JP2013516058A - 電子デバイスの製造方法および該方法により製造された電子デバイス - Google Patents
電子デバイスの製造方法および該方法により製造された電子デバイス Download PDFInfo
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- JP2013516058A JP2013516058A JP2012545291A JP2012545291A JP2013516058A JP 2013516058 A JP2013516058 A JP 2013516058A JP 2012545291 A JP2012545291 A JP 2012545291A JP 2012545291 A JP2012545291 A JP 2012545291A JP 2013516058 A JP2013516058 A JP 2013516058A
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Abstract
Description
Claims (24)
- GaAs基板(HS)の前面上に少なくとも1つの半導体素子(BE)を備えた電子デバイス(EB)の製造方法であって、
前記半導体素子とは反対側の基板背面に、背面金属化部(RM)が設けられ、
基板材料の表面に固着層が設けられ、その後、前記背面金属化部の厚さ全体の少なくとも50%の厚さでAu導電層(4)が堆積される、
電子デバイス(EB)の製造方法において、
前記固着層として第1のAu層(1)を堆積させることを特徴とする、
電子デバイス(EB)の製造方法。 - 前記第1のAu層(1)を、少なくとも25nmの層厚たとえば少なくとも35nmの層厚、最大100nmの層厚たとえば最大75nmの層厚で堆積させる、請求項1記載の方法。
- 前記第1のAu層(1)の堆積の前に、前記基板(HS)の背面を平均凹凸が4nmよりも小さくなるようポリッシングする、請求項1または2記載の方法。
- 前記第1のAu層(1)と前記Au導電層(4)との間に拡散バリア層(2)を堆積させる、請求項1から3のいずれか1項記載の方法。
- 前記拡散バリア層(2)と前記Au導電層(4)との間に第2のAu層(3)を堆積させる、請求項4記載の方法。
- 前記拡散バリア層(2)は少なくとも、前記第1のAu層に対する界面の領域(2a)、および/または前記第2のAu層に対する界面の領域(2c)において、少なくとも1つの耐熱金属から成り、たとえばTiから成る、請求項4または5記載の方法。
- 前記拡散バリア層(2)は、少なくとも中央層領域(2b)においてNを含む、請求項4から6のいずれか1項記載の方法。
- 前記拡散バリア層(2)を、前記第1のAu層(1)よりも厚い層厚で堆積させる、請求項4から7のいずれか1項記載の方法。
- 前記第1のAu層(1)および/または前記拡散バリア層(2)および/または前記第2のAu層(3)をスパッタリングする、請求項1から8のいずれか1項記載の方法。
- 前記Au導電層(4)を電気めっきにより析出する、請求項1から9のいずれか1項記載の方法。
- 前記背面金属化部(RM)を堆積させる前に、前記基板(HS)を通る少なくとも1つのスルーホール(DK)を形成し、前記背面金属化部を該スルーホール内にも堆積させる、請求項1から10のいずれか1項記載の方法。
- 少なくとも前記第1のAu層(1)を、前記基板背面における層厚よりも薄い層厚で、前記スルーホール(DK)内に堆積させる、請求項11記載の方法。
- 基板前面に少なくとも1つの半導体素子(BE)を有し、基板背面に背面金属化部を有する、GaAs半導体基板(HS)を備えた電子デバイス(EB)であって、
前記背面金属化部(RM)は、前記基板の半導体材料と接触している少なくとも1つの固着層(1)と、該背面金属化部の層厚の少なくとも50%の厚さを成すAu導電層とを含む、電子デバイス(EB)において、
前記固着層は第1のAu層(1)であることを特徴とする電子デバイス(EB)。 - 前記第1のAu層(1)の層厚は、少なくとも25nmたとえば少なくとも35nm、最大100nmたとえば最大75nmである、請求項13記載の電子デバイス。
- 前記基板背面は、前記第1のAu層(1)に対する界面において4nmよりも小さい平均凹凸を有する、請求項13または14記載の電子デバイス。
- 前記第1のAu層(1)と前記Au導電層(4)との間に拡散バリア層(2)が設けられている、請求項13から15のいずれか1項記載の電子デバイス。
- 前記拡散バリア層(2)と前記Au導電層(4)との間に第2のAu層(3)が設けられている、請求項16記載の電子デバイス。
- 前記拡散バリア層(2)は少なくとも、前記第1のAu層(1)に対する界面の領域(2a)、または前記第2のAu層(3)に対する界面の領域(2c)において、Tiから成る、請求項16または17記載の電子デバイス。
- 前記拡散バリア層(2)は、少なくとも中央層領域(2b)においてNを含み、有利にはTiNから成る、請求項16から18のいずれか1項記載の電子デバイス。
- 前記拡散バリア層(2)の層厚は、前記第1のAu層(1)の層厚よりも厚い、請求項16から19のいずれか1項記載の電子デバイス。
- 前記第1のAu層(1)および/または前記拡散バリア層(2)および/または前記第2のAu層(3)はスパッタリング層である、請求項13から20のいずれか1項記載の電子デバイス。
- 前記Au導電層(4)は電気めっき層である、請求項13から21のいずれか1項記載の電子デバイス。
- 前記基板において、該基板の前面と背面との間に少なくとも1つのスルーホール(DK)が設けられており、前記背面金属化部(RM)が該少なくとも1つのスルーホール(DK)の壁にも設けられている、請求項13から22のいずれか1項記載の電子デバイス。
- 前記スルーホールの壁において少なくとも前記第1のAu層(1)の層厚は、前記基板背面における層厚よりも薄い、請求項23記載の電子デバイス。
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PCT/EP2010/070357 WO2011076782A1 (de) | 2009-12-23 | 2010-12-21 | Verfahren zur herstellung eines elektronischen bauteils und nach diesem verfahren hergestelltes elektronisches bauteil |
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JP2006114732A (ja) * | 2004-10-15 | 2006-04-27 | Renesas Technology Corp | 半導体装置及びその製造方法、並びに半導体モジュール |
WO2009016928A1 (ja) * | 2007-07-31 | 2009-02-05 | Rohm Co., Ltd. | 半導体装置およびその製造方法 |
JP2009514228A (ja) * | 2005-10-25 | 2009-04-02 | フリースケール セミコンダクター インコーポレイテッド | 取付基板上にはんだ接点を形成する方法 |
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US5292686A (en) * | 1991-08-21 | 1994-03-08 | Triquint Semiconductor, Inc. | Method of forming substrate vias in a GaAs wafer |
JPH06268112A (ja) * | 1993-03-10 | 1994-09-22 | Mitsubishi Electric Corp | 半導体装置、及びその製造方法 |
JP2980066B2 (ja) * | 1997-07-07 | 1999-11-22 | 日本電気株式会社 | 半導体装置 |
JP3911174B2 (ja) * | 2002-03-01 | 2007-05-09 | シャープ株式会社 | 半導体素子の製造方法および半導体素子 |
JP2005033116A (ja) * | 2003-07-11 | 2005-02-03 | Sony Corp | バイアホール及びバイアホールを有する半導体装置並びに同バイアホールの形成方法。 |
US7772116B2 (en) * | 2005-09-01 | 2010-08-10 | Micron Technology, Inc. | Methods of forming blind wafer interconnects |
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JPH03153030A (ja) * | 1989-11-10 | 1991-07-01 | Seiko Epson Corp | 半導体装置 |
JPH0621058A (ja) * | 1992-07-06 | 1994-01-28 | Seiko Epson Corp | 半導体装置 |
JPH08203924A (ja) * | 1995-01-27 | 1996-08-09 | Nec Corp | 半導体装置 |
JP2002083936A (ja) * | 2000-09-08 | 2002-03-22 | Fujitsu Quantum Devices Ltd | 化合物半導体装置 |
JP2004088062A (ja) * | 2002-05-20 | 2004-03-18 | Sumitomo Electric Ind Ltd | ドライエッチング方法、ドライエッチング装置及び半導体装置の製造方法 |
JP2006114732A (ja) * | 2004-10-15 | 2006-04-27 | Renesas Technology Corp | 半導体装置及びその製造方法、並びに半導体モジュール |
JP2009514228A (ja) * | 2005-10-25 | 2009-04-02 | フリースケール セミコンダクター インコーポレイテッド | 取付基板上にはんだ接点を形成する方法 |
WO2009016928A1 (ja) * | 2007-07-31 | 2009-02-05 | Rohm Co., Ltd. | 半導体装置およびその製造方法 |
Also Published As
Publication number | Publication date |
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DE102009059303A1 (de) | 2011-06-30 |
CA2782581C (en) | 2017-12-19 |
JP5693610B2 (ja) | 2015-04-01 |
US9054080B2 (en) | 2015-06-09 |
CN102696104B (zh) | 2016-05-18 |
WO2011076782A1 (de) | 2011-06-30 |
CN102696104A (zh) | 2012-09-26 |
US20120248612A1 (en) | 2012-10-04 |
CA2782581A1 (en) | 2011-06-30 |
EP2517239B1 (de) | 2013-10-02 |
EP2517239A1 (de) | 2012-10-31 |
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