JP2013527612A5 - - Google Patents
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- Publication number
- JP2013527612A5 JP2013527612A5 JP2013510512A JP2013510512A JP2013527612A5 JP 2013527612 A5 JP2013527612 A5 JP 2013527612A5 JP 2013510512 A JP2013510512 A JP 2013510512A JP 2013510512 A JP2013510512 A JP 2013510512A JP 2013527612 A5 JP2013527612 A5 JP 2013527612A5
- Authority
- JP
- Japan
- Prior art keywords
- etching paste
- group
- poly
- etching
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 claims 17
- 238000005530 etching Methods 0.000 claims 14
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 7
- 229920000642 polymer Polymers 0.000 claims 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 claims 6
- 239000002041 carbon nanotube Substances 0.000 claims 6
- 239000000758 substrate Substances 0.000 claims 6
- 229910021393 carbon nanotube Inorganic materials 0.000 claims 5
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 claims 4
- 239000011159 matrix material Substances 0.000 claims 4
- 239000004033 plastic Substances 0.000 claims 4
- 229920003023 plastic Polymers 0.000 claims 4
- 229920000301 poly(3-hexylthiophene-2,5-diyl) polymer Polymers 0.000 claims 4
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 claims 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 claims 3
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 claims 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000007639 printing Methods 0.000 claims 3
- 239000002904 solvent Substances 0.000 claims 3
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 claims 2
- ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 2-octanone Chemical compound CCCCCCC(C)=O ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 0.000 claims 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229920000280 Poly(3-octylthiophene) Polymers 0.000 claims 2
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims 2
- MCEWYIDBDVPMES-UHFFFAOYSA-N [60]pcbm Chemical compound C123C(C4=C5C6=C7C8=C9C%10=C%11C%12=C%13C%14=C%15C%16=C%17C%18=C(C=%19C=%20C%18=C%18C%16=C%13C%13=C%11C9=C9C7=C(C=%20C9=C%13%18)C(C7=%19)=C96)C6=C%11C%17=C%15C%13=C%15C%14=C%12C%12=C%10C%10=C85)=C9C7=C6C2=C%11C%13=C2C%15=C%12C%10=C4C23C1(CCCC(=O)OC)C1=CC=CC=C1 MCEWYIDBDVPMES-UHFFFAOYSA-N 0.000 claims 2
- 239000002131 composite material Substances 0.000 claims 2
- 229920001940 conductive polymer Polymers 0.000 claims 2
- 150000002148 esters Chemical class 0.000 claims 2
- 239000000945 filler Substances 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 2
- 239000002048 multi walled nanotube Substances 0.000 claims 2
- 239000002245 particle Substances 0.000 claims 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 claims 2
- 229920001467 poly(styrenesulfonates) Polymers 0.000 claims 2
- -1 polyethylene naphthalate Polymers 0.000 claims 2
- 239000011112 polyethylene naphthalate Substances 0.000 claims 2
- 229920000139 polyethylene terephthalate Polymers 0.000 claims 2
- 239000005020 polyethylene terephthalate Substances 0.000 claims 2
- 239000002109 single walled nanotube Substances 0.000 claims 2
- 229940073455 tetraethylammonium hydroxide Drugs 0.000 claims 2
- LRGJRHZIDJQFCL-UHFFFAOYSA-M tetraethylazanium;hydroxide Chemical compound [OH-].CC[N+](CC)(CC)CC LRGJRHZIDJQFCL-UHFFFAOYSA-M 0.000 claims 2
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 claims 2
- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 claims 2
- 239000002562 thickening agent Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 claims 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 claims 1
- MMELVRLTDGKXGU-UHFFFAOYSA-N 2-ethylhex-1-en-1-ol Chemical compound CCCCC(CC)=CO MMELVRLTDGKXGU-UHFFFAOYSA-N 0.000 claims 1
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 claims 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 claims 1
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 claims 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 claims 1
- 229920000877 Melamine resin Polymers 0.000 claims 1
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 claims 1
- 239000002033 PVDF binder Substances 0.000 claims 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 claims 1
- 239000004952 Polyamide Substances 0.000 claims 1
- 239000004642 Polyimide Substances 0.000 claims 1
- 239000004793 Polystyrene Substances 0.000 claims 1
- 229920002125 Sokalan® Polymers 0.000 claims 1
- 239000003513 alkali Substances 0.000 claims 1
- 229910052810 boron oxide Inorganic materials 0.000 claims 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 claims 1
- 229910001634 calcium fluoride Inorganic materials 0.000 claims 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-N carbonic acid Chemical compound OC(O)=O BVKZGUZCCUSVTD-UHFFFAOYSA-N 0.000 claims 1
- 239000001913 cellulose Substances 0.000 claims 1
- 229920002678 cellulose Polymers 0.000 claims 1
- 238000004140 cleaning Methods 0.000 claims 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 claims 1
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 claims 1
- 150000002170 ethers Chemical class 0.000 claims 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 claims 1
- 229920002313 fluoropolymer Polymers 0.000 claims 1
- 229910003472 fullerene Inorganic materials 0.000 claims 1
- 229910021389 graphene Inorganic materials 0.000 claims 1
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 238000007641 inkjet printing Methods 0.000 claims 1
- 239000011256 inorganic filler Substances 0.000 claims 1
- 229910003475 inorganic filler Inorganic materials 0.000 claims 1
- 239000010954 inorganic particle Substances 0.000 claims 1
- 150000002576 ketones Chemical class 0.000 claims 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 claims 1
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000012766 organic filler Substances 0.000 claims 1
- 229920000620 organic polymer Polymers 0.000 claims 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 claims 1
- 229920001568 phenolic resin Polymers 0.000 claims 1
- 239000005011 phenolic resin Substances 0.000 claims 1
- 229920000264 poly(3',7'-dimethyloctyloxy phenylene vinylene) Polymers 0.000 claims 1
- 239000004584 polyacrylic acid Substances 0.000 claims 1
- 229920002647 polyamide Polymers 0.000 claims 1
- 229920000767 polyaniline Polymers 0.000 claims 1
- 229920001721 polyimide Polymers 0.000 claims 1
- 229920000193 polymethacrylate Polymers 0.000 claims 1
- 229920002223 polystyrene Polymers 0.000 claims 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims 1
- 239000004810 polytetrafluoroethylene Substances 0.000 claims 1
- 229920000123 polythiophene Polymers 0.000 claims 1
- 229920002635 polyurethane Polymers 0.000 claims 1
- 239000004814 polyurethane Substances 0.000 claims 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 claims 1
- 235000013772 propylene glycol Nutrition 0.000 claims 1
- 238000007650 screen-printing Methods 0.000 claims 1
- 229920002050 silicone resin Polymers 0.000 claims 1
- 239000011780 sodium chloride Substances 0.000 claims 1
- 150000005846 sugar alcohols Polymers 0.000 claims 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP10005321 | 2010-05-21 | ||
| EP10005321.4 | 2010-05-21 | ||
| PCT/EP2011/002085 WO2011144292A2 (en) | 2010-05-21 | 2011-04-26 | Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013527612A JP2013527612A (ja) | 2013-06-27 |
| JP2013527612A5 true JP2013527612A5 (https=) | 2014-06-19 |
| JP5778256B2 JP5778256B2 (ja) | 2015-09-16 |
Family
ID=44626002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013510512A Expired - Fee Related JP5778256B2 (ja) | 2010-05-21 | 2011-04-26 | カーボンナノチューブ（ｃｎｔ）ポリマーマトリックスのプラスチック基礎構造上への選択的エッチング |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US8809112B2 (https=) |
| EP (1) | EP2572388B1 (https=) |
| JP (1) | JP5778256B2 (https=) |
| KR (1) | KR20130119332A (https=) |
| CN (1) | CN102893421B (https=) |
| ES (1) | ES2535873T3 (https=) |
| PH (1) | PH12012501869A1 (https=) |
| SG (1) | SG185550A1 (https=) |
| TW (1) | TWI502782B (https=) |
| WO (1) | WO2011144292A2 (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8999186B2 (en) * | 2011-04-28 | 2015-04-07 | Merck Patent Gmbh | Selectively etching of a polymer matrix on pet |
| EP2587564A1 (en) * | 2011-10-27 | 2013-05-01 | Merck Patent GmbH | Selective etching of a matrix comprising silver nanowires or carbon nanotubes |
| TWI488943B (zh) * | 2013-04-29 | 2015-06-21 | Chi Mei Corp | 蝕刻膏組成物及其應用 |
| CN104952717B (zh) * | 2014-03-26 | 2018-04-06 | 苏州汉纳材料科技有限公司 | 基于碳材料的透明导电薄膜、其工业化制法及应用 |
| KR101535386B1 (ko) * | 2014-07-09 | 2015-07-08 | 노재호 | 잉크 또는 도료 식각용 식각용액 및 이를 이용한 잉크 또는 도료 패턴의 제조방법 |
| CN106276778B (zh) * | 2015-05-21 | 2018-08-14 | 清华大学 | 一种金属纳米线膜的制备方法以及导电元件 |
| KR102501463B1 (ko) * | 2015-05-21 | 2023-02-20 | 삼성전자주식회사 | 이차원 물질을 사용한 플렉서블 인터커넥트 레이어를 포함하는 유연소자 |
| US10614928B2 (en) | 2017-04-17 | 2020-04-07 | Philippe Hansen-Estruch | Biodegradable flexible lightweight energy storage composite and methods of making the same |
| US11993719B2 (en) | 2017-10-27 | 2024-05-28 | National Research Council Of Canada | Boron nitride nanotube coated substrates for sintering of metallic traces by intense pulse light |
| CN110034007B (zh) * | 2018-01-12 | 2021-07-09 | 东北师范大学 | 一种实现透明可拉伸电极超高精度图案化的方法 |
| CN113736466B (zh) * | 2020-05-29 | 2023-05-12 | 新应材股份有限公司 | 蚀刻剂组合物、增粘剂、移除聚酰亚胺的方法以及蚀刻工艺 |
| TWI751568B (zh) * | 2020-05-29 | 2022-01-01 | 新應材股份有限公司 | 蝕刻劑組成物、增黏劑、鹼溶液、移除聚醯亞胺的方法以及蝕刻製程 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5424054A (en) | 1993-05-21 | 1995-06-13 | International Business Machines Corporation | Carbon fibers and method for their production |
| US6221330B1 (en) | 1997-08-04 | 2001-04-24 | Hyperion Catalysis International Inc. | Process for producing single wall nanotubes using unsupported metal catalysts |
| KR100376768B1 (ko) | 2000-08-23 | 2003-03-19 | 한국과학기술연구원 | 전자, 스핀 및 광소자 응용을 위한 탄소나노튜브의 선택적 수평성장 방법 |
| US6835591B2 (en) | 2001-07-25 | 2004-12-28 | Nantero, Inc. | Methods of nanotube films and articles |
| US6872645B2 (en) * | 2002-04-02 | 2005-03-29 | Nanosys, Inc. | Methods of positioning and/or orienting nanostructures |
| DE10241300A1 (de) * | 2002-09-04 | 2004-03-18 | Merck Patent Gmbh | Ätzpasten für Siliziumoberflächen und -schichten |
| DE10333704B4 (de) * | 2003-07-23 | 2009-12-17 | Ovd Kinegram Ag | Sicherheitselement zur RF-Identifikation |
| TWI276140B (en) * | 2003-09-23 | 2007-03-11 | Ind Tech Res Inst | Method of forming carbon nanotube field emission source |
| JP2005327965A (ja) | 2004-05-17 | 2005-11-24 | Shachihata Inc | 光起電力装置 |
| TWI241414B (en) * | 2004-07-23 | 2005-10-11 | Ind Tech Res Inst | Carbon nanotubes as probes of MEMS devices and manufacturing method thereof |
| WO2008051205A2 (en) | 2005-10-14 | 2008-05-02 | Eikos, Inc. | Carbon nanotube use in solar cell applications |
| US7927666B2 (en) * | 2006-06-30 | 2011-04-19 | The University Of Akron | Aligned carbon nanotube-polymer materials, systems and methods |
| JP5020591B2 (ja) * | 2006-09-29 | 2012-09-05 | 鶴見曹達株式会社 | 導電性高分子用エッチング液および導電性高分子をパターニングする方法 |
| DE102006051952A1 (de) * | 2006-11-01 | 2008-05-08 | Merck Patent Gmbh | Partikelhaltige Ätzpasten für Siliziumoberflächen und -schichten |
| KR100883737B1 (ko) * | 2007-01-17 | 2009-02-12 | 삼성전자주식회사 | 망상 탄소나노튜브 박막층을 포함하는 탄소나노튜브 투명전극 및 그의 제조방법 |
| US8445385B2 (en) | 2008-04-11 | 2013-05-21 | Sandisk 3D Llc | Methods for etching carbon nano-tube films for use in non-volatile memories |
| CN101276789B (zh) * | 2008-05-07 | 2011-08-17 | 李毅 | 一种非晶硅太阳能电池铝膜蚀刻方法及蚀刻油墨 |
| WO2010010838A1 (ja) * | 2008-07-25 | 2010-01-28 | コニカミノルタホールディングス株式会社 | 透明電極および透明電極の製造方法 |
| TWI452011B (zh) * | 2010-01-20 | 2014-09-11 | 鴻海精密工業股份有限公司 | 碳奈米管裝置製造方法 |
-
2011
- 2011-04-26 CN CN201180024130.3A patent/CN102893421B/zh not_active Expired - Fee Related
- 2011-04-26 ES ES11716380.8T patent/ES2535873T3/es active Active
- 2011-04-26 US US13/699,092 patent/US8809112B2/en not_active Expired - Fee Related
- 2011-04-26 KR KR1020127033360A patent/KR20130119332A/ko not_active Ceased
- 2011-04-26 EP EP11716380.8A patent/EP2572388B1/en not_active Not-in-force
- 2011-04-26 PH PH1/2012/501869A patent/PH12012501869A1/en unknown
- 2011-04-26 SG SG2012083523A patent/SG185550A1/en unknown
- 2011-04-26 JP JP2013510512A patent/JP5778256B2/ja not_active Expired - Fee Related
- 2011-04-26 WO PCT/EP2011/002085 patent/WO2011144292A2/en not_active Ceased
- 2011-05-18 TW TW100117395A patent/TWI502782B/zh not_active IP Right Cessation
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