JP2013526011A5 - - Google Patents

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Publication number
JP2013526011A5
JP2013526011A5 JP2013502513A JP2013502513A JP2013526011A5 JP 2013526011 A5 JP2013526011 A5 JP 2013526011A5 JP 2013502513 A JP2013502513 A JP 2013502513A JP 2013502513 A JP2013502513 A JP 2013502513A JP 2013526011 A5 JP2013526011 A5 JP 2013526011A5
Authority
JP
Japan
Prior art keywords
wafer container
housing
rib
base
lower housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2013502513A
Other languages
English (en)
Japanese (ja)
Other versions
JP2013526011A (ja
JP5914457B2 (ja
Filing date
Publication date
Priority claimed from US12/749,448 external-priority patent/US8556079B2/en
Application filed filed Critical
Publication of JP2013526011A publication Critical patent/JP2013526011A/ja
Publication of JP2013526011A5 publication Critical patent/JP2013526011A5/ja
Application granted granted Critical
Publication of JP5914457B2 publication Critical patent/JP5914457B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2013502513A 2010-03-29 2010-06-28 調節可能な内部直径を有するウェーハコンテナ Active JP5914457B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/749,448 US8556079B2 (en) 2009-08-26 2010-03-29 Wafer container with adjustable inside diameter
US12/749,448 2010-03-29
PCT/MY2010/000109 WO2011122928A1 (en) 2010-03-29 2010-06-28 Wafer container with adjustable inside diameter

Publications (3)

Publication Number Publication Date
JP2013526011A JP2013526011A (ja) 2013-06-20
JP2013526011A5 true JP2013526011A5 (enExample) 2013-08-15
JP5914457B2 JP5914457B2 (ja) 2016-05-11

Family

ID=44712425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2013502513A Active JP5914457B2 (ja) 2010-03-29 2010-06-28 調節可能な内部直径を有するウェーハコンテナ

Country Status (8)

Country Link
US (1) US8556079B2 (enExample)
EP (1) EP2470456A4 (enExample)
JP (1) JP5914457B2 (enExample)
KR (1) KR20130014047A (enExample)
CN (2) CN102666315B (enExample)
MY (1) MY160279A (enExample)
TW (1) TWI410360B (enExample)
WO (1) WO2011122928A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170076179A (ko) * 2015-12-24 2017-07-04 삼성전자주식회사 웨이퍼 수납 용기
CN105501635B (zh) * 2016-01-07 2017-07-07 安庆市兴龙印业有限责任公司 一种易碎品防护式安全包装盒
CN110249418B (zh) * 2017-02-06 2023-03-31 阿基里斯株式会社 基板收容容器
TWI697979B (zh) * 2017-02-07 2020-07-01 日商阿基里斯股份有限公司 基板收容容器
US11658059B2 (en) 2018-02-28 2023-05-23 Ii-Vi Delaware, Inc. Thin material handling carrier
EP3806138B1 (en) * 2019-10-09 2022-11-30 Infineon Technologies AG Transport system
KR102595523B1 (ko) * 2021-09-07 2023-10-30 주식회사 삼에스코리아 웨이퍼 이송 박스
KR102595526B1 (ko) 2021-09-07 2023-10-30 주식회사 삼에스코리아 웨이퍼 이송 박스
CN114023676B (zh) * 2021-10-13 2022-09-16 广东万维半导体技术有限公司 一种移动式晶圆载盘承载装置
EP4503107A1 (en) 2022-03-30 2025-02-05 Achilles Corporation Semiconductor wafer transfer container

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3552548A (en) * 1968-08-05 1971-01-05 Fluroware Inc Wafer storage and shipping container
US5024329A (en) * 1988-04-22 1991-06-18 Siemens Aktiengesellschaft Lockable container for transporting and for storing semiconductor wafers
US5207324A (en) * 1991-03-08 1993-05-04 Fluoroware, Inc. Wafer cushion for shippers
US5501351A (en) * 1992-07-17 1996-03-26 Minnesota Mining And Manufacturing Company Reusable, multiple-piece storage container
JP2563802Y2 (ja) * 1992-08-28 1998-02-25 信越ポリマー株式会社 精密加工された薄板の収納容器
US5452795A (en) * 1994-11-07 1995-09-26 Gallagher; Gary M. Actuated rotary retainer for silicone wafer box
FR2735754B1 (fr) 1995-06-20 1998-07-17 Astra Plastique Pot, notamment pour le conditionnement de produits alimentaires
JPH09129719A (ja) * 1995-08-30 1997-05-16 Achilles Corp 半導体ウエハの収納構造および半導体ウエハの収納・取出し方法
JP3212890B2 (ja) * 1996-10-15 2001-09-25 九州日本電気株式会社 ウェハキャリア
US6039186A (en) * 1997-04-16 2000-03-21 Fluoroware, Inc. Composite transport carrier
US6010008A (en) * 1997-07-11 2000-01-04 Fluoroware, Inc. Transport module
FR2767800B1 (fr) * 1997-09-03 1999-10-08 Oreal Capot pour dispositif de conditionnement
US6193068B1 (en) * 1998-05-07 2001-02-27 Texas Instruments Incorporated Containment device for retaining semiconductor wafers
US6341695B1 (en) * 1998-05-07 2002-01-29 Texas Instruments Incorporated Containment device for retaining semiconductor wafers
TW440536B (en) 1998-05-12 2001-06-16 Maeda Seisakusho Sealing means for a plastics container and lid, and to a product using such sealing means
US6082540A (en) * 1999-01-06 2000-07-04 Fluoroware, Inc. Cushion system for wafer carriers
US6662950B1 (en) * 1999-10-25 2003-12-16 Brian R. Cleaver Wafer shipping and storage container
US6550619B2 (en) * 2000-05-09 2003-04-22 Entergris, Inc. Shock resistant variable load tolerant wafer shipper
KR100414886B1 (ko) 2000-05-15 2004-01-13 강인숙 인터넷상에서 정보 자동 검색 방법
US7040487B2 (en) * 2001-07-14 2006-05-09 Entegris, Inc. Protective shipper
DE20209288U1 (de) * 2002-06-14 2002-08-22 Ho, Ming-Hui, Hsin Chuang, Taipeh Abfallkorb für einen Papiershredder
US6988620B2 (en) * 2002-09-06 2006-01-24 E.Pak International, Inc. Container with an adjustable inside dimension that restricts movement of items within the container
US7147107B2 (en) * 2003-03-11 2006-12-12 E.Pak International, Inc. Packaging platform having an adjustable thickness
WO2004087535A1 (ja) 2003-03-31 2004-10-14 Achilles Corporation 半導体ウエハの容器
US7578392B2 (en) * 2003-06-06 2009-08-25 Convey Incorporated Integrated circuit wafer packaging system and method
CN100363243C (zh) * 2003-06-17 2008-01-23 伊利诺斯器械工程公司 减少移动的晶片盒
US6988621B2 (en) * 2003-06-17 2006-01-24 Illinois Tool Works Inc. Reduced movement wafer box
US7131248B2 (en) * 2003-07-14 2006-11-07 Peak Plastic & Metal Products (Int'l) Limited Wafer shipper with orientation control
CA2548731A1 (en) 2003-08-26 2005-03-03 Trade Guys International Pty Ltd A hub locking device for a disc-shaped recording media
EP1685038A4 (en) 2003-09-23 2008-11-26 Illinois Tool Works COST-EFFECTIVE WASTE CONTAINER IMPROVEMENTS
US7100772B2 (en) * 2003-11-16 2006-09-05 Entegris, Inc. Wafer container with door actuated wafer restraint
KR20050113889A (ko) 2004-05-31 2005-12-05 삼성전자주식회사 웨이퍼 포장 용기
US20060042998A1 (en) * 2004-08-24 2006-03-02 Haggard Clifton C Cushion for packing disks such as semiconductor wafers
DE202005007586U1 (de) * 2005-05-13 2005-08-04 Rösler, Peter Behälter mit Rastverschluss
FI20050541A7 (fi) 2005-05-23 2006-11-24 Prevex Ab Oy CD-rasia vaihtelevalle määrälle CD-levyjä
WO2009048456A1 (en) * 2007-10-12 2009-04-16 Peak Plastic & Metal Products (International) Limited Wafer container with staggered wall structure
US8109390B2 (en) * 2009-08-26 2012-02-07 Texchem Advanced Products Incorporated Sdn Bhd Wafer container with overlapping wall structure

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