CN102893421B - 在塑料底材结构上的碳纳米管（cnt）聚合物基质的选择性蚀刻 - Google Patents

在塑料底材结构上的碳纳米管（cnt）聚合物基质的选择性蚀刻 Download PDF

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Publication number
CN102893421B
CN102893421B CN201180024130.3A CN201180024130A CN102893421B CN 102893421 B CN102893421 B CN 102893421B CN 201180024130 A CN201180024130 A CN 201180024130A CN 102893421 B CN102893421 B CN 102893421B
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China
Prior art keywords
etching
polymer
methods according
poly
substrate
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Expired - Fee Related
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CN201180024130.3A
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English (en)
Chinese (zh)
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CN102893421A (zh
Inventor
W·斯托库姆
A·梅热尔
I·科勒
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Merck Patent GmbH
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Merck Patent GmbH
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/236—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers using printing techniques, e.g. applying the etch liquid using an ink jet printer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/80—Constructional details
    • H10K30/81—Electrodes
    • H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
    • H10K30/821—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes comprising carbon nanotubes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10—Organic polymers or oligomers
    • H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/20—Carbon compounds, e.g. carbon nanotubes or fullerenes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
    • H10K30/50—Photovoltaic [PV] devices
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy
    • Y02E10/549—Organic PV cells

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Photovoltaic Devices (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Weting (AREA)
  • Inks, Pencil-Leads, Or Crayons (AREA)
  • Materials For Photolithography (AREA)
  • Printing Plates And Materials Therefor (AREA)
CN201180024130.3A 2010-05-21 2011-04-26 在塑料底材结构上的碳纳米管（cnt）聚合物基质的选择性蚀刻 Expired - Fee Related CN102893421B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP10005321 2010-05-21
EP10005321.4 2010-05-21
PCT/EP2011/002085 WO2011144292A2 (en) 2010-05-21 2011-04-26 Selectively etching of a carbon nano tubes (cnt) polymer matrix on a plastic substructure

Publications (2)

Publication Number Publication Date
CN102893421A CN102893421A (zh) 2013-01-23
CN102893421B true CN102893421B (zh) 2016-01-20

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CN201180024130.3A Expired - Fee Related CN102893421B (zh) 2010-05-21 2011-04-26 在塑料底材结构上的碳纳米管（cnt）聚合物基质的选择性蚀刻

Country Status (10)

Country Link
US (1) US8809112B2 (https=)
EP (1) EP2572388B1 (https=)
JP (1) JP5778256B2 (https=)
KR (1) KR20130119332A (https=)
CN (1) CN102893421B (https=)
ES (1) ES2535873T3 (https=)
PH (1) PH12012501869A1 (https=)
SG (1) SG185550A1 (https=)
TW (1) TWI502782B (https=)
WO (1) WO2011144292A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11851597B2 (en) 2020-05-29 2023-12-26 Echem Solutions Corp. Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process

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EP2587564A1 (en) * 2011-10-27 2013-05-01 Merck Patent GmbH Selective etching of a matrix comprising silver nanowires or carbon nanotubes
TWI488943B (zh) * 2013-04-29 2015-06-21 Chi Mei Corp 蝕刻膏組成物及其應用
CN104952717B (zh) * 2014-03-26 2018-04-06 苏州汉纳材料科技有限公司 基于碳材料的透明导电薄膜、其工业化制法及应用
KR101535386B1 (ko) * 2014-07-09 2015-07-08 노재호 잉크 또는 도료 식각용 식각용액 및 이를 이용한 잉크 또는 도료 패턴의 제조방법
CN106276778B (zh) * 2015-05-21 2018-08-14 清华大学 一种金属纳米线膜的制备方法以及导电元件
KR102501463B1 (ko) * 2015-05-21 2023-02-20 삼성전자주식회사 이차원 물질을 사용한 플렉서블 인터커넥트 레이어를 포함하는 유연소자
US10614928B2 (en) 2017-04-17 2020-04-07 Philippe Hansen-Estruch Biodegradable flexible lightweight energy storage composite and methods of making the same
US11993719B2 (en) 2017-10-27 2024-05-28 National Research Council Of Canada Boron nitride nanotube coated substrates for sintering of metallic traces by intense pulse light
CN110034007B (zh) * 2018-01-12 2021-07-09 东北师范大学 一种实现透明可拉伸电极超高精度图案化的方法
CN113736466B (zh) * 2020-05-29 2023-05-12 新应材股份有限公司 蚀刻剂组合物、增粘剂、移除聚酰亚胺的方法以及蚀刻工艺

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11851597B2 (en) 2020-05-29 2023-12-26 Echem Solutions Corp. Etchant composition, tackifier, alkaline solution, method of removing polyimide and etching process

Also Published As

Publication number Publication date
EP2572388A2 (en) 2013-03-27
SG185550A1 (en) 2012-12-28
TWI502782B (zh) 2015-10-01
CN102893421A (zh) 2013-01-23
ES2535873T3 (es) 2015-05-18
WO2011144292A3 (en) 2012-01-26
EP2572388B1 (en) 2015-01-07
JP5778256B2 (ja) 2015-09-16
KR20130119332A (ko) 2013-10-31
TW201228065A (en) 2012-07-01
US20130065359A1 (en) 2013-03-14
JP2013527612A (ja) 2013-06-27
WO2011144292A2 (en) 2011-11-24
US8809112B2 (en) 2014-08-19
PH12012501869A1 (en) 2013-01-07

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