JP2013524546A5 - - Google Patents

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Publication number
JP2013524546A5
JP2013524546A5 JP2013504173A JP2013504173A JP2013524546A5 JP 2013524546 A5 JP2013524546 A5 JP 2013524546A5 JP 2013504173 A JP2013504173 A JP 2013504173A JP 2013504173 A JP2013504173 A JP 2013504173A JP 2013524546 A5 JP2013524546 A5 JP 2013524546A5
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Japan
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self
chemical species
polymer layer
interface
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JP2013504173A
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Japanese (ja)
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JP5802740B2 (ja
JP2013524546A (ja
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Priority claimed from PCT/EP2011/050668 external-priority patent/WO2011128120A1/en
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Publication of JP2013524546A5 publication Critical patent/JP2013524546A5/ja
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JP2013504173A 2010-04-14 2011-01-19 リソグラフィで使用される自己組織化可能な重合体の秩序化された層を提供する方法 Active JP5802740B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US32418410P 2010-04-14 2010-04-14
US61/324,184 2010-04-14
PCT/EP2011/050668 WO2011128120A1 (en) 2010-04-14 2011-01-19 Method for providing an ordered layer of self-assemblable polymer for use in lithography

Publications (3)

Publication Number Publication Date
JP2013524546A JP2013524546A (ja) 2013-06-17
JP2013524546A5 true JP2013524546A5 (enExample) 2014-03-06
JP5802740B2 JP5802740B2 (ja) 2015-11-04

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JP2013504173A Active JP5802740B2 (ja) 2010-04-14 2011-01-19 リソグラフィで使用される自己組織化可能な重合体の秩序化された層を提供する方法

Country Status (5)

Country Link
US (1) US8822139B2 (enExample)
JP (1) JP5802740B2 (enExample)
NL (1) NL2006030A (enExample)
TW (1) TWI497217B (enExample)
WO (1) WO2011128120A1 (enExample)

Families Citing this family (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2007940A (en) 2010-12-23 2012-06-27 Asml Netherlands Bv Methods for providing patterned orientation templates for self-assemblable polymers for use in device lithography.
NL2008952A (en) * 2011-06-23 2013-01-02 Asml Netherlands Bv Self-assemblable polymer and method for use in lithography.
NL2009002A (en) * 2011-07-18 2013-01-21 Asml Netherlands Bv Method for providing a template for a self-assemblable polymer for use in device lithography.
JP6162145B2 (ja) * 2012-01-13 2017-07-12 エーエスエムエル ネザーランズ ビー．ブイ． 自己組織化可能な重合体及びリソグラフィにおける使用方法
US9235125B2 (en) 2012-03-02 2016-01-12 Asml Netherlands B.V. Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithography
US9478429B2 (en) * 2012-03-13 2016-10-25 Massachusetts Institute Of Technology Removable templates for directed self assembly
JP5458136B2 (ja) * 2012-03-28 2014-04-02 株式会社東芝 パターン形成方法およびインプリントモールド製造方法
US9513553B2 (en) 2012-04-13 2016-12-06 Asml Netherlands B.V. Methods of providing patterned epitaxy templates for self-assemblable block copolymers for use in device lithography
US9086621B2 (en) * 2012-04-20 2015-07-21 Asml Netherlands B.V. Methods for providing spaced lithography features on a substrate by self-assembly of block copolymers
KR102150241B1 (ko) * 2012-07-10 2020-09-01 가부시키가이샤 니콘 마크 및 그 형성 방법, 그리고 노광 장치
JP5881565B2 (ja) * 2012-09-07 2016-03-09 東京エレクトロン株式会社 基板処理方法、プログラム及びコンピュータ記憶媒体
JP5813607B2 (ja) * 2012-09-27 2015-11-17 株式会社東芝 パターン形成方法及びリソグラフィ原版の製造方法
CN104995715B (zh) * 2013-02-14 2018-06-19 Asml荷兰有限公司 用于通过嵌段共聚物的自组装在衬底上提供间隔的光刻特征的方法
TWI672788B (zh) * 2013-03-27 2019-09-21 日商尼康股份有限公司 標記形成方法、標記檢測方法、及元件製造方法
BR112015029548B1 (pt) 2013-06-27 2021-06-01 Intel Corporation Método de fabricação e substrato de circuito integrado
JP6045482B2 (ja) * 2013-11-29 2016-12-14 東京エレクトロン株式会社 表面処理装置、表面処理方法、プログラム及びコンピュータ記憶媒体
US9385026B2 (en) 2014-05-08 2016-07-05 GlobalFoundries, Inc. Sublithographic Kelvin structure patterned with DSA
JP6356096B2 (ja) * 2014-06-27 2018-07-11 ダウ グローバル テクノロジーズ エルエルシー ブロックコポリマーを製造するための方法およびそれから製造される物品
JP6122906B2 (ja) 2014-06-27 2017-04-26 ダウ グローバル テクノロジーズ エルエルシー ブロックコポリマーを製造するための方法およびそれから製造される物品
JP6491865B2 (ja) * 2014-12-05 2019-03-27 東京応化工業株式会社 下地剤、及び相分離構造を含む構造体の製造方法
KR102335109B1 (ko) 2014-12-15 2021-12-03 삼성전자 주식회사 미세 패턴 형성 방법 및 이를 이용한 집적회로 소자의 제조 방법
FR3031749B1 (fr) * 2015-01-21 2018-09-28 Arkema France Procede d'amelioration de l'uniformite de dimension critique de films ordonnes de copolymeres a blocs
US9514263B1 (en) 2015-06-08 2016-12-06 International Business Machines Corporation Chemo epitaxy mask generation
US9691615B2 (en) 2015-08-28 2017-06-27 International Business Machines Corporation Chemoepitaxy-based directed self assembly process with tone inversion for unidirectional wiring
WO2017111822A1 (en) * 2015-12-24 2017-06-29 Intel Corporation Pitch division using directed self-assembly
KR102376126B1 (ko) * 2016-09-01 2022-03-18 제이에스알 가부시끼가이샤 기재 표면의 선택적 수식 방법 및 조성물
US10825683B2 (en) * 2017-06-07 2020-11-03 Imec Vzw Directed self-assembly of block copolymers
CN114613671A (zh) * 2020-12-09 2022-06-10 中国科学院微电子研究所 形成图案的方法
EP4486943A2 (en) * 2022-03-02 2025-01-08 Evolved by Nature, Inc. Composite polymeric materials, and products and methods of preparing the same
WO2025054449A1 (en) * 2023-09-06 2025-03-13 Evolved By Nature, Inc. Composite polymeric materials, and products and methods of preparing the same

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US6746825B2 (en) * 2001-10-05 2004-06-08 Wisconsin Alumni Research Foundation Guided self-assembly of block copolymer films on interferometrically nanopatterned substrates
US7999160B2 (en) 2007-03-23 2011-08-16 International Business Machines Corporation Orienting, positioning, and forming nanoscale structures
DE102007024653A1 (de) * 2007-05-26 2008-12-04 Forschungszentrum Karlsruhe Gmbh Stempel für das Mikrokontaktdrucken und Verfahren zu seiner Herstellung
US7790350B2 (en) 2007-07-30 2010-09-07 International Business Machines Corporation Method and materials for patterning a neutral surface
KR101291223B1 (ko) 2007-08-09 2013-07-31 한국과학기술원 블록 공중합체를 이용한 미세 패턴 형성 방법
US7763319B2 (en) * 2008-01-11 2010-07-27 International Business Machines Corporation Method of controlling orientation of domains in block copolymer films
US7989026B2 (en) * 2008-01-12 2011-08-02 International Business Machines Corporation Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films
US7521094B1 (en) 2008-01-14 2009-04-21 International Business Machines Corporation Method of forming polymer features by directed self-assembly of block copolymers
US8999492B2 (en) 2008-02-05 2015-04-07 Micron Technology, Inc. Method to produce nanometer-sized features with directed assembly of block copolymers
US8623458B2 (en) 2009-12-18 2014-01-07 International Business Machines Corporation Methods of directed self-assembly, and layered structures formed therefrom

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