JP2013520801A5 - - Google Patents

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Publication number
JP2013520801A5
JP2013520801A5 JP2012554050A JP2012554050A JP2013520801A5 JP 2013520801 A5 JP2013520801 A5 JP 2013520801A5 JP 2012554050 A JP2012554050 A JP 2012554050A JP 2012554050 A JP2012554050 A JP 2012554050A JP 2013520801 A5 JP2013520801 A5 JP 2013520801A5
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JP
Japan
Prior art keywords
switch
power
control signal
transistor
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2012554050A
Other languages
English (en)
Japanese (ja)
Other versions
JP5887282B2 (ja
JP2013520801A (ja
Filing date
Publication date
Priority claimed from US12/708,648 external-priority patent/US8548312B2/en
Application filed filed Critical
Publication of JP2013520801A publication Critical patent/JP2013520801A/ja
Publication of JP2013520801A5 publication Critical patent/JP2013520801A5/ja
Application granted granted Critical
Publication of JP5887282B2 publication Critical patent/JP5887282B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2012554050A 2010-02-19 2011-02-18 高効率／高精度ヒータドライバ Expired - Fee Related JP5887282B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/708,648 2010-02-19
US12/708,648 US8548312B2 (en) 2010-02-19 2010-02-19 High efficiency high accuracy heater driver
PCT/US2011/025391 WO2011103391A2 (en) 2010-02-19 2011-02-18 High efficiency high accuracy heater driver

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2015212586A Division JP6324938B2 (ja) 2010-02-19 2015-10-29 高効率／高精度ヒータドライバ

Publications (3)

Publication Number Publication Date
JP2013520801A JP2013520801A (ja) 2013-06-06
JP2013520801A5 true JP2013520801A5 (enExample) 2014-05-08
JP5887282B2 JP5887282B2 (ja) 2016-03-16

Family

ID=44476555

Family Applications (3)

Application Number Title Priority Date Filing Date
JP2012554050A Expired - Fee Related JP5887282B2 (ja) 2010-02-19 2011-02-18 高効率／高精度ヒータドライバ
JP2015212586A Active JP6324938B2 (ja) 2010-02-19 2015-10-29 高効率／高精度ヒータドライバ
JP2018001671A Pending JP2018093210A (ja) 2010-02-19 2018-01-10 高効率／高精度ヒータドライバ

Family Applications After (2)

Application Number Title Priority Date Filing Date
JP2015212586A Active JP6324938B2 (ja) 2010-02-19 2015-10-29 高効率／高精度ヒータドライバ
JP2018001671A Pending JP2018093210A (ja) 2010-02-19 2018-01-10 高効率／高精度ヒータドライバ

Country Status (8)

Country Link
US (3) US8548312B2 (enExample)
EP (1) EP2537178A4 (enExample)
JP (3) JP5887282B2 (enExample)
KR (2) KR101890155B1 (enExample)
CN (2) CN104617013B (enExample)
SG (1) SG183187A1 (enExample)
TW (2) TWI590333B (enExample)
WO (1) WO2011103391A2 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10734257B2 (en) * 2012-04-25 2020-08-04 Applied Materials, Inc. Direct current lamp driver for substrate processing
US9734659B2 (en) * 2014-08-06 2017-08-15 Mido Play Inc. Single platform system for multiple jurisdiction lotteries and social media
TW201626858A (zh) 2015-01-05 2016-07-16 應用材料股份有限公司 用於低壓環境的燈驅動器（二）
TWI612259B (zh) * 2016-02-26 2018-01-21 財團法人工業技術研究院 加熱設備以及加熱方法
US10908195B2 (en) 2016-06-15 2021-02-02 Watlow Electric Manufacturing Company System and method for controlling power to a heater
KR102737698B1 (ko) * 2016-06-15 2024-12-02 와틀로 일렉트릭 매뉴팩츄어링 컴파니 열시스템용 전력 변환기
KR102547953B1 (ko) * 2017-08-10 2023-06-26 와틀로 일렉트릭 매뉴팩츄어링 컴파니 히터에 공급되는 전력을 제어하는 시스템 및 방법
CN109429382A (zh) * 2017-08-24 2019-03-05 江苏威能电气有限公司 快速升降温加热器
DE102018203945B4 (de) 2018-03-15 2023-08-10 Siltronic Ag Verfahren zur Herstellung von Halbleiterscheiben
CN110554717B (zh) * 2019-08-15 2021-08-24 国电南瑞科技股份有限公司 适用于电力电子装置温度闭环调节的散热风扇设速方法
CN113405323A (zh) * 2021-07-21 2021-09-17 东方凯特瑞(成都)环保科技有限公司 一种用于蜂窝scr脱硝催化剂的微波干燥方法及装置
CN114060892B (zh) * 2021-11-29 2023-05-16 奥普家居股份有限公司 一种恒温浴霸及其控制方法、存储介质

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US4438356A (en) 1982-03-24 1984-03-20 International Rectifier Corporation Solid state relay circuit employing MOSFET power switching devices
JPH0327408A (ja) * 1989-06-24 1991-02-05 Matsushita Electric Works Ltd デユーテイ制御装置
JP3215613B2 (ja) * 1995-10-04 2001-10-09 古河電池株式会社 力率制御回路
US5751896A (en) 1996-02-22 1998-05-12 Micron Technology, Inc. Method and apparatus to compensate for non-uniform film growth during chemical vapor deposition
US5841110A (en) 1997-08-27 1998-11-24 Steag-Ast Gmbh Method and apparatus for improved temperature control in rapid thermal processing (RTP) systems
JP3304894B2 (ja) * 1998-09-28 2002-07-22 ウシオ電機株式会社 フィラメントランプ点灯装置
JP2000235886A (ja) 1998-12-14 2000-08-29 Tokyo Electron Ltd 加熱手段の温度制御装置および温度制御方法
JP3988338B2 (ja) * 1999-10-07 2007-10-10 ウシオ電機株式会社 光照射式急速加熱処理装置の制御装置
US6259072B1 (en) 1999-11-09 2001-07-10 Axcelis Technologies, Inc. Zone controlled radiant heating system utilizing focused reflector
KR100432135B1 (ko) * 2001-06-30 2004-05-17 동부전자 주식회사 급속 열처리 장치
US20030029859A1 (en) 2001-08-08 2003-02-13 Applied Materials, Inc. Lamphead for a rapid thermal processing chamber
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US20060000551A1 (en) * 2004-06-30 2006-01-05 Saldana Miguel A Methods and apparatus for optimal temperature control in a plasma processing system
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WO2006107013A1 (ja) * 2005-04-04 2006-10-12 Kokusai Electric Semiconductor Service Inc. 供給電力調整器及び半導体製造装置
JP2007095889A (ja) 2005-09-28 2007-04-12 Ushio Inc 光照射式加熱方法
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JP5282409B2 (ja) 2008-02-25 2013-09-04 ウシオ電機株式会社 光照射式加熱方法及び光照射式加熱装置
KR101606736B1 (ko) * 2008-07-07 2016-03-28 램 리써치 코포레이션 플라즈마 프로세싱 챔버에서 플라즈마 불안정성을 검출하기 위한 패시브 용량성-결합된 정전식 (ｃｃｅ) 프로브 장치

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