-12-07 |
CN103003473B (zh) | 2015-04-01 |
KR20140018086A (ko) | 2014-02-12 |
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